Residue detection device and wafer boat residue processing system

Abstract

The utility model discloses a kind of residual glue detection devices and wafer carrier residual glue processing system, residual glue detection device includes conveying assembly, detection component and alarm, conveying assembly includes conveying track, conveying track is used to convey measured piece, detection area is formed on conveying track, detection component is used to detect residual glue on measured piece and includes image acquisition module, image acquisition module is located above detection area, to be used to obtain the image of measured piece of detection area, alarm is electrically connected with detection component, to send alarm when detection component detects residual glue on measured piece. According to the residual glue detection device of the utility model, staff only needs to carry out glue removal treatment to measured piece with residual glue after alarm sends reminder, staff can carry out other work when alarm does not send reminder, so as to can guarantee measured piece on residual glue detection precision while, save residual glue processing manual cost.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth technology, and in particular to a residual adhesive detection device and a crystal tray residual adhesive treatment system. Background Technology

[0002] During silicon wafer fabrication, the ingot needs to be bonded to the wafer holder during dicing. After dicing, the silicon wafer is removed from the wafer holder. To ensure the wafer holder can be reused, residual adhesive on the wafer holder needs to be removed. In related technologies, adhesive removal devices cannot completely remove residual adhesive from the wafer holder. Manually inspecting each wafer holder for residual adhesive is inaccurate and increases labor costs. Utility Model Content

[0003] The first aspect of this utility model proposes a residual glue detection device, which has the advantage of saving labor costs for residual glue processing while ensuring the accuracy of residual glue detection.

[0004] According to a first aspect of the present invention, a residual adhesive detection device includes: a conveying assembly, the conveying assembly including a conveying track for conveying a test piece, the conveying track having a detection area formed thereon; a detection assembly for detecting residual adhesive on the test piece and including an image acquisition module located above the detection area for acquiring an image of the test piece in the detection area; and an alarm electrically connected to the detection assembly for issuing an alarm when the detection assembly detects the presence of residual adhesive on the test piece.

[0005] According to the residual adhesive detection device of the first aspect of the present invention, the detection component is used to detect residual adhesive on the test piece and is electrically connected to an alarm. The alarm sounds when the detection component detects residual adhesive on the test piece. The staff only needs to remove the adhesive from the test piece after the alarm sounds. The staff can perform other work when the alarm does not sound, thereby ensuring the accuracy of residual adhesive detection on the test piece while saving the labor cost of residual adhesive treatment.

[0006] According to some embodiments of the present invention, the conveying assembly includes a driving unit and a control component. The control component is electrically connected to the driving unit and the detection component. The control component is used to control the driving unit to switch between an on state and a off state. In the on state, the driving unit drives the conveying track to move and convey the test piece. In the off state, the conveying track stops moving.

[0007] According to some embodiments of the present invention, the control component includes a position sensor, a reset button, and a detection result receiver. The position sensor and the reset button are both electrically connected to the drive unit. The position sensor is used to detect the position of the test piece, so as to control the drive unit to switch to the off state when the test piece moves to the detection area. The reset button is used to control the drive unit to switch to the on state. The detection result receiver is electrically connected to the detection component and the drive unit, and is used to control the drive unit to switch to the on state.

[0008] According to some embodiments of the present invention, the conveying assembly includes a plurality of protective covers, which are disposed on the upper side of the conveying track, the conveying track extending along a first direction, and the plurality of protective covers include at least a first protective cover and a second protective cover arranged at intervals along the first direction, and the detection area is located between the first protective cover and the second protective cover.

[0009] According to some embodiments of the present invention, the alarm is located on the top of the protective cover.

[0010] According to some embodiments of the present invention, the conveying track extends along a first direction, the detection component is located on one side of the conveying component along a second direction, the second direction being perpendicular to the first direction; and / or, the detection component and the conveying component are spaced apart and can move relatively independently.

[0011] According to some embodiments of the present invention, the detection component further includes a supplementary light, which is located above the detection area and below the image acquisition module.

[0012] According to some embodiments of the present invention, the detection component includes a first mounting frame, and multiple image acquisition modules are provided, with the multiple image acquisition modules arranged at intervals on the first mounting frame along the extension direction of the conveying track.

[0013] According to some embodiments of the present invention, the detection component further includes a supplementary light, and there are multiple supplementary lights. The number of the multiple supplementary lights and the multiple image acquisition modules are the same and they are set in a one-to-one correspondence.

[0014] The second aspect of this utility model proposes a crystal tray residual adhesive treatment system.

