An external foolproof device capable of preventing the falling of a mask plate groove

Abstract

The utility model discloses a can prevent the outer additional foolproof device of photomask version slot drop, including machine table, baffle, photomask version slot, photomask version box, limiting mechanism and control mechanism, the baffle is arranged on the machine table, the recessed setting of photomask version slot is in the top front end of machine table, the photomask version box is arranged in the inside of photomask version slot, the limiting mechanism is arranged in the inside of machine table, control mechanism is arranged on machine table and photomask version slot. This scheme is through mechanical mistake proofing, electrical guidance, multiple fixing and flexible adaptation, realizes the comprehensive benefit of operation foolproof, stable and convenient, fundamentally solves the photomask version operation damage problem, provides reliable protection for its storage transfer loading and unloading, helps to improve the precision, efficiency and yield of photolithography process.

Description

Technical Field

[0001] This utility model relates to the technical field of conveying devices for transporting photomasks, specifically an external anti-mistake device that can prevent the photomask slot from falling off. Background Technology

[0002] A photomask box is a sealed protective container used for storing and transporting the photomask, a core precision component in photolithography. Its core function is to isolate dust, particles, and other contaminants during storage, loading / unloading, and transport of the photomask, preventing scratches, collisions, or environmental corrosion to the nanoscale patterns on its surface. Simultaneously, it works with the equipment's positioning structure to ensure precise photomask installation. It is a crucial protective carrier for ensuring the accuracy of the photolithography process and preventing photomask damage. Photomask boxes are typically installed inside the photomask slot of a photolithography machine.

[0003] Lithography machines without error prevention devices are at risk of operational errors. Removing the photomask box when the machine is unloaded can cause scratching or damage to the photomask.

[0004] Therefore, a solution is needed. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] To address the shortcomings of existing technologies, this utility model provides an external anti-mistake device that can prevent the photomask slot from falling off, thereby solving the problems mentioned in the background art.

[0007] (II) Technical Solution

[0008] To achieve the above objectives, this utility model provides the following technical solution:

[0009] An external foolproof device for preventing photomask tray from falling off includes a machine base, a baffle, a photomask tray, a photomask box, a limiting mechanism, and a control mechanism. The baffle is disposed on the machine base, the photomask tray is recessed at the front end of the top of the machine base, the photomask box is disposed inside the photomask tray, the limiting mechanism is disposed inside the machine base, and the control mechanism is disposed on the machine base and the photomask tray.

[0010] The limiting mechanism includes a rotating groove, a stepper motor, a rotating shaft, a connecting plate, a limiting plate, a limiting groove, and an insert. The rotating grooves are arranged concavely and diagonally at the bottom of the photomask slot. The stepper motor is located at the front end of each rotating groove and at the front end of the machine tool. The rotating shaft is located at the rear end of each stepper motor and inside the rotating groove. The connecting plate is arranged in the four directions (up, down, left, and right) of each rotating shaft. The limiting plate is located at the end of each connecting plate away from the rotating shaft. The limiting groove is located at the outer end of each limiting plate. The insert is located at the bottom of the photomask box, corresponding to the position of each limiting groove at the top.

[0011] Preferably, the rotating shaft, connecting plate, and limiting plate are integrally formed, the insert and the photomask box are integrally formed, and the width of each limiting groove in the circumferential direction is different.

[0012] Preferably, the control mechanism includes a telescopic groove, a cylinder, a limit block, a touch sensor, a control panel, a yellow light, and a green light. The telescopic grooves are oppositely recessed at the left and right ends of the photomask groove. The cylinder is located at the inner end of each telescopic groove. The limit block is located at the output end of each cylinder. The touch sensor is located at the rear end of the photomask groove. The control panel is located at the bottom of the front end of the photomask groove. The yellow light and green light are respectively arranged in a left-right configuration on the control panel.

[0013] Preferably, the telescopic grooves are rectangular in shape and located in the middle of the front-rear direction of the photomask groove, and the limiting block is cuboid in shape.

