A collimating focusing lens device and a dust particle counter

Abstract

The utility model discloses a collimating focusing lens device and dust particle counter, and the device includes support frame, collimating focusing lens and adjusting mechanism, the support frame includes first base, forms the second base of the inner chamber with the activity of setting of first base, and the first elastic part of setting in the inner chamber, and collimating focusing lens sets up in the inner chamber and is pressed to set on the first elastic part, adjusting mechanism includes two groups of adjusting components, and one group of adjusting components can directly act on collimating focusing lens and is matched with first elastic part and realizes the movement of collimating focusing lens in radial direction, and another group of adjusting components can be relatively movably set up two base and realize the movement and angle adjustment of collimating focusing lens in axial direction, the utility model does not need the technical personnel with rich experience to open component and carry out the calibration, can realize the adjustment of collimating focusing lens position through the standardization operation, greatly reduces the operation difficulty, is suitable for applying in dust particle counter.

Description

Technical Field

[0001] This utility model relates to the field of dust particle counters, specifically to a collimating focusing lens device and a dust particle counter. Background Technology

[0002] With the development of technology and the advancement of semiconductor processes, the linewidth of integrated circuits has entered the nanometer level (such as 3nm process). The requirements for controlling dust particles in the production environment are extremely strict in order to ensure product quality and improve product yield. The country and enterprises have formulated relevant testing and manufacturing standards to ensure that they can meet the needs of cleanroom production.

[0003] High-precision dust particle counters, as instruments for detecting airborne dust particles, are primarily based on the principle of optical scattering. Dust particles undergo Mie scattering in the photosensitive area, which is then collected by a scattered light collection system. They are widely used in environmental cleanliness testing, airborne particulate matter monitoring, and aerosol research. In dust particle counters, to ensure the counter continuously provides reliable and comparable measurement data, the measurement area of ​​the photosensitive region needs to be in a relatively ideal condition. An ideal photosensitive region should have uniform illumination intensity and high energy density. This requires the laser module and collimating lens module of the particle counter to be adjusted to ideal conditions. Furthermore, over time, device aging can lead to positional shifts, which can cause a decrease in the counting efficiency and resolution parameters of the dust particle counter. Currently, most dust particle counters on the market require disassembly, reassembly, and calibration, often relying on manual adjustments based on experience, demanding a high level of expertise from technicians. Utility Model Content

[0004] The purpose of this invention is to overcome one or more deficiencies in the prior art and to provide an improved collimating and focusing lens device and a dust particle counter using the collimating and focusing lens device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A collimating and focusing lens device, the collimating and focusing lens device comprising a support frame, a collimating and focusing lens and an adjustment mechanism; The support frame includes a first base, a second base having an inner cavity and being movably disposed relative to the first base, and a first elastic member disposed in the inner cavity. The collimating focusing lens is disposed in the inner cavity and pressed against the first elastic member. The adjustment mechanism includes a first adjustment component and a second adjustment component; the first adjustment component includes a first adjustment rod that passes through the second base and extends into the inner cavity, the first adjustment rod abuts against the outer wall of the collimating focusing lens and can push the collimating focusing lens to move; the second adjustment component includes a second elastic element and a second adjustment rod, one end of the second elastic element is connected to the first base and the other end is connected to the second base; the second adjustment rod contacts the second base and can push the second base to move.

[0006] In some embodiments of this utility model, the first elastic element includes a first deformation state and a second deformation state, wherein the degree of deformation of the second deformation state is greater than the degree of deformation of the first deformation state. When the first elastic element is in the first deformation state, the length of the portion of the first adjusting rod extending into the inner cavity is L1; when the first elastic element is in the second deformation state, the length of the portion of the first adjusting rod extending into the inner cavity is L2, and L2 is greater than L1.

[0007] In some embodiments of this utility model, the first elastic member is inclined.

[0008] In some embodiments of this utility model, the first adjusting rod includes a first rod and a second rod. The first rod is rotatably inserted into the second base and extends into the inner cavity from above the collimating focusing lens. The second rod is rotatably inserted into the second base and extends into the inner cavity from the side of the collimating focusing lens.

