Light deflector and light emitting assembly
Patent Information
- Application Number
- CN202522815519.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-30
- Publication Date
- 2026-10-30
- Estimated Expiration
- 2035-12-30
AI Technical Summary
[0005]本申请的目的之一在于提供一种光偏转器，以解决现有技术中调整光束偏转的器件无法兼顾调制精度和小型化的技术问题
[0020]与现有技术相比，本申请提供的光偏转器，提供基于目标偏转角确定的相位而制成的光调制元件，至少能够使得在垂直于光调制元件所在第一平面的第一轴方向上，入射光能够经过调制并按照目标偏转角的幅度进行偏转输出，能够实现高精度偏转调制；另一方面，由于通过对光调制元件进行相位配置而实现上述效果，无需增加其他光学元件，能够极大程度上简化光偏转器的结构复杂度，有利于光偏转器的小型化设计。
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Figure CN224922108U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of optical instrument technology, and in particular to a light deflector and a light emitting component. Background Technology
[0002] In the field of optical instrument technology, existing technologies provide light source devices such as lasers for illumination, thereby serving the realization of corresponding functions in fields such as optical communication, sensing, and optical measurement. Among them, vertical-cavity surface-emitting lasers (VCSELs) are widely used, which can output laser beams in the vertical direction and have advantages such as small size, low power consumption, high efficiency, and easy integration.
[0003] For a single light source, there is an application scenario where the output beam needs to be deflected to a certain extent and emitted to a designated position. For a light source array, the emitted light from multiple light sources will mix after propagating a certain distance and become difficult to separate for use, so the optical signal also needs to be modulated to emit at different angles.
[0004] There are two existing technical solutions for modulating beam deflection. One is to set up lenses or mirrors to modulate the output light deflection through refraction or reflection. However, this method has low modulation accuracy and requires a complex optical path. The other method is to dynamically modulate the beam through electrical programming. However, this system usually relies on multiple discrete optical components such as beam splitters and lens groups to form a complex optical path. This results in a complex structure, large size, and high cost for the entire deflector module, which seriously hinders its application in miniaturized and integrated optical devices. Utility Model Content
[0005] One of the purposes of this application is to provide an optical deflector to solve the technical problem that existing devices for adjusting beam deflection cannot simultaneously achieve modulation accuracy and miniaturization.
[0006] One of the purposes of this application is to provide a light emitting component.
[0007] To achieve one of the above objectives, one embodiment of this application provides an optical deflector, comprising: an optical modulation element having a first phase, the first phase being set according to a target deflection angle, the optical modulation element being arranged on a first plane, the optical modulation element being used to modulate incident light and outputting an amplitude of the target deflection angle relative to the first plane, the target deflection angle including a first angle, the first angle being the angle between the target deflection direction and a first axis, the first axis being perpendicular to the first plane.
[0008] Optional, first phase Compared to the first angle satisfy: , It is the wavelength of the incident light.
[0009] Optionally, the optical modulation element is configured according to at least one of the following: the optical modulation element includes a grating, the optical modulation element includes a nanostructure unit for forming a metasurface, the size of the nanostructure unit is determined according to the first phase, and the optical modulation element includes a diffractive optical element.
[0010] Optionally, the target deflection angle includes a second angle, which is the angle between the projection of the target deflection direction onto the first plane and the second axis, wherein the second axis is parallel to the first plane.
[0011] Optional, first phase Compared to the first angle Second angle satisfy: ,or ,or .
[0012] Optionally, for the first position at the first plane First phase Compared to the first angle Second angle satisfy: , It is the wavelength of the incident light.
[0013] Optionally, the optical modulation element includes a grating, the grating being regulated according to a first period. Settings, first cycle Compared to the first angle satisfy: The angle between the arrangement direction of the grating and the second axis is the second angle.
[0014] Optionally, the optical modulation element includes a metasurface, or the optical modulation element is a diffractive optical element; relative to the third axis, the first phase Compared with the first angle satisfy: , It is the wavelength of the incident light, the third axis is parallel to the first plane, and the angle between the third axis and the second axis is the second angle.
[0015] Optionally, the first phase is set according to the target deflection angle and the collimation phase; the collimation phase includes at least one of spherical phase, Gaussian phase, and binary surface phase.
[0016] To achieve one of the above objectives, one embodiment of this application provides an optical emitting component, including: an optical output device and an optical deflector, configured according to any technical solution of this application.
[0017] Optionally, the optical output device includes n light sources arranged in a periodic manner, and the optical deflector includes n optical modulation elements. The n optical modulation elements are arranged corresponding to the n light sources. The optical modulation elements are used to receive light output from the corresponding light source, modulate it, and output the incident light according to their respective preset target deflection angles.
