A copper foil substrate surface colloidal particle inspection apparatus

Abstract

The application provides a copper foil substrate surface glue particle inspection device, and relates to the technical field of substrate processing. The device comprises a material conveying belt, a detection unit and a controller. The material conveying belt can transport a substrate to be detected. The detection unit comprises a detection lamp and a detection camera. The detection lamp is arranged above the material conveying belt and can irradiate the substrate passing directly below the detection lamp. The detection lamp comprises at least two light sources of different colors. The detection camera can capture a detection image of the substrate passing directly below the detection lamp. The detection camera is electrically connected to the controller and can send the detection image to the controller. The controller can compare the detection image with a correct image and determine whether the substrate passing directly below the detection lamp is a defective substrate. The application can more accurately identify defective substrates and reduce missed detection.

Description

Technical Field

[0001] This application relates to the field of substrate processing technology, and in particular to a device for inspecting adhesive particles on the surface of a copper foil substrate. Background Technology

[0002] Copper foil substrate (CCL) is the core material for manufacturing printed circuit boards (PCBs), and its surface cleanliness directly determines the integrity of the circuit pattern. During the substrate production process, it is necessary to use optical inspection equipment to identify residual resin particles on the surface of the copper foil. If these are missed, it will lead to gaps or short circuits in the etching process.

[0003] Existing substrate surface inspection equipment generally includes an industrial camera and an image recognition device. The industrial camera can capture the surface of the substrate to form an inspection image and send the inspection image to the image recognition device so that the image recognition device can identify defective substrates by comparing the inspection image with the correct image.

[0004] However, since the images captured by industrial cameras are obtained under ambient light, when the difference in reflectivity between the adhesive particles and the copper foil background is small, the image recognition device has difficulty correctly identifying the defective substrate, which can easily lead to missed detections, causing the defective substrate to flow into the downstream process and resulting in batch scrap.

[0005] Therefore, there is a need to provide a device for inspecting adhesive particles on the surface of copper foil substrates. Utility Model Content

[0006] To address the problem of missed detections in existing substrate surface inspection equipment, this application provides a copper foil substrate surface adhesive particle inspection device.

[0007] This application provides a device for inspecting adhesive particles on the surface of a copper foil substrate, which adopts the following technical solution: it includes a material conveyor belt, a detection unit and a controller, wherein the material conveyor belt is capable of transporting the substrate to be inspected; The detection unit includes a detection lamp and a detection camera. The detection lamp is located above the material conveyor belt and can illuminate the substrate passing directly below the detection lamp. The detection lamp includes at least two different colors of light source. The detection camera can capture the substrate passing directly below the detection lamp to form a detection image. The detection camera is electrically connected to the controller and can send the detection image to the controller. The controller can compare the detected image with the correct image and determine whether the substrate located directly below the detection lamp is a defective substrate.

[0008] By adopting the above technical solution, the conveyor belt can transport the substrate to be inspected. The inspection lamp in the inspection unit can illuminate the substrate and includes at least two different colors of light source. The difference in reflection under different colored light sources can assist in the detection of adhesive particles. The inspection camera captures the substrate to form an inspection image and sends it to the controller. The controller determines whether the substrate is defective by comparing the inspection image with the correct image. Compared with the existing technology where industrial cameras capture images under ambient light, which are prone to missing detection when the difference in reflectivity between adhesive particles and the copper foil background is small, this equipment uses multiple colored light sources to enhance the difference in reflectivity between adhesive particles and the copper foil background. This allows the controller to more accurately identify defective substrates, reduce missed detections, and thus prevent defective substrates from flowing into downstream processes and causing batch scrap.

[0009] Specifically, the detection light includes red, green, blue, white, and purple light sources.

