Laser-driven white light source device

Abstract

The utility model provides a kind of laser-driven white light source device, it includes laser light source, optical system, gas loading structure and high-pressure drive component, laser light source is suitable for providing laser beam;Optical system is suitable for focusing to laser beam;Gas loading structure is located in the side of optical system away from laser light source, the central position of gas loading structure corresponds with the focusing area of laser beam;High-pressure drive component is suitable for igniting plasma in gas in gas loading structure;Wherein, gas loading structure has relatively arranged gas carrier incident surface and gas carrier exit surface along propagation path, the curvature of gas carrier incident surface and gas carrier exit surface in the direction perpendicular to propagation path is constant.The utility model can reduce the generation of aberration, and then reduce the size of light emitting point, so that light emitting point consistency is better;White light emission uniformity is also good and spectral radiance is also higher simultaneously.

Description

Technical Field

[0001] This utility model relates to the field of laser characteristic light source technology, and in particular to a laser-driven white light source device. Background Technology

[0002] As integrated circuits continue to become more multilayered and complex, the importance of measurement and inspection equipment is becoming increasingly prominent. In integrated circuit inspection, optical inspection has become an important indicator, and optical measurement and inspection equipment has become paramount. Current technology uses LSP (Laser Sustained Plasma) light sources to inspect integrated circuits, but existing LSP light sources have drawbacks such as excessively large light-emitting point size and low radiation brightness. Utility Model Content

[0003] In view of this, the purpose of this utility model is to propose a laser-driven white light source device to solve the problems of excessively large light-emitting point size and low radiation brightness in existing LSP light sources.

[0004] To achieve the above objectives, this utility model provides a laser-driven white light source device, comprising: A laser source, the laser source including a transmitter for emitting a laser beam; An optical system is provided in the emission direction of the emitting head to focus the laser beam to form a focusing area; A gas-loaded structure is disposed on the side of the optical system away from the transmitter head. The gas-loaded structure includes plasma, and the center position of the gas-loaded structure corresponds to the focusing area of ​​the laser beam. A high-voltage drive assembly includes an ignition head disposed on the sidewall of the gas loading structure and extending into the gas loading structure to ignite the plasma.

[0005] The gas-loaded structure includes a gas carrier incident surface and a gas carrier exit surface arranged opposite to each other along the propagation path of the laser beam, and the curvature of the gas carrier incident surface and the gas carrier exit surface is constant in the direction perpendicular to the propagation path.

[0006] Optionally, the optical system includes an optical incident surface for collimating the laser beam and an optical exit surface for focusing the laser beam, wherein the optical incident surface and the optical exit surface are arranged opposite to each other along the propagation path of the laser beam.

[0007] Optionally, the gas loading structure can be either a cylinder or a cube.

[0008] Optionally, the optical incident surface and the optical exit surface are either cylindrical lenses or spherical lenses.

[0009] Optionally, the optical system further includes a wedge mirror assembly for compensating for aberrations of the laser beam introduced by the optical incident surface, the wedge mirror assembly being disposed between the optical incident surface and the optical exit surface.

[0010] Optionally, the laser source includes any one of a semiconductor laser, a gas laser, or a fiber laser.

[0011] Optionally, the optical system includes at least one of a prism reflecting element, a DOE diffraction element, or an MLA array lens.

[0012] Optionally, the plasma is an inert gas or a mixture of gases.

[0013] Optionally, the ignition head is an electrode assembly, which includes two electrodes, which are respectively disposed on two opposite sidewalls of the gas loading structure.

[0014] Optionally, the high-voltage drive assembly further includes a high-voltage discharge module, which is electrically connected to the two electrodes respectively.