[0018] Optionally, at least one of the n optical modulation elements is configured according to one of the following: the target deflection angle of the optical modulation element includes a first angle of 10 degrees and a second angle of 30 degrees; the target deflection angle of the optical modulation element includes a first angle of 15 degrees and a second angle of 120 degrees; the target deflection angle of the optical modulation element includes a first angle of 30 degrees and a second angle of -45 degrees; the target deflection angle of the optical modulation element includes a first angle of 45 degrees and a second angle of -135 degrees; the target deflection angle of the optical modulation element includes a first angle of 2.5 degrees and a second angle of 8.5 degrees; the target deflection angle of the optical modulation element includes a first angle of 4 degrees and a second angle of 0.5 degrees; the target deflection angle of the optical modulation element includes a first angle of 13 degrees and a second angle of 6 degrees; or the target deflection angle of the optical modulation element includes a first angle of 2 degrees and a second angle of 9.5 degrees.
[0019] Optionally, the optical modulation element includes nanostructure units, which are used to form a metasurface, and the nanostructure units are disposed on the side of the optical modulation element close to the optical output device.
[0020] Compared with the prior art, the optical deflector provided in this application provides an optical modulation element made based on the phase determined by the target deflection angle, which enables the incident light to be modulated and deflected according to the magnitude of the target deflection angle in the first axial direction perpendicular to the first plane where the optical modulation element is located, thereby achieving high-precision deflection modulation. On the other hand, since the above effect is achieved by configuring the phase of the optical modulation element, there is no need to add other optical elements, which greatly simplifies the structural complexity of the optical deflector and is beneficial to the miniaturization design of the optical deflector. Attached Figure Description
[0021] Figure 1 This is a schematic diagram of the structure of an optical deflector according to this application.
[0022] Figure 2 This is a schematic diagram of the structure of an optical modulation element according to this application.
[0023] Figure 3 This is a schematic diagram of the structure of a nanostructure unit of this application.
[0024] Figure 4 This is a schematic diagram showing the relationship between the size, phase, and transmittance of the nanostructure unit in this application.
[0025] Figure 5 This is a schematic diagram of the structure of another optical modulation element of this application at one angle.
[0026] Figure 6 This is a schematic diagram of another optical modulation element from another angle, as described in this application.
[0027] Figure 7 This is a schematic diagram of another optical deflector according to this application.
[0028] Figure 8 This is a schematic diagram of the phase distribution of the optical deflector in the first embodiment of this application.
[0029] Figure 9 This is a schematic diagram of the imaging pattern of the optical deflector in the first embodiment of this application.
[0030] Figure 10 This is a schematic diagram of the phase arrangement of the nanostructure units in the first embodiment of this application.
[0031] Figure 11 This is a schematic diagram of the phase distribution of the optical deflector in the second embodiment of this application.
[0032] Figure 12 This is a schematic diagram of the imaging pattern of the optical deflector in the second embodiment of this application.
[0033] Figure 13 This is a schematic diagram of the phase arrangement of the nanostructure units in the second embodiment of this application.
[0034] Figure 14 This is a schematic diagram of the phase distribution of the optical deflector in the third embodiment of this application.
[0035] Figure 15 This is a schematic diagram of the phase arrangement of the nanostructure units in the third embodiment of this application.
[0036] Figure 16 This is a schematic diagram of the phase distribution of the optical deflector in the fourth embodiment of this application.
[0037] Figure 17 This is a schematic diagram of the phase arrangement of the nanostructure units in the fourth embodiment of this application.
[0038] Figure 18 This is a schematic diagram of the structure of a light emitting component according to this application.
[0039] Figure 19 This is a schematic diagram of the structure of the light emitting component in the first embodiment of this application.
[0040] Figure 20 This is a schematic diagram of the structure of the light emitting component in the second embodiment of this application. Detailed Implementation
[0041] The present application will now be described in detail with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present application, and any structural, methodological, or functional modifications made by those skilled in the art based on these embodiments are included within the scope of protection of this application.
[0042] It should be noted that the term "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.
[0043] Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. There is no necessary relationship between "first," "second," and "third," for example, the presence of "second" in an embodiment does not necessarily mean the presence of "first," and so on.
[0044] The embodiments or examples listed in this application can be considered as independent technical solutions, or they can be combined to form a combined technical solution. Although the accompanying drawings often show combined technical solutions, this does not imply that the technical solutions in this application must be combined in accordance with the drawings.
[0045] Optical deflector like Figure 1 One embodiment of this application provides an optical deflector 100.
