Right-angle prism mounting device for measurement

Abstract

The utility model relates to measuring equipment technical field discloses a right angle prism mounting device for measurement. Right angle prism mounting device for measurement includes support base, first support foot, second support foot and third support foot, support base has upside support plane, first support foot, second support foot and third support foot are all flexible elastic piece structure, the top of first support foot sets first support inclined plane, the top of second support foot sets second support inclined plane, the top of third support foot sets third support inclined plane, second support inclined plane and third support inclined plane are coplanar, and all are perpendicular to first support inclined plane, the projection of three support feet on upside support plane is connected first isosceles triangle in head and tail, and first support foot is located the vertex of first isosceles triangle. The mounting device can not only stably support right angle prism, but also can avoid the breakage of right angle prism due to the inconsistency between thermal deformation and mounting device when temperature changes.

Description

Technical Field

[0001] This utility model relates to the field of measuring equipment technology, and in particular to a measuring right-angle prism mounting device. Background Technology

[0002] Measuring right-angle prisms are widely used for reference measurements in semiconductor equipment and 3C automation equipment. For example... Figure 1 As shown, the measuring right-angle prism is constructed as a prism structure with a right-angled triangle cross-section and includes two right-angled surfaces. When performing benchmark measurements, a support device is usually required to support the two right-angled surfaces. However, existing support devices have the following problems when supporting the measuring right-angle prism: (1) poor support accuracy and stability; (2) due to the difference in thermal expansion coefficients between the support structure and the measuring right-angle prism, the prism is easily crushed and damaged when the temperature changes.

[0003] Therefore, there is an urgent need for a measuring right-angle prism mounting device to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a measuring right-angle prism mounting device that can not only stably support the measuring right-angle prism, but also prevent the right-angle prism from being squeezed and damaged due to the inconsistency between the thermal deformation and the mounting device when the temperature changes.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A measuring right-angle prism mounting device includes a support base, a first support foot, a second support foot, and a third support foot. The support base has an upper support plane. The first, second, and third support feet are all flexible spring sheet structures. A first support slope is provided at the top of the first support foot to support one right-angle face of the measuring right-angle prism. A second support slope is provided at the top of the second support foot, and a third support slope is provided at the top of the third support foot. The second and third support slopes are coplanar and perpendicular to the first support slope, and are used to support the other right-angle face of the measuring right-angle prism. The projections of the first, second, and third support feet onto the upper support plane form a first isosceles triangle, with the first support foot located at the vertex of the first isosceles triangle.

[0007] As an optional solution, the first support foot includes a first base plate, a first upright plate, and a first support block. The first base plate is connected to the upper support plane, the first upright plate is perpendicular to the upper support plane, and its lower end is fixedly connected to the first base plate and its upper end is connected to the first support block. The first support inclined surface is set on the first support block. The first upright plate is parallel to the base of the first isosceles triangle.

[0008] As an optional solution, the second support foot includes a second base plate, a second upright plate, and a second support block. The second base plate is connected to the upper support plane, the second upright plate is perpendicular to the upper support plane, and its lower end is fixedly connected to the second base plate and its upper end is connected to the second support block. The second support inclined surface is provided on the second support block.

[0009] The third support foot includes a third base plate, a third upright plate, and a third support block. The third base plate is connected to the upper support plane. The third upright plate is set perpendicular to the upper support plane, with its lower end fixedly connected to the third base plate and its upper end connected to the third support block. The third support inclined surface is set on the third support block.

[0010] Both the second and third upright plates are perpendicular to the base of the first isosceles triangle.

[0011] As an alternative, the first support leg is symmetrical about the height of the base of the first isosceles triangle; the second and third support legs are symmetrical about the height of the base of the first isosceles triangle.

[0012] As an optional solution, the first support foot, the second support foot, and the third support foot are all integrally formed with the support base.

[0013] As an optional solution, the support base is provided with three mounting holes, which are used to securely connect to an external structure via three fasteners.

