Ion beam dedicated filament support structure

Abstract

The utility model provides a special filament support structure of ion beam, include: lamp stand, for the bearing basic structure, at least two electrically conductive column, vertical through setting on the lamp stand for connecting external power supply, filament, electrically conductive connection between two electrically conductive columns of lamp stand same side surface, the lamp stand is disc shape structure, electrically conductive column with the lamp stand is integrative forming structure or gasket pressure buckle detachable connection, the material of lamp stand is ceramic, high temperature resistant insulating plastic, high temperature and chemical corrosion of ion beam environment resistance, electrically conductive column is cylindrical metal column, both ends are hemispherical, the utility model discloses through optimizing the structure and material of lamp stand, electrically conductive column, filament and support spring, can resist the high temperature and corrosion of ion beam environment, promote the conduction efficiency and the arc safety, optimize the ion beam emission angle and utilization efficiency, strengthen filament stability to prolong the service life, realize the stable and efficient operation of ion beam equipment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, specifically to a filament support structure for ion beams. Background Technology

[0002] Ion beam technology has been widely used in many fields such as materials processing, surface modification, and semiconductor manufacturing due to its high precision and high energy. In ion beam equipment, the lamp holder and filament are key components for ion emission, and their performance directly affects the stability of the ion beam, emission efficiency, and service life of the equipment. The lamp holder needs to provide stable load-bearing and insulation support for the filament, while withstanding the high temperature, high pressure, and chemical corrosion in the ion beam environment. The conductive post, as a bridge connecting the external power supply and the filament, needs to have good conductivity to ensure current transmission efficiency. The filament needs to emit the ion beam stably at a specific angle to meet the working requirements of the equipment. The shortcomings of existing technology: 1. Inadequate performance of conductive pillars: The material selection and surface treatment of existing conductive pillars are not optimized enough, resulting in low conductivity and affecting the energy supply of the filament. At the same time, the lack of reasonable anti-arc creepage design makes them prone to arc creepage in high-voltage working environments, posing safety hazards and reducing equipment reliability. 2. Filament structure defects: Most existing filaments are simple straight or bent structures, which are not optimized for the ion beam emission angle, resulting in a dispersion of the ion beam emission direction and reducing the utilization efficiency of the ion beam; the fixing method between the filament and the conductive post is unstable and is prone to falling off under high temperature or vibration environment; in addition, the filament lacks an effective support structure and is prone to deformation due to high temperature after long-term operation, affecting the emission performance. Therefore, existing technologies have shortcomings and need further improvement. Utility Model Content

[0003] To address the problems existing in the prior art, this utility model provides a filament support structure specifically for ion beams.

[0004] To achieve the above objectives, the specific solution of this utility model is as follows: This utility model provides a filament support structure for ion beams, comprising: The lamp holder serves as the support structure for the base. At least two conductive posts are vertically inserted through the lamp holder for connecting to an external power source; The filament is electrically connected between two conductive posts on the same side surface of the lamp holder.

[0005] Furthermore, the lamp holder has a disc-shaped structure, and the conductive post and the lamp holder are integrally formed, or can be detachably connected by a gasket snap-fit. The lamp holder is made of ceramic and high-temperature resistant insulating plastic, which can withstand the high temperature and chemical corrosion of the ion beam environment.

[0006] Furthermore, the conductive post is a cylindrical metal post with hemispherical ends, made of copper, aluminum or alloy, and its surface is treated with silver or gold plating to improve conductivity.

[0007] Furthermore, the two conductive posts are symmetrically distributed along the central axis of the lamp holder; Both ends of the conductive post protrude from the surface of the lamp holder, with a protrusion height of 1 / 8 to 1 / 6 of the lamp holder diameter, forming an anti-arc creepage distance.

[0008] Furthermore, the filament has a W-shaped bent structure, and its two ends are fixed to the conductive post by welding and pressing.

[0009] Furthermore, the angle between the normal to the plane containing the filament and the axis of the conductive pillar on the connecting side is 30°-45° to optimize the ion beam emission angle.

[0010] Furthermore, a support is provided in the middle of the filament; The top of the bracket is a four-sided cone, which is used to support the middle part of the filament to improve the positional stability of the filament during operation.

[0011] Furthermore, the support has a Y-shaped structure and is an elastic structure.

