Test device

Abstract

The application discloses a testing device, and belongs to the technical field of light beam quality testing. The testing device is used for testing a target light beam quality analyzer. The testing device comprises a laser, a light splitting element, a reference light beam quality analyzer and a light beam adjusting device. The light splitting element is used for splitting the output light of the laser into a first testing light beam and a second testing light beam, so that the target light beam quality analyzer receives the first testing light beam and obtains first light beam data. The reference light beam quality analyzer is used for receiving the second testing light beam and obtaining second light beam data. The light beam adjusting device is arranged between the laser and the light splitting element and comprises one of a beam expanding unit and a beam shrinking unit. The testing device not only saves time and effort, but also improves the testing efficiency and flexibility, reduces the testing cost as much as possible and simplifies the testing process.

Description

Technical Field

[0001] This application belongs to the field of beam quality testing technology, and in particular relates to a testing device. Background Technology

[0002] To ensure the normal operation and expected functionality of far-field laser equipment, it is often necessary to rigorously test and control the quality of the laser beam using a beam quality analyzer. Currently, the calibration and testing of beam quality analyzers often require the use of multiple lasers, resulting in time-consuming and cumbersome testing processes with low efficiency and high costs. Utility Model Content

[0003] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a testing apparatus that not only saves time and effort but also improves testing efficiency and flexibility, minimizes testing costs, and simplifies the testing process.

[0004] In a first aspect, this application provides a testing apparatus for testing a target beam quality analyzer, comprising: Laser; A beam splitter is used to split the output light of the laser into a first test beam and a second test beam, so that the target beam quality analyzer can receive the first test beam and obtain the first beam data. A reference beam quality analyzer is used to receive the second test beam and obtain second beam data; A beam conditioning device, disposed between the laser and the beam splitting element, includes one of a beam expanding unit and a beam contracting unit.

[0005] According to the testing apparatus of this application, on the one hand, the output light is split into a first test beam and a second test beam by a beam splitter. A target beam quality analyzer and a reference beam quality analyzer respectively receive the first test beam and the second test beam and obtain corresponding first beam data and second beam data. The second beam data is used as a reference standard to compare with the first beam data to determine whether the target beam quality analyzer is qualified. On the other hand, since the beam adjustment device includes one of a beam expanding unit and a beam contracting unit, the output light can be expanded or contracted during the test to change the beam waist diameter and divergence angle of the output light. This may cause deviations between the first beam data and the second beam data obtained by the target beam quality analyzer and the reference beam quality analyzer. Compared with related technologies that require the use of multiple different lasers or the rotation of lasers to test the target beam quality analyzer, this apparatus can improve testing efficiency and flexibility, minimize testing costs, and simplify the testing process.

[0006] According to one embodiment of this application, the optical axis of the first test beam and the optical axis of the second test beam are set at an angle.

[0007] According to one embodiment of this application, the included angle is a right angle.

[0008] According to one embodiment of this application, one of the optical axes of the first test beam and the second test beam coincides with the optical axis of the output light.

[0009] According to one embodiment of this application, it also includes: A first aperture stop is disposed between the beam splitter and the target beam quality analyzer to limit the size of the first test beam.

[0010] According to one embodiment of this application, two first aperture stops are provided, and the two first aperture stops are spaced apart along the optical axis direction of the first test beam.

[0011] According to one embodiment of this application, the aperture of the light-transmitting hole of the first aperture stop is adjustable; and / or The mounting position of the first aperture stop along the optical axis of the first test beam is adjustable.

[0012] According to one embodiment of this application, it also includes: A second aperture stop is disposed between the beam splitter and the reference beam quality analyzer to limit the size of the second test beam.

[0013] According to one embodiment of this application, two second aperture stops are provided, and the two second aperture stops are spaced apart along the optical axis direction of the second test beam.

[0014] According to one embodiment of this application, the aperture of the light-transmitting hole of the second aperture stop is adjustable; and / or The mounting position of the second aperture stop along the optical axis of the second test beam is adjustable.

[0015] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0016] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the test device provided in the embodiments of this application.

[0017] Figure label: 10. Target beam quality analyzer; 100. Laser; 200. Beam splitter; 300. Reference beam quality analyzer; 400. First aperture stop; 500. Second aperture stop; 600. Beam adjustment device. Detailed Implementation

[0018] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0019] The following is for reference. Figure 1 The test apparatus provided according to the embodiments of this application is used to test the target beam quality analyzer 10. The test apparatus includes a laser 100, a beam splitter 200, a reference beam quality analyzer 300, and a beam adjustment device 600.