[0014] As an alternative, the projections of the three mounting holes onto the upper support plane are connected end to end to form a second isosceles triangle, and the altitude on the base of the second isosceles triangle is collinear with the altitude on the base of the first isosceles triangle.

[0015] As an optional solution, the support base has three protrusions on its lower side, and the bottom of each of the three protrusions is provided with a mounting surface. The three mounting surfaces are coplanar, and the lower end of each mounting hole penetrates through the mounting surface.

[0016] As an optional solution, the support base is made of aluminum alloy or alloy steel.

[0017] As an alternative, the first support foot, the second support foot, and the third support foot are all made of rubber.

[0018] The beneficial effects of this utility model are:

[0019] This utility model relates to a measuring right-angle prism mounting device, comprising a support base, a first support foot, a second support foot, and a third support foot. In use, the support base is fixed in a preset position. The first support foot's first support slope supports one right-angle facet of the measuring right-angle prism; the second support slope of the second support foot and the third support slope of the third support foot jointly support the other right-angle facet of the measuring right-angle prism. Since the projections of the first, second, and third support feet onto the upper support plane form a first isosceles triangle, with the first support foot located at the vertex of the first isosceles triangle, the measuring right-angle prism is balanced under force, thus reliably, stably, and accurately supported. Furthermore, since the first, second, and third support feet are all flexible spring-loaded structures, when the ambient temperature changes, the first, second, and third support feet can compensate for inconsistent thermal deformation of the measuring right-angle prism and the mounting device through their own elastic deformation, thereby preventing excessive force from the support feet on the measuring right-angle prism and avoiding damage from compression. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of a right-angle prism used for measurement;

[0021] Figure 2 This is a schematic diagram of the structure of the measuring right-angle prism supported on the mounting device according to a specific embodiment of this utility model;

[0022] Figure 3 This is a schematic diagram of the measuring right-angle prism mounting device provided in a specific embodiment of the present invention from one angle.

[0023] Figure 4 This is a top view of the measuring right-angle prism mounting device provided in a specific embodiment of this utility model;

[0024] Figure 5 This is a schematic diagram of the measuring right-angle prism mounting device provided in a specific embodiment of this utility model from another perspective.

[0025] In the picture:

[0026] 10. Support base; 11. Upper support plane; 12. Mounting hole; 13. Boss; 14. Mounting surface;

[0027] 20. First support leg; 21. First base plate; 22. First upright plate; 23. First support block; 231. First support ramp;

[0028] 30. Second support leg; 31. Second base plate; 32. Second upright plate; 33. Second support block; 331. Second support ramp;

[0029] 40. Third support leg; 41. Third base plate; 42. Third upright plate; 43. Third support block; 431. Third support ramp;

[0030] 50. A right-angle prism for measurement; 51. A right-angled surface;

[0031] 60. The first isosceles triangle;

[0032] 70. The second isosceles triangle. Detailed Implementation

[0033] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not the entire structure.

[0034] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0035] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0036] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0037] This embodiment provides a mounting device for a measuring right-angle prism, which can be used to support a measuring right-angle prism 50. For example... Figure 1 As shown, the measuring right-angle prism 50 is constructed as a prism structure with a right-angled triangle cross-section, that is, the measuring right-angle prism 50 includes two right-angled faces 51. The measuring right-angle prism mounting device of this embodiment supports the two right-angled faces 51 of the measuring right-angle prism 50 respectively.

[0038] like Figures 2-4 As shown, the measuring right-angle prism mounting device includes a support base 10, a first support leg 20, a second support leg 30, and a third support leg 40. The support base 10 is used to fix it to an external structure and has an upper support plane 11. The first support leg 20, the second support leg 30, and the third support leg 40 are all flexible spring structures and are all disposed on the upper support plane 11. The top of the first support leg 20 is provided with a first support slope 231, the top of the second support leg 30 is provided with a second support slope 331, and the top of the third support leg 40 is provided with a third support slope 431. The second support slope 331 and the third support slope 431 are coplanar and are both perpendicular to the first support slope 231. The projections of the first support leg 20, the second support leg 30, and the third support leg 40 onto the upper support plane 11 form a first isosceles triangle 60, with the first support leg 20 located at the vertex of the first isosceles triangle 60.

