Target angle automatic compensation MEMS galvanometer reflection laser suppression mechanism

Abstract

The utility model discloses a target angle automatic compensation's MEMS mirror reflection laser suppression mechanism belongs to MEMS mirror technical field, including tray, the tray is fixed with the main control board of whole machine control, rudder machine and counterweight, rudder machine output is fixed with MEMS mirror, the upper MEMS mirror is equipped with the optical fiber laser light source through the support, the optical fiber laser light source is opposite the reflection surface center of MEMS mirror, the main control board includes the power conversion module of the power supply of giving whole main control board, PWM pulse generating module, MEMS mirror angle counting module, external trigger latch module and mirror power switch, the input port of MEMS mirror angle counting module is connected with MEMS mirror output, and the output port of MEMS mirror angle counting module is connected with the input port of external trigger latch module, the utility model discloses a target angle automatic compensation's MEMS mirror reflection laser suppression mechanism can to target angle automatic compensation, forms the sustained suppression to target.

Description

Technical Field

[0001] This utility model specifically relates to a MEMS galvanometer reflection laser suppression mechanism with automatic target angle compensation, belonging to the field of MEMS galvanometer technology. Background Technology

[0002] MEMS galvanometers are devices manufactured using MEMS technology. Under the action of a driver, the mirror surface twists according to a certain pattern. The specific principle is that the mirror twists or deforms under the force of a tiny driving structure, and the propagation direction of the beam is changed by twisting the MEMS galvanometer at a certain angle. MEMS galvanometers are a common means of achieving rapid scanning of laser beams and are widely used in lidar. Existing MEMS galvanometer driving control methods, such as the electromagnetically driven MEMS galvanometer and its control method, controller and medium disclosed in Chinese Patent Publication No.: CN118732256A, can achieve temperature compensation for the piezoresistive sensor corresponding to the torsion beam without the need for an additional temperature sensor, thus improving the torsion angle control accuracy of the electromagnetically driven MEMS galvanometer. However, existing MEMS galvanometers generally use the piezoelectric ceramic resonance principle. After being powered on and oscillating, they cannot stop at any angle within the vibration range. When the target detection device detects the target, it cannot make the beam continuously emit at a fixed angle to the target, thus making it impossible to continuously suppress the target with laser. Utility Model Content

[0003] To address the aforementioned issues, this invention proposes a MEMS galvanometer-reflected laser suppression mechanism with automatic target angle compensation, which can automatically compensate for the target angle to achieve continuous suppression of the target.

[0004] The present invention relates to a MEMS galvanometer reflection laser suppression mechanism with automatic target angle compensation, comprising a target detection device and an automatic compensation unit. The target detection device is an existing laser spot detection unit used for target spot detection. After the target detection device captures the target spot, it sends a compensation signal to the automatic compensation unit according to the detection result. The automatic compensation unit receives the compensation signal and performs compensation actions according to the high level, low level, rising edge, and falling edge states of the compensation signal.

[0005] The automatic compensation unit shown includes a tray on which a main control board, a servo motor, and a counterweight are fixed. A MEMS galvanometer is fixed to the output end of the servo motor, and a fiber laser source is mounted above the MEMS galvanometer via a bracket. The fiber laser source is directly facing the center of the reflective surface of the MEMS galvanometer. The main control board includes a power conversion module for powering the entire main control board, a PWM pulse generation module, a MEMS galvanometer angle counting module, an external trigger latch module, and a galvanometer power switch. The input port of the MEMS galvanometer angle counting module is connected to the output port of the MEMS galvanometer, and the output port of the MEMS galvanometer angle counting module is connected to the input port of the external trigger latch module. The input port of the external trigger latch module is connected to the input port of the PWM pulse generator module; The output port of the PWM pulse generator module is connected to the control terminal of the servo motor. The galvanometer power switch is connected to the MEMS galvanometer power supply terminal; The galvanometer power switch control terminal, the external trigger latch module trigger terminal, and the PWM pulse generator module trigger terminal are connected to the external trigger signal output terminal of the target detection device.

[0006] First, a fiber laser source continuously emits laser light. When the external trigger signal is low, the laser light is reflected by the MEMS mirror to form a scanning laser. When the external trigger signal rises to a high level, the angle count output by the MEMS mirror angle counting module is latched. When the external trigger signal rises to a high level, the MEMS mirror loses power and stops vibrating, and its deflection angle returns to 0°. At this time, the PWM pulse generation module starts to output PWM pulses, driving the servo motor to rotate to the latched angle, forming a compensation angle. At this time, the MEMS mirror stops vibrating, and the reflected laser forms a continuous suppression of the target.

