A testing device for ferric chloride used in fmm etching

Abstract

The utility model belongs to metal etching technical field discloses a kind of iron chloride testing devices for FMM etching, etching groove and Aqua testing machine further include: sampling box, and testing mechanism is installed on the sampling box;The testing mechanism includes the installation box fixed on the surface of the sampling box, multiple sliding sleeves are vertically inserted on the installation box, glass hydrometer is inserted on the inner wall of the sliding sleeve;Infusion mechanism is installed on the etching groove, two output ends of the infusion mechanism are connected with Aqua testing machine and sampling box respectively, flow controller one is installed in the position of infusion mechanism output end close to Aqua testing machine, flow controller two is installed in the position of infusion mechanism output end close to sampling box, the utility model accurately controls the capacity of solution into Aqua testing machine and sampling box by flow controller one and flow controller two, guarantees consistency, while testing using glass hydrometer, it can also be compared with the test of Aqua testing machine.

Description

Technical Field

[0001] This utility model belongs to the field of metal etching technology, specifically relating to a ferric chloride testing device for FMM etching. Background Technology

[0002] In the FMM (Fine Metal Mask) process, the specific gravity of ferric chloride in the etching tank needs to be controlled. A typical etching tank is equipped with an automatic Aqua (aqueous solution) tester, which can monitor the specific gravity of ferric chloride in the tank in real time. However, the test results of the Aqua tester may have some deviation.

[0003] The existing equipment is tested using the Aqua testing machine integrated into the etching tank. The Aqua testing machine is specifically as follows: Figure 5 As shown, the Aqua testing machine includes: 201, a specific gravity stand; 202, a specific gravity sensor; 203, titanium; 204, a float mounting washer; 205, an HCl sensor; 206, a copper salt counter electrode; 207, an H2O2 sensor; 208, a float; 209, a PVC hexagonal screw; 210, an inlet pipe; and 211, an outlet pipe. The inlet pipe of the Aqua testing machine is connected to the etching tank, and the outlet pipe is used for draining the liquid. The specific gravity sensor is used to detect the specific gravity of ferric chloride. Due to the switching of etching tank spray pressure on the machine, different product processes require different spray pressures, which leads to deviations in the test. This method of testing the specific gravity of ferric chloride has a deviation of more than 0.2%. The data obtained with deviations can easily affect subsequent processes in the FMM, resulting in errors in subsequent parameters.

[0004] To address these issues, those skilled in the art have proposed a ferric chloride testing device for FMM etching. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a ferric chloride testing device for FMM etching, which solves the problems in the prior art.

[0006] The objective of this utility model can be achieved through the following technical solutions:

[0007] A ferric chloride testing apparatus for FMM etching includes an etching tank and an Aqua testing machine, and further includes:

[0008] A sampling box, on which a testing mechanism is installed;

[0009] The testing mechanism includes a mounting box fixed to the surface of the sampling box, with multiple sliding sleeves vertically inserted into the mounting box, and a glass hydrometer inserted into the inner wall of the sliding sleeves.

[0010] An infusion mechanism is installed on the etching tank. The two output ends of the infusion mechanism are connected to the Aqua tester and the sampling box, respectively. A flow controller one is installed near the Aqua tester at the output end of the infusion mechanism, and a flow controller two is installed near the sampling box at the output end of the infusion mechanism.

[0011] The principle and effect of the above technical solution are as follows:

[0012] In addition to the etching tank and Aqua testing machine, this device is connected to a sampling box. The aqueous solution in the etching tank is simultaneously supplied to the Aqua testing machine and the sampling box through a liquid delivery mechanism. The two are supplied with equal amounts of solution, and the amount of solution supplied is controlled by flow controller one and flow controller two. After the aqueous solution enters the sampling box and stands for a period of time, the sliding sleeve is removed, so that the glass hydrometer is suspended in the solution and does not touch the mounting box. The specific gravity of ferric chloride can be directly read using the glass hydrometer, and it can also be compared with the test value of the Aqua testing machine.

[0013] Preferably, it also includes a liquid collection box and a liquid dispensing mechanism installed on the liquid collection box, wherein the two input ends of the liquid dispensing mechanism are respectively connected to the Aqua tester and the sampling box.