[0009] Furthermore, the portion of the first rod that contacts the collimating and focusing lens is the first point, the portion of the second rod that contacts the collimating and focusing lens is the second point, and the portion of the first elastic element that contacts the collimating and focusing lens is the third point. The first point, the second point, and the third point can jointly restrict the degree of freedom of the collimating and focusing lens to move in its radial direction.

[0010] In some embodiments of this utility model, there are multiple second elastic elements and multiple second adjusting rods, and the quantities of the two correspond one-to-one; One end of the second elastic element is connected to the upper part of the first base, and the other end is connected to the upper part of the second base. A second adjusting rod is in contact with the upper part of the second base and can push the corresponding part of the second base to move along the axial direction of the collimating focusing lens. At least one end of the second elastic element is connected to the lower part of the first base, and the other end is connected to the lower part of the second base. At least one second adjusting rod is in contact with the lower part of the second base and can push the corresponding part of the second base to move along the axial direction of the collimating focusing lens.

[0011] In some embodiments of this utility model, there are three of each of the second elastic element and the second adjusting rod. Two of the second elastic elements connected to the lower part of the first base are arranged on the left and right sides of the collimating focusing lens, and two of the second adjusting rods in contact with the lower part of the second base are arranged on the left and right sides of the collimating focusing lens.

[0012] In some embodiments of this utility model, the first base is L-shaped.

[0013] Another technical solution provided by the present invention is a dust particle counter, which includes a light source, a beam shaping element, a reflector, a photodetector, an extinction element, a photosensitive area, and a sampling gas passage, wherein the beam shaping element adopts the collimating and focusing lens device described above.

[0014] In some embodiments of this invention, the dust particle counter further includes a filter and a CCD camera; The dust particle counter includes a detection state and a calibration state. When the dust particle counter is in the detection state, the light source, the collimating and focusing lens device, the photosensitive area and the extinction element are distributed sequentially along a first direction, the reflector, the photosensitive area and the photodetector are distributed sequentially along a second direction, the sampling gas passage passes through the photosensitive area, and the straight line of the first direction intersects the straight line of the second direction. When the dust particle counter is in the calibration state, the light source, the collimating and focusing lens device, the photosensitive area, the filter and the CCD camera are distributed in sequence along the first direction, the reflector, the photosensitive area and the photodetector are distributed in sequence along the second direction, the sampling gas passage passes through the photosensitive area, and the straight line of the first direction intersects the straight line of the second direction.

[0015] In some embodiments of this utility model, the dust particle counter further includes a control module, which is communicatively connected to the CCD camera.

[0016] In some embodiments of this invention, the light source is a semiconductor laser.

[0017] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art: This invention addresses the issues of decreased accuracy in existing dust particle counters during use by innovatively providing an improved collimating and focusing lens device and a dust particle counter using this device. The collimating and focusing lens device utilizes two relatively movable bases and two specific sets of adjustment components. Firstly, the first adjustment component acts directly on the collimating and focusing lens and cooperates with a first elastic element to achieve radial movement of the lens. Secondly, the second adjustment component, in conjunction with the two relatively movable bases, enables axial movement and angle adjustment of the collimating and focusing lens. This allows for standardized operation to adjust the position of the collimating and focusing lens. With the aid of a compatible calibration component, adjustment only requires directly adjusting the radial and axial positions of the collimating and focusing lens based on the results. Even ordinary technicians can operate directly through the corresponding adjustment mechanism based on actual spot data feedback, eliminating the need for experienced technicians to disassemble components for calibration, significantly reducing operational difficulty.