[0010] By adopting the above technical solution, the detection lamp is equipped with red, green, blue, white and purple light sources. Different colors of light sources have different reflection effects on the adhesive particles and background on the surface of the copper foil substrate, which can increase the difference in reflectivity between the adhesive particles and the copper foil background, making the adhesive particles easier to identify in the detection image captured by the detection camera, thereby reducing the false negative rate when the controller judges whether the substrate is a defective substrate.

[0011] Specifically, the detection unit further includes a detection mirror, and the detection lamp and the detection camera are arranged sequentially along the direction in which the substrate is transported by the conveyor belt. The detection mirror can reflect the light reflected by the detection lamp onto the substrate into the lens of the detection camera.

[0012] By adopting the above technical solution, the inspection mirror reflects the light reflected by the inspection lamp cover onto the substrate into the lens of the inspection camera, which enhances the intensity and quality of the light received by the inspection camera. This makes the inspection image captured by the inspection camera clearer and more accurate, which helps the controller to more accurately compare the inspection image with the correct image, thereby improving the accuracy of judging whether the substrate is a defective substrate and reducing the occurrence of missed detections.

[0013] Specifically, it also includes a screening conveyor belt, a finished product cylinder, a waste product cylinder, and an adsorption unit. The screening conveyor belt is located between the detection unit and the finished product cylinder. The bottom surface of the screening conveyor belt can abut against the top surface of the substrate. The portion of the screening conveyor belt located between the conveyor belt and the finished product cylinder forms a suction plate section. The starting end of the suction plate section is located above the conveyor belt, and the ending end of the suction plate section is located above the finished product cylinder. The waste product cylinder is located between the conveyor belt and the finished product cylinder. The adsorption unit includes a vacuum pump and a connecting member. The screening conveyor belt has several ventilation holes. Each ventilation hole located in the suction plate section is connected to the vacuum pump via the connecting member. The controller is electrically connected to the vacuum pump and can control the switching of the vacuum pump based on the comparison result between the detected image and the correct image.

[0014] By adopting the above technical solution, the screening conveyor belt is set between the detection unit and the finished product cylinder. The suction plate section abuts against the top surface of the substrate, allowing the substrate to move with the screening conveyor belt. The ventilation holes on the belt are connected to the air pump through a connecting part. The controller can control the air pump switch based on the comparison result between the detected image and the correct image. When the substrate is detected as a qualified product, the air pump is turned on, and the substrate is adsorbed on the suction plate section and moves with it to the finished product cylinder. When the substrate is detected as a defective product, the air pump is turned off, and the substrate loses its adsorption force and falls into the waste cylinder. This realizes the automatic screening and classification of qualified and defective products, improving production efficiency and product quality.

[0015] Furthermore, the connecting component includes an air guide hood and a connecting pipe. The bottom end of the air guide hood is disposed on each of the air vents located in the suction plate section and abuts against the inner ring of the screening conveyor belt. The top port of the air guide hood is connected to the air intake port of the air pump via the connecting pipe.

[0016] By adopting the above technical solution, the bottom end of the air guide cover is provided with ventilation holes in the suction plate section and abuts against the inner ring of the screening conveyor belt. The top end is connected to the air pump port through the connecting pipe. This allows the air pump to draw air through the ventilation holes in the suction plate section through the air guide cover and the connecting pipe, thereby adsorbing the substrate and ensuring that the screening conveyor belt can stably transport the substrate, which is convenient for subsequent screening and classification of the substrate.

[0017] Furthermore, it also includes a back inspection unit, which is located directly below the suction plate section and between the material conveyor belt and the waste cylinder. The back inspection unit is capable of taking a picture of the substrate passing directly above it to form a back inspection image. The back inspection unit is electrically connected to the controller and is capable of sending the back inspection image to the controller.

[0018] By adopting the above technical solution, the back inspection unit can take pictures of the back of the substrate and send the back inspection images to the controller, which can help the controller to more comprehensively determine whether the substrate is a defective substrate, reduce missed detections, and improve the accuracy of substrate detection.