[0014] (III) Beneficial Effects

[0015] This invention provides an external anti-mistake device to prevent photomask slots from falling off. It has the following beneficial effects:

[0016] 1. Through the matching design of the limiting groove and the insert strip and the linkage of the light status, the mechanical and signal double foolproofing is achieved, eliminating damage to the photomask caused by operational errors.

[0017] 2. The dual structure of bottom insert-limiting groove engagement and top cylinder-limiting block fixation greatly improves the stability of the photomask box and prevents it from falling off or the box cover from popping out.

[0018] 3. The control panel is easy to operate, and the light signals provide intuitive guidance, reducing the operating threshold and improving the efficiency and reliability of the photolithography process.

[0019] 4. The stepper motor has an adjustable limit slot orientation to adapt to different specifications of photomask boxes, reducing adaptation costs and maintenance difficulty. Attached Figure Description

[0020] Figure 1This is a schematic diagram of the overall structure of the machine tool of this utility model;

[0021] Figure 2 This utility model is based on Figure 1 Detailed structural diagram;

[0022] Figure 3 This is a schematic diagram of the limiting mechanism of this utility model;

[0023] Figure 4 This is a schematic diagram of the internal structure of the telescopic groove of this utility model.

[0024] In the diagram: 1-Machine base; 2-Baffle; 3-Photomask slot; 4-Photomask box; 5-Limiting mechanism; 51-Rotating groove; 52-Stepper motor; 53-Rotating shaft; 54-Connecting plate; 55-Limiting plate; 56-Limiting groove; 57-Insertion strip; 6-Control mechanism; 61-Telescopic groove; 62-Cylinder; 63-Limiting block; 64-Touch sensor; 65-Control panel; 66-Yellow light; 67-Green light. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Please see Figure 1-4 The present invention provides a technical solution to achieve this: including a machine base 1, a baffle 2, a photomask slot 3, a photomask box 4, a limiting mechanism 5, and a control mechanism 6. The baffle 2 is disposed on the machine base 1, the photomask slot 3 is recessed and disposed at the front end of the top of the machine base 1, the photomask box 4 is disposed inside the photomask slot 3, the limiting mechanism 5 is disposed inside the machine base 1, and the control mechanism 6 is disposed on the machine base 1 and the photomask slot 3.

[0027] The limiting mechanism 5 includes a rotating groove 51, a stepper motor 52 (model: 42BYGH4818), a rotating shaft 53, a connecting plate 54, a limiting plate 55, a limiting groove 56, and an insert 57. The rotating groove 51 is set inwardly at the bottom of the photomask slot 3, with the left and right sides facing each other. The stepper motor 52 is set at the front end of each rotating groove 51 and at the front end of the machine base 1. The rotating shaft 53 is set at the rear end of each stepper motor 52 and inside the rotating groove 51. The connecting plate 54 is set in the four directions of up, down, left, and right of each rotating shaft 53. The limiting plate 55 is set at the end of each connecting plate 54 away from the rotating shaft 53. The limiting groove 56 is set at the outer end of each limiting plate 55. The insert 57 is set at the bottom of the photomask box 4, corresponding to the position of each limiting groove 56 located at the top.

[0028] In detail, the rotating shaft 53, connecting plate 54 and limiting plate 55 are integrally formed, the insert 57 and photomask box 4 are integrally formed, and the width of each limiting groove 56 in the circumferential direction is different.

[0029] The control mechanism 6 includes a telescopic groove 61, a cylinder 62 (model: CDJ2B10-15Z), a limit block 63, a touch sensor 64 (model: D4C-1232), a control panel 65, a yellow light 66, and a green light 67. The telescopic grooves 61 are oppositely recessed at the left and right ends of the photomask groove 3. The cylinders 62 are located at the inner end of each telescopic groove 61. The limit blocks 63 are located at the output end of each cylinder 62. The touch sensor 64 is located at the rear end of the photomask groove 3. The control panel 65 is located at the bottom of the front end of the photomask groove 3. The yellow light 66 and the green light 67 are respectively arranged on the control panel 65 in a left-right structure.

[0030] The telescopic grooves 61 are rectangular in shape and are located in the middle of the front and rear directions of the photomask groove 3. The limiting block 63 is cuboid in shape.

