An adjustable cavity base

Abstract

The utility model relates to excimer laser technical field, and disclose a kind of adjustable cavity base, and through pedestal, double support adjusting structure A, double support adjusting structure B, cavity module etc. Structure realizes precision adjustment, stable work, through the horizontal adjustment between brass slider and the vertical adjustment of spherical stud A, spherical stud B, to realize vertical lifting, pitching and yawing adjustment function, and all adopt precision screw rod drive, and adjustment resolution is high, can satisfy the high-precision calibration demand of laser light direction, and because nut A, nut B and screw are fixed locking, after adjustment, it can be locked comprehensively, effectively resist working vibration, ensure cavity long-term stable work, play the effect of precision adjustment, stable work.

Description

Technical Field

[0001] This utility model relates to the field of excimer laser technology, and in particular to an adjustable cavity base. Background Technology

[0002] Molecular lasers are high-power pulsed lasers that use a mixture of inert and halogen gases as their working medium. Due to their short wavelength, high energy, and excellent resolution, they are widely used in semiconductor lithography, medical surgery, and materials processing. The core of an excimer laser is its cavity module, which contains key components such as discharge electrodes, pre-ionization devices, gas circulation systems, and optical resonators. This module is heavy (tens to hundreds of kilograms) and requires regular maintenance (such as gas replacement, electrode cleaning, or optical window cleaning). When reinstalling after maintenance or adjusting the optical path for experimental needs, the spatial position and angle of the cavity must be precisely adjusted to ensure that the laser output direction and mode meet requirements.

[0003] Currently, the common practice is to use general-purpose optical support frames or simple tooling bases to fix the cavity. These methods have significant drawbacks: difficult assembly and disassembly, limited or no adjustment capability, lack of repeatability, and insufficient stability. Therefore, there is an urgent need to design an adjustment base for excimer laser cavities that integrates rapid assembly and disassembly, precise adjustment, and stable locking. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides an adjustable cavity base that features quick assembly and disassembly, multi-degree-of-freedom precision adjustment, and stable locking, thus solving the problems mentioned in the background section.

[0005] This utility model provides the following technical solution: an adjustable cavity base, including a base, a double-support adjustment structure A, a double-support adjustment structure B, a cavity module, and a handle. The top surface of the base is symmetrically provided with positioning pin holes. The double-support adjustment structure A is installed on one side of the base. The surface of the base is symmetrically provided with sliding grooves below the double-support adjustment structure A. An adjustment screw A is rotatably installed inside one of the sliding grooves. The double-support adjustment structure B is installed on the other side of the base. A cavity module is installed between the double-support adjustment structure A and the double-support adjustment structure B. A handle is symmetrically fixedly installed on the top of the base between the double-support adjustment structure A and the double-support adjustment structure B, and is installed inside the positioning pin holes.

[0006] Through the above structural design, this device integrates vertical lifting, pitch, and yaw adjustment functions, all driven by precision lead screws, providing high adjustment resolution and meeting the high-precision calibration requirements of the laser output direction. Furthermore, the entire base adopts a rigid structural design, and locking mechanisms are set on the dual-support adjustment structure A and dual-support adjustment structure B. After adjustment, it can be fully locked to effectively resist working vibration and ensure long-term stable operation of the cavity.

[0007] Preferably, the dual-support adjustment structure A includes a brass slider A, a brass slider B, and a spherical double-ended bolt A. The brass slider A and the brass slider B are slidably installed inside the slide groove, and the brass slider A is threaded onto the outer ring of the adjusting screw A. The top of the brass slider A and the brass slider B are respectively fixedly installed with spherical double-ended bolts A. One side of the brass slider A and the brass slider B is respectively provided with a pressure block inside the slide groove, and the pressure block is installed on the bottom wall of the slide groove by screws.

[0008] With the above structural setup, twisting the adjusting screw A causes the outer ring of the adjusting screw A to move with the inside of the brass slider A. Since the brass slider A is limited and slides inside the groove, the adjusting screw A will drive the brass slider A to move, thereby adjusting the position of the double-support adjusting structure A.