[0019] Furthermore, the back inspection unit includes a back inspection light and a back inspection camera. The back inspection light and the back inspection camera are arranged sequentially along the direction in which the substrate is transported by the suction plate section. The back inspection light can illuminate the substrate passing directly above the back inspection light, and the back inspection camera can capture the back inspection image of the substrate passing directly above the back inspection light.

[0020] By adopting the above technical solution, the back inspection lamp and the back inspection camera are arranged sequentially along the direction of transporting the substrate in the suction plate section. The back inspection lamp illuminates the substrate passing directly above it, and the back inspection camera captures the illuminated substrate to form a back inspection image. This allows for the inspection of the back of the substrate, which can detect defects such as residual adhesive particles on the back of the substrate. This further improves the comprehensiveness of the detection of adhesive particles on the surface of the copper foil substrate, reduces missed detections, and prevents defective substrates from flowing into downstream processes and causing batch scrap.

[0021] Furthermore, the connecting component also includes an electrically controlled valve. The air guide hood has a partition inside, which divides it into a detection chamber and a waste removal chamber. The detection chamber is located directly above the back inspection unit, and the waste removal chamber is located directly above the waste cylinder. The connecting pipe has a branch pipe. Both the detection chamber and the waste removal chamber have through holes on their inner walls. The through hole of the detection chamber is connected to the air intake port of the air pump through the connecting pipe, and the through hole of the waste removal chamber is connected to the air intake port of the air pump through the branch pipe and the connecting pipe. The electrically controlled valve is located on the branch pipe and is electrically connected to the controller, enabling it to control the flow of air in the branch pipe.

[0022] By adopting the above technical solution, during the detection process, a partition is used to divide the air guide hood into a detection chamber and a waste removal chamber, making the detection and waste removal processes independent and avoiding mutual interference. The detection chamber is located directly above the back inspection unit, which can stably adsorb the substrate during back inspection and ensure the accuracy of back inspection image capture; the waste removal chamber is located directly above the waste collection cylinder, which can promptly adsorb and send waste to the waste collection cylinder when it is identified. The connecting pipe and branch pipe provide a channel for airflow. By installing an electrically controlled valve on the branch pipe that is electrically connected to the controller, the controller can control the flow of air in the branch pipe according to the detection results, thereby precisely controlling the adsorption state of the waste removal chamber, achieving efficient screening and removal of waste, and improving the working efficiency and screening accuracy of the inspection equipment.

[0023] In summary, this application includes the following beneficial technical effects: The device includes a conveyor belt, an inspection unit, and a controller. The conveyor belt transports substrates to be inspected. The inspection unit includes an inspection lamp and an inspection camera. The inspection lamp is positioned above the conveyor belt and illuminates substrates passing directly beneath it. The inspection lamp includes at least two different colors of light source. The inspection camera captures images of substrates passing directly beneath the inspection lamp, forming an inspection image. The inspection camera is electrically connected to the controller and can send the inspection image to the controller. The controller compares the inspection image with a correct image and determines whether the substrate directly beneath the inspection lamp is a defective substrate. Compared to existing technologies where industrial cameras capture images under ambient light, making it easy to miss defects when the reflectivity difference between the adhesive particles and the copper foil background is small, this device uses multiple colors of light source to enhance the reflectivity difference between the adhesive particles and the copper foil background. This allows the controller to more accurately identify defective substrates, reducing missed detections and preventing defective substrates from flowing into downstream processes and causing batch scrap. Attached Figure Description

[0024] Figure 1 This is a perspective view of a copper foil substrate surface adhesive particle inspection device according to this application; Figure 2 This is a top view of a copper foil substrate surface adhesive particle inspection device according to this application; Figure 3 It is along Figure 2 A schematic cross-sectional view taken along the AA direction.