[0015] As described above, the laser-driven white light source device provided by this utility model includes a laser source, an optical system, a gas-loaded structure, and a high-pressure driving component. The laser source is suitable for providing a laser beam; the optical system is suitable for focusing the laser beam; the gas-loaded structure is located on the side of the optical system away from the laser source, and the center of the gas-loaded structure corresponds to the focusing area of ​​the laser beam; the high-pressure driving component is suitable for igniting the plasma within the gas in the gas-loaded structure; wherein, the gas-loaded structure has a gas carrier incident surface and a gas carrier exit surface arranged opposite each other along the propagation path, and the curvature of the gas carrier incident surface and the gas carrier exit surface is constant in the direction perpendicular to the propagation path. This can reduce the generation of aberrations, thereby reducing the size of the emitting point and making the consistency of the emitting point better; at the same time, the uniformity of white light output is also better, and the spectral radiance is also higher. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in this utility model or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of an embodiment of the laser-driven white light source device of this utility model.

[0018] Figure 2 This is a schematic diagram of one embodiment of the gas loading structure of this utility model.

[0019] Figure 3 This is a schematic diagram of another embodiment of the laser-driven white light source device of this utility model.

[0020] Figure 4 This is a schematic diagram of another embodiment of the gas loading structure of this utility model.

[0021] Figure 5 This is a schematic diagram of another embodiment of the laser-driven white light source device of this utility model.

[0022] Figure 6 This is a schematic diagram of yet another embodiment of the laser-driven white light source device of this utility model.

[0023] Figure 7 (a) is the contour map of the light spot before improvement; (b) is the lateral distribution map of the light intensity before improvement; (c) is the contour map of the light spot after improvement; and (d) is the lateral distribution map of the light intensity after improvement.

[0024] Figure 8 In the diagram, (e) represents the size of the light-emitting point before improvement; (f) represents the size of the light-emitting point after improvement.

[0025] Figure 9 (g) shows the size comparison of the light-emitting point in the X direction before and after the improvement; (h) shows the size comparison of the light-emitting point in the Y direction before and after the improvement.

[0026] Figure label: 10. Laser-driven white light source device; 100. Laser source; 110. Laser beam; 200. Optical system; 210. Optical incident surface; 220. Optical exit surface; 230. Cylindrical lens; 240. Spherical lens; 250. Wedge lens group; 300. Gas loading structure; 310. Gas carrier incident surface; 320. Gas carrier exit surface; 400. High-voltage drive assembly; 410. High-voltage discharge module; 420. Electrode assembly; 500. Focus area. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0028] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar words used in the embodiments of this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0029] As described in the background section, metrology is an indispensable part of the integrated circuit manufacturing process. Metrology equipment can monitor, identify, locate, and analyze process defects during production, playing a crucial role in enabling wafer fabs to promptly identify problems, improve processes, and increase yield. With the continued multi-layering and increasing complexity of integrated circuits, the importance of metrology equipment is becoming increasingly prominent. Optical metrology equipment occupies 70% of the market share for all metrology equipment, and the light source is one of its key core components, determining the final testing performance of the equipment. Light sources are mainly divided into single-wavelength and broadband light sources. Single-wavelength mainly refers to laser-type light sources, while broadband light sources currently mainly include LEDs, xenon lamps, and LSP (Laser-Sustaining Plasma) light sources. Among them, LSP light sources have important applications in the field of metrology due to their advantages such as high radiance, long lifespan, and wide spectral coverage.

[0030] The working principle of LSP (Liquid Spherical Photonics) light sources is to discharge gas using high voltage to form plasma, and then focus a laser onto the plasma to maintain its luminescence, thus achieving a wide spectrum output. However, in current LSP systems, the surface shapes of the laser incident surface and the white light emitting surface of the gas carrier cannot be precisely manufactured, resulting in certain aberrations. This leads to an excessively large luminous point size and low radiant brightness due to the final laser focusing.

[0031] To solve the above technical problems, such as Figure 1 As shown, this utility model provides a laser-driven white light source device 10, comprising: A laser source 100, the laser source 100 including an emitting head for emitting a laser beam 110; An optical system 200 is provided in the emission direction of the emitting head to focus the laser beam 110 to form a focusing region 500. A gas loading structure 300 is disposed on the side of the optical system 200 away from the transmitter head. The gas loading structure 300 includes plasma, and the center position of the gas loading structure 300 corresponds to the focusing area 500 of the laser beam 110. A high-voltage drive assembly 400 includes an ignition head disposed on the side wall of the gas loading structure 300 and extending into the gas loading structure 300 to ignite the plasma.

