A scanning head for a scanning probe microscope

Abstract

The utility model discloses a scanning head for scanning probe microscope, including mounting seat, be located in the needle tip groove and sample groove of mounting seat, the upper piezoelectric ceramic group of being located between the sample groove upper end surface and mounting seat, the lower piezoelectric ceramic group of being located at the sample groove lower end face, be located on the elastic assembly of mounting seat and the lower piezoelectric ceramic group lower end face, needle tip groove and sample groove are arranged along the up-down direction interval, the elastic assembly includes at least two groups of plate spring that are arranged along the up-down direction interval in proper order, the first mounting hole of being opened on plate spring, the first bolt of connecting each group plate spring and mounting seat through first mounting hole, plate spring includes the body of disc, a plurality of curve grooves that are opened on the body and are two two interval arrangement, a plurality of one one correspondingly be located between the curve groove two two of swing arm, and the width of swing arm is greater than its thickness. The utility model discloses a scanning head for scanning probe microscope, can satisfy the demand of radial steady support and axial and provide specific elastic force.

Description

Technical Field

[0001] This utility model relates to a scanning head for a scanning probe microscope. Background Technology

[0002] Scanning probe microscopy, as a high-resolution surface analysis tool, is mainly used in nano-optical spectroscopy, atomic-level light-matter interaction, characterization of optoelectronic materials, and light-controlled single-molecule and atomic manipulation.

[0003] In existing technologies, a sample cell is typically driven by an electrically energized piezoelectric ceramic to move horizontally and backward in a horizontal plane. An elastic element is required to press the sample cell against the piezoelectric ceramic, with the elastic extension direction perpendicular to the movement direction of the piezoelectric ceramic. When the piezoelectric ceramic moves the sample cell, the contact surface between the elastic element and the piezoelectric ceramic tends to follow the movement, making it difficult to keep the contact surface horizontal. This, in turn, makes it difficult to maintain a uniform clamping force on the piezoelectric ceramic, easily leading to problems such as detachment or jamming. Utility Model Content

[0004] The purpose of this invention is to provide a scanning head for a scanning probe microscope, wherein the axial deformation capacity of the leaf spring is much greater than its radial deformation capacity, which can meet the requirements of radial stable support and axial provision of specific elastic force, and avoid the problem of detachment or jamming from the piezoelectric ceramic.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A scanning head for a scanning probe microscope includes a mounting base, a tip groove movably disposed in the mounting base, a sample groove movably disposed in the mounting base in the horizontal plane along the front-back direction and the left-right direction, an upper piezoelectric ceramic assembly abutting between the upper end face of the sample groove and the mounting base, a lower piezoelectric ceramic assembly abutting against the lower end face of the sample groove, and an elastic component disposed on the mounting base and abutting against the lower end face of the lower piezoelectric ceramic assembly. The tip groove and the sample groove are arranged at intervals along the vertical direction.

[0007] The elastic component includes at least two sets of leaf springs arranged sequentially at intervals in the vertical direction, a first mounting hole opened on the leaf spring, and a first bolt connecting each set of leaf springs and the mounting base through the first mounting hole;

[0008] The leaf spring includes a disc-shaped body, multiple curved grooves formed on the body and spaced apart in pairs, and multiple rotating arms corresponding to each other between the curved grooves, wherein the width of the rotating arms is greater than its thickness.

[0009] Preferably, the multiple curved grooves have the same shape and are of equal size.

[0010] More preferably, the inner ends of the plurality of curved grooves equally divide the inner circumference, the outer ends of the plurality of curved grooves equally divide the outer circumference, and the spiral arms formed between each pair of the plurality of curved grooves have the same shape and are of equal size.

[0011] Preferably, the width of the rotating arm is 1-3 orders of magnitude larger than its thickness.

[0012] Preferably, one end of the curved groove is close to the center of the circle, and the other end of the curved groove is close to the circumference. The curved groove is arc-shaped and protrudes in the direction from the center of the circle to the circumference.

[0013] More preferably, the curved groove is a planar helix.

[0014] Preferably, there are multiple first mounting holes, which are arranged at intervals along the circumferential direction.

[0015] More preferably, a plurality of the first mounting holes are arranged around the outside of the plurality of curved grooves.

[0016] Preferably, the scanning head for the scanning probe microscope further includes a gasket abutting between the lower piezoelectric ceramic assembly and the elastic component, and the elastic component further includes a second mounting hole formed on the leaf spring and a second bolt connecting each set of leaf springs and the gasket through the second mounting hole.

[0017] More preferably, the second mounting hole is located at the center of the body and inside each of the curved grooves.