[0015] The residual adhesive treatment system for crystal trays according to a second aspect of the present invention includes: the aforementioned residual adhesive detection device.

[0016] According to the crystal tray residual adhesive treatment system of the second aspect of the present invention, the detection component is used to detect residual adhesive on the test piece and is electrically connected to an alarm. The alarm sounds when the detection component detects residual adhesive on the test piece. The staff only needs to remove the adhesive from the test piece after the alarm sounds. The staff can perform other work when the alarm does not sound, thereby ensuring the accuracy of residual adhesive detection on the test piece while saving the labor cost of residual adhesive treatment.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of a residual adhesive detection device according to an embodiment of the present utility model; Figure 2 This is a front view of the residual adhesive detection device according to an embodiment of the present utility model; Figure 3 This is a left view of the residual adhesive detection device according to an embodiment of the present utility model; Figure 4 This is a top view of the residual adhesive detection device according to an embodiment of the present invention.

[0019] Figure label: 100. Residual adhesive detection device; 200. Test piece; 1. Conveying assembly; 11. Conveying track; 111. Detection area; 12. Reset button; 13a. First protective cover; 13b. Second protective cover; 14. Second mounting bracket; 2. Detection assembly; 21. Image acquisition module; 22. Fill light; 23. First mounting bracket; 3. Alarm. Detailed Implementation

[0020] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0021] The following disclosure provides numerous different embodiments or examples for implementing various structures of the present invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention; however, those skilled in the art will recognize the applicability of other processes and / or the use of other materials.

[0022] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0023] In the description of this utility model, "first feature" and "second feature" may include one or more of the features.

[0024] In the description of this utility model, "multiple" means two or more.

[0025] In the description of this utility model, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or it may include the first and second features not being in direct contact but being in contact through another feature between them.

[0026] In the description of this utility model, the terms "above", "over" and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0027] The residual adhesive detection device 100 according to a first aspect of the present invention is described below with reference to the accompanying drawings.

[0028] like Figures 1 to 4As shown, the residual adhesive detection device 100 according to the first aspect embodiment of the present invention includes: a conveying component 1, a detection component 2, and an alarm 3. The conveying component 1 includes a conveying track 11 for conveying a test piece 200. A detection area 111 is formed on the conveying track 11. The detection component 2 is used to detect residual adhesive on the test piece 200 and includes an image acquisition module 21. The image acquisition module 21 is located above the detection area 111 to acquire an image of the test piece 200 in the detection area 111. The alarm 3 is electrically connected to the detection component 2 to issue an alarm when the detection component 2 detects the presence of residual adhesive on the test piece 200.

[0029] In other words, during the process of transporting the test piece 200, such as a crystal holder, through the transport track 11, when the test piece 200 moves to the detection area 111, the image of the test piece 200 can be acquired by the image acquisition module 21, so that the detection component 2 can determine whether there is residual adhesive on the test piece 200 based on the image of the test piece 200 acquired by the image acquisition module 21.

[0030] Specifically, the detection of residual adhesive on the test piece 200 by the detection component 2 includes the following steps: First, the image acquisition module 21 acquires a high-definition image of the surface of the test piece 200 at the detection area 111. The brightness and angle of the image can be adjusted according to the material of the crystal holder (such as metal) and the characteristics of the residual adhesive (such as color and transparency) to ensure that the residual adhesive area forms a clear contrast with the background crystal holder. Second, the acquired image is processed and judged to enhance the contrast and highlight the edge features of the residual adhesive area. If the color of the residual adhesive is close to that of the crystal holder, the target area can be separated by threshold segmentation or color space conversion. Third, the geometric features (shape factor) and texture features (chromaticity co-occurrence matrix) of the residual adhesive are extracted and compared with the preset pass / fail standard. Fourth, if the size and quantity of the residual adhesive exceed the set threshold, it is judged as unqualified, and the alarm 3 is controlled by signal transmission to issue a reminder.