[0007] Furthermore, the PWM pulse generation module, MEMS galvanometer angle counting module, and external trigger latch module are constructed using FPGA hardware description or directly integrated from hardware modules. Since the power conversion module, PWM pulse generation module, MEMS galvanometer angle counting module, external trigger latch module, and galvanometer power switch are all existing mature modules that can be directly purchased and integrated, the specific structure and working principle of each hardware module will not be described in detail. Additionally, the PWM pulse generation module, MEMS galvanometer angle counting module, and external trigger latch module can also be directly constructed using FPGA hardware description. Since the hardware structure (input ports, output ports, and logical relationships) of each of these modules are existing technologies, and their definition process is widely used in existing FPGA hardware descriptions, the individual modules of the main control board mentioned above are all existing technologies. This invention integrates these modules based on the requirements of the automatic target angle compensation function.

[0008] Furthermore, the target detection device is composed of a single-chip microcomputer minimum system or an ARM minimum system.

[0009] Furthermore, when the target detection device outputs a high-level external trigger signal, the galvanometer power switch is powered off, and the PWM pulse generation module outputs a PWM pulse signal; when the target detection device outputs a low-level external trigger signal, the galvanometer power switch is powered on, and the PWM pulse generation module stops outputting the PWM pulse signal; when the target detection device outputs a rising edge, the external trigger latch module latches the signal; when the target detection device outputs a falling edge, the external trigger latch module stops latching the signal.

[0010] Compared with the prior art, the MEMS galvanometer reflection laser suppression mechanism with automatic target angle compensation of this utility model first stops the MEMS galvanometer when the target angle is automatically compensated, and its deflection angle will be restored to 0°. Then, the original target angle is rotated back through the compensation mechanism, so that the laser beam is continuously aligned with the target, forming a continuous suppression of the target. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the overall structure of the MEMS galvanometer reflection laser suppression mechanism with automatic target angle compensation according to this utility model.

[0012] Figure 2 This is a schematic diagram of the principle block structure of the MEMS galvanometer reflection laser suppression mechanism with automatic target angle compensation according to this utility model.

[0013] Reference numerals: 1. Tray, 2. Main control board, 3. Servo motor, 4. Counterweight, 5. MEMS galvanometer, 6. Fiber laser source. Detailed Implementation

[0014] Example 1: like Figure 1 and Figure 2 The MEMS galvanometer reflection laser suppression mechanism with automatic target angle compensation shown includes a target detection device and an automatic compensation unit. The target detection device is an existing laser spot detection unit used for target spot detection. After the target detection device captures the target spot, it sends a compensation signal to the automatic compensation unit according to the detection result. The automatic compensation unit receives the compensation signal and performs compensation actions according to the high level, low level, rising edge and falling edge states of the compensation signal.

[0015] The automatic compensation unit shown includes a tray 1, which supports the various components. The tray 1 is fixed with a main control board 2, a servo motor 3, and a counterweight 4. The counterweight 4 balances the weight of the servo motor 3. A MEMS galvanometer 5 is fixed to the output end of the servo motor 3. A fiber laser source 6 is mounted above the MEMS galvanometer 5 via a bracket. The fiber laser source 6 faces the center of the reflective surface of the MEMS galvanometer 5. The main control board 2 includes a power conversion module for powering the entire main control board 2, a PWM pulse generation module, a MEMS galvanometer 5 angle counting module, an external trigger latch module, and a galvanometer power switch. The input port of the angle counting module of the MEMS galvanometer 5 is connected to the output port of the MEMS galvanometer 5, and the output port of the angle counting module of the MEMS galvanometer 5 is connected to the input port of the external trigger latch module. The input port of the external trigger latch module is connected to the input port of the PWM pulse generator module; The output port of the PWM pulse generator module is connected to the control terminal of the servo motor 3; The power switch of the galvanometer is connected to the power supply terminal of the MEMS galvanometer 5; The galvanometer power switch control terminal, the external trigger latch module trigger terminal, and the PWM pulse generator module trigger terminal are connected to the external trigger signal output terminal of the target detection device.