[0025] Reference numerals: 1. Conveyor belt; 2. Detection unit; 21. Detection light; 22. Detection camera; 23. Detection mirror; 3. Substrate; 4. Screening conveyor belt; 41. Suction plate section; 5. Finished product cylinder; 6. Waste cylinder; 7. Adsorption unit; 71. Air pump; 72. Connecting component; 721. Air guide hood; 7211. Detection chamber; 7212. Waste removal chamber; 722. Connecting pipe; 723. Electrically controlled valve; 8. Back inspection unit; 81. Back inspection light; 82. Back inspection camera. Detailed Implementation

[0026] The following is in conjunction with the appendix Figure 1-3 Further explanation: See Figure 1 and Figure 2The copper foil substrate surface adhesive particle inspection device provided in this application is installed at the discharge port of the copper foil substrate 3 production line (not shown in the figure). The device specifically includes: a conveyor belt 1, a detection unit 2, a controller (not shown in the figure), a screening conveyor belt 4, a back inspection unit 8, a finished product cylinder 5, a waste product cylinder 6, and an adsorption unit 7. The conveyor belt 1, detection unit 2, screening conveyor belt 4, back inspection unit 8, waste product cylinder 6, and finished product cylinder 5 are arranged sequentially along the direction of transporting the substrate 3 on the conveyor belt 1. The starting end of the conveyor belt 1 is located below the discharge port of the copper foil substrate 3 production line and is capable of receiving the substrates to be inspected. 3. The detection unit 2 includes a detection lamp 21, a detection mirror 23, and a detection camera 22. The detection lamp 21 is located above the material conveyor belt 1 and can illuminate the substrate 3 passing directly below the detection lamp 21. The detection lamp 21 can include red, green, blue, white, and purple light sources. The detection mirror 23 is located between the detection lamp 21 and the detection camera 22 and can reflect the light reflected from the substrate 3 by the detection lamp 21 into the lens of the detection camera 22, so that the detection camera 22 can capture the substrate 3 passing directly below the detection lamp 21 to form a detection image. The detection camera 22 is electrically connected to the controller and can send the detection image to the controller.

[0027] See Figure 2 and Figure 3 The bottom surface of the screening conveyor belt 4 can abut against the top surface of the substrate 3, and the portion of the screening conveyor belt 4 located between the material conveyor belt 1 and the finished product cylinder 5 is formed as a suction plate section 41. The starting end of the suction plate section 41 is located above the material conveyor belt 1, and the ending end of the suction plate section 41 is located above the finished product cylinder 5. The waste cylinder 6 is located between the material conveyor belt 1 and the finished product cylinder 5. The back inspection unit 8 is located directly below the suction plate section 41 and between the material conveyor belt 1 and the waste cylinder 6. The back inspection unit 8 includes a back inspection light 81 and a back inspection camera 82. The back inspection light 81 and the back inspection camera 82 are arranged sequentially along the direction of transporting the substrate 3 by the suction plate section 41. The back inspection light 81 can illuminate the substrate 3 passing directly above the back inspection light 81. The back inspection light 81 may also include red, green, blue, white and purple light sources. The back inspection camera 82 can capture the substrate 3 passing directly above the back inspection light 81 to form a back inspection image so as to inspect the back of the substrate 3.

[0028] See Figure 2 and Figure 3The adsorption unit 7 includes a vacuum pump 71 and a connecting member 72. Several ventilation holes are provided on the belt of the screening conveyor belt 4. The connecting member 72 includes a vent 721, a connecting pipe 722, and an electrically controlled valve 723. The bottom end of the vent 721 is fitted onto each ventilation hole located within the suction plate section 41 and abuts against the inner ring of the screening conveyor belt 4. The vent 721 has a partition inside, dividing it into a detection chamber 7211 and a waste removal chamber 7212. The detection chamber 7211 is located directly above the back inspection unit 8, and the waste removal chamber 7212 is located directly above the waste cylinder 6. The tube 722 has a branch pipe on its body. The inner walls of the detection chamber 7211 and the waste removal chamber 7212 are both provided with through holes. The through hole of the detection chamber 7211 is connected to the air extraction port of the air pump 71 through the connecting pipe 722. The through hole of the waste removal chamber 7212 is connected to the air extraction port of the air pump 71 through the branch pipe and the connecting pipe 722. The electric control valve 723 is provided on the branch pipe and is electrically connected to the controller and can control the flow of air in the branch pipe, so that the controller can control the switch of the air pump 71 according to the detection image and the comparison result between the back inspection image and the correct image.

