A temperature control system for a vacuum gauge based on temperature difference measurement
Patent Information
- Application Number
- CN202522738217.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-24
- Publication Date
- 2026-10-30
- Estimated Expiration
- 2035-12-24
AI Technical Summary
微小温差（如±0.5℃以内）可能导致薄膜厚度不均、材料应力分布异常或反应速率不一致，进而影响最终产品性能
[0016]本实用新型的有益效果是：本实用新型提供的基于温差测量的真空计温度控制系统采用测温组件进行测温，不仅能够提供高精度、高稳定性的基准温度参考，同时能够快速响应温度变化，实现微小温差的实时捕捉；控制器分别处理热电阻和热电偶输出的信号，实现温度与温差协同控制；在真空计的两端分别设置有第一温控件和第二温控件由控制器根据温差信号实时调节两端功率，实现差动控温，保证了温度控制的一致性；对于真空镀膜、半导体工艺腔、真空热处理等对温度均匀性要求极高的场合，能够显著提升工艺一致性与产品良率；并且基于温差测量的真空计温度控制系统的结构简单，安装使用便捷，可靠性高。
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Figure CN224922209U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum gauge temperature measurement and control, specifically to a vacuum gauge temperature control system based on temperature difference measurement. Background Technology
[0002] In semiconductor manufacturing processes, the uniformity of the temperature field within a vacuum gauge has a critical impact on process stability and product quality. Even minute temperature differences (such as within ±0.5℃) can lead to uneven film thickness, abnormal material stress distribution, or inconsistent reaction rates, thereby affecting the performance of the final product.
[0003] Currently, temperature measurement and control in vacuum environments mainly rely on single-type temperature sensors, such as resistance temperature detectors (RTDs) or thermocouples. RTDs (e.g., PT100) offer advantages in high measurement accuracy and stability, but their slow response time makes it difficult to quickly capture temperature changes in dynamic temperature fields. Thermocouples (e.g., type K) have fast response times and wide temperature ranges, but their output signals are weak (millivolt levels), susceptible to electromagnetic interference, and have low signal-to-noise ratios and limited accuracy in measuring small temperature differences. Furthermore, existing temperature control systems often employ rigid circuit boards or independent sensor arrangements, making them unsuitable for the complex installation environments of vacuum gauges. The separation of temperature measurement and control units also results in low system integration and complex installation arrangements.
[0004] Therefore, it is necessary to provide a new vacuum gauge temperature control system based on temperature difference measurement. Utility Model Content
[0005] Based on the aforementioned problems in the existing technology, the purpose of this utility model embodiment is to provide a vacuum gauge temperature control system based on temperature difference measurement. By setting up a temperature measuring component and two temperature control components, it achieves a combination of high-precision reference temperature measurement and rapid temperature difference response, thereby improving system integration and installation convenience, and effectively ensuring the stability and uniformity of the internal temperature field of the vacuum gauge.
[0006] To achieve the above objectives, the technical solution adopted by this utility model is: a vacuum gauge temperature control system based on temperature difference measurement, comprising a vacuum gauge, a first temperature control unit and a second temperature control unit respectively disposed at both ends of the vacuum gauge, a temperature measuring component disposed on the vacuum gauge, and a controller. The first temperature control unit is used to regulate the temperature at one end of the vacuum gauge, the second temperature control unit is used to regulate the temperature at the other end of the vacuum gauge, the temperature measuring component is used to measure the reference temperature on the vacuum gauge and the temperature difference between the two ends of the vacuum gauge, and the controller is electrically connected to the first temperature control unit, the second temperature control unit, and the temperature measuring component.
[0007] Furthermore, a reference temperature measurement area is preset on one end face of the cavity to be measured by the vacuum gauge, and a dynamic temperature measurement area is preset on the other end face of the cavity to be measured by the vacuum gauge.
[0008] Furthermore, the temperature measuring component is provided with two temperature measuring points, which are respectively located in the reference temperature measuring area and the dynamic temperature measuring area.
[0009] Furthermore, the first temperature control element is an annular heating element, which is attached to one end sidewall of the cavity to be measured in the vacuum gauge and is positioned close to the reference temperature measurement area.
[0010] Furthermore, the second temperature control element is an annular thin-film heating element, which is attached to the other side wall of the cavity to be measured in the vacuum gauge and is positioned close to the dynamic temperature measurement area.