[0032] Specifically, the optical system 200 is disposed on the propagation path of the laser beam 110, and the optical system 200 is suitable for focusing the laser beam 110; the gas loading structure 300 is disposed on the side of the optical system 200 away from the laser source 100, and the center position of the gas loading structure 300 corresponds to the focusing area of ​​the laser beam 110; the high-voltage driving component 400 is suitable for igniting the plasma in the gas in the gas loading structure 300; wherein, the gas loading structure 300 has a gas carrier incident surface 310 and a gas carrier exit surface 320 disposed opposite to each other along the propagation path, and the curvature of the gas carrier incident surface 310 and the gas carrier exit surface 320 is constant in the direction perpendicular to the propagation path.

[0033] The laser source 100 serves as the energy input source for the entire system, responsible for generating a high-intensity laser beam 110. The laser beam 110 possesses high monochromaticity and directionality, forming the basis for subsequent optical processing and energy conversion.

[0034] The optical system 200 is positioned along the propagation path of the laser beam 110, and its main function is to precisely focus the laser beam 110. By combining components such as optical lenses or mirrors, the laser beam 110 can be focused onto a very small focal point. This focal area is where the laser energy is most concentrated, which is the focusing area 500.

[0035] The gas loading structure 300 is located on the side of the optical system 200 away from the laser source 100, and its center position precisely corresponds to the focusing area of ​​the laser beam 110. The main function of the gas loading structure 300 is to provide a closed or semi-closed space to contain and confine a certain amount of gas (such as inert gas, mixed gas, etc.) so that the subsequent high-pressure drive component 400 can excite plasma within this space.

[0036] The gas carrier incident surface 310 and the gas carrier exit surface 320 are located at opposite ends of the gas loading structure 300 and are positioned relative to each other along the propagation path of the laser beam 110. They have constant curvature in the direction perpendicular to the propagation path, which helps to ensure that the laser beam 110 reduces the aberrations caused by the surface shape errors of the gas carrier incident surface 310 and the gas carrier exit surface 320 when passing through them, thereby reducing the size of the LSP emitting point and also facilitating the effective transfer and conversion of energy after the laser beam 110 is focused.

[0037] The high-voltage drive assembly 400 is suitable for achieving plasma excitation. When the laser beam 110 is focused on the gas within the gas-loaded structure 300, the high-voltage drive assembly 400 applies a momentary high-voltage pulse, ionizing the atoms or molecules in the gas to form plasma. The formation of plasma is accompanied by intense radiation, including visible light, ultraviolet light, and infrared light, with the visible light portion constituting the white light source.

[0038] In some embodiments, such as Figure 3 and Figure 5 As shown, the gas loading structure 300 includes a gas carrier incident surface 310 and a gas carrier exit surface 320 disposed opposite to each other along the propagation path of the laser beam 110, and the curvature of the gas carrier incident surface 310 and the gas carrier exit surface 320 is constant in the direction perpendicular to the propagation path.

[0039] Specifically, this invention modifies the gas carrier incident surface 310 and the gas carrier incident surface 310 exit surface in the gas loading structure 300 to maintain constant curvature in the direction perpendicular to the propagation path. This allows for more precise control of the production variables of the gas carrier incident surface 310 and the gas carrier incident surface 310, resulting in an optical surface that is easy to process with precision and has good uniformity. This reduces aberrations and reduces the size of the light-emitting point, resulting in better consistency of the light-emitting point. At the same time, the uniformity of white light emission and the spectral radiance are also better.