[0018] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art: The scanning head of this utility model for scanning probe microscope adopts at least two sets of leaf springs arranged sequentially and spaced apart in the vertical direction to form an elastic component, and the width of the rotating arm is greater than its thickness. Since the radial stiffness of the leaf spring is proportional to the cube of the width of the rotating arm and the axial stiffness of the leaf spring is proportional to the cube of the thickness of the rotating arm, this structure can make the axial deformation capacity of the leaf spring much greater than its radial deformation capacity, which can meet the requirements of radial stable support and axial provision of specific elastic force, and avoid the problem of detachment or jamming with piezoelectric ceramics. Attached Figure Description

[0019] Appendix Figure 1 This is a schematic diagram of the structure of a scanning head for a scanning probe microscope according to a specific embodiment of the present invention;

[0020] Appendix Figure 2 For the appendix Figure 1 A schematic diagram of the structure of a leaf spring.

[0021] The components are: 1. Mounting base; 2. Needle tip groove; 3. Sample groove; 4. Upper piezoelectric ceramic assembly; 5. Lower piezoelectric ceramic assembly; 6. Elastic component; 61. Leaf spring; 611. Body; 612. Curved groove; 613. Rotary arm; 62. First mounting hole; 63. First bolt; 64. Second mounting hole; 65. Second bolt. Detailed Implementation

[0022] The technical solution of this utility model will be further described below with reference to specific embodiments and accompanying drawings.

[0023] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0024] In the description of the embodiments of this utility model, it should be understood that the terms "length", "inner", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of this utility model.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0026] In this embodiment of the invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this embodiment of the invention according to the specific circumstances.

[0027] In this embodiment of the invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0028] The following disclosure provides many different implementations or examples for different structures of the embodiments of the present invention. To simplify the disclosure of the embodiments of the present invention, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the embodiments of the present invention. Furthermore, reference numerals and / or reference letters may be repeated in different examples of the embodiments of the present invention; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0029] See Figure 1 As shown, this embodiment provides a scanning head for a scanning probe microscope, including a mounting base 1 with a hollow inner cavity, a needle tip groove 2 that can be moved up and down in the mounting base 1, and a sample groove 3 that can be moved in the horizontal plane in the mounting base 1 in the front-back direction and the left-right direction respectively. The needle tip groove 2 and the sample groove 3 are arranged at intervals in the up-down direction. In this embodiment, the needle tip groove 2 is located above the sample groove 3.

[0030] The scanning head for the scanning probe microscope also includes an upper piezoelectric ceramic assembly 4 positioned between the upper end face of the sample reservoir 3 and the mounting base 1, a lower piezoelectric ceramic assembly 5 positioned against the lower end face of the sample reservoir 3, and an elastic component 6 mounted on the mounting base 1 and positioned against the lower end face of the lower piezoelectric ceramic assembly 5. The elastic component 6 is used to press the lower piezoelectric ceramic assembly 5, the sample reservoir 3, and the upper piezoelectric ceramic assembly 4 against the mounting base 1 in sequence. The upper piezoelectric ceramic assembly 4 moves horizontally in the left-right direction after being energized, simultaneously driving the sample reservoir 3 to move synchronously under the action of friction; the lower piezoelectric ceramic assembly 5 moves horizontally in the front-back direction after being energized, simultaneously driving the sample reservoir 3 to move synchronously under the action of friction.

[0031] The aforementioned elastic component 6 includes at least two sets of leaf springs 61 arranged sequentially at intervals in the vertical direction, a first mounting hole 62 opened on the leaf spring 61, and a first bolt 63 connecting each set of leaf springs 61 and the mounting base 1 through the first mounting hole 62.

[0032] See Figure 2As shown, the leaf spring 61 includes a disc-shaped body 611, multiple curved grooves 612 formed on the body 611 and spaced apart in pairs, and multiple rotating arms 613 corresponding to each other between the pairs of curved grooves 612. The width of the rotating arms 613 is greater than its thickness. In this embodiment, there are three curved grooves 612 and three rotating arms 613.

[0033] In this embodiment, the multiple curved grooves 612 are all the same shape and size. The inner ends of the multiple curved grooves 612 are located on the same inner circumference and equally divide the inner circumference, the outer ends of the multiple curved grooves 612 are located on the same outer circumference and equally divide the outer circumference, and the spiral arms 613 formed between each pair of multiple curved grooves 612 are all the same shape and size.

[0034] With this setup, the symmetrical rotating arm 613 structure ensures that the sample groove 3 being lifted is subjected to centered and uniform force, further preventing the piezoelectric ceramic from moving within its rated range, which could lead to excessive local lifting force and thus detachment or jamming.