[0009] Preferably, the outer ring of the spherical double-ended bolt A is threaded with nuts A on both the upper and lower sides. An adjusting and fixing strip is slidably sleeved between the outer rings of the spherical double-ended bolt A, with its end located between the nuts A. A conical washer is placed between the upper and lower nuts A and the adjusting and fixing strip on the outer ring of the spherical double-ended bolt A. A connecting post is symmetrically fixed inside the adjusting and fixing strip. The adjusting and fixing strip is connected to the cavity module through the connecting post.

[0010] With the above structural setup, rotating the upper and lower nuts A on the outer ring of the spherical double-ended bolt A will cause the two ends of the adjusting and fixing bar to be located between nuts A or to be moved by nuts A. Furthermore, due to the setting of the conical washer, the adjusting and fixing bar and the brass slider A can be automatically leveled.

[0011] Preferably, the dual-support adjustment structure B includes a pressure plate, a brass slider C, and a spherical double-ended bolt B. The brass slider C is slidably installed inside one side of the base and located in the middle of the base. The top of the brass slider C is provided with a pressure plate located in the middle of the base. The pressure plate is installed inside the base by screws. The spherical double-ended bolt B is fixedly installed inside the brass slider C. An adjustment screw B is provided between one side of the base and the inside of the brass slider C. The adjustment screw B is threadedly connected to the brass slider C.

[0012] With the above structural setup, rotating the adjusting screw B causes the brass slider C to move around the outer ring of the adjusting screw B. Due to the restriction between the pressure plate and the base, the brass slider C can only move linearly inside the base.

[0013] Preferably, the spherical double-ended bolt B has nuts B threaded onto its upper and lower outer rings, and a T-shaped adjusting and fixing block is slidably installed on the outer ring of the spherical double-ended bolt B and located between the nuts B. A spherical washer is provided between the nuts B and the T-shaped adjusting and fixing block. A double-ended internal threaded connecting post is symmetrically installed on the side of the T-shaped adjusting and fixing block near the cavity module, and the T-shaped adjusting and fixing block is connected to the cavity module through the double-ended internal threaded connecting post.

[0014] With the above structural setup, the nut B on the outer ring of the spherical double-ended bolt B is twisted. The movement generated by the screwing of nut B drives the movement of the T-shaped adjusting fixing block, thereby realizing the vertical position adjustment of the T-shaped adjusting fixing block. Furthermore, due to the setting of the spherical shim, the T-shaped adjusting fixing block is easily leveled while reducing vibration.

[0015] This utility model has the following advantages: 1. This adjustable cavity base achieves precise adjustment and stable operation through a base, dual-support adjustment structure A, dual-support adjustment structure B, and cavity module. Vertical lifting, pitch, and yaw adjustments are achieved through lateral adjustment between brass sliders and vertical adjustment via spherical double-ended bolts A and B. All adjustments are driven by precision lead screws, providing high adjustment resolution and meeting the high-precision calibration requirements of the laser beam direction. Furthermore, the locking mechanism between nuts A and B and screws ensures complete locking after adjustment, effectively resisting operational vibrations and ensuring long-term stable operation of the cavity, thus achieving precise adjustment and stable operation.

[0016] 2. This adjustable cavity base, through its structural design including a base, positioning pin holes, cavity modules, and handles, enables rapid assembly and disassembly, and high-precision positioning. The engagement of the positioning pin holes and handles on both sides allows a single person to complete the installation or disassembly of the heavy cavity within minutes without needing to lift it for alignment. This ensures safe operation and greatly improves maintenance efficiency. The high-precision pin hole positioning method guarantees minimal repeatability errors during each installation. The optical path changes minimally after cavity assembly and disassembly, requiring virtually no readjustment and saving significant debugging time. This results in rapid assembly and disassembly with high-precision positioning. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a top view of the overall structure of this utility model; Figure 3 This is a schematic diagram of side A of the double-support adjustment structure of the base structure of this utility model; Figure 4 This is a schematic diagram of the B-side structure of the double-support adjustment structure of the base structure of this utility model; Figure 5 This is a cross-sectional view of the A-structure of the double-support adjustment structure of this utility model; Figure 6 This is a cross-sectional view of the B structure of the dual-support adjustment structure of this utility model.

