Adjustable holder for silicon carbide chip testing

Abstract

The utility model discloses a kind of adjustable support for silicon carbide chip testing, belong to silicon carbide chip testing field.The device includes: base, clamping piece, moving piece and turnover piece.Clamping piece is set above base, for clamping silicon carbide chip;Clamping piece is symmetrically provided with two groups about base;Clamping piece includes bottom plate;Fixedly set with riser on bottom plate;Riser is provided with through slot;Through slot is matched with base and is provided with pressing plate in;Base is equipped with down pressure piece;Down pressure piece lower end is equipped with pressing plate;Through slot can pass through base and pressing plate.The utility model passes through test, base and pressing plate are symmetrically forced from vertical direction, ensure that silicon carbide chip does not fall off due to inertia or external force in turnover, movement and other operations.When needing to detect silicon carbide chip single side surface, base can be quickly removed, so that silicon carbide chip side is completely exposed, improve operation flexibility, so that the adjustable support for silicon carbide chip testing can adapt to different process detection needs.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide chip testing, and in particular to an adjustable bracket for silicon carbide chip testing. Background Technology

[0002] Silicon carbide (SiC) chips are semiconductor chips based on silicon carbide materials and belong to the third generation of semiconductor devices. They possess excellent characteristics such as wide bandgap, fast drift speed, high breakdown voltage, high thermal conductivity, and high temperature resistance.

[0003] When testing silicon carbide (SiC) chips, it is sometimes necessary to flip the chip to test its performance on both sides and at different angles. When testing a single surface of the SiC chip (such as the back metal layer or edge circuitry), that side must be fully exposed. Previously, testing SiC chips involved either clamping them, which obscured the chip surface and prevented complete testing, or laying them flat, which prohibited flipping and posed a risk of falling. Existing support systems cannot simultaneously meet both the requirements of flipping the SiC chip and fully exposing a single surface.

[0004] Therefore, this utility model proposes an adjustable bracket for testing silicon carbide chips. Utility Model Content

[0005] This invention provides an adjustable support for testing silicon carbide chips, which can solve the problem that existing supports cannot simultaneously meet the two working conditions of flipping the silicon carbide chip and fully exposing one side of the silicon carbide chip.

[0006] An adjustable support for testing silicon carbide chips includes: The system comprises a base, clamping components, a moving component, and a flipping component. The clamping components are positioned above the base and are used to hold the silicon carbide chip. Two sets of clamping components are symmetrically arranged about the base. Each clamping component includes a base plate; a vertical plate is fixedly mounted on the base plate; a through slot is formed on the vertical plate; a substrate is fitted into the through slot; a pressing component is mounted on the substrate; a pressure plate is located at the lower end of the pressing component; the through slot allows the substrate and the pressure plate to pass through. The moving component is positioned on the base and is used to move the two sets of clamping components relative to each other. The flipping component is positioned between the moving component and the clamping components and is used to flip the clamping components.

[0007] Preferably, the pressing component includes a sleeve fixedly connected to the upper end of the substrate; a sliding rod is slidably connected inside the sleeve; a spring is connected between the sliding rod and the top end of the sleeve; the lower end of the sliding rod passes through the substrate and is fixedly connected to the pressure plate.

[0008] Preferably, a protruding plate is fixedly provided at one end of each of the two opposing upright plates; a second sliding groove is provided on the protruding plate; a second slider is fixedly provided on the side wall of the substrate; the second slider is slidably connected in the second sliding groove.

[0009] Preferably, the upright plate is curved.

[0010] Preferably, multiple suction cups are evenly provided at one end of the two opposing upright plates.

[0011] Preferably, anti-slip pads are provided at the upper end of the base plate and the lower end of the pressure plate.

[0012] Preferably, a connecting plate is fixedly provided on the side wall of the pressure plate.

[0013] Preferably, the base has a sliding groove; a bidirectional lead screw is rotatably connected to the inner wall of the sliding groove; a motor is also provided on the inner wall of the bidirectional lead screw; the drive end of the motor is connected to one end of the bidirectional lead screw; and two sliders are provided on the bidirectional lead screw.