[0040] Specifically, such as Figures 7 to 9 As shown, Figure 7 Figures a and b show schematic diagrams of existing LDLS (Laser-driven white light source). Figure 7 Figures c and d illustrate the LDLS light source of this invention. Compared to the LDLS (Laser-driven white light source) of this invention, the uniformity of light emission is significantly improved; furthermore, the uniformity of the light spot distribution is enhanced, with no peaks in the lateral light intensity distribution, resulting in an overall flat distribution. Meanwhile, as... Figure 8As shown, Figure 8 Figure e shows the dimensions of an existing LDLS light source. Figure 8 Figure f shows the dimensions of the LDLS light source in this invention. The size of the emitting point of the LDLS is improved, with the size of the emitting point reduced by nearly 20 μm at the vertical interface, significantly compensating for the increased size of the emitting point caused by the Rayleigh spot, and improving the overall radiant brightness of the light source. Figure 9 As shown, the uniformity of the emission points of LDLS is significantly improved, and the uniformity in both the X and Y directions is guaranteed.

[0041] Reference Figures 1 to 4 In some embodiments, the curvature of the gas carrier incident surface 310 and the gas carrier exit surface 320 along the incident plane of the laser beam 110 is constant.

[0042] It is understandable that constant curvature means that the curvature of the gas carrier incident surface 310 and the gas carrier exit surface 320 is uniform and consistent in the direction perpendicular to the incident plane of the laser beam 110. This facilitates obtaining this surface shape during manufacturing, and also helps ensure that the propagation direction and shape of the laser beam 110 do not undergo unnecessary distortion or warping as it passes through the gas carrier incident surface 310 and the gas carrier exit surface 320. In other words, it reduces optical aberrations that may be introduced by surface irregularities. By reducing aberrations, wavefront distortion of the beam is suppressed, and beam quality is improved.

[0043] In some embodiments, the gas carrier incident surface 310 and the gas carrier exit surface 320 are either cylindrical or planar surfaces.

[0044] It is understandable that, compared to other surfaces with irregular curvature, cylindrical or flat surfaces allow for better control of the uniformity of overall changes during production and processing, precise control of surface errors, and improved consistency and uniformity of the luminous points 500.

[0045] Meanwhile, the cylindrical surface has a continuous curved surface, which can provide a more uniform gas flow path, reduce the formation of turbulence and eddies, and reduce the impact of gas non-uniformity on the focusing of the 500-point light source. The planar structure is easy to process and install, and can be easily connected and integrated with other planar components.

[0046] In some embodiments, such as Figures 3 to 5 As shown, the gas loading structure 300 can be either a cylinder or a cube.

[0047] Specifically, such as Figure 2 and Figure 3As shown, the cylindrical gas loading structure 300 has an outer surface with a constant or uniformly varying curvature along the axis or circumference, which can better reduce the influence of surface shape on aberrations. At the same time, the cylindrical gas loading structure 300 can better confine the gas and is easy to process and assemble, which helps to reduce aberrations, improve the consistency and uniformity of the light emission point 500, and is beneficial to the focusing of the laser beam 110 and the stable formation of plasma.

[0048] like Figure 4 and Figure 5 As shown, the cubic gas loading structure 300 can better uniformly confine gas in three-dimensional space, and its structure is simple, easy to process and assemble. The cubic gas loading structure 300 includes both cuboid and cube-shaped gas loading structures 300.

[0049] Of course, in other embodiments, the gas carrier incident surface 310 and the gas carrier exit surface 320 can also be other irregular shapes, as long as the gas carrier incident surface 310 and the gas carrier exit surface 320 are either cylindrical or planar.

[0050] In some embodiments, such as Figure 1 , Figure 3 , Figure 5 , Figure 6 As shown, the optical system 200 includes an optical incident surface 210 for collimating the laser beam 110 and an optical exit surface 220 for focusing the laser beam 110. The optical incident surface 210 and the optical exit surface 220 are arranged opposite to each other along the propagation path of the laser beam 110.

[0051] Understandably, the optical incident surface 210 is used to collimate the laser beam 110 incident on the optical system 200. During propagation, the laser beam 110 may be affected by various factors (such as air turbulence, mirror misalignment, etc.), causing the beam to diverge or deviate from its predetermined path. By designing a properly sized optical incident surface 210, optical elements such as lenses and mirrors can be used to correct and collimate the beam, ensuring it propagates along a predetermined path while maintaining high parallelism and energy density.