[0011] Furthermore, the input terminal of the first temperature control is electrically connected to the output terminal of the controller. When the controller determines that the temperature of the reference temperature measurement zone deviates from the target, the controller adjusts the power supplied to the first temperature control to adjust the temperature near the reference temperature measurement zone.
[0012] Furthermore, the input terminal of the second temperature control is electrically connected to the output terminal of the controller. When the controller determines that the temperature of the dynamic temperature measurement zone deviates from the target, the controller adjusts the power supplied to the second temperature control to adjust the temperature near the dynamic temperature measurement zone.
[0013] Furthermore, the temperature measuring component is in the form of a flexible thin sheet, and is attached to the outer surface of the cavity to be measured of the vacuum gauge, and the installation position of the temperature measuring component covers the reference temperature measuring area and the dynamic temperature measuring area of the vacuum gauge.
[0014] Furthermore, the temperature measuring component includes a flexible substrate layer at the bottom, a conductive circuit layer 42, and a thermal resistor and a thermocouple disposed on the conductive circuit layer.
[0015] Furthermore, the controller is electrically connected to the first temperature control, the second temperature control, and the resistance temperature detector (RTD) and thermocouple of the temperature measuring component, respectively. The controller is connected to the RTD to collect the RTD resistance signal and obtain the reference temperature of the reference temperature measuring area. The controller is connected to the thermocouple to provide an excitation signal to the thermocouple and collect the thermoelectric potential signal output by the thermocouple to obtain the temperature difference between the dynamic temperature measuring area and the reference temperature measuring area.
[0016] The beneficial effects of this utility model are as follows: The vacuum gauge temperature control system based on temperature difference measurement provided by this utility model uses a temperature measuring component for temperature measurement, which not only provides a high-precision and high-stability reference temperature, but also can quickly respond to temperature changes and achieve real-time capture of minute temperature differences; the controller processes the signals output by the resistance temperature detector (RTD) and the thermocouple, respectively, to achieve coordinated control of temperature and temperature difference; a first temperature control unit and a second temperature control unit are respectively set at both ends of the vacuum gauge, and the controller adjusts the power at both ends in real time according to the temperature difference signal to achieve differential temperature control and ensure the consistency of temperature control; for applications with extremely high requirements for temperature uniformity, such as vacuum coating, semiconductor process cavities, and vacuum heat treatment, it can significantly improve process consistency and product yield; and the vacuum gauge temperature control system based on temperature difference measurement has a simple structure, is easy to install and use, and has high reliability. Attached Figure Description
[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0018] In the picture: Figure 1 A schematic diagram illustrating the use of the vacuum gauge temperature control system provided in this embodiment of the utility model; Figure 2 A top view of the temperature measuring component provided in an embodiment of this utility model; Figure 3 This is a cross-sectional view of the temperature measuring component provided in an embodiment of the present invention.
[0019] The component names and their numbers in the diagram are as follows: Vacuum gauge temperature control system 100 based on temperature difference measurement; Vacuum gauge 1; First temperature control unit 2; Second temperature control 3; Temperature sensing component 4, flexible substrate layer 41, conductive circuit layer 42, protective layer 43, resistance temperature detector 44, thermocouple 45, working end 451, compensation end 452. Detailed Implementation
[0020] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.
[0021] It should be noted that when a component is referred to as "connected to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as "connected to" another component, it can be directly connected to or indirectly connected to that other component.
[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0023] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0024] Throughout this specification, reference to "an embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment of this application. Therefore, the phrases "in one embodiment," "in some embodiments," or "in some of these embodiments" appear in various places throughout the specification, and not all refer to the same embodiment. Furthermore, in one or more embodiments, a particular feature, structure, or characteristic may be combined in any suitable manner.
[0025] like Figure 1 As shown, an embodiment of this utility model provides a vacuum gauge temperature control system 100 based on temperature difference measurement, including a vacuum gauge 1, a first temperature control 2 and a second temperature control 3 respectively disposed at both ends of the vacuum gauge 1, a temperature measuring component 4 disposed on the vacuum gauge 1, and a controller (not shown in the figure). The controller is electrically connected to the first temperature control 2, the second temperature control 3, and the temperature measuring component 4. The first temperature control 2 is used to regulate the temperature at one end of the vacuum gauge 1. The second temperature control 3 is used to regulate the temperature at the other end of the vacuum gauge 1. The temperature measuring component 4 is used to measure the reference temperature on the vacuum gauge 1 and the temperature difference between the two ends of the vacuum gauge 1. The controller is used to control the first temperature control 2 and the second temperature control 3 to perform temperature control based on the temperature obtained from the temperature measuring component 4.