[0031] Solution Analysis:

[0032] I. Excellent error-proof function, avoiding damage to the photomask due to operational mistakes.

[0033] In existing technologies, lithography machines are prone to errors when removing the photomask during unloading, leading to scratches or damage to the photomask. This solution addresses this by using the coordinated action of the limiting mechanism 5 and the control mechanism 6 to prevent mistaken identification through both mechanical structure and signal control.

[0034] Mechanically, by utilizing the matching design of the limiting grooves 56 and the inserts 57 with different widths, only the photomask box 4 whose width matches the width of the bottom insert 57 and the width of the upward limiting groove 56 can be pushed in, thus avoiding incorrect installation from the source.

[0035] At the signal control level, the status of touch sensor 64, yellow light 66, and green light 67 are linked to clearly indicate the installation status of photomask box 4 (a constantly lit yellow light 66 indicates that it is not in place, and a lit green light 67 indicates that the installation is complete). Operators can intuitively judge whether the operation is compliant through the lights, completely eliminating the risk of photomask damage caused by operational errors.

[0036] II. Strong structural stability, multiple fixing measures ensure the photomask box will not fall off.

[0037] This solution significantly improves the stability of the photomask box 4 within the photomask slot 3 through a dual fixing structure of "bottom insert-limiting groove fit + top cylinder-limiting block fixation":

[0038] The bottom insert 57 and the limiting groove 56 form a mechanical engagement to limit the horizontal displacement of the photomask box 4;

[0039] The top cylinder 62 drives the limiting block 63 to extend, limiting the top of the photomask box 4 and preventing its lid from accidentally popping out or falling off completely. This multi-fixing design ensures that the photomask box 4 remains stable during storage, machine loading and unloading, and transportation, providing a reliable protective carrier for the photomask.

[0040] III. Easy to operate, improving the efficiency and reliability of photolithography processes.

[0041] This solution offers a simple and highly instructive workflow:

[0042] Operators can control the stepper motor 52 and cylinder 62 through the control panel 65 without the need for complicated manual adjustments;

[0043] The light signals (yellow light 66, green light 67) provide intuitive feedback on the equipment status, lowering the operational threshold and allowing even beginners to quickly grasp the operating logic. This not only improves the operational efficiency of the photolithography process but also indirectly ensures the precision and reliability of the photolithography process by reducing the probability of photomask damage, laying the foundation for high yields in subsequent chip manufacturing and other stages.

[0044] IV. Flexible structural design, adaptable to photomask boxes of different specifications.

[0045] The stepper motor 52 drives the rotating shaft 53 to rotate, and the orientation of the limiting groove 56 is adjusted. Different widths of the limiting groove 56 can be switched to fit with the insert 57 at the bottom of the photomask box 4, so that the device can be adapted to a variety of photomask boxes 4 of different specifications. It has good compatibility and expandability, and there is no need to design a separate foolproof device for each photomask box 4, which reduces the adaptation cost and maintenance difficulty of the equipment.

[0046] Working principle:

[0047] The operation of the stepper motor 52 and cylinder 62 can be controlled via the control panel 65. When the touch sensor 64 is not in contact with the rear end of the photomask box 4, the yellow light 66 remains constantly lit. Before pushing the photomask box 4 in, the stepper motor 52 is driven to rotate the limiting plate 55 via the rotating shaft 53 until the limiting groove 56 of the required width is facing upwards. Then, the photomask box 4, with its bottom corresponding to the width of the insert strip 57, is horizontally pushed into the photomask groove 3. The rear end of the photomask box 4 contacts the touch sensor 64. After receiving the signal, the touch sensor 64 transmits it to the control panel 65, which controls the cylinder 62 to push out the limiting block 63 to fix the top of the photomask box 4, preventing the lid from accidentally popping out. Then, the green light 67 illuminates and the yellow light 66 turns off. When removing the photomask box 4, the green light 67 will turn off and the yellow light 66 will illuminate simultaneously when the limiting block 63 retracts and the photomask box 4 leaves the touch sensor 64.