[0046] The optical deflector 100 includes an optical modulation element 10.
[0047] The optical modulation element 10 has a first phase First phase Set according to the target deflection angle.
[0048] An optical modulation element 10 is arranged on a first plane P1. The optical modulation element 10 is used to modulate the incident light and output it with an amplitude of a target deflection angle relative to the first plane P1.
[0049] The target deflection angle includes a first angle. .
[0050] First angle It is the angle between the target deflection direction and the first axis z. The first axis z is perpendicular to the first plane P1.
[0051] Thus, the optical deflector 100 provided in this application can achieve optical modulation of the target deflection angle through its own phase setting. In particular, when the target deflection angle includes a first angle relative to the axis perpendicular to the first plane, it can achieve high-precision and efficient setting of the beam deflection direction. Moreover, the modulation process only involves the configuration of the phase parameter, without the need to add additional modulation devices or change the structure of the optical system, which can greatly simplify the configuration and improve convenience.
[0052] The optical deflector 100 can deflect the light field from a low phase direction to a high phase direction by adjusting the phase, thereby obtaining the same optical path difference and realizing the deflection of the light beam.
[0053] Beam deflection can be constructed in three-dimensional space. In this case, the target deflection angle, or the first angle contained within the target deflection angle, can be an angle representing the deflection direction in spherical coordinates.
[0054] Figure 1 Target wave vector To represent the target deflection direction and its corresponding target deflection angle, the first angle is... It can be the target wave vector The angle between the first axis z and the first axis z.
[0055] The incident light is modulated by the optical modulation element 10 to form a modulated light field, which propagates a complex amplitude field. With the first phase It can satisfy: .
[0056] It is a constant. It is angular frequency. It's time.
[0057] In addition, the first phase With the target wave vector The following conditions must be met: .
[0058] It can be any feasible functional expression used to represent the first phase. With the target wave vector There is a correlation between them; the correlation can be positive, negative, etc.
[0059] Therefore, the target wave vector can be achieved through phase adjustment. The construction of this structure enables optical modulation of the target deflection angle amplitude.
[0060] In one embodiment, the first phase With the target wave vector They can be positively correlated.
[0061] In one embodiment, the first phase Compared to the first angle satisfy: .
[0062] It is the wavelength of the incident light. It can be any feasible functional expression used to represent the first phase. There is a correlation between the variables in the function; the correlation can be positive, negative, etc.
[0063] Thus, the first angle can be determined based on the incident light wavelength and the target deflection angle. To determine the angle used to modulate the incident light of that wavelength at a first angle. The first phase of the deflection In one embodiment, the first phase It can also satisfy: .
[0064] In one embodiment, such as Figure 2 The optical modulation element 10 includes a grating 1a.
[0065] In this embodiment, the optical modulation element 10 achieves beam deflection through the grating 1a.
[0066] Grating 1a can be based on the first phase Arrangement. For example, the period of grating 1a can be determined based on the first phase. set up.
[0067] In one embodiment, such as Figure 3 The optical modulation element 10 includes a nanostructure unit 1b.
[0068] Nanostructure unit 1b is used to construct metasurfaces.
[0069] Metasurfaces are novel micro-devices that precisely manipulate the physical properties of light, such as amplitude, phase, and polarization, by designing and fabricating nanostructures in shape, size, and arrangement. Metasurfaces can replace many traditional optical components, enabling a variety of optical functions and significantly improving the functional density and integration of devices.
[0070] like Figure 3 The nanostructure unit 1b can be a cylindrical structure formed on a substrate. The cylindrical nanostructure unit 1b has a radius r and a height h.
[0071] The nanostructure unit 1b can also be a square columnar structure or an elliptical columnar structure.
[0072] The nanostructure units 1b can be periodically arranged to form a metasurface. The arrangement of the nanostructure units 1b can be tetragonal, hexagonal, or polar coordinate.
[0073] Nanostructure unit 1b can be based on the first phase Arrange them.
[0074] The size of nanostructure unit 1b depends on the first phase Sure.
[0075] like Figure 4 This shows the size of nanostructure unit 1b and its relationship with the first phase at a specific wavelength. The relationship between them. Figure 4 The horizontal axis represents the radius of nanostructure unit 1b. Figure 4 The left vertical axis represents the first phase. , Figure 4 The vertical axis on the right represents the transmittance of nanostructure unit 1b. During the fabrication of the optical deflector 100, the first phase can be determined based on the target deflection angle. Then, according to the first phase and Figure 4 The size and / or transmittance of the nanostructure unit 1b are determined to prepare an optical modulation element 10 in the form of a metasurface element, and a corresponding optical deflector 100.