[0026] In some embodiments, the cavity to be measured by the vacuum gauge 1 is generally cylindrical. A reference temperature measurement area 11 is preset on one end face of the cavity to be measured by the vacuum gauge 1, and a dynamic temperature measurement area 12 is preset on the other end face of the cavity to be measured by the vacuum gauge 1. The first temperature control unit 2 is located near the reference temperature measurement area 11, and the second temperature control unit 3 is located near the dynamic temperature measurement area 12. The temperature measuring component 4 is provided with two temperature measuring points, which are respectively located in the reference temperature measurement area 11 and the dynamic temperature measurement area 12. The vacuum gauge temperature control system 100 based on temperature difference measurement feeds back the temperature data of the vacuum gauge 1 and the temperature difference data at both ends through the temperature measuring component 2. The controller controls the first temperature control unit 2 and the second temperature control unit 3 respectively to achieve precise temperature regulation of the vacuum gauge 1, ensuring a stable and uniform internal temperature field of the vacuum gauge 1, and avoiding the impact of excessive temperature difference on the working stability and application process effect of the vacuum gauge 1.
[0027] In some embodiments, the first temperature control 2 is an annular heating element. The first temperature control 2 is attached to one end sidewall of the cavity to be measured in the vacuum gauge 1 and is located close to the reference temperature measurement area 11. The input end of the first temperature control 2 is electrically connected to the output end of the controller. When the controller determines that the temperature of the reference temperature measurement area 11 deviates from the target, the controller adjusts the current / power supplied to the first temperature control 2 to achieve precise adjustment of the temperature near the reference temperature measurement area 11.
[0028] In some embodiments, the second temperature control 3 is an annular heating element. The second temperature control 3 is attached to the other side wall of the cavity to be measured in the vacuum gauge 1, and the second temperature control 3 is set close to the dynamic temperature measurement zone 12. The input end of the second temperature control 3 is electrically connected to the output end of the controller. When the controller determines that the temperature of the dynamic temperature measurement zone 12 deviates from the target, the controller adjusts the current / power supplied to the second temperature control 3, thereby achieving precise adjustment of the temperature near the dynamic temperature measurement zone 12.
[0029] In some of these embodiments, such as Figure 2 , Figure 3As shown, the temperature sensing component 4 is roughly in the shape of a flexible thin sheet. It is fitted onto the outer surface of the cavity to be measured in the vacuum gauge 1, and its installation position covers the reference temperature measuring area 11 and the dynamic temperature measuring area 12 of the vacuum gauge 1. The temperature sensing component 4 includes a flexible substrate layer 41 at the bottom, a conductive circuit layer 42, a protective layer 43 at the top, and a resistance temperature detector (RTD) 44 and a thermocouple 45 disposed on the conductive circuit layer 42. The conductive circuit layer 42 is located between the flexible substrate layer 41 and the protective layer 43. The flexible substrate layer 41 serves as a flexible support base at the bottom. The conductive circuit layer 42 serves as the mounting carrier for the RTD 44 and the thermocouple 45, ensuring stable signal transmission. The protective layer 43 provides insulation, oxidation protection, corrosion protection, and mechanical protection for the RTD 44 and the thermocouple 45. The RTD 44 provides a high-precision, high-stability temperature reference signal. The thermocouple 45 responds quickly to temperature changes and captures minute temperature difference signals.
[0030] In some embodiments, a flexible substrate layer 41 is located at the bottom. The flexible substrate layer 41 is generally in the form of a flexible film, which can adapt to various installation scenarios, such as curved surface installation or bending or deformation in narrow spaces. The shape of the flexible substrate layer 41 matches the laying range of the conductive circuit layer 42. The flexible substrate layer 41 is made of adhesive-free high-temperature resistant polyimide material, and the thickness of the flexible substrate layer 41 ranges from 30 to 60 μm. The flexible substrate layer 41 made of adhesive-free high-temperature resistant polyimide material has high temperature resistance, stable performance in the temperature range of -55℃ to 200℃, low outgassing rate, aging resistance, and good mechanical flexibility and physicochemical stability.
[0031] As an example, the flexible substrate layer 41 is made of adhesive-free high-temperature resistant polyimide material, and the thickness of the flexible substrate layer 41 is 50 μm.
