A multi-modal electrical response performance testing device and system

Abstract

The utility model discloses a kind of multi-modal electrical response performance testing device and system, at least including installation platform, double sample stage component, dynamometer component, microscope component and optical dark box;Double sample stage component, dynamometer component and microscope component are all set on installation platform, and installation platform, double sample stage component, dynamometer component and microscope component are contained in optical dark box as a whole;Installation platform includes first installation surface, second installation surface and third installation surface, and first installation surface, second installation surface and third installation surface are sequentially set from installation platform bottom surface upwards, double sample stage component is installed on first installation surface, and dynamometer component and microscope component are installed on third installation surface, and second installation surface height is adjustably set between first installation surface and third installation surface.This application has the effect of improving the difficulty of traditional single-function probe station to realize electrical response performance test under multiple external stimuli.

Description

Technical Field

[0001] This utility model belongs to the technical field of semiconductor electrical performance testing, especially in the field of electronic sensor device testing technology, and relates to a multimodal electrical response performance testing device and system, specifically a multifunctional probe station system for testing electrical, electromechanical, thermoelectric, photoelectric and other response functions. Background Technology

[0002] Probe stations are commonly used instruments in the field of semiconductor testing technology. Conventional probe stations, combined with high-precision electrical test sources, are used to test the electrical performance of electronic devices at room temperature. With the development of probe station technology, semi-automatic probe stations, automatic probe stations, high / low temperature probe stations, RF probe stations, vacuum probe stations, and other probe stations with specific functions have gradually been developed to meet special testing needs.

[0003] With the rapid development of flexible electronics, self-powered sensing, artificial intelligence, and the Internet of Things, various new functional materials and devices are emerging in an endless stream. The performance of these materials and devices often exhibits coupled response characteristics to multiple environmental stimuli (such as stress, temperature, and light). Along with the development of intelligent sensing electronic devices and wearable electronic devices, the requirements for device flexibility and functional integration are constantly increasing, placing higher demands on device performance testing technologies. For example, sensing devices used in "electronic skin" should typically possess both force and temperature response behaviors. Application scenarios often include various deformation or motion states such as stretching, compression, bending, rotation, and torsion. Device electrical performance testing includes the electrical response properties of the device under various forces and the response performance of the device at different temperatures. In electronic devices that simulate the sensory functions of living organisms, traditional devices typically simulate only one sensory function, while multimodal sensing devices, by integrating multiple physical mechanisms, simultaneously simulate the sensory functions of multiple senses, enabling a more natural and comprehensive realization of human-like sensory functions and achieving the recognition and processing of complex signals.

[0004] Therefore, traditional testing systems, which address the aforementioned issues, are typically single-function, primarily responding to a single stimulus. This "island-like" testing method suffers from inefficiency, poor data correlation, and difficulty in simulating real-world operating conditions. Furthermore, traditional sensing devices often employ multiple sensing functionalities to collect information separately, followed by computation by another device, resulting in significant information transmission delays, high power consumption, and complex device integration. Recent development trends have favored the development of integrated sensing, storage, and computing multimodal sensing devices, placing higher demands on testing systems. For multimodal sensing devices, it is necessary to develop an integrated testing system and method capable of meeting the requirements of electrical, electromechanical, thermoelectric, and optoelectronic multimodal response devices. Utility Model Content

[0005] To address the aforementioned issues, this invention provides a multimodal electrical response performance testing device, a probe station for testing the multimodal response performance of electrical, electromechanical, thermoelectric, and photoelectric functions, thereby resolving the need for a single-function probe station to achieve multiple stimulus response function tests.

[0006] To achieve the above objectives, this utility model provides the following technical solution: A multimodal electrical response performance testing device, the performance testing device comprising at least a mounting platform, a dual sample stage assembly, a force gauge assembly, a microscope assembly, and an optical dark box; The dual sample stage assembly, force gauge assembly, and microscope assembly are all mounted on the mounting platform, and the mounting platform, dual sample stage assembly, force gauge assembly, and microscope assembly are all housed within an optical dark box. The mounting platform includes a first mounting surface, a second mounting surface, and a third mounting surface, which are arranged sequentially from the bottom surface of the mounting platform upwards. The dual sample stage assembly is mounted on the first mounting surface, and the force gauge assembly and microscope assembly are mounted on the third mounting surface. The second mounting surface is adjustable in height between the first and third mounting surfaces.

[0007] In an alternative embodiment, the mounting platform further includes a parking control lever, a height adjustment knob, and a parking position; the height adjustment knob is disposed on the first mounting surface, the parking position is disposed on the side of the first mounting surface of the mounting platform, the parking control lever is fixed on the parking position, and the parking control lever adjusts the height of the second mounting surface through the parking position.

[0008] In an alternative embodiment, the dual-sample stage assembly includes dual-sample stage servo motors, a first moving track, a first sample stage assembly, and a second sample stage assembly; The dual sample stage servo motor and the first moving track are fixed on the first mounting surface of the mounting platform. The first sample stage assembly and the second sample stage assembly are movably mounted on the first moving track. The first sample stage assembly and the second sample stage assembly are located below the second mounting surface of the mounting platform. The dual sample stage servo motor is fixed to the first sample stage assembly and the second sample stage assembly and drives the first sample stage assembly and the second sample stage assembly to perform unidirectional, bidirectional, or reciprocating movements simultaneously or individually on the first moving track.