[0014] Preferably, the two sliders are symmetrically arranged about the bidirectional lead screw.

[0015] Preferably, the flipping component includes two uprights fixedly connected to the upper ends of two sliders; a motor is provided on one upright; a drive wheel is connected to the drive end of the motor; a driven wheel is meshed with one side of the drive wheel; both the drive wheel and the driven wheel are rotatably connected to the side wall of the upright; the driven wheel is fixedly connected to the corresponding side base plate through a rotating shaft; the other upright is rotatably connected to the corresponding side base plate through a rotating shaft.

[0016] Compared with the prior art, the present invention has the following beneficial technical effects: This adjustable support for silicon carbide chip testing includes a base plate; a vertical plate is fixedly mounted on the base plate; a through slot is formed on the vertical plate; a substrate is fitted into the through slot; a pressing member is mounted on the substrate; a pressure plate is located at the lower end of the pressing member; and the through slot allows the substrate and pressure plate to pass through. During testing, the substrate and pressure plate apply symmetrical force from a vertical direction, forming a closed, fixed space to ensure that the silicon carbide chip will not fall off due to inertia or external force during flipping, moving, or other operations. When it is necessary to test only one side of the silicon carbide chip (such as the back metal layer or edge circuitry), the substrate can be quickly removed to fully expose that side of the silicon carbide chip, enabling unobstructed observation and improving operational flexibility. This adjustable support for silicon carbide chip testing can adapt to the testing requirements of different processes. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the adjustable support structure for testing silicon carbide chips according to this utility model; Figure 2 This is a schematic diagram of the front structure of the clamping component of this utility model; Figure 3 This is a schematic diagram of the back structure of the clamping component of this utility model; Figure 4 This is a schematic diagram of the disassembled structure of the clamping component of this utility model.

[0018] Explanation of reference numerals in the attached figures: 1. Base; 2. Moving part; 21. Slide groove one; 22. Bidirectional lead screw; 23. Motor one; 24. Slider one; 3. Flipping part; 31. Stand; 32. Motor two; 33. Drive wheel; 34. Driven wheel; 4. Clamping part; 41. Base plate; 42. Stand plate; 43. Through groove; 44. Anti-slip pad; 45. Suction cup; 46. Base plate; 47. Sleeve; 48. Slide rod; 49. Spring; 410. Pressure plate; 411. Connecting plate; 412. Protruding plate; 413. Slide groove two; 414. Slider two; 5. Silicon carbide chip. Detailed Implementation

[0019] The specific embodiments of this utility model are described in detail below, but it should be understood that the scope of protection of this utility model is not limited to the specific embodiments.

[0020] like Figure 1-4 As shown in the figure, an adjustable support for testing silicon carbide chips provided by this utility model embodiment includes a base 1, a clamping member 4, a moving member 2, and a flipping member 3. The clamping member 4 is disposed above the base 1 and is used to clamp the silicon carbide chip 5; two sets of clamping members 4 are symmetrically arranged about the base 1; the clamping member 4 includes a base plate 41; a vertical plate 42 is fixedly disposed on the base plate 41; a through groove 43 is formed on the vertical plate 42; a substrate 46 is fitted into the through groove 43; a pressing member is disposed on the substrate 46; a pressure plate 410 is disposed at the lower end of the pressing member; the through groove 43 allows the substrate 46 and the pressure plate 410 to pass through. The moving member 2 is disposed on the base 1 and is used to drive the two sets of clamping members 4 to move relative to each other. The flipping member 3 is disposed between the moving member 2 and the clamping member 4 and is used to drive the clamping member 4 to flip.

