High-reliability signal line dedicated vacuum electrode

Abstract

The utility model relates to a kind of high-reliability signal line special vacuum electrode, including, ceramic insulator and integrated conductive electrode, the integrated conductive electrode includes conductive column and the metal casing of being set on conductive column, the conductive column and metal casing integrated, the ceramic insulator is set on the conductive column;By the integrated structure of center conductive column and one end metal shell design, the annular weld seam at this place is completely eliminated.This directly reduces a most main potential leakage point, the overall vacuum sealing reliability of electrode is promoted in quality, especially applicable to the long life, high-reliability application of extremely high leakage rate requirement.

Description

Technical Field

[0001] This invention belongs to the field of electronic vacuum device technology, specifically a high-reliability signal line dedicated vacuum electrode. Background Technology

[0002] Vacuum electrodes are key components connecting the vacuum environment and the atmospheric environment, enabling electrical energy input and output. Their reliability directly determines the stability and lifespan of the vacuum system. In scientific research, semiconductor manufacturing, aerospace, and other fields, there are numerous applications requiring the transmission of low-level, high-precision signals (such as thermocouple signals, sensor signals, and gate control signals). These dedicated vacuum electrodes for signal lines have extremely high requirements for reliability, airtightness, and long-term stability.

[0003] Traditional signal line vacuum electrodes typically employ a multi-component assembly structure. The ceramic-sealed electrode portion generally includes: a ceramic insulator, a central conductive post, and metal shells at both ends. The central conductive post and the ceramic insulator are hermetically sealed via brazing, and the metal shells at both ends are also brazed to the ceramic insulator or external flanges, respectively. This structure has at least three main circumferential welds (the conductive post to the ceramic, and the metal shells at both ends to the main body).

[0004] However, each additional weld seam means an additional potential failure point. Each weld seam is susceptible to microcracks due to process variations, material fatigue, or thermal stress concentration, leading to vacuum leakage. Furthermore, the assembly of multiple components increases structural complexity and manufacturing costs. For high-reliability applications, there is an urgent need for a vacuum electrode structure with a simpler design and fewer potential leakage points. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a dedicated vacuum electrode for signal lines that has a simplified structure, significantly reduced leakage risk, and high reliability.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a high-reliability signal line dedicated vacuum electrode, comprising, A ceramic insulator and an integrated conductive electrode, wherein the integrated conductive electrode includes a conductive post and a metal casing disposed on the conductive post, the conductive post and the metal casing are integrally formed, and the ceramic insulator is disposed on the conductive post.

[0007] As a preferred technical solution for a high-reliability signal line dedicated vacuum electrode, the metal casing includes a first stepped shaft and a second stepped shaft, which are connected by a frustum.

[0008] As a preferred technical solution for a high-reliability signal line dedicated vacuum electrode, a first annular groove is provided inward on one side of the second stepped shaft.

[0009] As a preferred technical solution for a high-reliability signal line dedicated vacuum electrode, the ceramic insulator has a first through hole in the middle, and the conductive post passes through the first through hole.

[0010] As a preferred technical solution for a high-reliability signal line dedicated vacuum electrode, the end of the ceramic insulator is embedded in the first annular groove, and the ceramic insulator is connected to the inner wall of the first annular groove through a first brazing layer.

[0011] As a preferred technical solution for a high-reliability signal line dedicated vacuum electrode, it also includes a second end metal shell, in which a second through hole is provided, and the conductive post passes through the second through hole.

[0012] As a preferred technical solution for a high-reliability signal line dedicated vacuum electrode, a second annular groove is provided inward at one end of the second end metal shell, and the other end of the ceramic insulator is embedded in the second annular groove. A second brazing layer is provided in the second annular groove and connected to the end of the ceramic insulator.

[0013] The beneficial effects of this invention are as follows: By designing the central conductive post and the metal shell at one end as an integrally formed structure, a circumferential weld seam at that location is completely eliminated. This directly reduces a major potential leakage point, significantly improving the overall vacuum sealing reliability of the electrode, making it particularly suitable for long-life, high-reliability applications with extremely high leakage rate requirements. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them: Figure 1 This is a schematic diagram of a half-section of the ceramic insulator of this utility model; Figure 2 This is a schematic diagram of the overall cross-sectional structure of this utility model; Figure 3 This is a schematic diagram illustrating the application of this utility model.

[0015] Reference numerals: 11, first through hole; 1, ceramic insulator; 221, first stepped shaft; 223, truncated cone; 222, second stepped shaft; 2, integrated conductive electrode; 224, first annular groove; 21, conductive post; 22, metal casing; 3, second end metal casing; 32, second annular groove; 31, second through hole; 4, first brazing layer; 5, second brazing layer. Detailed Implementation

[0016] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0017] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0018] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0019] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0020] Example 1

[0021] Reference Figures 1-3 This embodiment provides a high-reliability signal line dedicated vacuum electrode, including a ceramic insulator 1 and an integrated conductive electrode 2. The integrated conductive electrode 2 includes a conductive post 21 and a metal cover 22 disposed on the conductive post 21. The conductive post 21 and the metal cover 22 are integrally formed, and the ceramic insulator 1 is disposed on the conductive post 21.

[0022] The metal casing 22 includes a first stepped shaft 221 and a second stepped shaft 222, which are connected by a frustum 223.

[0023] The second-step shaft 222 has a first annular groove 224 on one side facing inward.

[0024] The ceramic insulator 1 has a first through hole 11 in the middle, and the conductive post 21 passes through the second through hole 11.