[0009] In an alternative embodiment, the first sample stage assembly includes a first connecting block, a first two-dimensional displacement stage, a first adapter plate, a first heating stage, and a first loading stage connected sequentially from bottom to top; the second sample stage assembly includes a second connecting block, a second two-dimensional displacement stage, a second adapter plate, a second heating stage, and a second loading stage connected sequentially from bottom to top. The first connecting block and the second connecting block are movably mounted on the first moving track, and the first two-dimensional displacement stage and the second two-dimensional displacement stage respectively operate the first loading stage and the second loading stage to make fine adjustments in the horizontal plane.

[0010] In an alternative embodiment, vacuum adsorption holes are distributed on the first stage and the second stage.

[0011] In an alternative embodiment, both the first stage and the second stage are provided with BNC cable interfaces.

[0012] In an alternative embodiment, both the first heating stage and the second heating stage are provided with a temperature control unit, which includes at least a heater and a temperature sensor.

[0013] In an alternative embodiment, the temperature sensors for the first and second heating stages are PT100, PT1000, or thermocouples.

[0014] In an alternative embodiment, the first sample stage assembly further includes a first fixing block, and the second sample stage assembly further includes a second fixing block, the first fixing block and the second fixing block being detachably fixed to the first stage and the second stage, respectively.

[0015] In an alternative embodiment, the force gauge assembly includes a support frame, a Y-axis slide rail and servo motor unit, a Z-axis slide rail and servo motor unit, an in-plane rotary servo motor, an out-of-plane rotary servo motor, a force gauge, and a second moving track; The Y-axis slide rail and servo motor unit, Z-axis slide rail and servo motor unit, in-plane rotary servo motor, out-of-plane rotary servo motor and force gauge are all integrated and mounted on the support frame. The support frame is movably fixed on the second moving track, and the second moving track is fixed on the third mounting surface of the mounting platform. The force gauge moves and / or rotates through the linkage control of the Y-axis slide rail and servo motor unit, the Z-axis slide rail and servo motor unit, the in-plane rotation servo motor and the out-of-plane rotation servo motor.

[0016] In an alternative embodiment, the microscope assembly includes a lifting cylinder, a two-dimensional displacement stage, a microscope, a camera, a Z-axis displacement controller, and a rotation axis. The microscope and camera are fixed to the lifting cylinder via the rotation axis, and the two-dimensional displacement stage is fixedly disposed at the lower end of the lifting cylinder to control the movement of the lifting cylinder.

[0017] In an alternative embodiment, the rotating shaft is rotatable by 45°.

[0018] In an alternative embodiment, the microscope assembly is movably fixed on a second moving track; wherein the force gauge assembly and the microscope assembly are fixedly mounted on an adapter plate, and the adapter plate is movably fixed on the second moving track.

[0019] In an alternative embodiment, the performance testing apparatus further includes a probe assembly comprising at least a probe holder, a probe arm, and a probe, the probe assembly being disposed on a second mounting surface of the mounting platform.

[0020] In an alternative embodiment, the performance testing apparatus may further include at least electrical performance testing equipment, a vibration damping platform, a vacuum pump, an air compressor, and a cabinet.

[0021] This utility model also provides a multimodal electrical response performance testing system, which employs the above-mentioned multimodal electrical response performance testing device and includes at least one or more units selected from the following modules: electrical transport performance testing module, pressure response performance testing module, flexible device electrical performance testing module, thermoelectric conversion performance testing module, and photoelectric response performance testing module.

[0022] The beneficial effects of this utility model are: This invention relates to a multimodal electrical response performance testing device and system, capable of performing one or multiple simultaneous tests, including electrical performance testing, electromechanical response performance testing, thermoelectric response performance testing, and photoelectric response performance testing, according to testing needs. It provides a probe station capable of performing multimodal response performance testing of electrical, electromechanical, thermoelectric, and photoelectric functions, thus addressing the challenge of single-function probe stations being unable to achieve multi-stimulus response testing. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the multimodal electrical response performance testing device in this embodiment of the present invention; Figure 2 This is a schematic diagram of the installation platform in an embodiment of the present utility model; Figure 3 This is a schematic diagram of the structure of the dual sample stage assembly in an embodiment of the present invention; Figure 4 This is a schematic diagram of the force gauge assembly in an embodiment of the present invention; Figure 5 This is a schematic diagram of the microscope assembly in an embodiment of the utility model.