[0014] Preferably, the liquid dispensing mechanism includes a second pump body installed on the liquid collection box. A connecting pipe is installed at one end of the second pump body, and a two-stage three-way valve is installed at one end of the connecting pipe. Output pipe one and output pipe two are respectively installed at the two ends of the two-stage three-way valve. One end of output pipe one is connected to the Aqua testing machine, and one end of output pipe two is connected to the sampling box.

[0015] Preferably, the infusion mechanism includes a pump body 1 installed on the etching tank, an inlet pipe installed at one end of the pump body 1, a first-stage three-way valve installed at one end of the inlet pipe, and an input pipe 1 and an input pipe 2 respectively installed at the two ends of the first-stage three-way valve.

[0016] Preferably, a hand valve is installed on the outer wall of the input pipe.

[0017] Preferably, a hand valve is installed on the outer wall of the input pipe.

[0018] Preferably, the inner diameters of input tube one and input tube two are the same.

[0019] Preferably, the sampling box has an installation port on the side near the glass hydrometer, and an observation window is fixed on the inner wall of the installation port.

[0020] The explanations of the nouns, conjunctions, or adjectives used in the above technical solutions are as follows:

[0021] A fixed connection refers to a connection in which parts or components are fixed in place and there is no relative movement between them;

[0022] A rotating connection is a connection between parts that allows the parts to rotate relative to each other.

[0023] Threaded connections are a type of detachable fixed connection with advantages such as simple structure, reliable connection, and convenient assembly and disassembly. They are widely used in mechanical engineering and connection structure fields.

[0024] A sliding connection is a connection between parts that allows the parts to slide against each other.

[0025] The beneficial effects of this utility model are:

[0026] 1. This utility model is equipped with a flow controller one and a flow controller two to precisely control the volume of solution entering the Aqua tester and the sampling box, ensuring consistency. While using a glass hydrometer for testing, it can also compare the results with those of the Aqua tester.

[0027] 2. This utility model is equipped with a sliding sleeve and a glass hydrometer. The sliding sleeve is used to fix the glass hydrometer. When it is necessary to test the specific gravity of ferric chloride, hold the head of the glass hydrometer with one hand and pull out the sliding sleeve with the other end. Then move your hand from the head of the glass hydrometer to the bottom of the sliding sleeve and remove the sliding sleeve. Then make the glass hydrometer float on the aqueous solution without touching the mounting box. After the hydrometer has been still for more than 30 seconds without obvious shaking, keep your line of sight horizontal with the lowest point of the concave meniscus of the solution and directly read the value corresponding to the scale line, which is the specific gravity of ferric chloride at that temperature. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model;

[0030] Figure 2 yes Figure 1 Another structural diagram from a different angle;

[0031] Figure 3 This is a schematic diagram of the structure of the testing mechanism according to an embodiment of the present invention;

[0032] Figure 4 This is a partial three-dimensional structural schematic diagram of an embodiment of the present utility model.

[0033] Figure 5 This is a schematic diagram of the specific structure of the Aqua testing machine according to an embodiment of this utility model.

[0034] In the diagram: 1. Etching tank; 2. Aqua testing machine; 201. Gravity stand; 202. Gravity sensor; 203. Titanium; 204. Float mounting washer; 205. HCl sensor; 206. Salt copper counter electrode; 207. H2O2 sensor; 208. Float; 209. PVC hexagonal screw; 210. Inlet pipe; 211. Outlet pipe; 3. Infusion mechanism; 301. Pump body one; 302. Inlet pipe; 303. First-stage three-way valve; 304. Input pipe 1; 305. Manual valve 1; 306. Input pipe 2; 307. Manual valve 2; 4. Sampling box; 401. Observation window; 5. Flow controller 1; 6. Flow controller 2; 7. Testing mechanism; 701. Mounting box; 702. Sliding sleeve; 703. Glass hydrometer; 8. Liquid discharge mechanism; 801. Pump body 2; 802. Connecting pipe; 803. Two-stage three-way valve; 804. Output pipe 1; 805. Output pipe 2; 9. Liquid collection box. Detailed Implementation

[0035] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0036] Please see Figures 1 to 5 A ferric chloride testing apparatus for FMM etching includes an etching tank 1 and an Aqua testing machine 2, and further includes:

[0037] Sampling box 4, on which a testing mechanism 7 is installed;

[0038] The testing mechanism 7 includes a mounting box 701 fixed to the surface of the sampling box 4. Multiple sliding sleeves 702 are vertically inserted into the mounting box 701, and glass hydrometers 703 are inserted into the inner wall of the sliding sleeves 702.