[0020] The beam splitter 200 is used to split the output light of the laser 100 into a first test beam and a second test beam, so that the target beam quality analyzer 10 receives the first test beam and obtains the first beam data; the reference beam quality analyzer 300 is used to receive the second test beam and obtain the second beam data; the beam adjustment device 600 is disposed between the laser 100 and the beam splitter 200, and includes one of a beam expander unit and a beam shrinker unit.

[0021] For example, laser 100 includes, but is not limited to, single-mode lasers. A single-mode laser is a type of laser device whose core feature is the output fundamental transverse mode (typically the TEM00 mode). Its core characteristic is high mode purity of the output light. Ideally, its far-field intensity distribution exhibits a symmetrical Gaussian distribution, and the resulting light spot is nearly circular, thus obtaining a unique M-mode laser. 2 This factor reduces the complexity of the test. The beam splitter 200 includes, but is not limited to, a beam splitter prism. The beam adjustment device 600 includes, but is not limited to, a Keplerian lens structure or a Galilean lens structure.

[0022] Understandably, on the one hand, the output light is split into a first test beam and a second test beam by the beam splitter 200. The target beam quality analyzer 10 and the reference beam quality analyzer 300 receive the first test beam and the second test beam, respectively, and obtain corresponding first beam data and second beam data. The second beam data is used as a reference standard to compare with the first beam data to determine whether the target beam quality analyzer 10 is qualified. On the other hand, since the beam adjustment device 600 includes one of a beam expanding unit and a beam contracting unit, the output light can be expanded or contracted during the test to change the beam waist diameter and divergence angle of the output light. This may cause deviations between the first beam data and the second beam data obtained by the target beam quality analyzer 10 and the reference beam quality analyzer 300, respectively. Compared with related technologies that require the use of multiple different lasers or rotation of the laser 100 to test the target beam quality analyzer 10, this method can improve test efficiency and flexibility, minimize test costs, and simplify the test process.

[0023] For example, such as Figure 1 As shown, L1 represents the optical axis of the output light, L2 represents the optical axis of the second test beam, and L3 represents the optical axis of the first test beam.

[0024] It should be noted that by placing beam expanders or beam shrinkers, the beam waist and divergence angle of the output light can be changed. Furthermore, multiple scaling factors are applied to obtain multiple sets of beam data (including M...). 2 The performance of the target beam quality analyzer 10 can be effectively and comprehensively evaluated by combining multiple sets of beam data, including factors, beam shape, and focusing ability.

[0025] The testing apparatus provided in the embodiments of this application not only saves time and effort, but also improves testing efficiency and flexibility, minimizes testing costs, and simplifies the testing process.

[0026] In some embodiments, such as Figure 1 As shown, the optical axes of the first test beam and the second test beam are set at an angle. It should be noted that the size of the angle can be designed according to actual needs, and this embodiment does not impose specific limitations on it.

[0027] It is understandable that the optical axes of the first test beam and the second test beam are set at an angle, so that the target beam quality analyzer 10 and the reference beam quality analyzer 300 can measure the beam quality of the same output light in different directions, making the structure of the entire detection device as compact as possible and enhancing the flexibility and comprehensiveness of the test.

[0028] In some embodiments, such as Figure 1As shown, the included angle is a right angle. That is, the optical axes of the first and second test beams are perpendicular to each other, which ensures that the beam quality of the output light can be measured in two orthogonal directions, thereby improving the test accuracy and reliability.

[0029] In some embodiments, such as Figure 1 As shown, the optical axis of the first test beam and one of the optical axes of the second test beam coincide with the optical axis of the output light.

[0030] It is understandable that aligning the optical axis of the first or second test beam with the optical axis of the output beam ensures that the test beam directly reflects the characteristics of the output beam. This not only provides a reliable benchmark for evaluating the beam quality of the output beam, but also simplifies the alignment process between the test beam (including the first and second test beams) and the corresponding beam quality analyzer (including one of the target beam quality analyzer 10 and the reference beam quality analyzer 300), thus simplifying the calibration process and improving test accuracy and reliability.

[0031] In this embodiment, as Figure 1 As shown, the optical axis of the second test beam coincides with the optical axis of the output beam.

[0032] In some embodiments, such as Figure 1 As shown, the testing device also includes a first aperture stop 400, which is disposed between the beam splitter 200 and the target beam quality analyzer 10 to limit the size of the first test beam.