[0024] Reference numerals: 1-Mounting platform; 2-Dual sample stage assembly; 3-Force gauge assembly; 4-Microscope assembly; 11-First mounting surface; 12-Second mounting surface; 13-Third mounting surface; 14-Manual parking control lever; 15-Joint knob; 16-Parking position; 21-Dual sample stage servo motor; 22-First moving track; 23-First sample stage assembly; 231-First connecting block; 232-First two-dimensional displacement stage; 233-First adapter plate; 234-First heating stage; 235-First stage; 236-First fixing block; 24-Second sample stage Components; 241-Second connecting block; 242-Second two-dimensional displacement stage; 243-Second adapter plate; 244-Second heating stage; 245-Second stage; 246-Second fixing block; 31-Support frame; 32-Y-axis slide rail and servo motor unit; 33-Z-axis slide rail and servo motor unit; 34-In-plane rotation servo motor; 35-Out-of-plane rotation servo motor; 36-Force gauge; 37-Second moving track; 41-Lifting cylinder; 42-Two-dimensional displacement stage; 43-Microscope; 44-Camera; 45-Z-axis displacement controller; 46-Rotation axis. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0026] Embodiments of this utility model, examples of which are shown in the accompanying drawings, are illustrated, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The terms "first," "second," "third," etc., in the specification, claims, and drawings of this utility model, are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the objects described in this way can be interchanged where appropriate. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. Directional terms mentioned in this utility model, such as: up, down, left, right, front, back, inside, outside, side, etc., are only for the purpose of referring to the drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model. Furthermore, the repetition of reference numerals and / or reference letters in different examples of this utility model is for simplification and clarity purposes and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, this utility model provides examples of various specific processes and materials, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0027] like Figure 1-5 As shown, a multimodal electrical response performance testing device includes at least a mounting platform 1, a dual sample stage assembly 2, a force gauge assembly 3, a microscope assembly 4, and an optical dark box (not shown). The performance testing device can be used for electrical performance testing, pressure-shear-torsional response performance testing, thermoelectric response performance and temperature sensing testing, and photoelectric response performance testing. It can perform single-function testing or multiple testing functions simultaneously.

[0028] Specifically, the dual sample stage assembly 2, the force gauge assembly 3, and the microscope assembly 4 are all mounted on the mounting platform 1, and the mounting platform 1, the dual sample stage assembly 2, the force gauge assembly 3, and the microscope assembly 4 are all housed in an optical dark box.

[0029] Among them, the dual sample stage assembly 2 can be individually temperature controlled, and can move unidirectionally, bidirectionally or reciprocally along the moving track simultaneously or individually, and the force gauge assembly 3 can be used in conjunction with the force gauge.

[0030] Preferably, the performance testing device of this utility model is a probe station, and also includes a probe assembly (not shown in the figure), which is also set on the mounting platform 1 and housed in an optical dark box.

[0031] Specifically, the mounting platform 1 includes a first mounting surface 11, a second mounting surface 12, and a third mounting surface 13. The first mounting surface 11, the second mounting surface 12, and the third mounting surface 13 are arranged sequentially upward from the bottom surface of the mounting platform 1. The dual sample stage assembly 2 is mounted on the first mounting surface 11, and the force gauge assembly 3 and the microscope assembly 4 are mounted on the third mounting surface 13. The second mounting surface 12 is height-adjustably positioned between the first mounting surface 11 and the third mounting surface 13.

[0032] The first mounting surface 11 is located at the bottom of the mounting platform 1, the third mounting surface 13 is located at the top of the mounting platform 1, and the second mounting surface 12 is located between the first mounting surface 11 and the third mounting surface 13. Furthermore, the first mounting surface 11, the second mounting surface 12, and the third mounting surface 13 have different planes, forming a stepped shape when viewed from the side; that is, the plane sizes of the first mounting surface 11, the second mounting surface 12, and the third mounting surface 13 decrease sequentially.

[0033] Optionally, the probe assembly includes at least a probe holder, a probe arm, and a probe, and the probe assembly is disposed on the second mounting surface 12 of the mounting platform 1.

[0034] Furthermore, to achieve height adjustment of the second mounting surface 12, the mounting platform 1 also includes a parking control lever 14, a height adjustment knob 15, and a parking position 16. The height adjustment knob 15 is located on the first mounting surface 11, the parking position 16 is located on the side of the first mounting surface 11 of the mounting platform 1, the parking control lever 14 is fixed on the parking position 16, and the parking control lever 14 adjusts the height of the second mounting surface 12 through the parking position 16.

[0035] Preferably, the height adjustment knob 15 is manually adjustable.

[0036] Specifically, the height adjustment knob 15 is connected to the second mounting surface 12 via a lead screw. By rotating the height adjustment knob 15, the second mounting surface 12 can be moved up and down.

[0037] In use, both the probe holder and the probe are placed on the second mounting surface 12.

[0038] First, raise the second mounting surface 12 to its highest position using the height adjustment knob 15. Then, according to the selected parking position 16, operate the parking control lever 14 to move the second mounting surface 12 downward by a fixed distance. Finally, lower the second mounting surface 12 to the target position using the height adjustment knob 15, thus achieving the connection between the probe and the sample to be tested.

[0039] The second mounting surface 12 and the probe holders and probes on the second mounting surface 12 can be raised and lowered by the parking control lever 14, so as to easily change the test site or replace the test sample of the same thickness.

[0040] Preferably, the parking position 16 has three positions to choose from. By operating the parking control lever 14, different positions can be selected to park the second mounting surface 12 at different heights.

[0041] The dual sample stage assembly 2 includes a dual sample stage servo motor 21, a first moving track 22, a first sample stage assembly 23, and a second sample stage assembly 24.

[0042] The dual sample stage servo motor 21 and the first moving track 22 are fixed on the first mounting surface 11 of the mounting platform 1. The first sample stage assembly 23 and the second sample stage assembly 24 are movably mounted on the first moving track 22, and the first sample stage assembly 23 and the second sample stage assembly 24 are located below the second mounting surface 12 of the mounting platform 1. The dual sample stage servo motor 21 is fixed to the first sample stage assembly 23 and the second sample stage assembly 24 and drives the first sample stage assembly 23 and the second sample stage assembly 24 to perform unidirectional, bidirectional or reciprocating movements simultaneously or individually on the first moving track 22.