[0035] In this embodiment, the width of the rotating arm 613 is 1-3 orders of magnitude larger than its thickness. Since the radial stiffness of the leaf spring 61 is proportional to the cube of the width of the rotating arm 613, and the axial stiffness of the leaf spring 61 is proportional to the cube of the thickness of the rotating arm 613, this structure allows the axial deformation capacity of the leaf spring 61 to be much greater than its radial deformation capacity. This satisfies the requirements for radial stable support and axial provision of specific elastic force, avoiding the problem of detachment or jamming from the piezoelectric ceramic.

[0036] See Figure 2 As shown, one end of the curved groove 612 is close to the center of the circle, and the other end is close to the circumference. The curved groove 612 protrudes in an arc shape along the direction from the center to the circumference. In this embodiment, the curved groove 612 is a planar spiral.

[0037] See Figure 2 As shown, there are multiple first mounting holes 62, which are arranged sequentially at intervals along the circumferential direction. In this embodiment, more preferably, the multiple first mounting holes 62 are arranged around the outside of multiple curved grooves 612.

[0038] See Figure 1-2 As shown, the scanning head for the scanning probe microscope also includes a gasket (not shown) abutting between the lower piezoelectric ceramic group 5 and the elastic component 6. The elastic component 6 also includes a second mounting hole 64 opened on the leaf spring 61 and a second bolt 65 connecting each group of leaf springs 61 and the gasket through the second mounting hole 64.

[0039] In this embodiment, the second mounting hole 64 is located at the center of the body 611 and inside each curved groove 612.

[0040] The inner circumference, outer circumference, second mounting hole 64, and the surrounding circumference of the center of the multiple first mounting holes 62 are arranged concentrically.

[0041] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A scanning head for a scanning probe microscope, characterized in that: The device includes a mounting base, a needle tip groove that can be moved up and down in the mounting base, a sample cell that can be moved in the horizontal plane along the front-back direction and the left-right direction respectively, an upper piezoelectric ceramic assembly that abuts against the upper end face of the sample cell and the mounting base, a lower piezoelectric ceramic assembly that abuts against the lower end face of the sample cell, and an elastic component that is disposed on the mounting base and abuts against the lower end face of the lower piezoelectric ceramic assembly. The needle tip groove and the sample cell are arranged at intervals along the vertical direction. The elastic component includes at least two sets of leaf springs arranged sequentially at intervals in the vertical direction, a first mounting hole opened on the leaf spring, and a first bolt connecting each set of leaf springs and the mounting base through the first mounting hole; The leaf spring includes a disc-shaped body, multiple curved grooves formed on the body and spaced apart in pairs, and multiple rotating arms corresponding to each other between the curved grooves, wherein the width of the rotating arms is greater than its thickness.

2. The scanning head for a scanning probe microscope according to claim 1, characterized in that: The multiple curved grooves are all identical in shape and equal in size.

3. The scanning head for a scanning probe microscope according to claim 2, characterized in that: The inner ends of the multiple curved grooves equally divide the inner circumference, the outer ends of the multiple curved grooves equally divide the outer circumference, and the spiral arms formed between each pair of the multiple curved grooves have the same shape and are of equal size.

4. The scanning head for a scanning probe microscope according to claim 1, characterized in that: The width of the spiral arm is 1-3 orders of magnitude larger than its thickness.

5. The scanning head for a scanning probe microscope according to claim 1, characterized in that: One end of the curved groove is close to the center of the circle, and the other end of the curved groove is close to the circumference. The curved groove protrudes in an arc shape along the direction from the center of the circle to the circumference.

6. The scanning head for a scanning probe microscope according to claim 5, characterized in that: The curved groove is a planar spiral.

7. The scanning head for a scanning probe microscope according to claim 1, characterized in that: There are multiple first mounting holes, which are arranged at intervals along the circumference.

8. The scanning head for a scanning probe microscope according to claim 7, characterized in that: Multiple first mounting holes are arranged on the outside of multiple curved grooves.

9. The scanning head for a scanning probe microscope according to claim 1, characterized in that: The scanning head for the scanning probe microscope also includes a gasket abutting between the lower piezoelectric ceramic assembly and the elastic component. The elastic component also includes a second mounting hole formed on the leaf spring and a second bolt connecting each set of leaf springs and the gasket through the second mounting hole.

10. The scanning head for a scanning probe microscope according to claim 9, characterized in that: The second mounting hole is located at the center of the body and inside each of the curved grooves.

Images