[0076] In addition, the first phase It can also be used to determine the rotation angle of nanostructure unit 1b.
[0077] In one embodiment, the optical modulation element 10 includes a diffractive optical element (DOE). In another embodiment, the optical modulation element 10 may be a diffractive optical element.
[0078] Diffractive optical elements have unique dispersion properties, greater design freedom, a wide range of material options, and the advantages of small size and ultra-thinness, which facilitates module integration. They have important application prospects in fields such as optical imaging technology and micro-opto-electro-mechanical systems.
[0079] In one embodiment, the optical deflector 100 can be any device used to achieve optical diffraction.
[0080] In one embodiment, such as Figure 1 The target deflection angle includes the second angle. .
[0081] Second angle It is the angle between the projection of the target deflection direction onto the first plane P1 and the second axis x. The second axis x is parallel to the first plane P1.
[0082] Using the target wave vector When expressing the direction of target deflection, the target wave vector The projection at the first plane P1 forms the projection wave vector. Projected wave vector The angle between the second angle and the second axis x forms the second angle. .
[0083] At this point, the target deflection angle includes the second angle. The target deflection angle is used to determine the first phase. First phase According to the second angle This ensures that the light beam modulated by the optical modulation element 10 can be positioned at a second angle relative to the second axis x. The amplitude output enables further fine modulation of the incident light deflection by the optical modulation element 10.
[0084] The second axis x can be perpendicular to the first axis z.
[0085] The first plane P1 may also include a fourth axis y that is perpendicular to the second axis x. The second axis may be perpendicular to both the first axis z and the fourth axis y.
[0086] Target wave vector The first parameter can be obtained by decomposing along the first axis z, the second axis x, and the fourth axis y. Second parameter and the third parameter .
[0087] Second parameter It can satisfy: .
[0088] Third parameter It can satisfy: .
[0089] Thus, the first phase Based on the first angle Second angle Configure it to achieve a deflection output in the target deflection direction with the target deflection angle magnitude.
[0090] In one embodiment, the first phase Compared to the first angle Second angle satisfy: .
[0091] For example, satisfying: .
[0092] In one embodiment, the first phase Compared to the first angle Second angle satisfy: .
[0093] For example, satisfying: .
[0094] In one embodiment, the first phase Compared to the first angle Second angle satisfy: .
[0095] For example, satisfying: .
[0096] Thus, for incident light of a specific wavelength, the deflection output of the target deflection angle amplitude can be achieved by designing the phase.
[0097] In one embodiment, the first phase of the optical modulation element 10 The target deflection angle is determined by combining the position of the optical modulation element 10 itself or different parts of the optical modulation element 10 at the first plane P1.
[0098] For example, the first portion of the optical modulation element 10 has a first position relative to the origin of the first plane P1. First position Compared to constructing a position vector with the origin of plane P1 For the first portion of the optical modulation element 10, the first phase The propagation of complex amplitude field in the light field They respectively satisfy: .
[0099] .
[0100] When the target wave vector is decomposed along the first axis z, the second axis x, and the fourth axis y and position vector At that time, the first phase It can satisfy: .
[0101] , , These are position vectors. The coordinates determined by decomposing along the three axes, for a point located in the first plane P1, .
[0102] In one embodiment, for the first position at the first plane P1 First phase Compared to the first angle Second angle satisfy: .
[0103] It is the wavelength of the incident light.
[0104] Thus, for a light beam propagating along the first axis z, or a light source positioned toward the first axis z, it is possible to simultaneously base the first angle on the light beam. Second angle The phase is set by considering the position of the first plane P1 and the position of the first plane P1, and the component of the first axis z direction is ignored.
[0105] In some embodiments, different target deflection angles can be achieved by adjusting different structural features in the optical modulation element 10. For different types of optical modulation elements 10, the structural features adjusted may also be different in order to achieve the target deflection angle or configure the corresponding first phase.
[0106] For example, in some embodiments, the first angle can be determined in advance. The structure at the optical modulation element 10 is configured, and then at a second angle By rotating the light modulation element 10, the effect of simultaneously achieving two angle deflections can be achieved.
[0107] In one embodiment, such as Figure 2 , Figure 5 and Figure 6 The optical modulation element 10 includes a grating 1a. The grating 1a is based on a first period. Settings. First cycle. Compared to the first angle satisfy: .
[0108] The angle between the arrangement direction of grating 1a and the second axis x is the second angle. .
[0109] Thus, when configuring the grating-type optical modulation element 10, it is possible to first determine the first angle. Determine the first period of grating 1a Then, the grating 1a is configured to complete the cycle, and then the second angle is used. Rotation is performed to determine the target deflection that can be achieved in two dimensions (first angle). Second angle ) optical modulation element 10.