[0021] Further explanation: The pressing component includes a sleeve 47 fixedly connected to the upper end of the substrate 46; a sliding rod 48 is slidably connected inside the sleeve 47; a spring 49 is connected between the sliding rod 48 and the top end of the sleeve 47; the lower end of the sliding rod 48 passes through the substrate 46 and is fixedly connected to the pressure plate 410. By pushing the sliding rod 48 downward by the spring 49, the pressure plate 410 can be driven to press against the upper end of the silicon carbide chip 5, thereby limiting the position of the silicon carbide chip 5. A protruding plate 412 is fixedly provided at one opposite end of each of the two upright plates 42; a second sliding groove 413 is opened on the protruding plate 412; a second slider 414 is fixedly provided on the side wall of the substrate 46; the second slider 414 is slidably connected in the second sliding groove 413. During testing, the substrate 46 and the pressure plate 410 apply force symmetrically from the vertical direction to form a closed fixed space, ensuring that the silicon carbide chip 5 will not fall off due to inertia or external force during flipping, moving, and other operations. When it is necessary to inspect one side of the silicon carbide chip 5 (such as the back metal layer or edge circuit), the substrate 46 can be quickly removed to fully expose that side of the silicon carbide chip 5, enabling unobstructed observation, improving operational flexibility, and allowing the adjustable support for silicon carbide chip testing to adapt to the testing needs of different processes.

[0022] To further explain, the upright plate 42 is arc-shaped. This allows the upright plate 42 to better fit the side shape of the silicon carbide chip 5, thus making the clamping of the silicon carbide chip 5 more stable. Multiple suction cups 45 are evenly distributed on opposite ends of the upright plates 42, which can adhere to the sides of the silicon carbide chip 5, reducing the risk of the silicon carbide chip 5 falling when it is flipped. Anti-slip pads 44, made of silicone, are provided on the upper end of the base plate 41 and the lower end of the pressure plate 410. These anti-slip pads increase friction and prevent excessive local stress from causing breakage due to rigid clamping. A connecting plate 411 is fixedly provided on the side wall of the pressure plate 410, facilitating the upward lifting of the pressure plate 410.

[0023] Further explanation: A sliding groove 21 is provided on the base 1; a bidirectional lead screw 22 is rotatably connected to the inner wall of the sliding groove 21; a motor 23 is also provided on the inner wall of the bidirectional lead screw 22; the drive end of the motor 23 is connected to one end of the bidirectional lead screw 22; two sliders 24 are provided on the bidirectional lead screw 22; the two sliders 24 are symmetrically arranged about the bidirectional lead screw 22. This allows the two side flipping parts 3 and clamping parts 4 to move relative to each other, thereby accommodating silicon carbide chips 5 of different sizes.

[0024] Further explanation: The flipping component 3 includes two uprights 31 fixedly connected to the upper ends of the two sliders 24; a motor 32 is mounted on one upright 31; a drive wheel 33 is connected to the drive end of the motor 32; a driven wheel 34 is meshed with one side of the drive wheel 33; both the drive wheel 33 and the driven wheel 34 are rotatably connected to the side wall of the upright 31; the driven wheel 34 is fixedly connected to the corresponding side base plate 41 via a rotating shaft; the other upright 31 is rotatably connected to the corresponding side base plate 41 via a rotating shaft, which can drive the clamping component 4 and the silicon carbide chip 5 to flip. This allows for convenient testing of the performance of both sides and different angles of the silicon carbide chip 5 without repeated disassembly and assembly, adapting to multi-faceted testing needs and improving testing efficiency.

[0025] The working principle of this utility model is as follows: During testing, motor 23 is first started to drive the bidirectional lead screw 22 to rotate, thereby causing the sliders 24 on both sides and the clamping member 4 to move relative to each other to accommodate silicon carbide chips 5 of different sizes. Then, the silicon carbide chip 5 is placed on the base plates 41 on both sides, and the slide bar 48 is pushed downward by the spring 49, which can drive the pressure plate 410 to press against the upper end of the silicon carbide chip 5, thereby limiting the silicon carbide chip 5. When it is necessary to flip the silicon carbide chip 5, motor 32 is started to drive the drive wheel 33 to rotate, thereby driving the driven wheel 34 to rotate, which in turn can drive the clamping member 4 and the silicon carbide chip 5 to flip. The base plate 46 and the pressure plate 410 apply force symmetrically from the vertical direction to form a closed fixed space to ensure that the silicon carbide chip 5 will not fall off due to inertia or external force during flipping, moving and other operations. When it is necessary to inspect one side of the silicon carbide chip 5 (such as the back metal layer or edge circuit), hold the connecting plate 411 and lift it upwards, push the substrate 46 and the pressure plate 410 into the through groove 43, and let the slider 414 slide along the slide groove 413, so that the substrate 46 can be quickly removed, so that the side of the silicon carbide chip 5 is fully exposed, achieving unobstructed observation, improving operational flexibility, and making the adjustable bracket for silicon carbide chip testing adaptable to the testing needs of different processes.