[0039] When using the measuring right-angle prism mounting device of this embodiment, the support base 10 is fixed in a preset position, the first support slope 231 of the first support foot 20 supports one right-angle surface 51 of the measuring right-angle prism 50; the second support slope 331 of the second support foot 30 and the third support slope 431 of the third support foot 40 jointly support the other right-angle surface 51 of the measuring right-angle prism 50. Since the projections of the first support leg 20, the second support leg 30, and the third support leg 40 onto the upper support plane 11 form a first isosceles triangle 60, with the first support leg 20 located at the vertex of the first isosceles triangle 60, the measuring right-angle prism 50 is balanced under the premise of ensuring stable support, reducing the risk of damage to the measuring right-angle prism 50 due to uneven force. In addition, since the first support leg 20, the second support leg 30, and the third support leg 40 are flexible spring sheet structures, when the ambient temperature changes, the first support leg 20, the second support leg 30, and the third support leg 40 can compensate for the inconsistent thermal deformation of the measuring right-angle prism 50 and the mounting device through their own elastic deformation, thereby avoiding excessive force exerted by each support leg on the measuring right-angle prism 50 and preventing the measuring right-angle prism 50 from being squeezed and broken.

[0040] like Figure 2 and Figure 3 As shown, the support base 10 is generally constructed as a cuboid, and the upper surface of the support base 10 is the upper support plane 11. Optionally, the support base 10 can be made of aluminum alloy or alloy steel to ensure the structural strength of the entire installation device.

[0041] Optionally, the first support leg 20, the second support leg 30, and the third support leg 40 are all integrally formed with the support base 10. This arrangement eliminates the need for separate assembly of the three support legs with the support base 10, thus ensuring the relative positional accuracy between the three support legs and guaranteeing the support accuracy for the measuring right-angle prism 50. It should be noted that by processing the three support legs to be sufficiently thin, the support legs can possess elastic deformation capability. Optionally, the support base 10 can be made of aluminum alloy or alloy steel, thereby ensuring the structural strength of the entire mounting device.

[0042] Optionally, the first support leg 20, the second support leg 30, and the third support leg 40 can be bonded to the measuring right-angle prism 50 respectively, further improving the accuracy and reliability of the mounting device in supporting the measuring right-angle prism 50. Specifically, each support leg can be bonded to the right-angle surface 51 using existing structural adhesive.

[0043] like Figure 3 and Figure 4As shown, the first support leg 20 is symmetrical about the height H1 of the base of the first isosceles triangle 60. The second support leg 30 and the third support leg 40 are also symmetrically arranged about the height H1 of the base of the first isosceles triangle 60. This arrangement ensures that after the measuring right-angle prism 50 is supported by the mounting device, the forces along the base of the first isosceles triangle 60 are completely symmetrical, further guaranteeing the stable support of the measuring right-angle prism 50 and preventing positional movement of the measuring right-angle prism 50 during measurement, which would affect the measurement results.

[0044] like Figure 3 and Figure 4 As shown, the first support foot 20 includes a first base plate 21, a first upright plate 22, and a first support block 23. The first base plate 21 is connected to the upper support plane 11, specifically by bonding. The first upright plate 22 is set perpendicular to the upper support plane 11. The lower end of the first upright plate 22 is fixedly connected to the first base plate 21, and the upper end is connected to the first support block 23. The first support inclined surface 231 is set on the first support block 23, and the first upright plate 22 is parallel to the base side of the first isosceles triangle 60. On the one hand, the first base plate 21 is bonded to the upper support plane 11, ensuring the reliability of the connection between the entire first support leg 20 and the support base 10; on the other hand, along the direction of the height H1 of the base of the first isosceles triangle 60, the first support leg 20 supports one right-angled surface 51 of the measuring right-angled prism 50, and the second support leg 30 and the third support leg 40 together support the other right-angled surface 51 of the measuring right-angled prism 50. By setting the first upright plate 22 to be perpendicular to the base of the first isosceles triangle 60, the first support leg 20 has sufficient structural strength in the direction of the height of the first isosceles triangle 60, thereby reliably supporting the measuring right-angled prism 50.