[0110] It can be an integer. It can be 1 or -1.
[0111] In one embodiment, the optical modulation element 10 includes a metasurface.
[0112] In one embodiment, the optical modulation element 10 is a diffractive optical element.
[0113] like Figure 1 Compared to the third axis x1, the first phase Compared to the first angle satisfy: .
[0114] It is the wavelength of the incident light.
[0115] The third axis x1 is parallel to the first plane P1.
[0116] The angle between the third axis x1 and the second axis x is the second angle. .
[0117] Thus, the third axis x1 can be considered as the second axis x rotated by a second angle. Received. The above configuration can be understood as, first according to the first angle... After configuring the phase of the optical modulation element 10, a second angle is introduced by rotation. This achieves the effect of configuring the optical modulation element 10 according to the target deflection angle.
[0118] In the configured optical modulation element 10, the first part can have a first position relative to the third axis x1 and the fourth axis y. The third axis x1 is considered as a rotation of the second axis x by a second angle. Therefore, the first position can have a position relative to the second axis x and the fourth axis y. It can satisfy: .
[0119] .
[0120] Thus, the configured optical modulation element 10 can simultaneously achieve the first angle Second angle Deflection modulation.
[0121] In some embodiments, the optical deflector 100 provided in this application can be implemented in conjunction with a collimator to achieve beam collimation based on deflection modulation.
[0122] In one embodiment, the first phase Set according to the target deflection angle and collimation phase.
[0123] In this way, the optical deflector 100 and the optical modulation element 10 can simultaneously achieve beam deflection modulation and collimated emission.
[0124] Figure 9 This shows the beam deflection effect corresponding to the uncollimated optical deflector 100. Figure 12 The beam deflection effect corresponding to the collimated optical deflector 100 is shown. It can be seen that the beam emission is more concentrated after the collimation phase is superimposed.
[0125] The collimated phase includes at least one of the following: spherical phase, Gaussian phase, and binary surface phase.
[0126] In one embodiment, the first phase Based on the phase setting of the sphere.
[0127] Spherical phase, which can be based on the phase distribution of spherical waves, can be used to simulate the collimation effect of a lens.
[0128] First phase It can include spherical phase in Cartesian coordinate form It can satisfy: .
[0129] First phase It can include spherical phase in radial coordinate form It can satisfy: . .
[0130] In one embodiment, the first phase Based on Gaussian phase settings.
[0131] Gaussian phase can be a phase distribution based on the Gaussian beam profile and is suitable for laser beam collimation.
[0132] In one embodiment, the first phase Based on the phase setting of the binary plane.
[0133] A binary plane phase can be a phase distribution obtained through mathematical optimization (such as polynomial expansion), which can be used to improve collimation efficiency or reduce aberrations.
[0134] First phase It can include a binary surface phase in Cartesian coordinate form. It can satisfy: .
[0135] First phase This can include a binary surface phase in radial coordinate form. It can satisfy: . .
[0136] For the collimation phase formula above It is the wavelength of the incident light. These are the position coordinates in the Cartesian coordinate system. It is the equivalent focal length of the collimated phase. It is the radial distance in the Cartesian coordinate system. These are weighting coefficients. It represents the number of terms to be summed.
[0137] like Figures 7 to 17 As shown, the optical deflector 100 may include a plurality of optical modulation elements 10. The optical modulation elements 10 may be arranged periodically on the optical deflector 100.
[0138] like Figure 7 The optical deflector 100 includes four optical modulation elements 10, namely a first modulation element e1, a second modulation element e2, a third modulation element e3, and a fourth modulation element e4. The four optical modulation elements 10 can be arranged in a matrix. Adjacent optical modulation elements 10 can have a spacing of 300 μm in the horizontal direction and a spacing of 300 μm in the vertical direction.
[0139] like Figure 8 The four optical modulation elements 10 can have different target deflection angles, and are respectively configured as follows: Figure 8 The different phase states are shown. For example... Figure 9 Optical modulation elements with different phases receive the light beam and deflect and modulate it to obtain angular spatial imaging patterns distributed at different positions; in one case, the angular spatial imaging pattern can be determined according to the corresponding phase after propagation for 1m.
[0140] like Figure 10 When the optical modulation element 10 includes nanostructure units, the nanostructure units can form Figure 10 The phase arrangement is shown. In this embodiment, the nanostructure units are arranged in a tetragonal pattern. In other embodiments, the nanostructure units may also be arranged in a hexagonal pattern or a polar coordinate pattern, etc.