[0016] During operation, a fiber laser source continuously emits laser light. When the external trigger signal is low, the laser light is reflected by the MEMS mirror 5 to form a scanning laser. When the external trigger signal rises to a high level, the angle count output by the angle counting module of the MEMS mirror 5 is latched. When the external trigger signal rises to a high level, the MEMS mirror 5 loses power and stops vibrating, and its deflection angle returns to 0°. At this time, the PWM pulse generation module starts to output PWM pulses, driving the servo motor 3 to rotate to the latched angle, forming a compensation angle. At this time, the MEMS mirror 5 stops vibrating, and the reflected laser forms a continuous suppression of the target.

[0017] The PWM pulse generation module, MEMS galvanometer 5-angle counting module, and external trigger latch module are constructed using FPGA hardware description or directly integrated from hardware modules. Since the power conversion module, PWM pulse generation module, MEMS galvanometer 5-angle counting module, external trigger latch module, and galvanometer power switch are all existing mature modules that can be directly purchased and integrated, the specific structure and working principle of each hardware module will not be described in detail. Furthermore, the PWM pulse generation module, MEMS galvanometer 5-angle counting module, and external trigger latch module can also be directly constructed using FPGA hardware description. Since the hardware structure (input ports, output ports, and logical relationships) of each of these modules are existing technologies, and their definition process is widely used in existing FPGA hardware descriptions, the individual modules of the main control board 2 mentioned above are all existing technologies. This invention integrates these modules based on the requirements of the automatic target angle compensation function.

[0018] The target detection device is composed of a single-chip microcomputer minimum system or an ARM minimum system.

[0019] When the target detection device outputs a high-level external trigger signal, the galvanometer power switch is powered off, and the PWM pulse generation module outputs a PWM pulse signal; when the target detection device outputs a low-level external trigger signal, the galvanometer power switch is powered on, and the PWM pulse generation module stops outputting the PWM pulse signal; when the target detection device outputs a rising edge, the external trigger latch module latches the signal; when the target detection device outputs a falling edge, the external trigger latch module stops latching the signal.

[0020] The above embodiments are merely preferred embodiments of the present utility model. Therefore, all equivalent changes or modifications made to the structure, features and principles described in the claims of the present utility model are included within the scope of the present utility model.

Claims

1. A MEMS galvanometer-reflected laser suppression mechanism with automatic target angle compensation, comprising a target detection device, characterized in that: It also includes an automatic compensation unit, which includes a tray on which the main control board, servo motor, and counterweight are fixed. A MEMS galvanometer is fixed at the output end of the servo motor, and a fiber laser source is mounted above the MEMS galvanometer via a bracket. The fiber laser source is directly facing the center of the reflective surface of the MEMS galvanometer. The main control board includes a power conversion module for powering the entire main control board, a PWM pulse generation module, a MEMS galvanometer angle counting module, an external trigger latch module, and a galvanometer power switch. The input port of the MEMS galvanometer angle counting module is connected to the output port of the MEMS galvanometer, and the output port of the MEMS galvanometer angle counting module is connected to the input port of the external trigger latch module. The input port of the external trigger latch module is connected to the input port of the PWM pulse generator module; The output port of the PWM pulse generator module is connected to the control terminal of the servo motor. The galvanometer power switch is connected to the MEMS galvanometer power supply terminal; The galvanometer power switch control terminal, the external trigger latch module trigger terminal, and the PWM pulse generator module trigger terminal are connected to the external trigger signal output terminal of the target detection device.

2. The MEMS galvanometer reflection laser suppression mechanism with automatic target angle compensation according to claim 1, characterized in that: The PWM pulse generation module, MEMS galvanometer angle counting module, and external trigger latch module are constructed by FPGA hardware description or directly by hardware modules.

3. The MEMS galvanometer reflection laser suppression mechanism with automatic target angle compensation according to claim 1, characterized in that: When the target detection device outputs an external trigger signal at a high level, the galvanometer power switch is powered off, and the PWM pulse generation module outputs a PWM pulse signal; when the target detection device outputs an external trigger signal at a low level, the galvanometer power switch is powered on, and the PWM pulse generation module stops outputting the PWM pulse signal. When the external trigger signal output by the target detection device is a rising edge, the external trigger latch module latches the signal; when the external trigger signal output by the target detection device is a falling edge, the external trigger latch module stops latching the signal.

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