[0018] Furthermore, this invention can also provide real-time feedback of beam data through filters and a CCD camera, thereby enabling rapid adjustment and calibration during calibration via the adjustment mechanism, which helps improve work efficiency. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is one of the structural schematic diagrams of the collimating and focusing lens device of this utility model; Figure 2 This is the second schematic diagram of the collimating and focusing lens device of this utility model; Figure 3 This is the third schematic diagram of the collimating and focusing lens device of this utility model; Figure 4 This is a schematic diagram of the dust particle counter of this utility model in the detection state; Figure 5 This is a schematic diagram of the dust particle counter of this utility model in calibration mode; In the attached figures, the following are the reference numerals: 1. Light source; 2. Collimating and focusing lens device; 21. Collimating and focusing lens; 22. First base; 23. Second base; 231. Inner cavity; 24. First elastic element; 251. First rod; 252. Second rod; 261. Second elastic element; 262. Second adjusting rod; 3. Photosensitive area; 4. Reflector; 5. Photodetector; 6. Extinction element; 7. Air inlet; 8. Air outlet; 9. Filter; 10. CCD camera; 11. Control module. Detailed Implementation

[0021] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments. Many specific details are set forth in the following description to provide a full understanding of the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present utility model. Therefore, the present utility model is not limited to the specific embodiments disclosed below.

[0022] In the description of this utility model, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0023] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0024] The preferred embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0025] like Figures 1 to 5As shown, this example provides a collimating and focusing lens device 2, which includes a support frame, a collimating and focusing lens 21, and an adjustment mechanism. The support frame includes a first base 22, a second base 23 having an inner cavity 231 and being movably disposed relative to the first base 22, and a first elastic member 24 disposed in the inner cavity 231. The collimating and focusing lens 21 is disposed in the inner cavity 231 and pressed against the first elastic member 24. The adjustment mechanism includes a first adjustment assembly and a second adjustment assembly. The first adjustment assembly includes a first adjustment rod passing through the second base 23 and extending into the inner cavity 231. The first adjustment rod abuts against the outer wall of the collimating and focusing lens 21 and can push the collimating and focusing lens 21 to move. The second adjustment assembly includes a second elastic member 261 and a second adjustment rod 262. One end of the second elastic member 261 is connected to the first base 22, and the other end is connected to the second base 23. The second adjustment rod 262 contacts the second base 23 and can push the second base 23 to move.

[0026] In this example, the first elastic element 24 includes a first deformation state and a second deformation state, and the degree of deformation in the second deformation state is greater than the degree of deformation in the first deformation state. When the first elastic element 24 is in the first deformation state, the length of the portion of the first adjusting rod extending into the inner cavity 231 is L1. When the first elastic element 24 is in the second deformation state, the length of the portion of the first adjusting rod extending into the inner cavity 231 is L2, and L2 is greater than L1.

[0027] The first elastic element 24 is inclined. For example... Figure 2 As shown, the first elastic element 24 extends upward from left to right, and the first elastic element 24 can be a spring sheet.

[0028] In practical applications, the first elastic element 24 not only supports the collimating and focusing lens 21, but also provides elastic recovery. For example, when the first adjusting rod moves outward, the collimating and focusing lens 21 will shift under the recovery action of the first elastic element 24, thereby achieving position adjustment. When the first adjusting rod moves into the inner cavity 231, it can push the collimating and focusing lens 21 to shift. At this time, the first elastic element 24 deforms or continues to deform under the action of the collimating and focusing lens 21 it supports. The deformation provides space for the collimating and focusing lens 21 to shift.

[0029] Furthermore, the first adjusting rod includes a first rod 251 and a second rod 252. The first rod 251 is rotatably inserted into the second base 23 and extends into the inner cavity 231 from above the collimating focusing lens 21. The second rod 252 is rotatably inserted into the second base 23 and extends into the inner cavity 231 from the side of the collimating focusing lens 21. See also Figure 2As shown, the first rod 251 at the top can push the collimating focusing lens 21 to move downward, and the second rod 252 on the left can push the collimating focusing lens 21 to move to the right. Correspondingly, when the first rod 251 is moved outward (i.e. away from the inner cavity) a certain distance, the collimating focusing lens 21 can move upward under the action of the first elastic element 24. When the second rod 252 is moved outward (i.e. away from the inner cavity) a certain distance, the collimating focusing lens 21 can move to the left under the action of the first elastic element 24.

[0030] Furthermore, the portion of the first rod 251 that contacts the collimating lens 21 is the first point, the portion of the second rod 252 that contacts the collimating lens 21 is the second point, and the portion of the first elastic element 24 that contacts the collimating lens 21 is the third point. These three points together restrict the degree of freedom of movement of the collimating lens 21 in its radial direction. This arrangement allows for effective control of the collimating lens's position without affecting its adjustment.