[0141] like Figure 11 In some embodiments, after the optical modulation element 10 constructs a phase distribution based on the target deflection angle, a collimated phase can be further superimposed on this distribution to determine the final first phase. After superimposing the collimated phase, the four optical modulation elements 10 form... Figure 11 The phase state is shown. (As shown in the image) Figure 12Light modulation elements with different phases receive the light beam and deflect and modulate it to obtain angular spatial imaging patterns distributed at different positions.
[0142] like Figure 13 When the optical modulation element 10 includes nanostructure units, the nanostructure units after superimposed collimation phase can form Figure 13 The phase arrangement is shown.
[0143] like Figure 14 In some embodiments, the first angle can be determined in advance. Perform phase arrangement, such as Figure 14 As shown; then by rotating a second angle The final phase arrangement is obtained. When the optical modulation element 10 includes nanostructure units, the second angle... The resulting nanostructure units with the final phase arrangement are as follows: Figure 15 As shown.
[0144] like Figure 16 In some embodiments, the optical modulation element 10 is thus based on the first angle. Second angle After configuration, collimated phases can be further superimposed on this basis to determine the final first phase. After superimposing the collimated phase, the four optical modulation elements 10 form... Figure 16 The phase state is shown. (As shown in the image) Figure 17 When the optical modulation element 10 includes nanostructure units, the nanostructure units after superimposed collimation phase can form Figure 16 The phase arrangement is shown.
[0145] In one embodiment, such as Figure 18 One embodiment of this application provides a light emitting component 1000.
[0146] The light emitting component 1000 includes a light output device 200.
[0147] The optical emitting assembly 1000 includes an optical deflector 100. The optical deflector 100 is configured according to any of the technical solutions of this application.
[0148] In one embodiment, the light output device 200 includes a light source 20. There may be n light sources 20. The n light sources 20 may be arranged periodically. For example, Figure 18 In the light output device 200, there are eight light sources 20 arranged in a matrix.
[0149] In one embodiment, the optical deflector 100 includes n optical modulation elements 10. The n optical modulation elements 10 can be arranged periodically. The n optical modulation elements 10 can correspond to n light sources 20. For example, Figure 18In this configuration, the light deflector 100 includes eight light modulation elements 10, which are arranged in a matrix. This corresponding arrangement facilitates the differentiated use of the light source 20.
[0150] In one embodiment, the optical modulation element 10 is used to receive light output from a corresponding light source 20. The optical modulation element 10 is used to modulate and output the incident light according to a predetermined target deflection angle. For example, Figure 18 In the process, eight optical modulation elements 10 are respectively arranged corresponding to eight light sources 20, so as to receive the light beams output from the eight light sources 20 and modulate them according to their respective target deflection angles.
[0151] The light source 20 can be a VCSEL. The light output device 200 can include multiple VCSELs.
[0152] When arranged periodically, the beams output by multiple light sources 20 will mix after propagating a certain distance and become difficult to separate for use. At this time, by deflecting and modulating the beams by the light deflector 100, the beams output by multiple light sources 20 that are relatively close to each other can be emitted at different angles, so as to distinguish them for use.
[0153] Furthermore, when the optical modulation element 10 is close to the light source 20 and the beam propagation distance is short, it is difficult to miniaturize the optical modulation element 10 based on conventional optical devices, making it difficult to integrate it into the light source 20, especially a VCSEL. However, the optical modulation element 10 and optical deflector 100 provided in this application implement planar diffraction light modulation technology, which supports precise control of the emitted light phase at close range and small size, thereby realizing the miniaturization and integration of the light emitting component 1000.
[0154] In one embodiment, combined with Figure 7 The target deflection angle of at least one of the n optical modulation elements includes a first angle; the first angle corresponding to the optical modulation element is 10 degrees. The target deflection angle of at least one of the n optical modulation elements includes a second angle; the second angle corresponding to the optical modulation element is 30 degrees.
[0155] For example, such as Figures 7 to 13 The first angle of the first modulation element e1 is 10 degrees, and the second angle is 30 degrees. Regarding the position of the first modulation element e1... At this point, the first modulation element e1 may have a phase. It can satisfy: .
[0156] wavelength of incident light It could be 850nm.
[0157] In one embodiment, the target deflection angle of at least one of the n optical modulation elements includes a first angle; the first angle corresponding to the optical modulation element is 15 degrees. The target deflection angle of at least one of the n optical modulation elements includes a second angle; the second angle corresponding to the optical modulation element is 120 degrees.
