Anode component electron brushing device under ultrahigh vacuum

Abstract

The utility model provides an anode part electronic cleaning device based on ultrahigh vacuum, including equipment shell, be equipped with vacuum chamber in the equipment shell, the top of equipment shell is open mouth structure, and is installed with sealed cavity door, the surface of equipment shell is installed with window flange, blind plate flange and six star electrode flange, two mutually symmetrical one star electrode flanges are installed on the equipment shell, the vacuum chamber is provided with cleaning fixture, the vacuum chamber is provided with two tungsten wire clamps, the utility model discloses a vacuum chamber is set up, realizes the efficient degassing under vacuum environment, through controllable electron stream bombardment material surface, directly desorbs gas molecule in vacuum environment, avoids gas reabsorption. Dynamic charge neutralization, design multi-electrode electric field system, real -time guide away surface charge, eliminate high -voltage breakdown risk. Pollutant on -line cleaning: combine low -energy electron stream with infrared irradiation, and decompose organic pollutants into the gas that can be pumped.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum photoelectric detection, specifically an electronic cleaning device for anode components under ultra-high vacuum. Background Technology

[0002] A photodetector is a vacuum electronic device that converts weak light signals into electrical signals. A photomultiplier tube (PMT) is based on the external photoelectric effect, secondary electron emission, and electron optics theories, combining high gain, low noise, fast response, and a wide signal receiving range. It is an electro-vacuum device with extremely high sensitivity and ultrafast time response, capable of operating in the ultraviolet, visible, and near-infrared spectral range. A photodetector mainly consists of a cathode, an electron multiplication system, and an anode, and requires high-precision packaging and integration under ultra-high vacuum conditions to avoid gas ionization interfering with electron trajectories.

[0003] However, during the fabrication of photodetectors, due to various factors such as vacuum environment and material structure, core components such as electron multiplication systems and anodes (metal anodes, fluorescent screens, chips, etc.) are prone to adsorbing gases. These adsorbed gases (generally referred to as "residual gases") are ionized into positive ions by the high-energy electron cloud output from the photomultiplier tube. The ionized positive ions move in the opposite direction under the action of a reverse electric field to bombard the cathode, damaging the surface of the photocathode, significantly reducing quantum efficiency, and affecting the product's working life. At the same time, the increase in gas partial pressure can trigger high-voltage discharge, leading to the risk of device breakdown and thus product failure.

[0004] Therefore, this utility model provides an electronic cleaning device for anode components under ultra-high vacuum. By bombarding the surface of the anode material inside the device with a high-energy electron beam, the adsorbed gas is desorbed and extracted by the vacuum system, thereby removing residual gas and solving the above-mentioned problems. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides an electronic cleaning device for anode components under ultra-high vacuum, which removes residual gas by electron bombardment.

[0006] The electronic cleaning device for the anode component includes a housing with a vacuum chamber inside. The top of the housing is open and fitted with a sealed door. A viewing flange, a blind flange, and a six-star electrode flange are mounted on the surface of the housing. Two symmetrical single-star electrode flanges are mounted on the housing. A cleaning fixture is installed within the vacuum chamber, along with two tungsten wire fixtures. One end of each tungsten wire fixture is connected to a single-star electrode flange. Each tungsten wire fixture includes a cylindrical base and a fork. The cleaning fixture also includes multiple insulating bases with multiple square slots and through slots on their side walls, each through slot containing a limiting post.

[0007] Furthermore, the vacuum chamber is a double-layered hollow structure, and two threaded posts are provided on the vacuum chamber.

[0008] Furthermore, the sealing chamber door has a circular structure and is installed on the equipment housing via a hinge. Three threaded holes are arranged in a ring array on the inner wall of the sealing chamber door near the equipment housing. A sealing groove is provided on the sealing chamber door, and a rubber ring is installed in the sealing groove.

[0009] Furthermore, the cylindrical base has a threaded hole, and the fork is located at the end, with a threaded hole on one side.

[0010] Furthermore, the through slot has a semi-circular structure, the multiple insulating bases are close together end to end and form a ring structure, and the limiting post is set in two adjacent through slots.

[0011] Furthermore, the tungsten wire clamps are disposed at both ends of the cleaning clamp, and tungsten wires are disposed between the tungsten wire clamps.

[0012] Furthermore, the bottom of the equipment housing is provided with a reducing flange seat, the limiting post is connected to the reducing flange seat, and multiple columns are installed at the bottom of the reducing flange seat.

[0013] Compared with the prior art, the present invention has the following beneficial effects: 1. This invention achieves efficient degassing in a vacuum environment by setting up a vacuum chamber. Controllable electron beams bombard the surface of the anode component material, directly desorbing gas molecules in the vacuum environment and preventing gas re-adsorption. Dynamic charge neutralization is achieved through a multi-electrode electric field system that conducts surface charges in real time, eliminating the risk of high-voltage breakdown. Online contaminant removal: Combining low-energy electron beams with infrared irradiation, organic contaminants are decomposed into removable gases.