[0018] In the diagram: 1. Base; 11. Slide groove; 12. Adjusting screw A; 2. Double-support adjustment structure A; 21. Brass slider A; 22. Brass slider B; 23. Spherical double-ended bolt A; 24. Pressure block; 25. Adjusting fixing strip; 26. Connecting column; 3. Double-support adjustment structure B; 31. Pressure plate; 32. Brass slider C; 33. Spherical double-ended bolt B; 34. Adjusting screw B; 35. T-shaped adjusting fixing block; 36. Double-ended internal thread connecting column; 4. Cavity module; 5. Handle. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Please see Figures 1-2 An adjustable cavity base includes a base 1, a double-support adjustment structure A2, a double-support adjustment structure B3, a cavity module 4, and a handle 5. The base 1 adopts a rigid structure design. The top surface of the base 1 has symmetrically opened positioning pin holes. The double-support adjustment structure A2 is installed on one side of the base 1. The surface of the base 1 below the double-support adjustment structure A2 has symmetrically opened sliding grooves 11. An adjustment screw A12 is rotatably installed inside one of the sliding grooves 11. The double-support adjustment structure B3 is installed on the other side of the base 1. The double-support adjustment structure A2 and the double-support adjustment structure B3 are connected. A cavity module 4 is installed between the support adjustment structure B3, and a locking mechanism is set on the double support adjustment structure A2 and the double support adjustment structure B3. After adjustment, it can be fully locked to effectively resist working vibration and ensure long-term stable operation of the cavity module 4. A handle 5 is symmetrically fixedly installed on the top of the base 1 between the double support adjustment structure A2 and the double support adjustment structure B3, and is installed inside the positioning pin hole. Through the cooperation between the positioning pin hole and the handle 5, the cavity module 4 can be quickly pulled out when the handle 5 is pulled, which is convenient for maintenance.

[0021] Please see Figures 1-5The double-support adjustment structure A2 includes a brass slider A21, a brass slider B22, and a spherical double-ended bolt A23. The brass slider A21 and the brass slider B22 are slidably installed inside the slide groove 11, and the brass slider A21 is threaded onto the outer ring of the adjusting screw A12. The top of the brass slider A21 and the brass slider B22 are respectively fixedly installed with spherical double-ended bolts A23. One side of the brass slider A21 and the brass slider B22 is provided with a pressure block 24 inside the slide groove 11. The pressure block 24 is installed on the bottom wall of the slide groove 11 by screws.

[0022] In actual use, by twisting the adjusting screw A12, the outer ring of the adjusting screw A12 moves with the inside of the brass slider A21. Since the brass slider A21 is limited to slide inside the slide groove 11, the adjusting screw A12 will drive the brass slider A21 to move, thereby adjusting the position of the double support adjusting structure A2. After adjusting to the required distance, the pressure block 24 is screwed and pressed onto the top of the brass slider A21 and the brass slider B22 by using screws, thereby restricting the position of the brass slider A21 and the brass slider B22.

[0023] Please see Figures 1-5 The outer ring of the spherical double-ended bolt A23 is threaded with nuts A on both the upper and lower sides. An adjusting and fixing strip 25 is slidably sleeved between the outer rings of the spherical double-ended bolt A23, with its end located between the nuts A. A conical washer is placed between the upper and lower nuts A and the adjusting and fixing strip 25 on the outer ring of the spherical double-ended bolt A23. A connecting post 26 is symmetrically fixed inside the adjusting and fixing strip 25. The adjusting and fixing strip 25 is connected to the cavity module 4 through the connecting post 26.

[0024] When the vertical position of the adjusting fixing bar 25 needs to be adjusted, the upper and lower nuts A on the outer ring of the spherical double-ended bolt A23 are rotated to make the two ends of the adjusting fixing bar 25 located between the nuts A or moved by the nuts A. Due to the setting of the conical washer, the adjusting fixing bar 25 can automatically level with the brass slider A21. When the desired height is reached, the position of the adjusting fixing bar 25 is fixed by tightening the nuts A.