[0045] like Figure 3 and Figure 4As shown, the second support foot 30 includes a second base plate 31, a second upright plate 32, and a second support block 33. The second base plate 31 is connected to the upper support plane 11, specifically by bonding. The second upright plate 32 is perpendicular to the upper support plane 11. The lower end of the second upright plate 32 is fixedly connected to the second base plate 31, and the upper end is connected to the second support block 33. A second support slope 331 is provided on the second support block 33. The third support foot 40 includes a third base plate 41, a third upright plate 42, and a third support block 43. The third base plate 41 is connected to the upper support plane 11, specifically by bonding. The third upright plate 42 is perpendicular to the upper support plane 11. The lower end of the third upright plate 42 is fixedly connected to the third base plate 41, and the upper end is connected to the third support block 43. A third support slope 431 is provided on the third support block 43. In this embodiment, both the second upright plate 32 and the third upright plate 42 are perpendicular to the base of the first isosceles triangle 60. On the one hand, the second base plate 31 and the third base plate 41 are respectively bonded to the upper support plane 11, ensuring that the second support foot 30 and the third support foot 40 are reliably installed on the support base 10. On the other hand, by setting the second upright plate 32 and the third upright plate 42 to be perpendicular to the base of the first isosceles triangle 60, sufficient support strength can be provided in the direction of the base of the first isosceles triangle 60. Combined with the setting of the height H1 of the first upright plate 22 of the first support foot 20 perpendicular to the base of the first isosceles triangle 60, the entire mounting device has sufficient support strength to ensure the stability of the measuring right-angle prism 50. In this embodiment, as shown... Figure 3 As shown, the cross-sectional area of ​​the second support block 33 is greater than that of the second vertical plate 32, and the cross-sectional area of ​​the third support block 43 is greater than that of the third vertical plate 42. This arrangement allows the second support inclined surface 331 and the third support inclined surface 431 to have a sufficiently large area to contact the right angle surface 51 of the measuring right angle prism 50, thus avoiding stress concentration in the measuring right angle prism 50.

[0046] like Figure 3 and Figure 4 As shown, the support base 10 has three mounting holes 12, which are used to securely connect to the external structure via three fasteners. On one hand, fixing the support base 10 with fasteners is simple in structure and convenient in operation; on the other hand, the three mounting holes 12 and the fasteners minimize the number of fasteners while ensuring the support base 10 is firmly fixed, further improving the convenience of installation and fixing. Optionally, the fasteners can be bolts. It is understood that the external structure needs to have threaded holes corresponding to the mounting holes 12. In this embodiment, the mounting holes 12 can be countersunk holes.

[0047] like Figure 4As shown, the projections of the three mounting holes 12 onto the upper support plane 11, connected end to end, form a second isosceles triangle 70. The height H2 of the base of the second isosceles triangle 70 is collinear with the height H1 of the base of the first isosceles triangle 60. With this configuration, when leveling the three support feet on the support base 10 by adjusting the tightening force of each fastener and by adding or removing shims at each mounting hole 12, the adjustment of the tightness of the three fasteners and the adjustment of the shims at the three mounting holes 12 will correspond to the height changes of the three support feet, thereby improving the convenience of installation and debugging.

[0048] like Figure 4 As shown, the support base 10 has three bosses 13 on its lower side, and each of the three bosses 13 has a mounting surface 14 at its bottom. The three mounting surfaces 14 are coplanar, and the lower end of each mounting hole 12 penetrates through the mounting surface 14. The mounting surface 14 is the reference for adjusting the posture of the support base 10 and the height of the three support legs, so it is required to be a precision-machined surface. By setting three bosses 13 and placing the mounting surface 14 on the bosses 13, the area of ​​the precision-machined surface on the support base 10 can be reduced, thereby reducing the processing cost.