[0033] Understandably, the first aperture stop 400 is positioned between the beam splitter 200 and the target beam quality analyzer 10 to precisely control the diameter of the first measurement beam entering the target beam quality analyzer 10 and ensure that the first measurement beam maintains a consistent size during the measurement process, thereby improving the accuracy and repeatability of the measurement. Simultaneously, the first aperture stop 400 restricts the size of the first measurement beam, reducing edge effects and stray light influences, minimizing measurement errors and spot shape distortion, and improving M... 2 The accuracy of factor measurement.

[0034] In some embodiments, such as Figure 1 As shown, two first aperture stops 400 are provided, and the two first aperture stops 400 are spaced apart along the optical axis of the first test beam. It should be noted that the distance between the two first aperture stops 400 can be designed according to actual needs, and this embodiment does not impose specific limitations on this.

[0035] Understandably, on the one hand, based on the principle that "two points determine a straight line," the optical axis of the first measuring beam can be precisely adjusted by adjusting the beam splitter 200, thereby improving the accuracy of the first measuring beam aligned with the target beam quality analyzer 10 and enhancing the reliability of the measurement results. On the other hand, the spacing between the two first aperture stops 400 can further reduce the edge effects and stray light of the first measuring beam, thus improving the accuracy of the measurement.

[0036] In some embodiments, such as Figure 1 As shown, the aperture of the light-transmitting hole of the first aperture stop 400 is adjustable.

[0037] It is understandable that by adjusting the aperture of the light-transmitting hole of the first aperture stop 400, the light flux entering the target beam quality analyzer 10 can be precisely controlled, ensuring that the detector of the target beam quality analyzer 10 always operates within the linear range, reducing the possibility of measurement distortion caused by light signal saturation, and providing measurement stability and accuracy.

[0038] For example, the aperture of the light-transmitting hole of the first aperture stop 400 can be steplessly adjusted using an iris-type mechanical structure. It should be noted that the iris-type mechanical structure is a conventional technique in this field and will not be described in detail here. Of course, in other embodiments, the first aperture stop 400 can also employ other structures to achieve stepless aperture adjustment or switching between multiple discrete aperture sizes; this embodiment does not impose specific limitations on this.

[0039] In some embodiments, such as Figure 1 As shown, the mounting position of the first aperture stop 400 along the optical axis of the first test beam is adjustable.

[0040] It is understandable that by adjusting the installation position of the first aperture stop 400 along the optical axis of the first test beam, the position of the first aperture stop 400 relative to the beam waist of the first test beam can be changed to simulate the spot size and energy distribution of the first test beam on different cross sections during propagation, so as to test and verify the alignment sensitivity of the target beam quality analyzer 10 to the first test beam and improve the test accuracy.

[0041] It should be noted that the first aperture stop 400 can be infinitely adjusted along the optical axis by linear motion mechanical structures such as linear guide rails, or other structures can be used to switch between multiple installation positions distributed at intervals along the optical axis. This embodiment does not impose specific limitations on this.

[0042] In some embodiments, such as Figure 1As shown, the testing apparatus also includes a second aperture stop 500, which is disposed between the beam splitter 200 and the reference beam quality analyzer 300 to limit the size of the second test beam.

[0043] Understandably, the second aperture stop 500 is positioned between the beam splitter 200 and the reference beam quality analyzer 300 to precisely control the diameter of the second measurement beam entering the reference beam quality analyzer 300 and ensure that the second measurement beam maintains a consistent size during the measurement process, thereby improving the accuracy and repeatability of the measurement. Simultaneously, the second aperture stop 500 restricts the size of the second measurement beam, reducing edge effects and stray light influences, minimizing measurement errors and spot shape distortion, and improving M... 2 The accuracy of factor measurement.

[0044] In some embodiments, such as Figure 1 As shown, two second aperture stops 500 are provided, and the two second aperture stops 500 are spaced apart along the optical axis of the second test beam. It should be noted that the distance between the two first aperture stops 400 can be designed according to actual needs, and this embodiment does not impose specific limitations on this.

[0045] Understandably, on the one hand, based on the principle that "two points determine a straight line," the optical axis of the second measuring beam can be precisely adjusted by adjusting the beam splitter 200, thereby improving the accuracy of the second measuring beam alignment with the reference beam quality analyzer 300 and enhancing the reliability of the measurement results. On the other hand, the spacing between the two second aperture stops 500 can further reduce the influence of edge effects and stray light on the second measuring beam, thus improving the accuracy of the measurement.

[0046] In some embodiments, such as Figure 1 As shown, the aperture of the light-transmitting hole of the second aperture stop 500 is adjustable.