[0014] 2. This utility model uses tungsten wire as an electron source. A negative high voltage is applied to the tungsten wire, and the potential on the anode clamp is 0. The electron beam emitted by the tungsten wire bombards the surface of the material, which has the effect of degassing and cleaning. Compared with traditional contact cleaning, it can effectively remove deep-seated organic residues, gas residues, etc.

[0015] 3. This utility model, through the layout of the multi-station fixture and tungsten wire, including but not limited to the distance between the tungsten wire and the x, y, and z axes, and the angle between the cleaning surface and the filament, can better receive the electron beam emitted by the tungsten wire and avoid the phenomenon of uneven cleaning caused by distance and angle issues.

[0016] 4. In the cleaning process of this utility model, the multi-station cleaning fixture is connected to the six-star electrode flange on the chamber. The six-star electrode flange is connected to the picoammeter. The picoammeter can monitor the current of each product during the electronic cleaning process. By adjusting the voltage of the one-star electrode flange connected to the power supply and the tungsten wire in the fixing fixture of the electronic source tungsten wire, the voltage can be adjusted in real time, so as to achieve the effect of closed-loop control of the cleaning current. Attached Figure Description

[0017] Figure 1 This is a perspective view of the utility model; Figure 2 This is a perspective view of the cleaning clamp of this utility model; Figure 3 This is a perspective view of the insulating base of this utility model; Figure 4 This is a perspective view of the tungsten wire clamp of this utility model.

[0018] In the picture: 1. Equipment casing; 2. Vacuum chamber; 3. Sealed door; 4. Viewing window flange; 5. Single-star electrode flange; 6. Six-star electrode flange; 7. Column; 8. Tungsten wire clamp; 9. Cleaning clamp; 10. Blind flange; 11. Insulating base; 12. Through slot; 13. Limiting post; 14. Column base; 15. Front fork. Detailed Implementation

[0019] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0020] like Figures 1-4 As shown, this utility model provides an electronic cleaning device for anode components under ultra-high vacuum, including a device housing 1, a vacuum chamber 2 inside the device housing 1, an open structure at the top of the device housing 1 and a sealed door 3, a viewing flange 4, a blind flange 10 and a six-star electrode flange 6 installed on the surface of the device housing 1, two mutually symmetrical single-star electrode flanges 5 installed on the device housing 1, a cleaning fixture 9 is provided in the vacuum chamber 2, and two tungsten wire fixtures 8 are provided in the vacuum chamber 2. One end of the tungsten wire fixture 8 is connected to the single-star electrode flange 5. The tungsten wire fixture 8 includes a cylindrical base 14 and a front fork 15. The cleaning fixture 9 includes multiple insulating bases 11, multiple square slots are opened on the insulating bases 11, and through slots 12 are opened on the side walls of the insulating bases 11. Limiting posts 13 are provided in the through slots 12.

[0021] As one embodiment of this utility model, the vacuum chamber 2 is a double-layered hollow structure, and two threaded posts are provided on the vacuum chamber 2.

[0022] Vacuum chamber 2 is the main component that provides a vacuum environment, such as Figure 1As shown, it has eight branch flanges: three CF63 branch flanges with an included angle of 60 degrees for connecting the six-star electrode flange 6; two single-star electrode flanges 5 distributed vertically for connecting the tungsten wire clamp of the electronic source, with the two flanges located on the left side of the vacuum chamber 2, with an angle difference of 30 degrees from the axis of the two CF63 branch flanges; one CF16 flange for purging nitrogen, located between the two CF16 branch flanges; one CF35 flange for connecting the vacuum gauge, with an angle difference of 30 degrees from the axis of the two CF63 branch flanges; and one CF100 flange for installing the viewing window, with an angle difference of 30 degrees from the axis of the two CF63 branch flanges. The lower part of the chamber has a CF250 flange, and the upper part has a non-standard chamber door seat with a circular groove, which is welded with a hinge and connected to the sealing chamber door 3 through the hinge. In addition, the threaded column of the vacuum chamber 2 allows cooling medium to be added into the hollow structure through a gas pipe joint to cool the interior of the chamber.

[0023] In one embodiment of this utility model, the sealing chamber 3 has a circular structure. The sealing chamber 3 is installed on the equipment housing 1 by a hinge. Three threaded holes are installed in a ring array on the inner wall of the sealing chamber 3 near the equipment housing 1. A sealing groove is opened on the sealing chamber 3, and a rubber ring is installed in the sealing groove.

[0024] The rubber ring is an O-ring made of fluororubber, which has a circular structure with a cross-section of 8mm in diameter and fits into the circular groove in the cavity seat.

[0025] As one embodiment of this utility model, the cylindrical base 14 has a threaded hole, the front fork 15 is located at the end, and a threaded hole is provided on one side.