[0025] Please see Figures 1-6 The double-support adjustment structure B3 includes a pressure plate 31, a brass slider C32, and a spherical double-ended bolt B33. The brass slider C32 is slidably installed inside one side of the base 1 and is located in the middle of the base 1. The pressure plate 31 is located on the top of the brass slider C32 in the middle of the base 1. The pressure plate 31 is installed inside the base 1 by screws. The spherical double-ended bolt B33 is fixedly installed inside the brass slider C32. An adjustment screw B34 is provided between one side of the base 1 and the inside of the brass slider C32. The adjustment screw B34 is threadedly connected to the brass slider C32.

[0026] When the lateral position of the double-support adjustment structure B3 needs to be adjusted, the brass slider C32 is moved to the outer ring of the adjustment screw B34 by rotating the adjustment screw B34. Due to the restriction between the pressure plate 31 and the base 1, the brass slider C32 can only move linearly inside the base 1. After the brass slider C32 is moved to the desired position, the pressure plate 31 is pressed against the top of the adjustment screw B34 by using screws to fix the position of the adjustment screw B34.

[0027] Please see Figures 1-6 The upper and lower outer rings of the spherical double-ended bolt B33 are threaded with nuts B. A T-shaped adjusting and fixing block 35 is slidably installed on the outer ring of the spherical double-ended bolt B33 and is located between the nuts B. A spherical washer is provided between the nuts B and the T-shaped adjusting and fixing block 35. A double-ended internal threaded connecting post 36 is symmetrically installed on the side of the T-shaped adjusting and fixing block 35 near the cavity module 4. The T-shaped adjusting and fixing block 35 is connected to the cavity module 4 through the double-ended internal threaded connecting post 36 and is fixed through the double-ended internal threaded connecting post 36.

[0028] By turning the nut B on the outer ring of the spherical double-ended bolt B33, the movement generated by the screwing of nut B drives the movement of the T-shaped adjusting fixing block 35, thereby realizing the vertical position adjustment of the T-shaped adjusting fixing block 35. Furthermore, due to the setting of the spherical shim, it is easy to level the T-shaped adjusting fixing block 35 while reducing vibration. After adjusting the T-shaped adjusting fixing block 35 to the required height, the position is fixed by tightening nut B.

[0029] This device, through the cooperation of tapered positioning pins and handles on both sides, allows a single person to complete the installation or disassembly of the heavy cavity module 4 in a few minutes without lifting it for alignment, ensuring safe operation and greatly improving maintenance efficiency.

[0030] It integrates vertical lifting, pitch and yaw adjustment functions, all driven by precision lead screws, with high adjustment resolution, which can meet the high-precision calibration requirements of laser beam output direction.

[0031] The entire base 1 adopts a rigid structure design, and locking mechanisms are set on the double support adjustment structure A2 and double support adjustment structure B3. After adjustment, it can be fully locked to effectively resist working vibration and ensure long-term stable operation of the cavity.

[0032] The dedicated design for excimer laser cavities addresses specific pain points in this field, demonstrating high practical value and promising market prospects.

[0033] Working principle: In use, first place the cavity module 4 above the base 1. Then, adjust the position of the double support adjustment structure A2 so that the connecting column 26 and the cavity module 4 can be aligned and connected. By rotating the upper and lower nuts A on the outer ring of the spherical double-ended bolt A23, the two ends of the adjusting fixing bar 25 are located between nuts A or moved by nuts A. When the desired height is reached, tighten the nuts A to fix the position of the adjusting fixing bar 25. Then, turn the adjusting screw A12. The adjusting screw A12 drives the brass slider A21 and the adjusting fixing bar 25 to move. After adjustment, use screws to press the pressure block 24 into the top of the brass slider A21 and the brass slider B22 to restrict the position of the brass slider A21 and the brass slider B22. Then, connect the cavity module 4 with the connecting column 26 to fix one side of the cavity module 4. Subsequently, the position of the double-support adjustment structure B3 is adjusted to align the double-headed internal thread connecting column 36 with the cavity module 4. The nut B on the outer ring of the spherical double-headed bolt B33 is twisted. The movement generated by the screwing of nut B drives the movement of the T-shaped adjustment fixing block 35, thereby adjusting the vertical position of the T-shaped adjustment fixing block 35. After adjusting the T-shaped adjustment fixing block 35 to the required height, the position is fixed by tightening nut B. Then, the adjustment screw B34 is rotated, causing the brass slider C32 to move on the outer ring of the adjustment screw B34. Due to the restriction between the pressure plate 31 and the base 1, the brass slider C32 can only move linearly inside the base 1. After moving the brass slider C32 to the required position, the pressure plate 31 is pressed against the top of the adjustment screw B34 by using screws to fix the position of the adjustment screw B34. Then, the double-headed internal thread connecting column 36 is connected to the cavity module 4, and the other side of the cavity module 4 is fixed by the double-headed internal thread connecting column 36.