[0047] Understandably, by adjusting the aperture of the light-transmitting hole of the second aperture stop 500, the light flux entering the reference beam quality analyzer 300 can be precisely controlled, ensuring that the detector of the reference beam quality analyzer 300 always operates within the linear range, reducing the possibility of measurement distortion caused by light signal saturation, and providing measurement stability and accuracy.

[0048] For example, the aperture of the light-transmitting hole of the second aperture stop 500 can be steplessly adjusted using an iris-type mechanical structure. It should be noted that the iris-type mechanical structure is a conventional technique in this field and will not be described in detail here. Of course, in other embodiments, the second aperture stop 500 can also employ other structures to achieve stepless aperture adjustment or switching between multiple discrete aperture sizes; this embodiment does not impose specific limitations on this.

[0049] In some embodiments, such as Figure 1 As shown, the mounting position of the second aperture stop 500 along the optical axis of the second test beam is adjustable.

[0050] It is understandable that by adjusting the installation position of the second aperture stop 500 along the optical axis of the second test beam, the position of the second aperture stop 500 relative to the beam waist of the second test beam can be changed to simulate the spot size and energy distribution of the second test beam on different cross sections during propagation, so as to test and verify the alignment sensitivity of the reference beam quality analyzer 300 to the second test beam and improve the test accuracy.

[0051] It should be noted that the second aperture stop 500 can be infinitely adjusted along the optical axis by linear motion mechanical structures such as linear guide rails, or other structures can be used to switch between multiple installation positions distributed at intervals along the optical axis. This embodiment does not impose specific limitations on this.

[0052] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0053] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0054] In the description of this application, it should be understood that the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. The terms "parallel," "perpendicular," and "equal" include the described situation and situations that are similar to the described situation, within an acceptable deviation range, wherein the acceptable deviation range is determined by a person skilled in the art taking into account the measurement under discussion and the error associated with the measurement of a particular quantity (i.e., the limitations of the measurement system). For example, "parallel" includes absolute parallelism and approximate parallelism, wherein the acceptable deviation range for approximate parallelism can be, for example, a deviation within 5°; "perpendicular" includes absolute perpendicularity and approximate perpendicularity, wherein the acceptable deviation range for approximate perpendicularity can also be, for example, a deviation within 5°. "Equal" includes absolute equality and approximate equality, wherein the acceptable deviation range for approximate equality can be, for example, a difference between two equal entities less than or equal to 5% of either one. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0055] In the description of this application, "first feature" and "second feature" may include one or more of the features.

[0056] In the description of this application, "multiple" means two or more.

[0057] In the description of this application, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or it may include the first and second features not being in direct contact but being in contact through another feature between them.

[0058] In the description of this application, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0059] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0060] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A testing apparatus for testing a target beam quality analyzer (10), characterized in that, include: Laser (100); A beam splitter (200) is used to split the output light of the laser (100) into a first test beam and a second test beam, so that the target beam quality analyzer (10) receives the first test beam and obtains the first beam data; A reference beam quality analyzer (300) is used to receive the second test beam and obtain second beam data; A beam conditioning device (600) is disposed between the laser (100) and the beam splitter (200), and includes one of a beam expanding unit and a beam shrinking unit.

2. The testing apparatus according to claim 1, characterized in that, The optical axes of the first test beam and the second test beam are set at an angle.

3. The testing apparatus according to claim 2, characterized in that, The included angle is a right angle.

4. The testing apparatus according to claim 1, characterized in that, One of the optical axes of the first test beam and the second test beam coincides with the optical axis of the output light.

5. The testing apparatus according to any one of claims 1 to 4, characterized in that, Also includes: A first aperture stop (400) is disposed between the beam splitter (200) and the target beam quality analyzer (10) to limit the size of the first test beam.

6. The testing apparatus according to claim 5, characterized in that, There are two first aperture stops (400), and the two first aperture stops (400) are spaced apart along the optical axis of the first test beam.

7. The testing apparatus according to claim 5, characterized in that, The aperture of the first aperture stop (400) is adjustable; and / or The mounting position of the first aperture stop (400) along the optical axis of the first test beam is adjustable.

8. The testing apparatus according to any one of claims 1 to 4, characterized in that, Also includes: A second aperture stop (500) is disposed between the beam splitter (200) and the reference beam quality analyzer (300) to limit the size of the second test beam.

9. The testing apparatus according to claim 8, characterized in that, There are two second aperture stops (500), and the two second aperture stops (500) are spaced apart along the optical axis of the second test beam.

10. The testing apparatus according to claim 8, characterized in that, The aperture of the second aperture stop (500) is adjustable; and / or The mounting position of the second aperture stop (500) along the optical axis of the second test beam is adjustable.

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