[0031] In this example, there are multiple second elastic elements 261 and second adjusting rods 262, and the number of each corresponds one-to-one. One end of one second elastic element 261 is connected to the upper part of the first base 22 and the other end is connected to the upper part of the second base 23. One second adjusting rod 262 is in contact with the upper part of the second base 23 and can push the corresponding part of the second base 23 to move along the axial direction of the collimating focusing lens 21. At least one second elastic element 261 is connected to the lower part of the first base 22 and the other end is connected to the lower part of the second base 23. At least one second adjusting rod 262 is in contact with the lower part of the second base 23 and can push the corresponding part of the second base 23 to move along the axial direction of the collimating focusing lens 21. Specifically, in this example, there are three second elastic elements 261 and three second adjusting rods 262. Two second elastic elements 261 connected to the lower part of the first base 22 are positioned on the left and right sides of the collimating focusing lens 21, and two second adjusting rods 262 contacting the lower part of the second base 23 are positioned on the left and right sides of the collimating focusing lens 21. By setting multiple directions, the positions of the upper and lower parts can be easily adjusted, thereby achieving adjustment of angular and linear displacement. Specifically, when only the upper second adjusting rod 262 is adjusted, for example, moving it towards the second base 23, only the upper part of the second base 23 can be driven to move forward, while the lower part is held still by the corresponding second elastic element 261. This achieves angular adjustment of the collimating focusing lens 21 in the forward and downward direction. If the upper part tilts backward during use, position calibration can be achieved in this way. Similarly, when only the lower second adjusting rod 262 is adjusted… When lever 262 is moved, for example, towards the second base 23, only the lower part of the second base 23 is driven to move forward, while the upper part is held still by the corresponding second elastic element 261. This achieves angle adjustment of the collimating focusing lens 21 in the forward and upward direction. If the lower part tilts backward during use, position calibration can be achieved in this way. Alternatively, when both the upper and lower second adjustment levers 262 are moved towards the second base 23, for example, by the same distance, the collimating focusing lens 21 can be displaced forward, i.e., in its axial direction. This structure allows for standardized adjustment and calibration of the angle and displacement of the collimating focusing lens 21, facilitating operation by ordinary technicians and reducing operational difficulty.

[0032] Furthermore, in this example, both the first adjusting rod and the second adjusting rod 262 can be in the form of bolts, which engage with the threaded holes on the corresponding first base 22 and second base 23 via external threads. This not only facilitates operation but also provides a self-limiting function, ensuring a stable connection. See, for example... Figure 1 or Figure 2As shown, the first adjusting rod can pass through the second base and extend into the inner cavity through a threaded hole on the second base, and the second adjusting rod can pass through the first base and extend into the inner cavity through a threaded hole on the first base. The second adjusting rod and the first base can be in surface contact, or they can be connected by a hole structure. Of course, the diameter of the hole structure needs to be larger than the outer diameter of the second adjusting rod. This is beneficial for the second base to undergo a certain angular deflection, which is beneficial for the calibration of angle and position.

[0033] The first base 22 is L-shaped, which simplifies the structure without affecting the supporting function.

[0034] This example also provides a dust particle counter, which includes a light source 1, a beam shaping element, a reflector 4, a photodetector 5, an extinction element 6, a photosensitive area 3, and a sampling gas passage. The beam shaping element adopts the collimating and focusing lens device 2 described above.

[0035] The dust particle counter also includes a filter 9 and a CCD camera 10. The dust particle counter has a detection state and a calibration state. When the dust particle counter is in the detection state, the light source 1, the collimating and focusing lens device 2, the photosensitive area 3, and the extinction element 6 are arranged sequentially along the first direction, and the reflector 4, the photosensitive area 3, and the photodetector 5 are arranged sequentially along the second direction. The sampling gas passage passes through the photosensitive area 3, and the straight line of the first direction intersects the straight line of the second direction. When the dust particle counter is in the calibration state, the light source 1, the collimating and focusing lens device 2, the photosensitive area 3, the filter 9, and the CCD camera 10 are arranged sequentially along the first direction, and the reflector 4, the photosensitive area 3, and the photodetector 5 are arranged sequentially along the second direction. The sampling gas passage passes through the photosensitive area 3, and the straight line of the first direction intersects the straight line of the second direction.