[0043] The first sample stage assembly 23 and the second sample stage assembly 24 are the same components.

[0044] Specifically, the first sample stage assembly 23 includes a first connecting block 231, a first two-dimensional displacement stage 232, a first adapter plate 233, a first heating stage 234, and a first stage 235 connected in sequence from bottom to top, and the second sample stage assembly 24 includes a second connecting block 241, a second two-dimensional displacement stage 242, a second adapter plate 243, a second heating stage 244, and a second stage 245 connected in sequence from bottom to top.

[0045] The first connecting block 231 and the second connecting block 241 are movably mounted on the first moving track 22, and the first two-dimensional displacement stage 232 and the second two-dimensional displacement stage 242 respectively operate the first loading stage 235 and the second loading stage 245 to make fine adjustments in the horizontal plane.

[0046] Preferably, the first stage 235 and the second stage 245 are provided with vacuum adsorption holes, and the first stage 235 and the second stage 245 can vacuum adsorb and fix samples. In particular, they support vacuum adsorption of 2-inch, 4-inch and 6-inch samples.

[0047] Preferably, both the first stage 235 and the second stage 245 are provided with BNC cable interfaces, so the first stage 235 and the second stage 245 can be used as back electrodes.

[0048] Preferably, both the first heating stage 234 and the second heating stage 244 are provided with a temperature control unit, which includes at least a heater and a temperature sensor. The temperature sensor can accurately measure the temperature of the first sample stage assembly 23 and the second sample stage assembly 24.

[0049] Preferably, the temperature sensors of the first heating stage 234 and the second heating stage 244 are PT100, PT1000 or thermocouple type.

[0050] Furthermore, the first sample stage assembly 23 also includes a first fixing block 236, and the second sample stage assembly 24 also includes a second fixing block 246. The first fixing block 236 and the second fixing block 246 are respectively detachably fixed to the first stage 235 and the second stage 245. The first fixing block 236 and the second fixing block 246 can better fix the sample to the first stage 235 and the second stage 245.

[0051] Preferably, the first fixing block 236 and the second fixing block 246 are fixed to the first platform 235 and the second platform 245 by screws, respectively.

[0052] The force gauge assembly 3 includes a support frame 31, a Y-axis slide rail and servo motor unit 32, a Z-axis slide rail and servo motor unit 33, an in-plane rotation servo motor 34, an out-of-plane rotation servo motor 35, a force gauge 36, and a second moving track 37.

[0053] When the force gauge assembly 3 is working, as needed, the force gauge 36 is adjusted and moved to the target position in the following order: Y-axis slide rail and servo motor unit 32, Z-axis slide rail and servo motor unit 33, in-plane rotation servo motor 34, and out-of-plane rotation servo motor 35.

[0054] The Y-axis slide rail and servo motor unit 32, the Z-axis slide rail and servo motor unit 33, the in-plane rotary servo motor 34, the out-of-plane rotary servo motor 35, and the force gauge 36 are all integrated and mounted on the support frame 31. The support frame 31 is movably fixed on the second moving track 37, which is fixed on the third mounting surface 13 of the mounting platform 1. Thus, the force gauge assembly 3 can move as a whole along the second moving track 37.

[0055] Specifically, the direction of the second moving track 37 is defined as the X-axis direction. The Y-axis slide rail and servo motor unit 32 are mounted on the lower end of the support frame 31 and connected to the second moving track 37. The Y-axis slide rail and servo motor unit 32 are used to control the movement of the force gauge 36 in the Y direction.

[0056] The Z-axis slide rail and servo motor unit 33 are mounted on the circumferential surface of the support frame 31. The in-plane rotary servo motor 34 and the out-of-plane rotary servo motor 35 are connected to the Z-axis slide rail through the bracket. The Z-axis slide rail and servo motor unit 33 are used to control the movement of the force gauge 36 in the Z direction.

[0057] The in-plane rotary servo motor 34 and the out-of-plane rotary servo motor 35 control the force gauge 36 to rotate.

[0058] Thus, the force gauge 36 moves and / or rotates in relevant directions through the linkage control of the Y-axis slide rail and servo motor unit 32, the Z-axis slide rail and servo motor unit 33, the in-plane rotation servo motor 34, and the out-of-plane rotation servo motor 35.

[0059] Preferably, the servo motors in the force gauge 36 and the force gauge assembly 3 can be used in conjunction.

[0060] In one specific embodiment, the force is set to 1 N, and the downward movement distance is set to 1 cm. Driven by the Z-axis slide rail and the servo motor unit 33, the force gauge 36 slowly moves downward. The force measured by the force gauge 36 gradually increases from 0 to 1 N. When the force measured by the force gauge 36 is 1 N, the servo motor will stop operating even if the Z-axis movement distance has not reached 1 cm.

[0061] Preferably, the force gauge assembly 3 further includes an adapter plate, on which the force gauge assembly 3 is fixed and movably mounted on the second moving track 37 via the adapter plate. The Y-axis slide rail and the servo motor unit 32 are fixed on the adapter plate, and the adapter plate drives the force gauge assembly 3 to move along the second moving track 37.