[0026] The above-disclosed embodiments are only a few specific examples of the present utility model. However, the embodiments of the present utility model are not limited thereto. Any changes that can be conceived by those skilled in the art should fall within the protection scope of the present utility model.

Claims

1. An adjustable support for testing silicon carbide chips, characterized in that, include: Base (1); Clamping component (4); The clamping component (4) is set above the base (1) and is used to clamp the silicon carbide chip (5); Two sets of clamping components (4) are symmetrically arranged about the base (1); The clamping component (4) includes a base plate (41); A vertical plate (42) is fixedly provided on the base plate (41); A through groove (43) is opened on the vertical plate (42); A substrate (46) is fitted in the through groove (43); A pressing component is provided on the substrate (46); A pressure plate (410) is provided at the lower end of the pressing component; The through groove (43) allows the substrate (46) and the pressure plate (410) to pass through; Movable component (2); The movable component (2) is set on the base (1) and is used to drive the two sets of clamping components (4) to move relative to each other; Flipping component (3); The flipping component (3) is disposed between the moving component (2) and the clamping component (4) and is used to drive the clamping component (4) to flip.

2. The adjustable bracket for testing silicon carbide chips according to claim 1, characterized in that, The pressing component includes a sleeve (47) fixedly connected to the upper end of the substrate (46); a slide rod (48) is slidably connected inside the sleeve (47); a spring (49) is connected between the slide rod (48) and the top end of the sleeve (47); the lower end of the slide rod (48) passes through the substrate (46) and is fixedly connected to the pressure plate (410).

3. The adjustable bracket for testing silicon carbide chips according to claim 2, characterized in that, A protruding plate (412) is fixedly provided at one of the opposite ends of the two upright plates (42); a second sliding groove (413) is provided on the protruding plate (412); a second slider (414) is fixedly provided on the side wall of the base plate (46); the second slider (414) is slidably connected in the second sliding groove (413).

4. The adjustable bracket for testing silicon carbide chips according to claim 3, characterized in that, The upright plate (42) is arc-shaped.

5. The adjustable bracket for testing silicon carbide chips according to claim 4, characterized in that, Multiple suction cups (45) are evenly provided at opposite ends of the two side panels (42).

6. The adjustable bracket for testing silicon carbide chips according to claim 5, characterized in that, Anti-slip pads (44) are provided at the upper end of the base plate (41) and the lower end of the pressure plate (410).

7. An adjustable support for testing silicon carbide chips according to claim 6, characterized in that, A connecting plate (411) is fixedly provided on the side wall of the pressure plate (410).

8. The adjustable bracket for testing silicon carbide chips according to claim 1, characterized in that, The base (1) has a slide groove (21); the inner wall of the slide groove (21) is rotatably connected to a two-way lead screw (22); the inner wall of the two-way lead screw (22) is also provided with a motor (23); the driving end of the motor (23) is connected to one end of the two-way lead screw (22); the two-way lead screw (22) is provided with two sliders (24).

9. An adjustable support for testing silicon carbide chips according to claim 8, characterized in that, The two sliders (24) are symmetrically arranged about the bidirectional lead screw (22).

10. An adjustable support for testing silicon carbide chips according to claim 9, characterized in that, The flipping component (3) includes two uprights (31) fixedly connected to the upper ends of two sliders (24); one upright (31) is provided with a motor (32); the driving end of the motor (32) is connected to a drive wheel (33); a driven wheel (34) is meshed with one side of the drive wheel (33); the drive wheel (33) and the driven wheel (34) are rotatably connected to the side wall of the upright (31); the driven wheel (34) is fixedly connected to the corresponding side base plate (41) through a rotating shaft; the other upright (31) is rotatably connected to the corresponding side base plate (41) through a rotating shaft.

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