[0049] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. For those skilled in the art, based on the concept of this utility model, there will be changes in the specific implementation methods and application scope. The content of this specification should not be construed as a limitation of this utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A measuring right-angle prism mounting device, characterized in that, It includes a support base (10), a first support foot (20), a second support foot (30), and a third support foot (40); the support base (10) has an upper support plane (11); the first support foot (20), the second support foot (30), and the third support foot (40) are all flexible spring sheet structures; the top of the first support foot (20) is provided with a first support slope (231) for supporting a right angle surface (51) of a measuring right angle prism (50); the top of the second support foot (30) is provided with a second support slope (331), and the third support foot (4 ... second support slope (231) for supporting a right angle surface (51) of a measuring right angle prism (50); the top of the second support foot (30) is provided with a second support slope (331), and the top of the third support foot (40) is provided with a third support slope (331). A third support slope (431) is provided at the top of the 0), the second support slope (331) and the third support slope (431) are coplanar and both are perpendicular to the first support slope (231), and are used to support another right angle surface (51) of the measuring right angle prism (50); the projections of the first support foot (20), the second support foot (30) and the third support foot (40) on the upper support plane (11) are connected end to end to form a first isosceles triangle (60), and the first support foot (20) is located at the vertex of the first isosceles triangle (60).

2. The measuring right-angle prism mounting device as described in claim 1, characterized in that, The first support foot (20) includes a first base plate (21), a first upright plate (22) and a first support block (23). The first base plate (21) is connected to the upper support plane (11). The first upright plate (22) is set perpendicular to the upper support plane (11), and its lower end is fixedly connected to the first base plate (21) and its upper end is connected to the first support block (23). The first support inclined surface (231) is set on the first support block (23). The first upright plate (22) is parallel to the base of the first isosceles triangle (60).

3. The measuring right-angle prism mounting device as described in claim 1, characterized in that, The second support foot (30) includes a second base plate (31), a second upright plate (32), and a second support block (33). The second base plate (31) is connected to the upper support plane (11). The second upright plate (32) is set perpendicular to the upper support plane (11), and its lower end is fixedly connected to the second base plate (31), and its upper end is connected to the second support block (33). The second support inclined surface (331) is set on the second support block (33). The third support foot (40) includes a third base plate (41), a third upright plate (42), and a third support block (43). The third base plate (41) is connected to the upper support plane (11). The third upright plate (42) is set perpendicular to the upper support plane (11), and its lower end is fixedly connected to the third base plate (41), and its upper end is connected to the third support block (43). The third support inclined surface (431) is set on the third support block (43). The second upright plate (32) and the third upright plate (42) are both perpendicular to the base of the first isosceles triangle (60).

4. The measuring right-angle prism mounting device as described in claim 1, characterized in that, The first support leg (20) is symmetrical about the height of the base of the first isosceles triangle (60); the second support leg (30) and the third support leg (40) are symmetrical about the height of the base of the first isosceles triangle (60).

5. The measuring right-angle prism mounting device as described in claim 1, characterized in that, The first support foot (20), the second support foot (30) and the third support foot (40) are all integrally formed with the support base (10).

6. The measuring right-angle prism mounting device as described in any one of claims 1-5, characterized in that, The support base (10) is provided with three mounting holes (12), which are used to fasten the support base (10) to the external structure by means of three fasteners.

7. The measuring right-angle prism mounting device as described in claim 6, characterized in that, The projections of the three mounting holes (12) onto the upper support plane (11) are connected end to end to form a second isosceles triangle (70), and the altitude on the base of the second isosceles triangle (70) is collinear with the altitude on the base of the first isosceles triangle (60).

8. The measuring right-angle prism mounting device as described in claim 6, characterized in that, The support base (10) has three protrusions (13) on its lower side. The bottom of each of the three protrusions (13) is provided with a mounting surface (14). The three mounting surfaces (14) are coplanar, and the lower end of each mounting hole (12) penetrates through the mounting surface (14).

9. The measuring right-angle prism mounting device as described in any one of claims 1-5, characterized in that, The support base (10) is made of aluminum alloy or alloy steel.

Images