[0026] The tungsten wire serves as the electron source and is connected to the tungsten wire clamp 8.

[0027] In one embodiment of this utility model, the through groove 12 has a semi-circular structure, multiple insulating bases 11 are close to each other and form a ring structure, and the limiting post 13 is set in two adjacent through grooves 12.

[0028] The insulating base 11 is a square block with a square hole in the middle. There are three threaded holes and one circular through hole in the four squares on the top, bottom, left and right sides of the through hole. The square hole in the middle is used to fit with the anode component.

[0029] In one embodiment of this utility model, tungsten wire clamps 8 are disposed at both ends of the cleaning clamp 9, and tungsten wires are disposed between the tungsten wire clamps 8.

[0030] As one embodiment of this utility model, the bottom of the equipment housing 1 is provided with a reducing flange seat, the limiting column 13 is connected to the reducing flange seat, and multiple columns 7 are installed at the bottom of the reducing flange seat.

[0031] The top heat shield of vacuum chamber 2 is connected to the sealed chamber door 3; the vacuum pump is connected to the slide gate valve.

[0032] Tungsten wire clamp 8, such as Figure 4 As shown, one end is connected to the tungsten wire via a set screw; the flat-headed cylindrical pin connects the tungsten wire to itself via spot welding, and the flat-headed cylindrical pin is inserted into the filament insulating block; the filament insulating block and the filament base are connected by bolts.

[0033] Cleaning clamp 9: such as Figure 3 As shown, the anode component is placed in the clamp mounting base, and the component is clamped and fixed by the surrounding fixing screws.

[0034] After assembling the device as described above, close the sealed chamber door 3, turn on the molecular pump, and perform vacuuming. Once the vacuum level is reached, start the power supply and apply a negative high voltage to the tungsten filament through a single star electrode. This causes the tungsten filament to emit electrons to perform electronic cleaning of the surrounding anode components. The picoammeter is connected to the six-star electrode flange via a flat-headed cylindrical pin on the fixture base to monitor the current of the anode components in real time. The effectiveness and completion of the cleaning are determined by analyzing the current.

[0035] The embodiments of this utility model are given for the purpose of illustration and description. Although embodiments of this utility model have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this utility model. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this utility model.

Claims

1. An electronic cleaning device for anode components under ultra-high vacuum, comprising a housing (1), wherein a vacuum chamber (2) is provided inside the housing (1), characterized in that, The top of the equipment housing (1) is an open structure and is equipped with a sealed cavity door (3). The surface of the equipment housing (1) is equipped with a viewing window flange (4), a blind flange (10) and a six-star electrode flange (6). Two mutually symmetrical one-star electrode flanges (5) are installed on the equipment housing (1). A cleaning clamp (9) is provided in the vacuum chamber (2). Two tungsten wire clamps (8) are provided in the vacuum chamber (2). One end of the tungsten wire clamp (8) is connected to the one-star electrode flange (5). The tungsten wire clamp (8) includes a cylindrical base (14) and a fork (15). The cleaning clamp (9) includes multiple insulating bases (11). Multiple square slots are opened on the insulating bases (11). Through slots (12) are opened on the side walls of the insulating bases (11). Limiting posts (13) are provided in the through slots (12).

2. The electronic cleaning device for anode components under ultra-high vacuum as described in claim 1, characterized in that, The vacuum chamber (2) is a double-layered hollow structure, and two threaded columns are provided on the vacuum chamber (2).

3. The electronic cleaning device for anode components under ultra-high vacuum as described in claim 1, characterized in that, The sealing chamber door (3) has a circular structure. The sealing chamber door (3) is installed on the equipment housing (1) by a hinge. Three threaded holes are installed in a ring array on the inner wall of the equipment housing (1) near the sealing chamber door (3). A sealing groove is opened on the sealing chamber door (3), and a rubber ring is installed in the sealing groove.

4. The electronic cleaning device for anode components under ultra-high vacuum as described in claim 1, characterized in that, The cylindrical base (14) has a threaded hole, and the fork (15) is located at the end and has a threaded hole on one side.

5. The electronic cleaning device for anode components under ultra-high vacuum as described in claim 1, characterized in that, The through slot (12) has a semi-circular structure, and the multiple insulating bases (11) are close to each other and form a ring structure. The limiting post (13) is set in two adjacent through slots (12).

6. The electronic cleaning device for anode components under ultra-high vacuum as described in claim 1, characterized in that, The tungsten wire clamps (8) are set at both ends of the cleaning clamps (9), and tungsten wires are provided between the tungsten wire clamps (8).

7. The electronic cleaning device for anode components under ultra-high vacuum as described in claim 1, characterized in that, The bottom of the equipment housing (1) is provided with a variable diameter flange seat, the limiting post (13) is connected to the variable diameter flange seat, and multiple columns (7) are installed at the bottom of the variable diameter flange seat.

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