[0012] Furthermore, a spring is also fitted onto the bracket, and the opening width of the bracket is interference-fitted with the inner diameter of the spring; The Y-shaped structure of the bracket is designed as an elastic structure, tightly held in place by a spring to prevent the spring from falling off. The spring is used to tighten the bracket to enhance the bracket's support for the filament.

[0013] Furthermore, the spring is made of a high-temperature resistant alloy material, which can withstand the high temperature and high pressure of the ion beam environment.

[0014] The technical solution of this utility model has the following beneficial effects: 1. Lamp holder: The lamp holder is made of ceramic, high-temperature resistant insulating plastic and other materials, which can withstand the high temperature and chemical corrosion of the ion beam environment, effectively extending the service life of the lamp holder; the lamp holder has a disc-shaped structure, and the conductive post and the lamp holder can be integrally molded, which enhances the stability of the overall structure. It can also be connected in a detachable way by gasket snap-fit, which facilitates installation, disassembly and maintenance. 2. Conductive posts: The conductive posts are made of copper, aluminum, or alloys, and the surface is silver-plated or gold-plated, which significantly improves conductivity. The two ends of the conductive posts are hemispherical and protrude from the lamp holder surface. The protrusion height is 1 / 8 to 1 / 6 of the lamp holder diameter, forming an effective anti-arc creepage distance and improving safety. The two conductive posts are symmetrically distributed along the central axis of the lamp holder, which is conducive to uniform current conduction and ensures stable filament operation. 3. Filament: The filament has a W-shaped bending structure, and both ends are fixed to the conductive post by welding and pressing, which enhances the firmness of the connection between the filament and the conductive post and reduces the risk of filament falling off; the angle between the normal of the plane where the filament is located and the axis of the conductive post on the connected side is 30°-45°, which optimizes the ion beam emission angle and improves the utilization efficiency of the ion beam. 4. Regarding the bracket and spring: The spring fitted on the bracket is made of high-temperature resistant alloy material, which can withstand the high temperature and high pressure of the ion beam environment. Furthermore, the opening width of the bracket and the inner diameter of the spring are interference-fitted, which further enhances the support effect on the filament and extends the service life of the filament. Attached Figure Description

[0015] Figure 1 This is a top-view perspective view of the present invention; Figure 2 This is a perspective view of the present invention after the spring has been removed, viewed from a tilting angle. Figure 3 This is a bottom-view perspective view of the present invention used to display the detailed view of the four conical shapes on the top of the bracket.

[0016] Attached image captions: 1. Lamp holder; 2. Conductive post; 3. Filament; 4. Bracket; 5. Spring. Detailed Implementation

[0017] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0018] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0019] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0020] In the description of this embodiment, the terms "upper," "lower," "front," "rear," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0021] Combination Figures 1-3 As shown, this utility model provides a filament support structure for ion beams, comprising: Lamp holder 1 serves as the supporting foundation structure; At least two conductive posts 2 are vertically inserted through the lamp holder 1 for connecting to an external power source; The filament 3 is electrically connected between two conductive posts 2 on the same side surface of the lamp holder 1.

[0022] The lamp holder 1 has a disc-shaped structure, and the conductive post 2 is integrally formed with the lamp holder 1, or can be detachably connected by a gasket snap fastener; The lamp holder 1 is made of ceramic and high-temperature resistant insulating plastic, which can withstand the high temperature and chemical corrosion of the ion beam environment.

[0023] The conductive post 2 is a cylindrical metal post with hemispherical ends. It is made of copper, aluminum or alloy and its surface is plated with silver or gold to improve conductivity.

[0024] The two conductive posts 2 are symmetrically distributed along the central axis of the lamp holder 1; Both ends of the conductive post 2 protrude from the surface of the lamp holder 1, with the protrusion height being 1 / 8 to 1 / 6 of the diameter of the lamp holder 1, forming an anti-arc creepage distance.

[0025] The filament 3 has a W-shaped bent structure, and its two ends are fixed to the conductive post 2 by welding and pressing.

[0026] The angle between the normal to the plane containing the filament 3 and the axis of the conductive post 2 on the connecting side is 30°-45° to optimize the ion beam emission angle.