[0031] When there is no residual adhesive on the test piece 200, the alarm 3 is silent. When the detection component 2 determines that there is residual adhesive on the test piece 200, the detection component 2 transmits the signal of residual adhesive to the alarm 3, and the alarm 3 sounds an alarm to remind the staff to remove the adhesive. Therefore, the staff only needs to remove the adhesive from the test piece 200 after the alarm 3 sounds an alarm, so that the staff does not need to stay by the conveyor track 11 to continuously monitor whether there is residual adhesive on the test piece 200. The staff can carry out other work when the alarm 3 does not sound an alarm, thus saving the labor cost of residual adhesive removal while ensuring the accuracy of residual adhesive detection on the test piece 200. For example, the conveyor track 11 has an input end and an output end. The conveyor track 11 is used to drive the test piece 200 to move from the input end to the output end. When the alarm 3 does not sound an alarm, the staff can load the test piece 200 at the input end, that is, move the test piece 200 onto the conveyor track 11. In addition, multiple residual adhesive detection devices 100 can be arranged side by side, and multiple residual adhesive detection devices 100 can detect residual adhesive at the same time. An alarm 3 is set to provide an alarm reminder, so that the staff can pay attention to multiple residual adhesive detection devices 100 at the same time, thereby saving labor costs.

[0032] According to the first aspect of the present invention, the residual adhesive detection device 100 has a detection component 2 for detecting residual adhesive on the test piece 200 and is electrically connected to an alarm 3. The alarm 3 sounds an alarm when the detection component 2 detects residual adhesive on the test piece 200. The staff only needs to remove the adhesive from the test piece 200 after the alarm 3 sounds an alarm. The staff can perform other work when the alarm 3 does not sound an alarm, thereby ensuring the accuracy of residual adhesive detection on the test piece 200 while saving the labor cost of residual adhesive treatment.

[0033] In addition, it should be noted that the detection component 2 and the alarm 3 can be electrically connected via a signal transmission harness. The detection component 2 can also communicate with the alarm 3 via wireless transmission. That is, it is sufficient to ensure that the detection component 2 and the alarm 3 can transmit signals. Here, no specific restrictions are placed on the signal transmission method between the detection component 2 and the alarm 3.

[0034] In some embodiments, the alarm 3 can provide an alert by emitting an alarm sound, such as a buzzer; in other embodiments, the alarm 3 can provide an alert by emitting a light, such as a warning light, which can emit a bright color when an alarm is triggered. There is no specific limitation on the type of alarm 3, as long as the alarm 3 can alert the staff.

[0035] According to some embodiments of this utility model, the conveying assembly 1 includes a driving unit and a control assembly. The control assembly is electrically connected to the driving unit and the detection assembly 2. The control assembly is used to control the driving unit to switch between an on state and a off state. In the on state, the driving unit drives the conveying track 11 to move and convey the test piece 200. In the off state, the conveying track 11 stops moving. Thus, the control assembly can flexibly control the conveying track 11 to switch between an on state and a off state to meet the requirements of residual adhesive detection on the test piece 200.

[0036] Specifically, when the test piece 200 is conveyed to the detection area 111 via the conveyor track 11, the drive unit can be switched to the off state by the control component. At this time, the conveyor track 11 stops running, allowing the test piece 200 to remain within the detection area 111. This provides sufficient time for the image acquisition module 21 to acquire images of the test piece 200, improving the clarity of the acquired images and thus enhancing the accuracy of the detection component 2 in detecting residual adhesive. Furthermore, when residual adhesive is present on the test piece 200, the drive unit can be switched to the off state by the control component, providing sufficient time for workers to clean the residual adhesive and preventing accidental injury to workers from the conveyor track 11. When the detection component 2 determines that no residual adhesive is present on the test piece 200, the drive unit can be switched from the off state to the on state by the control component. This allows the output of the detected test piece 200 and the delivery of the next test piece 200 to the detection area 111 for detection, ensuring the orderly execution of the residual adhesive detection operation.

[0037] According to some embodiments of the present invention, the control component includes a position sensor, a reset button 12, and a detection result receiver. The position sensor and the reset button 12 are both electrically connected to the drive unit. The position sensor is used to detect the position of the test piece 200 so that when the test piece 200 moves to the detection area 111, the drive unit is controlled to switch to the off state. The reset button 12 is used to control the drive unit to switch to the on state. The detection result receiver is electrically connected to the detection component 2 and the drive unit and is used to control the drive unit to switch to the on state.

[0038] In other words, when the drive unit is in the on state and the conveyor track 11 is running to convey the test piece 200, when the test piece 200 moves to the detection area 111, the position information of the test piece 200 can be received in time by the position sensor and transmitted to the drive unit. For example, the position sensor can be a photoelectric switch to control the drive unit to switch to the off state, so that the test piece 200 stays in the detection area 111, so that the detection component 2 can detect residual adhesive.