[0039] An infusion mechanism 3 is installed on the etching tank 1. The two output ends of the infusion mechanism 3 are connected to the Aqua tester 2 and the sampling box 4, respectively. A flow controller 5 is installed near the Aqua tester 2 at the output end of the infusion mechanism 3, and a flow controller 6 is installed near the sampling box 4 at the output end of the infusion mechanism 3.

[0040] In use, start the infusion mechanism 3 to send the aqueous solution in the etching tank 1 into the Aqua tester 2 and the sampling box 4. Control the flow rate through the flow controller 5 and the flow controller 6. Then, use the Aqua tester 2 and the glass hydrometer 703 to measure the specific gravity of ferric chloride. There are multiple glass hydrometers 703, and the average value is taken. After the aqueous solution has been standing in the sampling box 4 for a period of time, hold the head of the glass hydrometer 703 with one hand and pull out the sliding sleeve 702 with the other hand. Then move your hand from the head of the glass hydrometer 703 to the bottom of the sliding sleeve 702 and remove the sliding sleeve 702. Then, make the glass hydrometer 703 suspend on the aqueous solution without touching the mounting box 701. After the glass hydrometer 703 has been still for more than 30 seconds without obvious shaking, keep your line of sight horizontal with the lowest point of the concave meniscus of the solution and directly read the value corresponding to the scale line. This is the specific gravity of ferric chloride at that temperature, which can be compared with the value measured by the Aqua tester 2.

[0041] It also includes a liquid collection box 9 and a liquid dispensing mechanism 8 installed on the liquid collection box 9. The two input ends of the liquid dispensing mechanism 8 are connected to the Aqua tester 2 and the sampling box 4, respectively.

[0042] After the test is completed, the aqueous solution inside the Aqua tester 2 and the sampling box 4 is discharged through the liquid discharge mechanism 8 and sent to the collection box 9 for collection.

[0043] The liquid dispensing mechanism 8 includes a second pump body 801 installed on the liquid collection box 9. A connecting pipe 802 is installed at one end of the second pump body 801, and a two-stage three-way valve 803 is installed at one end of the connecting pipe 802. Output pipe 804 and output pipe 805 are respectively installed at the two ends of the two-stage three-way valve 803. One end of output pipe 804 is connected to the Aqua testing machine 2, and one end of output pipe 805 is connected to the sampling box 4.

[0044] Start the pump body 801 to send the aqueous solution to the collection box 9 through the two-stage three-way valve 803. The etching tank 1, Aqua test machine 2, sampling box 4 and collection box 9 are all detachable and equipped with drain pipes.

[0045] Furthermore, the infusion mechanism 3 includes a pump body 301 installed on the etching tank 1. One end of the pump body 301 is equipped with an inlet pipe 302. One end of the inlet pipe 302 is equipped with a first-stage three-way valve 303. The two ends of the first-stage three-way valve 303 are respectively equipped with an input pipe 304 and an input pipe 306.

[0046] When the pump body 301 is started, the aqueous solution in the etching tank 1 is sent into the inlet pipe 302. After being diverted by the first-stage three-way valve 303, it is sent into the Aqua tester 2 and the sampling box 4 through the input pipe 304 and the input pipe 306 respectively.

[0047] Furthermore, a hand valve 305 is installed on the outer wall of the input pipe 304.

[0048] Among them, a hand valve 307 is installed on the outer wall of the input pipe 306.

[0049] The flow rates of input pipe 304 and input pipe 306 can be manually adjusted using hand valve 305 and hand valve 307, respectively. This can be used as an auxiliary method during the maintenance of flow controller 5 and flow controller 6.

[0050] Furthermore, the inner diameters of input tube 304 and input tube 306 are the same.

[0051] Having the same inner diameter makes it easier to control the flow rate output from input tube 304 and input tube 306.

[0052] Furthermore, the sampling box 4 has an installation port on the side near the glass hydrometer 703, and an observation window 401 is fixed on the inner wall of the installation port.