[0048] Technical effects of implementing this solution:

[0049] This solution achieves comprehensive benefits such as error-proofing of operation, structural stability, convenient operation, and strong adaptability through error-proofing design of mechanical structure, status guidance of electrical control, multiple fixed stability guarantees, and flexible adaptability. It fundamentally solves the problem of photomask damage caused by operational errors in existing lithography machines, and provides a safe and reliable protection solution for the storage, transportation, and handling of photomasks. It is of great significance for improving the precision, efficiency, and yield of lithography processes.

[0050] The components of this utility model are: 1-machine base; 2-baffle; 3-photomask slot; 4-photomask box; 5-limiting mechanism; 51-rotating groove; 52-stepper motor; 53-rotating shaft; 54-connecting plate; 55-limiting plate; 56-limiting groove; 57-insertion strip; 6-control mechanism; 61-telescopic groove; 62-cylinder; 63-limiting block; 64-touch sensor; 65-control panel; 66-yellow light; 67-green light. These components are all general standard parts or components known to those skilled in the art. Their structure and principle can be learned by those skilled in the art through technical manuals or conventional experimental methods. The problem solved by this utility model is that photolithography machines without error prevention devices are at risk of operational errors, and removing the photomask box when the machine is unloaded can cause scratching or damage to the photomask. This invention achieves comprehensive benefits of error prevention, stability, and convenience through mechanical error prevention, electrical guidance, multiple fixing mechanisms, and flexible adaptation. It fundamentally solves the problem of damage to photomasks during operation, provides reliable protection for their storage, transportation, and handling, and helps improve the precision, efficiency, and yield of photolithography processes.

[0051] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0052] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. An external foolproof device to prevent photomask slot from falling off, characterized in that: The system includes a machine base (1), a baffle (2), a photomask slot (3), a photomask box (4), a limiting mechanism (5), and a control mechanism (6). The baffle (2) is disposed on the machine base (1). The photomask slot (3) is recessed at the front end of the top of the machine base (1). The photomask box (4) is disposed inside the photomask slot (3). The limiting mechanism (5) is disposed inside the machine base (1). The control mechanism (6) is disposed on the machine base (1) and the photomask slot (3). The limiting mechanism (5) includes a rotating groove (51), a stepper motor (52), a rotating shaft (53), a connecting plate (54), a limiting plate (55), a limiting groove (56), and an insert (57). The rotating groove (51) is recessed and arranged in opposite directions at the bottom of the photomask slot (3). The stepper motor (52) is located at the front end of each rotating groove (51) and at the front end of the machine base (1). The rotating shaft (53) is located at the rear end of each stepper motor (52) and inside the rotating groove (51). The connecting plate (54) is arranged in the four directions of up, down, left, and right of each rotating shaft (53). The limiting plate (55) is located at the end of each connecting plate (54) away from the rotating shaft (53). The limiting groove (56) is located at the outer end of each limiting plate (55). The insert (57) is located at the bottom of the photomask box (4) corresponding to the position of each limiting groove (56) located at the top.

2. The external anti-mistake device for preventing photomask slot from falling off according to claim 1, characterized in that: The rotating shaft (53), connecting plate (54) and limiting plate (55) are integrally formed, the insert (57) and the photomask box (4) are integrally formed, and the width of each limiting groove (56) in the circumferential direction is different.

3. An external anti-mistake device for preventing photomask slot from falling off according to claim 2, characterized in that: The control mechanism (6) includes a telescopic groove (61), a cylinder (62), a limiting block (63), a touch sensor (64), a control panel (65), a yellow light (66), and a green light (67). The telescopic groove (61) is recessed and oppositely arranged at the left and right ends of the photomask groove (3). The cylinder (62) is arranged at the inner end of each telescopic groove (61). The limiting block (63) is arranged at the output end of each cylinder (62). The touch sensor (64) is arranged at the rear end of the photomask groove (3). The control panel (65) is arranged at the bottom of the front end of the photomask groove (3). The yellow light (66) and the green light (67) are arranged on the control panel (65) in a left-right structure.

4. An external anti-mistake device for preventing photomask slot from falling off according to claim 3, characterized in that: The telescopic groove (61) is rectangular in shape and is located in the middle of the front and rear direction of the photomask groove (3). The limiting block (63) is cuboid in shape.

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