[0032] In some embodiments, the conductive circuit layer 42 is made of high-ductility rolled copper foil with a thickness of 20–30 μm, exhibiting good conductivity and bend resistance. Precision circuit patterns, including RTD connection lines, thermocouple connection lines, and power and ground lines, are etched onto the conductive circuit layer 42 to achieve electrical connections with the RTD 44 and thermocouple 45, respectively. The thermocouple connection lines employ a differential transmission design with a line spacing controlled between 0.2 and 0.4 mm to effectively suppress electromagnetic interference; the RTD connection lines employ a short-path design to minimize line length and reduce signal attenuation. The conductive circuit layer 42 provides electrical connections and signal transmission channels for the RTD 44 and thermocouple 45, and also serves as a carrier for mounting the RTD 44 and thermocouple 45, achieving low-interference, low-attenuation signal transmission and ensuring the originality and stability of the temperature difference measurement signal.
[0033] As an example, the conductive circuit layer 42 is made of high-ductility rolled copper foil, and the thickness of the conductive circuit layer 42 is 35μm. The connection line of the thermocouple 45 is a differential line with a line width and line spacing of 0.2mm. The connection line of the resistance temperature detector 44 has a line width of 0.2mm. The power supply and grounding line width is 0.15mm.
[0034] In some embodiments, the protective layer 43 is made of a high-temperature resistant polyimide film with a thickness of 25 μm, exhibiting excellent insulation, heat resistance, and chemical stability. The protective layer 43 covers the conductive circuit layer 42, and has openings at the pad locations corresponding to the thermocouple 45 and the resistance temperature detector 44 to expose the pads for easy soldering. The protective layer 43 provides electrical insulation, preventing short circuits or leakage between circuits, and also offers protection against oxidation, moisture, and corrosion, preventing scratches, wear, or contamination of the circuitry.
[0035] In some embodiments, the thermal resistor 44 has a fixed package structure, with an internal wound or thin-film metal temperature-sensing resistor, an external insulating protective shell, and two electrode leads. The thermal resistor 44 is located at a preset reference temperature measurement position of the temperature measuring component 4, and when the temperature measuring component 4 is installed, the thermal resistor 44 is correspondingly attached to the reference temperature measurement area 11 of the vacuum gauge 1. The two electrode leads of the thermal resistor 44 are soldered directly to the dedicated solder pads for the thermal resistor 44 on the conductive circuit layer 42, thereby connecting to the thermal resistor connection line 21 on the conductive circuit layer 42 and thus connecting to the measurement circuit. The thermal resistor 44 is used as a reference temperature measurement, providing a high-precision and high-stability reference temperature value.
[0036] In some embodiments, the thermocouple 45 is a type K thermocouple. The positive electrode of a type K thermocouple is a nickel-chromium alloy, and the negative electrode is a nickel-silicon alloy. It features a wide temperature measurement range, high thermoelectric potential, and good stability, making it suitable for temperature measurement in a vacuum environment. Multiple thermocouples 45 are arranged in an array and connected in series to form a thermopile. Each thermocouple 45 includes a working end 451 at one end and a compensation end 452 at the other end. The working ends 451 of the multiple thermocouples 45 are arrayed at preset dynamic temperature measurement positions on the temperature measuring component 4, and when the temperature measuring component 4 is installed, the working ends of the thermocouples 45 are correspondingly attached to the dynamic temperature measurement area 12 of the vacuum gauge 1. The compensation ends 452 of the multiple thermocouples 45 are arrayed on the side closest to the resistance temperature detector 44. Multiple thermocouples 45 are connected in series, and their two pins at both ends are soldered directly to the dedicated differential pads for thermocouples 45 on the conductive circuit layer 42. This connects them to the thermocouple connection line 22 on the conductive circuit layer 42, thereby connecting to the differential measurement circuit. Thermocouples 45 are used to sense the temperature difference between the reference temperature measurement area 11 and the dynamic temperature measurement area 12, enabling them to quickly respond to temperature changes between the reference temperature measurement area 11 and the dynamic temperature measurement area 12. They output a thermoelectric potential proportional to the temperature difference. The output signal of thermocouples 45 is combined with the reference temperature signal provided by the resistance temperature detector 44 to calculate the real-time temperature difference between the two measurement points. Thermocouples 45 can capture transient temperature changes, compensating for the relatively slow response speed of the resistance temperature detector 44. Connecting multiple thermocouples 45 in series effectively amplifies weak thermoelectric potential signals, which is more conducive to subsequent circuit detection and processing, improving the signal-to-noise ratio and data reliability in the measurement of small temperature differences.