[0036] The dust particle counter also includes a control module 11, which is communicatively connected to the CCD camera 10, facilitating the issuance of alerts based on feedback from the CCD camera 10. The light source 1 can be a semiconductor laser, and the reflector 4 can be a spherical reflector.

[0037] See Figure 4The diagram shows a dust particle counter in detection mode. A light source 1, such as a semiconductor laser, emits a continuous detection laser beam. This laser beam is collimated and focused by a collimating and focusing lens device 2, concentrating it into a photosensitive area 3. When a particle entering through the air inlet 7 passes through the photosensitive area 3, the converged laser beam irradiates the particle surface, causing light scattering. The scattered light is reflected and focused onto a photodetector 5 by a reflector 4, such as a spherical reflector. The light is then processed by a subsequent signal control system. An extinction element 6, such as an extinction trap, absorbs other light beams, preventing excessive stray light from affecting detection accuracy in the photosensitive area. The sampling gas entering through the air inlet 7 passes through the photosensitive area 3 and exits through the air outlet 8, forming a sampling gas passage between the air inlet 7 and the air outlet 8.

[0038] See Figure 5 As shown, this is a schematic diagram of a dust particle counter in calibration mode, which will... Figure 4 The extinction element is replaced by a filter 9 and a CCD camera 10 (that is, in this example, switching between detection and calibration states can be achieved by switching the extinction element or switching the filter 9 and the CCD camera 10). The function of the filter 9 is to attenuate the laser emitted by the semiconductor laser to prevent the CCD camera 10 from being exposed. The CCD camera 10 collects the light beam after passing through the filter 9 and can then provide real-time feedback of the light beam data. Based on the light beam information obtained by the CCD camera 10, the size of the light beam in the photosensitive area can be determined. This light beam size is related to the position of the collimating focusing lens. When the position of the collimating focusing lens is in an ideal state, the light beam size meets the requirements. When the position of the collimating focusing lens is shifted, the light beam size will be affected, for example, the light intensity will change. Thus, the position of the collimating focusing lens in the calibration collimating focusing lens device can be adjusted by the detected light beam size, and the light beam data information received by the CCD camera 10 changes continuously with the adjustment until it is adjusted to the required position. Furthermore, a control module 11 can be set up to control and process the information acquired by the CCD camera 10 in real time.

[0039] In summary, this invention innovatively provides an improved collimating and focusing lens device and a dust particle counter using this device. The collimating and focusing lens device, through the design of two relatively movable bases and two specific sets of adjustment components, allows for the following: First, the first adjustment component acts directly on the collimating and focusing lens and cooperates with the first elastic element to achieve radial movement of the collimating and focusing lens; second, the second adjustment component, in conjunction with the two relatively movable bases, enables axial movement and angle adjustment of the collimating and focusing lens. Thus, the position of the collimating and focusing lens can be adjusted through standardized operation. With the aid of a suitable calibration component, adjustment only requires directly adjusting the radial and axial positions of the collimating and focusing lens based on the results. Even ordinary technicians can operate directly through the corresponding adjustment mechanism based on actual spot data feedback, eliminating the need for experienced technicians to disassemble components for calibration, greatly reducing operational difficulty. Furthermore, this invention can also provide real-time feedback of spot data through filters and a CCD camera, allowing for rapid adjustment and calibration through the adjustment mechanism, thus improving work efficiency.

[0040] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the protection scope of this utility model.