[0029] Specifically, the controller can be a microcontroller or industrial computer, which stores the correct image and can compare the detected image with the correct image to determine whether the substrate 3 located directly below the detection lamp 21 is a defective substrate 3. The controller is connected to the detection camera 22 via a data cable and receives the detection images sent by the detection camera 22. When a defective substrate 3 is detected, the controller can issue an alarm signal or control subsequent screening actions.

[0030] The working principle of the copper foil substrate surface adhesive particle inspection device of this application is as follows: The conveyor belt 1 first transports the substrate 3 to be inspected to below the inspection unit 2, so that the inspection lamp 21 of the inspection unit 2 emits light of different colors to illuminate the substrate 3. The inspection camera 22 captures an image of the surface of the substrate 3 and sends it to the controller. The controller compares the inspection image with the correct image to determine whether the substrate 3 is a defective substrate 3. If it is a defective substrate 3 and there is no back inspection unit 8, and the waste cylinder 6 is adjacent to the end of the conveyor belt 1, the controller can control the vacuum pump 71 to turn off so that the substrate 3 will not be attracted to the screening conveyor belt 4, but will fall into the waste cylinder 6 from the end of the conveyor belt 1. If it is a defective substrate 3 and a back inspection unit 8 is set between the waste cylinder 6 and the end of the conveyor belt 1, the controller can also control the vacuum pump 71 to turn on and the electronic control valve 723 to turn off, so that the substrate 3 is first attracted to the screening conveyor belt 4, and then moves with the screening conveyor belt 4 to the bottom of the waste removal chamber 7212 before falling into the waste cylinder 6.

[0031] If the substrate 3 is qualified, the controller will activate the vacuum pump 71 and the back inspection unit 8, so that the substrate 3 is first adsorbed onto the screening conveyor belt 4, and then the back inspection unit 8 will inspect the back of the substrate 3. If a defect is found on the back of the substrate 3, the controller will close the electric control valve 723 and move the substrate 3 along the screening conveyor belt 4 to the bottom of the waste removal chamber 7212 and then fall into the waste cylinder 6. If no defect is found on the back of the substrate 3, the controller will open the electric control valve 723 and generate negative pressure throughout the suction plate section 41, so that the substrate 3 will fall into the finished product cylinder 5 only when it is directly above the finished product cylinder 5. This can effectively improve the detection accuracy of adhesive particles on the surface of copper foil substrates through multi-color light source illumination, multi-angle detection and automated screening, reduce the occurrence of missed detection, avoid defective substrates 3 flowing into downstream processes and causing batch scrapping, and improve production efficiency and product quality.

[0032] It should be noted that the above are all preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A device for inspecting adhesive particles on the surface of a copper foil substrate, characterized in that: It includes a material conveyor belt (1), a detection unit (2) and a controller, wherein the material conveyor belt (1) is capable of transporting the substrate (3) to be detected; The detection unit (2) includes a detection lamp (21) and a detection camera (22). The detection lamp (21) is located above the material conveyor belt (1) and can illuminate the substrate (3) passing directly below the detection lamp (21). The detection lamp (21) includes at least two different colors of light source. The detection camera (22) can capture a detection image of the substrate (3) passing directly below the detection lamp (21). The detection camera (22) is electrically connected to the controller and can send the detection image to the controller. The controller can compare the detected image with the correct image and determine whether the substrate (3) located directly below the detection lamp (21) is a defective substrate (3).

2. The copper foil substrate surface adhesive particle inspection device according to claim 1, characterized in that: The detection lamp (21) includes red, green, blue, white and purple light sources.