[0158] For example, such as Figures 7 to 13 The first angle of the second modulation element e2 is 15 degrees, and the second angle is 120 degrees. Regarding the position of the second modulation element e2... At this point, the second modulation element e2 can have a phase. It can satisfy: .
[0159] wavelength of incident light It could be 850nm.
[0160] In one embodiment, the target deflection angle of at least one of the n optical modulation elements includes a first angle; the first angle corresponding to the optical modulation element is 30 degrees. The target deflection angle of at least one of the n optical modulation elements includes a second angle; the second angle corresponding to the optical modulation element is -45 degrees.
[0161] For example, such as Figures 7 to 13 The first angle of the third modulation element e3 is 30 degrees, and the second angle is -45 degrees. Regarding the position of the third modulation element e3... At this point, the third modulation element e3 can have phase. It can satisfy: .
[0162] wavelength of incident light It could be 850nm.
[0163] In one embodiment, the target deflection angle of at least one of the n optical modulation elements includes a first angle; the first angle corresponding to the optical modulation element is 45 degrees. The target deflection angle of at least one of the n optical modulation elements includes a second angle; the second angle corresponding to the optical modulation element is -135 degrees.
[0164] For example, such as Figures 7 to 13 The first angle of the fourth modulation element e4 is 45 degrees, and the second angle is -135 degrees. Regarding the position of the fourth modulation element e4... At this point, the fourth modulation element e4 can have phase. It can satisfy: .
[0165] wavelength of incident light It could be 850nm.
[0166] Based on this, we can obtain the following respectively: Figures 8 to 13 The phase distribution, angular spatial imaging pattern, and arrangement of nanostructure units.
[0167] In this application, the optical modulation elements with the four target deflection angle configurations described above are used as examples for description. This does not limit the application to only be implemented with the above-described angle configurations. In some other embodiments, the optical modulation elements may also have other target deflection angle settings.
[0168] In one embodiment, the target deflection angle of at least one of the n optical modulation elements includes a first angle; the first angle corresponding to the optical modulation element is 2.5 degrees. The target deflection angle of at least one of the n optical modulation elements includes a second angle; the second angle corresponding to the optical modulation element is 8.5 degrees.
[0169] In one embodiment, the target deflection angle of at least one of the n optical modulation elements includes a first angle; the first angle corresponding to the optical modulation element is 4 degrees. The target deflection angle of at least one of the n optical modulation elements includes a second angle; the second angle corresponding to the optical modulation element is 0.5 degrees.
[0170] In one embodiment, the target deflection angle of at least one of the n optical modulation elements includes a first angle; the first angle corresponding to the optical modulation element is 13 degrees. The target deflection angle of at least one of the n optical modulation elements includes a second angle; the second angle corresponding to the optical modulation element is 6 degrees.
[0171] In one embodiment, the target deflection angle of at least one of the n optical modulation elements includes a first angle; the first angle corresponding to the optical modulation element is 2 degrees. The target deflection angle of at least one of the n optical modulation elements includes a second angle; the second angle corresponding to the optical modulation element is 9.5 degrees.
[0172] In one embodiment, the optical modulation element 10 can first perform phase configuration according to a first angle, and then rotate according to a second angle to determine the final phase.
[0173] At this time, as Figures 14 to 17 The phase of the first modulation element e1 can be... Phase of the second modulation element e2 Phase of the third modulation element e3 and the phase of the fourth modulation element e4 Configured to satisfy: ; ; ; .
[0174] Then, the four optical modulation elements are rotated by their respective second angles to determine the final structure of the optical modulation elements.
[0175] Based on this, we can obtain the following respectively: Figures 14 to 17 The phase distribution and the arrangement of nanostructure units.
[0176] In one embodiment, such as Figure 19 and Figure 20 The optical modulation element 10 includes nanostructure units. These nanostructure units are used to construct the metasurface.
[0177] In one embodiment, such as Figure 19 The nanostructure unit is disposed on the side of the optical modulation element 10 near the optical output device 200.
[0178] In this way, the metasurface is positioned between the optical modulation element 10 and the optical output device 200, which can prevent it from being scratched by external objects.
[0179] The optical deflector 100 may include a substrate 300, and four regions on the substrate 300 are respectively provided with nanostructure units. The nanostructure units in the four regions and the substrate 300 respectively constitute four optical modulation elements 10. Each optical modulation element 10 is respectively provided with a different light source 20 in the optical output device 200.
[0180] In this embodiment, nanostructure units are disposed on the side of substrate 300 near light source 20; the nanostructure units on the side of substrate 300 near light source 20 are used to form metasurface.
[0181] In one embodiment, such as Figure 20 The nanostructure unit is disposed on the side of the optical modulation element 10 away from the optical output device 200.