[0062] The microscope assembly 4 includes a lifting cylinder 41, a two-dimensional displacement stage 42, a microscope 43, a camera 44, a Z-axis displacement controller 45, and a rotation axis 46. The microscope 43 and the camera 44 are fixed on the lifting cylinder 41 via the rotation axis 46. The two-dimensional displacement stage 42 is fixedly installed at the lower end of the lifting cylinder 41 to control the movement of the lifting cylinder 41.

[0063] The two-dimensional displacement stage 42, the Z-axis displacement controller 45, or the rotation axis 46 can all control the movement or rotation of the microscope 43 in the relevant directions.

[0064] Preferably, the rotating shaft 46 is rotatable by 45° so that the sample can be observed when using the force measuring assembly.

[0065] Furthermore, the microscope assembly 4 is movably fixed on the second moving track 37.

[0066] Specifically, the microscope assembly 4 is also fixed to the adapter plate, that is, the force gauge assembly 3 and the microscope assembly 4 are fixedly mounted on the same adapter plate, which is movably fixed on the second moving track 37. Therefore, the force gauge assembly 3 and the microscope assembly 4 can move simultaneously along the direction of the second moving track 37.

[0067] Furthermore, in order to meet the requirements of electrical, electromechanical, thermoelectric, and photoelectric testing, the performance testing device of this utility model may also include computer equipment, electrical performance testing equipment, shock absorption platform, vacuum pump, air compressor, cabinet, and control software, etc.

[0068] In addition, this utility model also discloses a multimodal electrical response performance testing system for electrical, electromechanical, thermoelectric, and photoelectric responses. The multimodal electrical response performance testing device includes one functional standalone testing module or multiple functional simultaneous testing modules, including an electrical transport performance testing module, a pressure response performance testing module, a flexible device electrical performance testing module, a thermoelectric conversion performance testing module, and a photoelectric response performance testing module.

[0069] To further demonstrate that the performance testing equipment of this utility model can be used for electrical, electromechanical, thermoelectric, and photoelectric testing, several embodiments are described below.

[0070] Example 1 Conventional electrical performance testing The prepared sample to be tested is placed on the first stage 235 and the sample is adsorbed and fixed through the vacuum adsorption hole. Optionally, double-sided tape can be used for fixation.

[0071] A probe assembly including a probe holder, a probe arm, and a probe is placed on the second mounting surface 12. The positions of the probe holder and the probe are adjusted, the probe is connected to the sample to be tested, and the electrical performance testing equipment is connected.

[0072] The contact between the probe tip and the electrode of the sample under test is observed using microscope 43 to ensure good contact between the two.

[0073] The electrical properties of the test sample can be tested, including conventional electrical properties such as resistance and field effect, depending on the device structure.

[0074] Example 2 Pressure sensor test The prepared sample to be tested is placed on the first stage 235, and the sample is adsorbed and fixed through the vacuum adsorption hole.

[0075] Place the probe holder, probe arm, and probe on the second mounting surface 12, adjust the position of the probe holder and probe, connect the probe to the sample to be tested, and connect the electrical performance testing equipment.

[0076] The first stage 235 is moved along the first moving track 22, and the position of the first stage 235 is finely adjusted by the first two-dimensional displacement stage 232. The position of the force gauge assembly 3 is moved along the second moving track 37, and the position of the force gauge 36 is adjusted by the Y-axis slide rail and the servo motor unit 32 so that the force gauge 36 is directly above the sample to be tested.

[0077] Rotate the rotation axis 46, adjust the Z-axis displacement controller 45, focus on the sample surface, and observe through the microscope 43 whether the force gauge 36 is completely above the sample.

[0078] Set the target pressure value on the force gauge 36 or the control software.

[0079] The descent speed of the force gauge 36 is set. Preferably, a segmented speed is set, that is, a larger descent speed can be set when the distance to the sample is relatively far, and a smaller speed can be set when the distance to the sample is relatively close.

[0080] Set the time for applying pressure.

[0081] Under the control of the software, the force gauge 36 is lowered in height and gradually approaches the sample surface by being driven by the Z-axis slide rail and the servo motor unit 33.

[0082] After reaching the sample surface, the pressure gradually increases.

[0083] Once the set value is reached, the force gauge 36 stops moving under the drive of the Z-axis slide rail and the servo motor unit 33.

[0084] The electrical properties of the sample in response to pressure were tested using electrical performance testing equipment.

[0085] After the set pressure application time is reached, the force gauge 36 is raised in height under the drive of the Z-axis slide rail and the servo motor unit 33.

[0086] By analyzing the electrical properties of the sample's response to pressure, the pressure sensing results of the sample can be obtained.

[0087] Example 3 Shear force sensing test The prepared sample to be tested is placed on the first stage 235, and the sample is adsorbed and fixed through the vacuum adsorption hole.

[0088] Place the probe holder, probe arm, and probe on the second mounting surface 12, adjust the position of the probe holder and probe, connect the probe to the sample to be tested, and connect the electrical performance testing equipment.