3. The copper foil substrate surface adhesive particle inspection device according to claim 1, characterized in that: The detection unit (2) further includes a detection mirror (23). The detection lamp (21) and the detection camera (22) are arranged sequentially along the direction in which the substrate (3) is transported by the conveyor belt (1). The detection mirror (23) can reflect the light reflected by the detection lamp (21) onto the substrate (3) into the lens of the detection camera (22).

4. The copper foil substrate surface adhesive particle inspection device according to claim 1, characterized in that: It also includes a screening conveyor belt (4), a finished product cylinder (5), a waste cylinder (6), and an adsorption unit (7). The screening conveyor belt (4) is located between the detection unit (2) and the finished product cylinder (5). The bottom surface of the screening conveyor belt (4) can abut against the top surface of the substrate (3). The portion of the screening conveyor belt (4) located between the conveyor belt (1) and the finished product cylinder (5) is formed as a suction plate section (41). The starting end of the suction plate section (41) is located above the conveyor belt (1), and the ending end of the suction plate section (41) is located at... Above the finished product cylinder (5), the waste cylinder (6) is located between the conveyor belt (1) and the finished product cylinder (5). The adsorption unit (7) includes a vacuum pump (71) and a connecting member (72). The screening conveyor belt (4) has several ventilation holes. Each ventilation hole located in the suction plate section (41) is connected to the vacuum pump (71) via the connecting member (72). The controller is electrically connected to the vacuum pump (71) and can control the switch of the vacuum pump (71) according to the comparison result between the detection image and the correct image.

5. The copper foil substrate surface adhesive particle inspection device according to claim 4, characterized in that: The connecting component (72) includes an air guide hood (721) and a connecting pipe (722). The bottom end of the air guide hood (721) is disposed on each of the air vents located in the suction plate section (41) and abuts against the inner ring of the belt body of the screening conveyor belt (4). The top port of the air guide hood (721) is connected to the air extraction port of the air pump (71) via the connecting pipe (722).

6. The copper foil substrate surface adhesive particle inspection device according to claim 5, characterized in that: It also includes a back inspection unit (8), which is located directly below the suction plate section (41) and between the material conveyor belt (1) and the waste cylinder (6). The back inspection unit (8) can take a picture of the substrate (3) passing directly above the back inspection unit (8) to form a back inspection image. The back inspection unit (8) is electrically connected to the controller and can send the back inspection image to the controller.

7. The copper foil substrate surface adhesive particle inspection device according to claim 6, characterized in that: The back inspection unit (8) includes a back inspection light (81) and a back inspection camera (82). The back inspection light (81) and the back inspection camera (82) are arranged sequentially along the direction in which the substrate (3) is transported by the suction plate section (41). The back inspection light (81) can illuminate the substrate (3) passing directly above the back inspection light (81), and the back inspection camera (82) can capture the back inspection image of the substrate (3) passing directly above the back inspection light (81).

8. The copper foil substrate surface adhesive particle inspection device according to claim 7, characterized in that: The connecting component (72) also includes an electrically controlled valve (723). The air guide hood (721) has a partition inside, which divides it into a detection chamber (7211) and a waste removal chamber (7212). The detection chamber (7211) is located directly above the back inspection unit (8), and the waste removal chamber (7212) is located directly above the waste cylinder (6). The connecting pipe (722) has a branch pipe on its body. The detection chamber (7211) and the waste removal chamber (7212) The inner wall of the chamber is provided with through holes, and the through hole of the detection chamber (7211) is connected to the air extraction port of the air pump (71) through the connecting pipe (722). The through hole of the waste removal chamber (7212) is connected to the air extraction port of the air pump (71) through the branch pipe and the connecting pipe (722). The electric control valve (723) is provided on the branch pipe, and the electric control valve (723) is electrically connected to the controller and can control the flow of air in the branch pipe.

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