[0039] When the detection component 2 detects residual adhesive on the test piece 200, the operator needs to clean the residual adhesive. A reset button 12 allows the operator to switch the drive unit from the off state to the on state after confirming the adhesive has been cleaned. This enables the test piece 200 in the detection area 111 to be transported to the next process via the conveyor track 11, and the next untested test piece 200 to be transported to the detection area 111 for testing. When the detection component 2 detects no residual adhesive on the test piece 200, meaning the current test piece 200 does not require adhesive removal, the detection component 2 transmits a signal indicating the absence of residual adhesive to the detection result receiver. Upon receiving the signal, the detection structure receiver controls the drive unit to switch from the off state to the on state, enabling the test piece 200 in the detection area 111 to be transported to the next process via the conveyor track 11, and the next untested test piece 200 to be transported to the detection area 111.

[0040] According to some embodiments of this utility model, the conveying assembly 1 includes multiple protective covers, which are disposed on the upper side of the conveying track 11. The conveying track 11 extends along a first direction (as shown in e1). The multiple protective covers include at least a first protective cover 13a and a second protective cover 13b arranged at intervals along the first direction. The detection area 111 is located between the first protective cover 13a and the second protective cover 13b. Thus, by setting the protective covers, a good shielding and protection effect can be formed for the test piece 200 on the conveying track 11. Furthermore, since the detection area 111 is located between the first protective cover 13a and the second protective cover 13b, the first protective cover 13a and the second protective cover 13b can avoid obstructing the test piece 200 located in the detection area 111, which facilitates the image acquisition module 21 to acquire images of the test piece 200 and the operator to perform adhesive removal operations on the test piece 200.

[0041] According to some embodiments of this utility model, the alarm 3 is located on top of the protective cover. This prevents the protective cover from obstructing the alarm 3, allowing the alarm 3 to more directly alert staff so that they can promptly be aware of any residual adhesive on the test piece 200.

[0042] According to some embodiments of this utility model, the conveying track 11 extends along a first direction (e1 as shown in the figure), and the detection component 2 is located on one side of the conveying component 1 along a second direction (e2 as shown in the figure), the second direction being perpendicular to the first direction. Therefore, by placing the detection component 2 on one side of the conveying component 1 along the second direction, operating space can be provided for the operator on the other side of the conveying component 1 along the second direction. That is, the operator can perform adhesive removal on the test piece 200 on the other side of the conveying component 1 along the second direction, thereby reducing the difficulty of adhesive removal for the operator.

[0043] According to some embodiments of this utility model, the detection component 2 and the conveying component 1 are spaced apart and can move relatively independently. This improves the flexibility of the arrangement of the detection component 2; for example, the position of the detection component 2 can be flexibly changed according to the position of the conveying component 1. Furthermore, the relative independence of the detection component 2 and the conveying component 1 reduces mutual interference between them. For example, it prevents vibration of the conveying track 11 from causing vibration of the image acquisition module 21, thus avoiding affecting the accuracy of image acquisition and improving the accuracy of residual adhesive detection by the detection component 2. Moreover, when one of the detection component 2 and the conveying component 1 is inspected or maintained, it avoids affecting the other. And when one of the detection component 2 and the conveying component 1 is damaged, only the damaged part of the casing needs to be replaced, reducing the maintenance difficulty and cost of the residual adhesive detection device 100.

[0044] According to some embodiments of this utility model, the detection component 2 further includes a supplementary light 22, which is located above the detection area 111 and below the image acquisition module 21. By emitting light towards the detection area 111 through the supplementary light 22, the brightness around the test piece 200 can be significantly increased, allowing the image acquisition module 21 to more clearly capture images of the test piece 200. Furthermore, it can create a clear contrast between the residual adhesive on the test piece 200 and the test piece itself, thereby improving the accuracy of determining the residual adhesive status through the image of the test piece 200.

[0045] According to some embodiments of this utility model, the detection component 2 includes a first mounting frame 23, and multiple image acquisition modules 21 are provided. These multiple image acquisition modules 21 are arranged at intervals along the extension direction of the conveying track 11 on the first mounting frame 23. Therefore, multiple image acquisition modules 21 can capture images of the test piece 200 at different positions and angles from multiple different locations, enabling the detection component 2 to obtain more complete and clear images of the surface of the test piece 200. This provides accurate data support for determining whether there is residual adhesive on the test piece 200, thereby improving the accuracy of the detection component 2 in detecting residual adhesive on the test piece 200.

[0046] In some embodiments, the conveying assembly 1 further includes a second mounting bracket 14, and the conveying track 11 is disposed on the top of the second mounting bracket 14, so that the conveying track 11 can have a certain height, which facilitates the operator to remove the adhesive from the test piece on the conveying track 11.