[0089] The first stage 235 is moved along the first moving track 22, and the position of the first stage 235 is finely adjusted by the first two-dimensional displacement stage 232. The position of the force gauge assembly 3 is moved along the second moving track 37, and the position of the force gauge 36 is adjusted by the Y-axis slide rail and the servo motor 32 so that the force gauge 36 is directly above the sample.

[0090] Rotate the rotating shaft 46, adjust the Z-axis displacement controller 45, focus on the sample surface, and observe through the microscope 43 whether the force gauge 36 is completely above the sample and whether the sample surface is in complete contact with the pressure head.

[0091] Set the target pressure value on the force gauge 36 or the control software, and apply a specific pressure to the sample. Test the electrical properties of the sample using electrical performance testing equipment.

[0092] The servo motor 35, positioned outside the control surface, positions the force gauge 36 at a point relative to the sample contact surface. Slight movement of the force gauge 36 or the sample generates a shear force on the sample surface. The electrical properties of the sample at this point are then tested using electrical performance testing equipment.

[0093] By comparing and analyzing the results of the two electrical performance tests, the sensing response of the sample under shear force can be obtained.

[0094] Example 4 Torsional force sensing test The prepared sample to be tested is placed on the first stage 235, and the sample is adsorbed and fixed through the vacuum adsorption hole.

[0095] Place the probe holder, probe arm, and probe on the second mounting surface 12, adjust the position of the probe holder and probe, connect the probe to the sample to be tested, and connect the electrical performance testing equipment.

[0096] The first stage 235 is moved along the first moving track 22, and the position of the first stage 235 is finely adjusted by the first two-dimensional displacement stage 232. The position of the force gauge assembly 3 is moved along the second moving track 37, and the position of the force gauge 36 is adjusted by the Y-axis slide rail and the servo motor 32 so that the force gauge 36 is directly above the sample.

[0097] Rotate the rotating shaft 46, adjust the Z-axis displacement controller 45, focus on the sample surface, and observe through the microscope 43 whether the force gauge 36 is completely above the sample and whether the sample surface is in complete contact with the pressure head.

[0098] Set the target pressure value on the force gauge 36 or the control software, and apply a specific pressure to the sample. Test the electrical properties of the sample using electrical performance testing equipment.

[0099] The servo motor 34 in the control plane causes the force gauge 36 to rotate at a certain position relative to the sample contact surface, generating a torsional force on the sample surface. The electrical properties of the sample at this time are then tested using electrical performance testing equipment.

[0100] By comparing and analyzing the results of the two electrical performance tests, the response of the sample under torsional force can be obtained.

[0101] Example 5 Seebeck voltage and Seebeck coefficient test Based on the sample size, the first sample stage assembly 23 and the second sample stage assembly 24 are driven to move towards each other along the first moving track 22 by the dual sample stage servo motor 21, so that the first stage 235 and the second stage 245 reach a suitable distance.

[0102] To ensure good heat transfer and temperature accuracy, thermal grease is applied to the right side of the first stage 235 and the left side of the second stage 245.

[0103] The prepared sample to be tested is placed on the first stage 235 and the second stage 245, and the position of the sample is adjusted.

[0104] Place the probe holder, probe arm, and probe on the second mounting surface 12, adjust the position of the probe holder and probe, move the probe to the right side of the first stage 235 and the left side of the second stage 245 to connect with the sample to be tested, and connect to the electrical performance testing equipment.

[0105] The software controls the first heating stage 234 and the second heating stage 244 to heat to different temperatures and maintain a stable temperature difference for a period of time.

[0106] The Seebeck voltage is the potential difference measured by electrical performance testing equipment in response to a temperature difference. By analyzing the potential difference in response to a temperature difference, the Seebeck coefficient of the sample can be obtained.

[0107] Example 6 Conductivity test at different temperatures This embodiment tests the sample conductivity using the "four-electrode" method. That is, four parallel electrodes have been prepared on the sample.

[0108] The prepared device to be tested is placed on the first stage 235, and the sample is adsorbed and fixed through the vacuum adsorption hole.

[0109] Four sets of probe holders, probe arms, and probes are placed on the second mounting surface 12. The positions of the probe holders and probes are adjusted, and the probes are connected to the four parallel electrodes on the sample to be tested, and then connected to the electrical performance testing equipment.

[0110] The first heating stage 234 is controlled by software, and different target temperatures are set. After the target temperature is reached, it is maintained for a period of time to achieve stability.

[0111] According to the test requirements, current is applied to the two outermost electrodes of the sample, and the potential difference between the two middle electrodes is measured.

[0112] By analyzing the potential difference and current data of the sample at different target temperatures, the conductivity of the sample at different target temperatures can be obtained.

[0113] By changing the device structure to a transistor device structure, the field-effect electrical performance under different temperature responses can be tested.

[0114] Example 7 Conductivity test of sample under tension This embodiment tests the sample conductivity using the "four-electrode" method. That is, four parallel electrodes have been prepared on the sample.

[0115] Based on the sample size, the first sample stage assembly 23 and the second sample stage assembly 24 are driven to move towards each other along the first moving track 22 by the dual sample stage servo motor 21, so that the first stage 235 and the second stage 245 reach a suitable distance.

[0116] The prepared device under test is placed on the first stage 235 and the second stage 245, and the position of the sample is adjusted so that the four parallel electrodes are located between the first stage 235 and the second stage 245.