[0182] In this embodiment, nanostructure units are disposed on the side of substrate 300 near light source 20; the nanostructure units on the side of substrate 300 near light source 20 are used to form metasurface.
[0183] In summary, the optical deflector and optical emitting assembly provided in this application provide an optical modulation element fabricated based on the phase determined by the target deflection angle. This enables the incident light to be modulated and deflected according to the magnitude of the target deflection angle in the first axial direction perpendicular to the first plane where the optical modulation element is located, thereby achieving high-precision deflection modulation. On the other hand, since the above effects are achieved by configuring the phase of the optical modulation element, no other optical elements need to be added, which greatly simplifies the structural complexity of the optical deflector and is beneficial to the miniaturization design of the optical deflector.
[0184] It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
[0185] The detailed descriptions listed above are merely specific descriptions of feasible implementation methods of this application and are not intended to limit the scope of protection of this application. All equivalent implementation methods or modifications made without departing from the spirit of the art of this application should be included within the scope of protection of this application.
Claims
1. An optical deflector, characterized in that, include: The optical modulation element has a first phase, which is set according to the target deflection angle. The optical modulation element is arranged on a first plane, and is used to modulate the incident light and output it with an amplitude relative to the target deflection angle of the first plane. The target deflection angle includes a first angle. The first angle is the angle between the target deflection direction and the first axis, which is perpendicular to the first plane.
2. The optical deflector according to claim 1, characterized in that, First phase Compared to the first angle satisfy: , It is the wavelength of the incident light.
3. The optical deflector according to claim 1, characterized in that, Configured according to at least one of the following: Optical modulation elements include gratings, The optical modulation element includes nanostructure units that form a metasurface, the dimensions of which are determined according to the first phase. Optical modulation elements include diffractive optical elements.
4. The optical deflector according to claim 1, characterized in that, The target deflection angle includes a second angle. The second angle is the angle between the projection of the target deflection direction onto the first plane and the second axis, which is parallel to the first plane.
5. The optical deflector according to claim 4, characterized in that, First phase Compared to the first angle Second angle satisfy: ,or ,or 。 6. The optical deflector according to claim 5, characterized in that, For the first position at the first plane First phase Compared to the first angle Second angle satisfy: ， It is the wavelength of the incident light.
7. The optical deflector according to claim 4, characterized in that, The optical modulation element includes a grating, the grating being based on a first period. Settings, first cycle Compared to the first angle satisfy: ； The angle between the arrangement direction of the grating and the second axis is the second angle.
8. The optical deflector according to claim 4, characterized in that, The optical modulation element includes a metasurface, or the optical modulation element is a diffractive optical element; Compared to the third axis, the first phase Compared with the first angle satisfy: , It is the wavelength of the incident light. The third axis is parallel to the first plane. The angle between the third axis and the second axis is the second angle.
9. The optical deflector according to claim 1, characterized in that, The first phase is set based on the target deflection angle and the collimation phase; The collimated phase includes at least one of the following: spherical phase, Gaussian phase, and binary surface phase.
10. A light-emitting component, characterized in that, include: Optical output devices An optical deflector, configured according to any one of claims 1-9.
11. The light emitting component according to claim 10, characterized in that, The optical output device comprises n light sources arranged in a periodic manner. The optical deflector includes n optical modulation elements, which are arranged corresponding to the n light sources. The optical modulation element is used to receive light output from the corresponding light source, modulate it, and output the incident light according to their respective preset target deflection angles.
12. The light emitting component according to claim 11, characterized in that, At least one of the n optical modulation elements is configured according to one of the following: The target deflection angle of the optical modulation element includes a first angle of 10 degrees and a second angle of 30 degrees. The target deflection angle of the optical modulation element includes a first angle of 15 degrees and a second angle of 120 degrees. The target deflection angle of the optical modulation element includes a first angle of 30 degrees and a second angle of -45 degrees. The target deflection angle of the optical modulation element includes a first angle of 45 degrees and a second angle of -135 degrees. The target deflection angle of the optical modulation element includes a first angle of 2.5 degrees and a second angle of 8.5 degrees. The target deflection angle of the optical modulation element includes a first angle of 4 degrees and a second angle of 0.5 degrees. The target deflection angle of the optical modulation element includes a first angle of 13 degrees and a second angle of 6 degrees. The target deflection angle of the optical modulation element includes a first angle of 2 degrees and a second angle of 9.5 degrees.
13. The light emitting component according to claim 10, characterized in that, The optical modulation element includes nanostructure units that form a metasurface. The nanostructure unit is disposed on the side of the optical modulation element near the optical output device.