[0052] After the laser beam 110 is collimated by the optical incident surface 210, the optical exit surface 220 is used to further focus the beam onto the target area. By designing appropriate focal length and lens shape, beams that are originally parallel or nearly parallel can be converged into a point or a small area, thereby achieving high energy density output.

[0053] In some embodiments, such as Figure 3 and Figure 5As shown, the optical incident surface 210 and the optical exit surface 220 are either cylindrical lenses 230 or spherical lenses 240.

[0054] It is understood that the optical incident surface 210 in this embodiment can be either a cylindrical lens 230 or a spherical lens 240, and the optical exit surface 220 can also be either a cylindrical lens 230 or a spherical lens 240, without any special limitation. The cylindrical lens 230 has focusing capability in one direction, while maintaining the parallelism of the light beam in the opposite direction. The cylindrical lens 230 can be used as both the optical incident surface 210 and the optical exit surface 220 as needed. Similarly, the spherical lens 240 in this embodiment has focusing capability in one direction, converging the light beam to a single point to form a focal point, while maintaining the parallelism of the light beam in the opposite direction. The cylindrical lens 230 can be used as both the optical incident surface 210 and the optical exit surface 220 as needed.

[0055] In some embodiments, such as Figure 5 As shown, the optical system 200 further includes a wedge mirror assembly 250 for compensating for aberrations of the laser beam 110 introduced by the optical incident surface 210, the wedge mirror assembly 250 being disposed between the optical incident surface 210 and the optical exit surface 220.

[0056] Understandably, in this embodiment, a wedge mirror assembly 250 is provided between the optical incident surface 210 and the optical exit surface 220 of the optical system 200 to compensate for aberrations introduced into the laser beam 110 by the optical incident surface 210, thereby improving the focusing accuracy of the laser beam 110. The wedge mirror assembly 250 is located at a position where the incident light rays are relatively parallel, and the system is matched with a collimating and focusing device to achieve laser energy convergence. By adjusting the angle of the wedge mirror to compensate for aberrations, it is ensured that the laser beam 110 can be focused more accurately.

[0057] In some embodiments, the laser source 100 includes any one of a semiconductor laser, a gas laser, or a fiber laser.

[0058] As is understood, a semiconductor laser is a device that generates laser light using stimulated emission from semiconductor materials. It possesses advantages such as small size, light weight, high efficiency, long lifespan, ease of modulation, and direct electrical pumping. In optical systems 200, semiconductor lasers can serve as compact and efficient light sources, particularly suitable for applications requiring miniaturization and integration.

[0059] Gas lasers use gas as the working medium to generate laser light. They have high output power and good beam quality.

[0060] Fiber lasers utilize optical fibers as the laser gain medium. Stimulated emission is generated within the fiber by pump light, thus producing laser light. Fiber lasers possess excellent beam quality, high conversion efficiency, good heat dissipation, and flexible output characteristics.

[0061] When selecting a laser source 100, the choice should be based on specific needs. For example, factors such as cost, reliability, maintenance difficulty, and environmental requirements should be considered when choosing a suitable laser source 100; no specific limitations are imposed here.

[0062] In some embodiments, the optical system 200 includes at least one of a prism reflecting element, a DOE diffraction element, or an MLA array lens.

[0063] Specifically, the optical system 200 includes at least one of a prism reflecting element, a DOE (Diffractive Optical Elements) diffractive element, or an MLA (Diffractive Optical Elements) array lens.

[0064] Understandably, prism reflectors utilize the refraction and reflection properties of prisms to change the direction of light propagation. In optical systems 200, prism reflectors are often used in compact designs to reduce system size and weight while maintaining or improving optical performance.

[0065] A DOE (Diffractive Optical Element) is an optical element that utilizes the principle of light diffraction to achieve specific optical functions. In optical systems, DOEs are commonly used in beam shaping, wavefront correction, spectral analysis, and imaging optimization.