[0037] In some embodiments, the controller is electrically connected to the first temperature control 2, the second temperature control 3, and the resistance temperature detector (RTD) 44 and thermocouple 45 of the temperature measuring component 4, respectively. The controller is connected to the first temperature control 2 and outputs a control signal (such as a PWM signal) to adjust the heating power of the first temperature control 2 to control the temperature near the reference temperature measuring zone 11. The controller is connected to the second temperature control 3 and outputs a control signal (such as a PWM signal) to adjust the heating power of the second temperature control 3 to control the temperature near the dynamic temperature measuring zone 12. The controller is connected to the RTD 44 and acquires the resistance signal of the RTD 44 to obtain the reference temperature of the reference temperature measuring zone 11. The controller is connected to the thermocouple 45, provides an excitation signal to the thermocouple 45, and acquires the thermoelectric potential signal output by the thermocouple 45 to obtain the temperature difference between the dynamic temperature measuring zone 12 and the reference temperature measuring zone 11.
[0038] In some embodiments, the controller uses the reference temperature measured by the resistance temperature detector 44 as feedback, employs an independent PID control loop to calculate the overall temperature adjustment, and outputs the same control signal to the first temperature control unit 2 and the second temperature control unit 3 to adjust the temperature of the vacuum gauge 1 to the set value. The controller also uses the ADC value of the output signal from the thermocouple 45 as feedback, employs a PID control algorithm to calculate the control quantity in real time, and outputs a differential control signal to the first temperature control unit 2 and the second temperature control unit 3, causing their power to adjust in opposite directions, thereby quickly eliminating the temperature difference between the reference temperature measurement zone 11 and the dynamic temperature measurement zone 12.
[0039] As an example, the controller sends an excitation signal to thermocouple 45. If the working end 451 and the compensation end 452 of thermocouple 45 are at the same temperature, the feedback signal is 512 after being sampled by the controller's ADC. When the temperatures at both ends are different, the feedback value will vary between 0 and 1023. In order to ensure that the temperatures at both ends are the same, the first temperature control 2 and the second temperature control 3 located near the working end 451 and the compensation end 452 are controlled to make the feedback value return to 512, so that the temperature difference between the reference temperature measurement zone 11 and the dynamic temperature measurement zone 12 is 0.
[0040] In some embodiments, the temperature regulation control process of the controller is as follows: First, the controller provides an excitation signal to the thermocouple 45, collects the output signal of the thermocouple 45, converts it into a digital value through an ADC, and simultaneously collects the signal of the resistance temperature detector 44. The reference temperature of the reference temperature measurement zone 11 is calculated. If the ADC value obtained by the controller is not equal to 512, it indicates that there is a temperature difference between the reference temperature measurement zone 11 and the dynamic temperature measurement zone 12. The magnitude and polarity of the temperature difference are calculated based on the direction and magnitude of the ADC value deviating from 512. The power adjustment amount ΔP is calculated based on the temperature difference error of the thermocouple 45. The reference power P1 is calculated based on the deviation between the reference temperature of the resistance temperature detector 44 and the temperature set value. At this time, the power of the first temperature control 2 is calculated as P1 + ΔP, and the power of the second temperature control 3 is calculated as P1 – ΔP. The controller continuously monitors the ADC value of the thermocouple 45 and adjusts ΔP in real time to make the ADC value approach and stabilize at 512, thereby achieving temperature stability of the vacuum gauge 1.
[0041] The vacuum gauge temperature control system 100 based on temperature difference measurement of this utility model uses a thermal resistor 44 and a thermocouple 45 of the temperature measuring component 4 for temperature measurement. This not only provides a high-precision and high-stability reference temperature, but also enables rapid response to temperature changes and real-time capture of minute temperature differences. The controller processes the signals output by the thermal resistor 44 and the thermocouple 45 respectively to achieve coordinated control of temperature and temperature difference. A first temperature control unit 2 and a second temperature control unit 3 are respectively set at both ends of the vacuum gauge. The controller 4 adjusts the power at both ends in real time according to the temperature difference signal to achieve differential temperature control and ensure the consistency of temperature control. For applications with extremely high requirements for temperature uniformity, such as vacuum coating, semiconductor process chambers, and vacuum heat treatment, it can significantly improve process consistency and product yield. Moreover, the vacuum gauge temperature control system 100 based on temperature difference measurement has a simple structure, is easy to install and use, and has high reliability.