[0117] The first fixing block 236 and the second fixing block 246 are used to press down the two ends of the sample and fix it to the first stage 235 and the second stage 245 with screws to ensure that the position of the sample remains unchanged during the stretching process.

[0118] Four sets of probe holders, probe arms, and probes are placed on the second mounting surface 12. The positions of the probe holders and probes are adjusted, and the probes are connected to the four parallel electrodes on the sample to be tested, and then connected to the electrical performance testing equipment.

[0119] The software controls the dual sample stage servo motor 21 to drive the first sample stage assembly 23 and the second sample stage assembly 24 to move in opposite directions along the first moving track 22 to achieve the target stretching degree.

[0120] According to the test requirements, current is applied to the two outermost electrodes of the sample, and the potential difference between the two middle electrodes is measured.

[0121] By analyzing the potential difference and current data of the sample under different degrees of stretching, the conductivity of the sample under different degrees of stretching can be obtained.

[0122] By changing the device structure to a field-effect transistor device structure, the field-effect electrical properties of the sample at different drawing depths can be tested.

[0123] Example 8 Photoelectric response performance test The prepared sample is placed on the first stage 235 and fixed by adsorption through the vacuum adsorption holes. Alternatively, double-sided adhesive tape can be used for fixation.

[0124] Place the probe holder, probe arm, and probe on the second mounting surface 12, adjust the position of the probe holder and probe, connect the probe to the sample to be tested, and connect the electrical performance testing equipment.

[0125] The contact between the probe tip and the electrode of the sample under test is observed using microscope 43 to ensure good contact between the two.

[0126] The optical dark chamber was closed to ensure the sample was in a dark environment, and the sample's electrical properties were tested as dark-state electrical properties.

[0127] When the sample is in a dark environment, light of a specific wavelength range and intensity is applied to the sample surface, and the electrical properties of the sample are tested as electrical properties under light irradiation.

[0128] The electrical performance test results under the above two conditions are compared and analyzed to obtain the photoelectric response performance test results of the device.

[0129] Example 9 By combining Example 2 and Example 6, the electrical properties of the sample under dual stimulation of temperature and pressure can be obtained, and devices with both temperature and pressure sensing capabilities can be tested.

[0130] Example 10 By combining Examples 7 and 8, the photoelectric response of the sample under tensile deformation can be obtained, which can be used to test a device that simulates human stretching tactile sensation and optical vision.

[0131] Example 11 The combination of Examples 2, 5, 6, and 8 can be used to test pressure-temperature-optical integrated response devices, which can be used for research on visual-tactile integrated devices.

[0132] Example 12 The combination of Examples 5 and 7 can be used to test the Seebeck voltage or Seebeck coefficient of the device under different degrees of stretching, which can be used for the research of temperature sensor devices under different stretching conditions, such as temperature sensing devices for flexible electronic skin.

[0133] Example 13 By combining Examples 3 and 6, the electrical properties of the sample under dual stimulation of temperature and shear force can be obtained, and devices with both temperature sensing and shear force sensing, such as temperature sensing devices for flexible electronic skin, can be tested.

[0134] Example 14 By combining Examples 4 and 6, the electrical properties of the sample under dual stimulation of temperature and torsional force can be obtained. This allows for the testing of devices that simultaneously possess temperature sensing and torsional force sensing capabilities, such as temperature sensing devices for flexible electronic skin.

[0135] Example 15 By combining Example 5 or Example 6 with Example 8, the Seebeck voltage or Seebeck coefficient of the sample under illumination can be obtained, which can be used to test the energy conversion or sensing functional device that integrates photothermal and electrical functions.

[0136] Example 16 By combining Examples 5, 7, and 8, we can obtain the Seebeck voltage or Seebeck coefficient of a sample that is simultaneously in a tensile deformation state and under illumination, which can be used for the research of photo-thermal-electric integrated functional devices under tension.

[0137] This invention provides a multimodal electrical response performance testing device that can be used for electrical, electromechanical, thermoelectric, and photoelectric testing. It is a multifunctional probe station testing system capable of performing one or more simultaneous tests, including electrical performance testing, electromechanical response performance testing, thermoelectric response performance testing, and photoelectric response performance testing, depending on the testing requirements. Specifically, electromechanical response performance testing includes testing the electrical response of electronic devices under mechanical forces such as pressure, torsional force, shear force, or tensile force. It overcomes the limitations of traditional single-function probe stations in achieving electrical response performance testing under various external stimuli.

[0138] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

Claims

1. A multimodal electrical response performance testing device, characterized in that, The performance testing device includes at least a mounting platform (1), a dual sample stage assembly (2), a force gauge assembly (3), a microscope assembly (4), and an optical dark box; The dual sample stage assembly (2), the force gauge assembly (3), and the microscope assembly (4) are all mounted on the mounting platform (1), and the mounting platform (1), the dual sample stage assembly (2), the force gauge assembly (3), and the microscope assembly (4) are all housed in an optical dark box. The mounting platform (1) includes a first mounting surface (11), a second mounting surface (12), and a third mounting surface (13). The first mounting surface (11), the second mounting surface (12), and the third mounting surface (13) are arranged sequentially upward from the bottom surface of the mounting platform (1). The dual sample stage assembly (2) is mounted on the first mounting surface (11), and the force gauge assembly (3) and the microscope assembly (4) are mounted on the third mounting surface (13). The second mounting surface (12) is adjustable in height between the first mounting surface (11) and the third mounting surface (13).