[0027] A bracket 4 is also provided in the middle of the filament 3; The top of the bracket 4 is a four-sided cone, which is used to support the middle part of the filament 3 to improve the positional stability of the filament 3 during operation.

[0028] The support 4 has a Y-shaped structure and is an elastic structure.

[0029] A spring 5 is also fitted on the bracket 4, and the opening width of the bracket 4 is interference-fitted with the inner diameter of the spring 5. The Y-shaped structure of the bracket 4 is designed as an elastic structure, which is tightly held in place by the spring 5 to prevent the spring 5 from falling off. The spring 5 is used to tighten the bracket 4 to enhance the support of the bracket 4 for the filament 3.

[0030] The spring 5 is made of high-temperature resistant alloy material, which can withstand the high temperature and high pressure of the ion beam environment.

[0031] The principle of this utility model is as follows: The lamp holder 1, serving as the supporting foundation structure, is made of materials such as ceramic and high-temperature resistant insulating plastic, enabling it to stably support the entire device under the high temperature and chemical corrosion conditions of the ion beam environment. At least two conductive posts 2 penetrate the lamp holder 1 vertically, with one end connected to an external power source and the other end conductively connected to the filament 3, forming a current path.

[0032] The conductive post 2 is made of copper, aluminum or alloy and its surface is treated with silver or gold plating, which can efficiently conduct current. Its two ends are hemispherical and symmetrically distributed along the central axis of the lamp holder 1. The height of the two ends protruding from the surface of the lamp holder 1 is 1 / 8 to 1 / 6 of the diameter of the lamp holder 1, forming an anti-arc creepage distance to ensure the safety and stability of current transmission.

[0033] Current is conducted through conductive post 2 to filament 3. Filament 3 has a W-shaped bend and is firmly fixed to conductive post 2 at both ends by welding and pressing. Under the action of current, it heats up and generates an ion beam. The normal of the plane containing filament 3 forms an angle of 30°-45° with the axis of conductive post 2 on the connected side, thereby optimizing the ion beam emission angle and improving the ion beam utilization efficiency.

[0034] In addition, the Y-shaped bracket 4 set in the middle of the filament 3 provides stable support for the filament 3. The high-temperature resistant alloy spring 5 sleeved on the bracket 4 is interference-fitted with the opening of the bracket 4, which further enhances the structural stability of the filament 3, making it less prone to deformation in the high temperature and high pressure ion beam environment, and ensuring continuous and stable emission of the ion beam.

[0035] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the protection scope of the present utility model.

Claims

1. A filament support structure specifically for ion beams, characterized in that, include: The lamp holder is a disc-shaped supporting base structure; Two conductive posts are vertically inserted through the lamp holder for connecting to an external power source; The two conductive posts are symmetrically distributed along the central axis of the lamp holder, and both ends of the conductive posts protrude from the surface of the lamp holder, with the protrusion height being 1 / 8 to 1 / 6 of the diameter of the lamp holder; A filament is electrically connected between two conductive posts on the same side surface of the lamp holder; the filament has a W-shaped bend, and the angle between the normal to the plane containing the filament and the axis of the conductive post on the connecting side is 30°-45°; a bracket is disposed in the middle of the filament, the top of the bracket is a four-sided cone, the bracket has a Y-shaped structure and is an elastic structure; a spring is sleeved on the bracket, the opening width of the bracket is interference-fitted with the inner diameter of the spring, and the Y-shaped structure of the bracket is tightly sleeved by the spring.

2. The filament support structure for ion beams according to claim 1, characterized in that, The conductive post and the lamp holder are either integrally formed or detachably connected by a gasket snap-fit. The lamp holder is made of ceramic and high-temperature resistant insulating plastic, which can withstand the high temperature and chemical corrosion of the ion beam environment.

3. The filament support structure for ion beams according to claim 1, characterized in that, The conductive pillar is a cylindrical metal pillar with hemispherical ends, made of copper, aluminum or alloy, and its surface is treated with silver or gold plating to improve conductivity.

4. The filament support structure for ion beams according to claim 1, characterized in that, The two ends of the filament are fixed to the conductive post by welding and pressing.

5. The filament support structure for ion beams according to claim 1, characterized in that, The spring is made of high-temperature resistant alloy material, which can withstand the high temperature and high pressure of the ion beam environment.

Images