[0042] The above descriptions are merely embodiments of this utility model. Commonly known structures and characteristics are not described in detail here. Those skilled in the art are aware of all common technical knowledge in the field prior to the application date or priority date, are knowledgeable of all existing technologies in that field, and possess the ability to apply conventional experimental methods prior to that date. Therefore, those skilled in the art can, based on the guidance provided in this application, improve and implement this solution in conjunction with their own capabilities. Typical known structures or methods should not be obstacles for those skilled in the art to implement this application. It should be noted that those skilled in the art can make several modifications and improvements without departing from the structure of this utility model. These modifications and improvements should also be considered within the scope of protection of this utility model, and will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application should be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.
Claims
1. A vacuum gauge temperature control system based on temperature difference measurement, characterized in that, The device includes a vacuum gauge, a first temperature control and a second temperature control respectively disposed at both ends of the vacuum gauge, a temperature measuring component disposed on the vacuum gauge, and a controller. The first temperature control is used to regulate the temperature at one end of the vacuum gauge, the second temperature control is used to regulate the temperature at the other end of the vacuum gauge, the temperature measuring component is used to measure the reference temperature on the vacuum gauge and the temperature difference between the two ends of the vacuum gauge, and the controller is electrically connected to the first temperature control, the second temperature control, and the temperature measuring component.
2. The vacuum gauge temperature control system based on temperature difference measurement according to claim 1, characterized in that, The vacuum gauge has a reference temperature measurement area pre-set on one end face of the cavity to be measured, and a dynamic temperature measurement area pre-set on the other end face of the cavity to be measured.
3. The vacuum gauge temperature control system based on temperature difference measurement according to claim 2, characterized in that, The temperature measuring component is provided with two temperature measuring points, which are respectively located in the reference temperature measuring area and the dynamic temperature measuring area.
4. The vacuum gauge temperature control system based on temperature difference measurement according to claim 2, characterized in that, The first temperature control element is a ring-shaped heating element, which is attached to one end side wall of the cavity to be measured in the vacuum gauge and is located close to the reference temperature measurement area.
5. The vacuum gauge temperature control system based on temperature difference measurement according to claim 2, characterized in that, The second temperature control element is an annular thin-film heating element, which is attached to the other side wall of the cavity to be measured in the vacuum gauge and is located close to the dynamic temperature measurement area.
6. The vacuum gauge temperature control system based on temperature difference measurement according to claim 1, characterized in that, The input terminal of the first temperature control is electrically connected to the output terminal of the controller. When the controller determines that the temperature of the reference temperature measurement zone deviates from the target, the controller adjusts the power supplied to the first temperature control to adjust the temperature near the reference temperature measurement zone.
7. The vacuum gauge temperature control system based on temperature difference measurement according to claim 1, characterized in that, The input terminal of the second temperature control is electrically connected to the output terminal of the controller. When the controller determines that the temperature of the dynamic temperature measurement zone deviates from the target, the controller adjusts the power supplied to the second temperature control to adjust the temperature near the dynamic temperature measurement zone.
8. The vacuum gauge temperature control system based on temperature difference measurement according to claim 1, characterized in that, The temperature measuring component is in the form of a flexible thin sheet. The temperature measuring component is attached to the outer surface of the cavity to be measured of the vacuum gauge, and the installation position of the temperature measuring component covers the reference temperature measuring area and the dynamic temperature measuring area of the vacuum gauge.
9. The vacuum gauge temperature control system based on temperature difference measurement according to claim 1, characterized in that, The temperature measuring component includes a flexible substrate layer at the bottom, a conductive circuit layer (42), and a thermal resistor and a thermocouple disposed on the conductive circuit layer.
10. The vacuum gauge temperature control system based on temperature difference measurement according to claim 9, characterized in that, The controller is electrically connected to the first temperature control, the second temperature control, and the resistance temperature detector (RTD) and thermocouple of the temperature measuring component. The controller is connected to the RTD to collect the RTD resistance signal and obtain the reference temperature of the reference temperature measuring area. The controller is connected to the thermocouple, provides an excitation signal to the thermocouple, and collects the thermoelectric potential signal output by the thermocouple to obtain the temperature difference between the dynamic temperature measurement zone and the reference temperature measurement zone.