[0053] When testing the specific gravity of ferric chloride, the aqueous solution inside the sampling box 4 and the changes in the value on the glass hydrometer 703 can be observed from the outside of the observation window 401.

[0054] The following description, in conjunction with the accompanying drawings and embodiments, provides a further explanation of this example.

[0055] Working principle: During use, starting pump 301 sends the aqueous solution from etching tank 1 into inlet pipe 302. After being diverted by first-stage three-way valve 303, it is then fed into Aqua testing machine 2 and sampling box 4 via inlet pipe 304 and inlet pipe 306 respectively. Flow controllers 5 and 6 control the flow rate. The Aqua testing machine 2 and glass hydrometers 703 are used to measure the specific gravity of ferric chloride. Multiple glass hydrometers 703 are used; the average value is taken. After the aqueous solution has settled in sampling box 4 for a period of time, the head of glass hydrometer 703 is held with one hand, and the other end is slid... Pull out the sleeve 702, then move your hand from the head of the glass hydrometer 703 to below the sleeve 702, remove the sleeve 702, and then suspend the glass hydrometer 703 on the aqueous solution without touching the mounting box 701. After the glass hydrometer 703 has been still for more than 30 seconds without obvious shaking, keep your line of sight level with the lowest point of the concave meniscus of the solution and directly read the value corresponding to the scale line. This is the specific gravity of ferric chloride at that temperature. It can be compared with the value measured by the Aqua tester 2. After the test is completed, start the pump body 2 801 to send the aqueous solution to the collection box 9 through the secondary three-way valve 803.

[0056] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0057] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims of this utility model.

Claims

1. A ferric chloride testing apparatus for FMM etching, comprising an etching tank (1) and an Aqua testing machine (2), characterized in that, Also includes: Sampling box (4), on which a testing mechanism (7) is installed; The testing mechanism (7) includes a mounting box (701) fixed on the surface of the sampling box (4), and a plurality of sliding sleeves (702) are vertically inserted into the mounting box (701). A glass hydrometer (703) is inserted into the inner wall of the sliding sleeve (702). An infusion mechanism (3) is installed on the etching tank (1). The two output ends of the infusion mechanism (3) are connected to the Aqua tester (2) and the sampling box (4) respectively. A flow controller one (5) is installed near the Aqua tester (2) at the output end of the infusion mechanism (3), and a flow controller two (6) is installed near the sampling box (4) at the output end of the infusion mechanism (3).

2. The ferric chloride testing device for FMM etching according to claim 1, characterized in that, It also includes a collection box (9) and a liquid dispensing mechanism (8) installed on the collection box (9), the two input ends of which are connected to the Aqua tester (2) and the sampling box (4) respectively.

3. The ferric chloride testing device for FMM etching according to claim 2, characterized in that, The liquid dispensing mechanism (8) includes a second pump body (801) installed on the liquid collection box (9). A connecting pipe (802) is installed at one end of the second pump body (801). A two-stage three-way valve (803) is installed at one end of the connecting pipe (802). An output pipe (804) and an output pipe (805) are respectively installed at both ends of the two-stage three-way valve (803). One end of the output pipe (804) is connected to the Aqua tester (2), and one end of the output pipe (805) is connected to the sampling box (4).

4. The ferric chloride testing device for FMM etching according to claim 1, characterized in that, The infusion mechanism (3) includes a pump body (301) installed on the etching tank (1), an inlet pipe (302) is installed at one end of the pump body (301), a first-stage three-way valve (303) is installed at one end of the inlet pipe (302), and an input pipe (304) and an input pipe (306) are respectively installed at both ends of the first-stage three-way valve (303).

5. The ferric chloride testing device for FMM etching according to claim 4, characterized in that, A hand valve (305) is installed on the outer wall of the input pipe (304).

6. The ferric chloride testing apparatus for FMM etching according to claim 4, characterized in that, A hand valve (307) is installed on the outer wall of the input pipe (306).

7. The ferric chloride testing apparatus for FMM etching according to claim 4, characterized in that, The inner diameters of input tube one (304) and input tube two (306) are the same.

8. The ferric chloride testing apparatus for FMM etching according to claim 1, characterized in that, The sampling box (4) has an installation opening on the side near the glass hydrometer (703), and an observation window (401) is fixed on the inner wall of the installation opening.

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