2. The multimodal electrical response performance testing device according to claim 1, characterized in that, The installation platform (1) also includes a parking control lever (14), a height adjustment knob (15), and a parking position (16); the height adjustment knob (15) is located on the first mounting surface (11), the parking position (16) is located on the side of the first mounting surface (11) of the installation platform (1), the parking control lever (14) is fixed on the parking position (16), and the parking control lever (14) adjusts the height of the second mounting surface (12) through the parking position (16).

3. The multimodal electrical response performance testing device according to claim 1, characterized in that, The dual sample stage assembly (2) includes a dual sample stage servo motor (21), a first moving track (22), a first sample stage assembly (23), and a second sample stage assembly (24). The dual sample stage servo motor (21) and the first moving track (22) are fixed on the first mounting surface (11) of the mounting platform (1). The first sample stage assembly (23) and the second sample stage assembly (24) are movably mounted on the first moving track (22). The first sample stage assembly (23) and the second sample stage assembly (24) are located below the second mounting surface (12) of the mounting platform (1). The dual sample stage servo motor (21) is fixed with the first sample stage assembly (23) and the second sample stage assembly (24) and drives the first sample stage assembly (23) and the second sample stage assembly (24) to perform unidirectional, bidirectional or reciprocating motion simultaneously or individually on the first moving track (22).

4. The multimodal electrical response performance testing device according to claim 3, characterized in that, The first sample stage assembly (23) includes a first connecting block (231), a first two-dimensional displacement stage (232), a first adapter plate (233), a first heating stage (234), and a first stage (235) connected from bottom to top. The second sample stage assembly (24) includes a second connecting block (241), a second two-dimensional displacement stage (242), a second adapter plate (243), a second heating stage (244), and a second stage (245) connected from bottom to top. The first connecting block (231) and the second connecting block (241) are movably mounted on the first moving track (22), and the first two-dimensional displacement stage (232) and the second two-dimensional displacement stage (242) respectively operate the first loading stage (235) and the second loading stage (245) to make fine adjustments in the horizontal plane.

5. The multimodal electrical response performance testing device according to claim 4, characterized in that, Vacuum adsorption holes are distributed on the first stage (235) and the second stage (245); Both the first stage (235) and the second stage (245) are equipped with BNC cable interfaces; The first heating platform (234) and the second heating platform (244) are both equipped with a temperature control unit, which includes at least a heater and a temperature sensor.

6. The multimodal electrical response performance testing device according to claim 4, characterized in that, The first sample stage assembly (23) further includes a first fixing block (236), and the second sample stage assembly (24) further includes a second fixing block (246). The first fixing block (236) and the second fixing block (246) are respectively detachably fixed on the first stage (235) and the second stage (245).

7. The multimodal electrical response performance testing device according to claim 1, characterized in that, The force gauge assembly (3) includes a support frame (31), a Y-axis slide rail and servo motor unit (32), a Z-axis slide rail and servo motor unit (33), an in-plane rotation servo motor (34), an out-of-plane rotation servo motor (35), a force gauge (36), and a second moving track (37). The Y-axis slide rail and servo motor unit (32), Z-axis slide rail and servo motor unit (33), in-plane rotary servo motor (34), out-of-plane rotary servo motor (35) and force gauge (36) are all integrated and installed on the support frame (31). The support frame (31) is movably fixed on the second moving track (37), and the second moving track (37) is fixed on the third mounting surface (13) of the mounting platform (1). The force gauge (36) moves and / or rotates through the linkage control of the Y-axis slide rail and servo motor unit (32), the Z-axis slide rail and servo motor unit (33), the in-plane rotation servo motor (34), and the out-of-plane rotation servo motor (35).

8. The multimodal electrical response performance testing device according to claim 1, characterized in that, The microscope assembly (4) includes a lifting cylinder (41), a two-dimensional displacement stage (42), a microscope (43), a camera (44), a Z-axis displacement controller (45), and a rotation axis (46). The microscope (43) and the camera (44) are fixed on the lifting cylinder (41) via the rotation axis (46). The two-dimensional displacement stage (42) is fixedly installed at the lower end of the lifting cylinder (41) to control the movement of the lifting cylinder (41).

9. The multimodal electrical response performance testing device according to claim 7, characterized in that, The microscope assembly (4) is movably fixed on the second moving track (37); The force gauge assembly (3) and the microscope assembly (4) are fixedly mounted on the adapter plate, and the adapter plate is movably fixed on the second moving track (37). The performance testing device also includes a probe assembly, which includes at least a probe holder, a probe arm and a probe, and the probe assembly is disposed on the second mounting surface (12) of the mounting platform (1); The performance testing device also includes at least electrical performance testing equipment, a shock absorption platform, a vacuum pump, an air compressor, and a cabinet.

10. A multimodal electrical response performance testing system, characterized in that, The multimodal electrical response performance testing device according to any one of claims 1-9 includes at least one or more units selected from the following modules: electrical transport performance testing module, pressure response performance testing module, flexible device electrical performance testing module, thermoelectric conversion performance testing module, and photoelectric response performance testing module.

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