[0025] The ceramic insulator 1 is embedded in the first annular groove 224 at one end, and the ceramic insulator 1 is connected to the inner wall of the first annular groove 224 through the first brazing layer 4.

[0026] It also includes a second end metal shell 3, in which a second through hole 31 is provided, and a conductive post 21 passes through the second through hole 31.

[0027] The second metal shell 3 has a second annular groove 32 at one end, and the other end of the ceramic insulator 1 is embedded in the second annular groove 32. A second brazing layer 5 is provided in the second annular groove 32 and connected to the end of the ceramic insulator 1.

[0028] like Figure 1 As shown, the present invention provides a high-reliability signal line dedicated vacuum electrode, the core components of which include a ceramic insulator 1, an integrated conductive electrode 2, and a second-end metal shell 3.

[0029] The ceramic insulator 1 is preferably a high-purity alumina ceramic ring, which serves to provide insulation and vacuum isolation. The outer metal casing 22 is used to weld or install the entire electrode onto the vacuum chamber wall.

[0030] The key improvement of this invention lies in the integrated conductive electrode 2. This integrated conductive electrode is made of a metal material with a coefficient of thermal expansion matching that of the ceramic insulator. Preferably, it is integrally formed from a single piece of Kovar alloy bar through machining methods such as turning and stamping. It includes a slender conductive post 21 and a bowl-shaped metal casing 22. The conductive post 21 passes through the central hole of the ceramic insulator 1 and achieves an airtight connection with the ceramic through a first brazing layer 4 (e.g., using Ag-Cu-Ti active brazing filler metal). The bowl-shaped metal casing 22, like a hat, surrounds and covers one end face and part of the side of the ceramic insulator. The edge of the bowl-shaped metal casing 22 can be machined with external threads for connecting cable connectors.

[0031] The edges of the bowl-shaped metal shell are folded outward to form a threaded or snap-fit ​​structure for connection with the external cable connector.

[0032] The first and second brazing layers are airtight sealing layers formed by active metal brazing process.

[0033] At the other end of the ceramic insulator 1, a separate second-end metal shell 3 is installed, which is sealed to the extension of the ceramic insulator 1 through a second brazing layer 5. Thus, the entire electrode forms a complete, airtight vacuum barrier.

[0034] Manufacturing process in brief: First, all components (integrated conductive electrode 2, ceramic insulator 1, second end metal shell 3) and pre-placed brazing filler metal sheets are assembled into a special fixture; then, they are placed in a high vacuum brazing furnace and brazed once according to the set temperature curve, which simultaneously forms the first brazing layer and the second brazing layer, thus completing the manufacturing of the electrode.

[0035] The beneficial effects of this utility model are as follows: Significantly improved reliability: By designing the central conductive post and the metal shell at one end as a single molded structure, a circumferential weld seam at that location is completely eliminated. This directly reduces a major potential leakage point, resulting in a qualitative improvement in the overall vacuum seal reliability of the electrode, making it particularly suitable for long-life, high-reliability applications with extremely high leakage rate requirements.

[0036] Simplified structure and process: The reduction in the number of components simplifies the overall structure of the electrode and reduces assembly complexity. During manufacturing, one less brazing step is eliminated, improving production efficiency and product consistency, and reducing manufacturing costs.

[0037] Improved mechanical strength: The one-piece structure avoids the mechanical weaknesses that may be caused by welds, resulting in higher overall mechanical strength at this end, and making it more able to withstand the torque, external vibration and impact during installation.

[0038] Optimized thermal management: The integrated structure provides a better heat conduction path, which is conducive to the even dissipation of heat generated during operation, reduces the risk of local overheating, and further ensures long-term stability.

[0039] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0040] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A high-reliability signal line dedicated vacuum electrode, characterized in that: include, A ceramic insulator (1) and an integrated conductive electrode (2), wherein the integrated conductive electrode (2) includes a conductive post (21) and a metal cover (22) disposed on the conductive post (21), the conductive post (21) and the metal cover (22) are integrally formed, and the ceramic insulator (1) is disposed on the conductive post (21).

2. The high-reliability signal line dedicated vacuum electrode according to claim 1, characterized in that: The metal casing (22) includes a first stepped shaft (221) and a second stepped shaft (222), which are connected by a frustum (223).

3. The high-reliability signal line dedicated vacuum electrode according to claim 2, characterized in that: A first annular groove (224) is provided inward on one side of the second stepped shaft (222).

4. The high-reliability signal line dedicated vacuum electrode according to claim 3, characterized in that: The ceramic insulator (1) has a first through hole (11) in the middle, and the conductive post (21) passes through the first through hole (11).

5. The high-reliability signal line dedicated vacuum electrode according to claim 4, characterized in that: The ceramic insulator (1) is embedded in the first annular groove (224) at its end, and the ceramic insulator (1) is connected to the inner wall of the first annular groove (224) through the first brazing layer (4).

6. The high-reliability signal line dedicated vacuum electrode according to claim 5, characterized in that: It also includes a second end metal shell (3), in which a second through hole (31) is provided, and the conductive post (21) passes through the second through hole (31).

7. The high-reliability signal line dedicated vacuum electrode according to claim 6, characterized in that: The second end metal shell (3) has a second annular groove (32) at one end, and the other end of the ceramic insulator (1) is embedded in the second annular groove (32). A second brazing layer (5) is provided in the second annular groove (32) and connected to the end of the ceramic insulator (1).

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