Claims

1. An adjustable cavity base, comprising a base (1), a double-support adjustment structure A (2), a double-support adjustment structure B (3), a cavity module (4), and a handle (5), characterized in that: The top surface of the base (1) is symmetrically provided with positioning pin holes. A double support adjustment structure A (2) is installed on one side of the base (1). A sliding groove (11) is symmetrically provided on the surface of the base (1) below the double support adjustment structure A (2). An adjustment screw A (12) is rotatably installed inside one of the sliding grooves (11). A double support adjustment structure B (3) is installed on the other side of the base (1). A cavity module (4) is installed between the double support adjustment structure A (2) and the double support adjustment structure B (3). A handle (5) is symmetrically fixedly installed on the top of the base (1) between the double support adjustment structure A (2) and the double support adjustment structure B (3), and is installed inside the positioning pin hole.

2. The adjustable cavity base according to claim 1, characterized in that: The double-support adjustment structure A (2) includes a brass slider A (21), a brass slider B (22), and a spherical double-ended bolt A (23). The brass slider A (21) and the brass slider B (22) are slidably installed inside the slide groove (11), and the brass slider A (21) is threaded onto the outer ring of the adjusting screw A (12). The top of the brass slider A (21) and the brass slider B (22) are respectively fixedly installed with spherical double-ended bolts A (23). One side of the brass slider A (21) and the brass slider B (22) is provided with a pressure block (24) inside the slide groove (11). The pressure block (24) is installed on the bottom wall of the slide groove (11) by screws.

3. An adjustable cavity base according to claim 2, characterized in that: The outer ring of the spherical double-ended bolt A (23) is threaded with nuts A on both the upper and lower rings. An adjusting fixing strip (25) is slidably sleeved between the outer rings of the spherical double-ended bolt A (23), and the end is located between the nuts A. A conical washer is placed between the upper and lower nuts A and the adjusting fixing strip (25) on the outer ring of the spherical double-ended bolt A (23). A connecting column (26) is symmetrically fixed inside the adjusting fixing strip (25). The adjusting fixing strip (25) is connected to the cavity module (4) through the connecting column (26).

4. An adjustable cavity base according to claim 3, characterized in that: The double-support adjustment structure B (3) includes a pressure plate (31), a brass slider C (32), and a spherical double-ended bolt B (33). The brass slider C (32) is slidably installed inside one side of the base (1) and located in the middle of the base (1). The top of the brass slider C (32) is provided with a pressure plate (31) located in the middle of the base (1). The pressure plate (31) is installed inside the base (1) by screws. The spherical double-ended bolt B (33) is fixedly installed inside the brass slider C (32). An adjustment screw B (34) is provided between one side of the base (1) and the inside of the brass slider C (32). The adjustment screw B (34) is threadedly connected to the brass slider C (32).

5. An adjustable cavity base according to claim 4, characterized in that: The spherical double-ended bolt B (33) has nuts B threadedly fitted on its upper and lower outer rings. A T-shaped adjusting and fixing block (35) is slidably installed on the outer ring of the spherical double-ended bolt B (33) and located between the nuts B. A spherical washer is provided between the nuts B and the T-shaped adjusting and fixing block (35). A double-ended internal threaded connecting column (36) is symmetrically installed on the side of the T-shaped adjusting and fixing block (35) near the cavity module (4). The T-shaped adjusting and fixing block (35) is connected to the cavity module (4) through the double-ended internal threaded connecting column (36).

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