[0047] According to some embodiments of this utility model, the detection component 2 further includes multiple supplementary lights 22, and the number of supplementary lights 22 and multiple image acquisition modules 21 are the same and they are arranged in a one-to-one correspondence. Each supplementary light 22 is used to illuminate at least the viewing angle range of the corresponding image acquisition module 21. Through the multiple supplementary lights 22, the outer surface contour of the test piece 200 can be made clearer, and a clear contrast can be formed between the residual adhesive on the test piece 200 and the test piece 200 itself, thereby improving the accuracy of judging the residual adhesive situation through the image of the test piece 200.

[0048] The following description, with reference to the accompanying drawings, describes a crystal tray residual adhesive treatment system according to a second aspect of the present invention.

[0049] According to a second aspect of the present invention, a residual adhesive treatment system for crystal trays includes: a residual adhesive detection device 100.

[0050] According to the crystal tray residual adhesive treatment system of the second aspect of the present invention, the detection component 2 is used to detect residual adhesive on the test piece 200 and is electrically connected to the alarm 3. The alarm 3 sounds an alarm when the detection component 2 detects residual adhesive on the test piece 200. The staff only needs to remove the adhesive from the test piece 200 after the alarm 3 sounds an alarm. The staff can carry out other work when the alarm 3 does not sound an alarm. Thus, the accuracy of residual adhesive detection on the test piece 200 can be guaranteed while saving the labor cost of residual adhesive treatment.

[0051] In some embodiments, the crystal tray residual adhesive treatment system further includes an adhesive removal device, which is located in the previous step of the residual adhesive detection device 100. That is, after the adhesive on the crystal tray is treated by the adhesive removal device, the treated crystal tray is transported to the transport track 11 and detected by the detection component 2. That is, the residual adhesive detection device 100 is a re-inspection step of the adhesive removal device to ensure that the adhesive on the crystal tray is completely removed.

[0052] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0053] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0054] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A residual adhesive detection device, characterized in that, include: A conveying assembly, comprising a conveying track for conveying a test piece, wherein a detection area is formed on the conveying track; A detection component for detecting residual adhesive on the test piece and including an image acquisition module, the image acquisition module being located above the detection area for acquiring an image of the test piece in the detection area; An alarm, electrically connected to the detection component, is provided to sound an alarm when the detection component detects the presence of residual adhesive on the test piece.

2. The residual adhesive detection device according to claim 1, characterized in that, The conveying assembly includes a drive unit and a control component. The control component is electrically connected to the drive unit and the detection component. The control component is used to control the drive unit to switch between an on state and a off state. In the on state, the drive unit drives the conveying track to move and convey the test piece. In the off state, the conveying track stops moving.

3. The residual adhesive detection device according to claim 2, characterized in that, The control component includes a position sensor, a reset button, and a detection result receiver. The position sensor and the reset button are both electrically connected to the drive unit. The position sensor is used to detect the position of the device under test (DUT) so that when the DUT moves to the detection area, the drive unit is controlled to switch to the off state. The reset button is used to control the drive unit to switch to the on state. The detection result receiver is electrically connected to the detection component and the drive unit and is used to control the drive unit to switch to the on state.

4. The residual adhesive detection device according to claim 1, characterized in that, The conveying assembly includes multiple protective covers, which are disposed on the upper side of the conveying track, which extends along a first direction. The multiple protective covers include at least a first protective cover and a second protective cover arranged at intervals along the first direction. The detection area is located between the first protective cover and the second protective cover.

5. The residual adhesive detection device according to claim 4, characterized in that, The alarm is located on top of the protective shield.

6. The residual adhesive detection device according to claim 1, characterized in that, The conveying track extends along a first direction, and the detection component is located on one side of the conveying component along a second direction, which is perpendicular to the first direction; and / or, the detection component and the conveying component are spaced apart and can move relatively independently.

7. The residual adhesive detection device according to claim 1, characterized in that, The detection component also includes a fill light, which is located above the detection area and below the image acquisition module.

8. The residual adhesive detection device according to claim 1, characterized in that, The detection component includes a first mounting frame, and multiple image acquisition modules are provided, with the multiple image acquisition modules arranged at intervals on the first mounting frame along the extension direction of the conveying track.

9. The residual adhesive detection device according to claim 8, characterized in that, The detection component also includes multiple fill lights, and the number of multiple fill lights and the number of multiple image acquisition modules are the same and they are set in a one-to-one correspondence.

10. A system for treating residual adhesive on a crystal tray, characterized in that, include: The residual adhesive detection device according to any one of claims 1-9.

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