Claims

1. A collimating and focusing lens device, characterized in that, The collimating and focusing lens device includes a support frame, a collimating and focusing lens, and an adjustment mechanism; The support frame includes a first base, a second base having an inner cavity and being movably disposed relative to the first base, and a first elastic member disposed in the inner cavity. The collimating focusing lens is disposed in the inner cavity and pressed against the first elastic member. The adjustment mechanism includes a first adjustment component and a second adjustment component; the first adjustment component includes a first adjustment rod that passes through the second base and extends into the inner cavity, the first adjustment rod abuts against the outer wall of the collimating focusing lens and can push the collimating focusing lens to move; the second adjustment component includes a second elastic element and a second adjustment rod, one end of the second elastic element is connected to the first base and the other end is connected to the second base; the second adjustment rod contacts the second base and can push the second base to move.

2. The collimating and focusing lens device according to claim 1, characterized in that, The first elastic element includes a first deformation state and a second deformation state, wherein the degree of deformation in the second deformation state is greater than the degree of deformation in the first deformation state. When the first elastic element is in the first deformation state, the length of the portion of the first adjusting rod extending into the inner cavity is L1; when the first elastic element is in the second deformation state, the length of the portion of the first adjusting rod extending into the inner cavity is L2, and L2 is greater than L1.

3. The collimating and focusing lens device according to claim 1, characterized in that, The first elastic element is inclined.

4. The collimating and focusing lens device according to any one of claims 1-3, characterized in that, The first adjusting rod includes a first rod and a second rod. The first rod is rotatably inserted into the second base and extends into the inner cavity from above the collimating focusing lens. The second rod is rotatably inserted into the second base and extends into the inner cavity from the side of the collimating focusing lens.

5. The collimating and focusing lens device according to claim 4, characterized in that, The portion of the first rod that contacts the collimating and focusing lens is the first point, the portion of the second rod that contacts the collimating and focusing lens is the second point, and the portion of the first elastic element that contacts the collimating and focusing lens is the third point. The first point, the second point, and the third point can jointly restrict the degree of freedom of the collimating and focusing lens to move in its radial direction.

6. The collimating and focusing lens device according to claim 1, characterized in that, The second elastic element and the second adjusting rod are each provided in multiple quantities, and the quantities of the two correspond one-to-one; One end of the second elastic element is connected to the upper part of the first base, and the other end is connected to the upper part of the second base. A second adjusting rod is in contact with the upper part of the second base and can push the corresponding part of the second base to move along the axial direction of the collimating focusing lens. At least one end of the second elastic element is connected to the lower part of the first base, and the other end is connected to the lower part of the second base. At least one second adjusting rod is in contact with the lower part of the second base and can push the corresponding part of the second base to move along the axial direction of the collimating focusing lens.

7. The collimating and focusing lens device according to claim 6, characterized in that, There are three of each of the second elastic element and the second adjusting rod. Two of the second elastic elements connected to the lower part of the first base are arranged on the left and right sides of the collimating focusing lens, and two of the second adjusting rods in contact with the lower part of the second base are arranged on the left and right sides of the collimating focusing lens; and / or, the first base is L-shaped.

8. A dust particle counter, the dust particle counter comprising a light source, a beam shaping element, a reflector, a photodetector, an extinction element, a photosensitive area, and a sampling gas passage, characterized in that, The beam shaping element employs the collimating and focusing lens device as described in any one of claims 1-7.

9. The dust particle counter according to claim 8, characterized in that, The dust particle counter also includes a filter and a CCD camera; The dust particle counter includes a detection state and a calibration state. When the dust particle counter is in the detection state, the light source, the collimating and focusing lens device, the photosensitive area and the extinction element are distributed sequentially along a first direction, the reflector, the photosensitive area and the photodetector are distributed sequentially along a second direction, the sampling gas passage passes through the photosensitive area, and the straight line of the first direction intersects the straight line of the second direction. When the dust particle counter is in the calibration state, the light source, the collimating and focusing lens device, the photosensitive area, the filter and the CCD camera are distributed in sequence along the first direction, the reflector, the photosensitive area and the photodetector are distributed in sequence along the second direction, the sampling gas passage passes through the photosensitive area, and the straight line of the first direction intersects the straight line of the second direction.

10. The dust particle counter according to claim 9, characterized in that, The dust particle counter also includes a control module that is communicatively connected to the CCD camera; and / or, the light source is a semiconductor laser.

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