[0066] MLA (Microlens Array) is an optical element consisting of multiple tiny lenses arranged in a specific pattern.

[0067] In some embodiments, the optical system 200 integrates at least one of a prism reflecting element, a DOE diffraction element, and an MLA array lens, depending on specific requirements. This allows for full utilization of the advantages of various optical elements, enabling more complex and efficient optical functions. For example, combining a prism reflecting element and a DOE diffraction element can achieve a compact and high-performance beam shaping and wavefront correction system; while introducing an MLA array lens can further improve the system's imaging quality and resolution. No particular limitations are imposed here, and the configuration can be tailored to specific needs.

[0068] In some embodiments, the plasma is an inert gas or a mixture of gases.

[0069] Specifically, the gas loading structure 300 includes at least one of a mixture of one or more rare gases.

[0070] It is understood that rare gases include helium, neon, argon, krypton, xenon, radon, nitrogen, etc. The gas loading structure 300 in this embodiment may include, but is not limited to, helium, neon, argon, krypton, xenon, radon, nitrogen, etc., as well as mixtures of various gases.

[0071] In some embodiments, such as Figure 6 As shown, the ignition head is an electrode assembly 420, which includes two electrodes, which are respectively disposed on two opposite side walls of the gas loading structure 300.

[0072] Furthermore, the high-voltage drive assembly 400 also includes a high-voltage discharge module 410, which is electrically connected to the two electrodes respectively.

[0073] The high-voltage drive assembly 400 includes a high-voltage discharge module 410 and an electrode group 420. The electrode group 420 is partially disposed within the gas loading structure 300 and is electrically connected to the high-voltage discharge module 410.

[0074] Understandably, the high-voltage discharge module 410 is suitable for converting low-voltage DC or AC power into high-voltage electrical energy and outputting it to the electrode group 420.

[0075] Electrode group 420 is the direct actuator for high-voltage discharge and can consist of two or more electrode groups 420, with the electrode portions positioned opposite each other inside the gas loading structure 300. Under the action of the high-voltage electric field, the gas molecules between the electrodes are ionized, forming a conductive channel, i.e., a discharge channel.

[0076] Electrical energy is transmitted between the electrode group 420 and the high-voltage discharge module 410 via an electrical connection.

[0077] The steps for using the laser-driven white light source device 10 of this utility model are as follows: First, turn on the laser source 100 so that the laser beam 110 is focused on the light source 500; Then, the high-voltage discharge module 410 is turned on, and the electrode group 420 is driven by high voltage, so that electrons escape from the electrode group 420. Furthermore, the emitted electrons collide with gas molecules in the gas-loaded structure 300, generating plasma; Finally, the high-voltage discharge module 410 is turned off, and plasma luminescence can continue to be maintained at the laser focusing area 500.

[0078] It should be noted that the above description describes some embodiments of the present invention. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps described in the claims can be performed in a different order than that shown in the above embodiments and still achieve the desired result. Furthermore, the processes depicted in the drawings do not necessarily require a specific or sequential order to achieve the desired result. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0079] Additionally, to simplify the description and discussion, and to avoid obscuring the embodiments of the present invention, the well-known power / ground connections to the integrated circuit (IC) chip and other components may or may not be shown in the provided drawings. Furthermore, the apparatus may be shown in block diagram form to avoid obscuring the embodiments of the present invention, and this also takes into account the fact that the details of the implementation of these block diagram apparatuses are highly dependent on the platform on which the embodiments of the present invention will be implemented (i.e., these details should be fully understood by those skilled in the art). While specific details (e.g., circuits) have been set forth to describe exemplary embodiments of the present invention, it will be apparent to those skilled in the art that the embodiments of the present invention may be implemented without these specific details or with variations thereof. Therefore, these descriptions should be considered illustrative rather than restrictive.

[0080] Although the present invention has been described in conjunction with specific embodiments thereof, many substitutions, modifications, and variations of these embodiments will be apparent to those skilled in the art from the foregoing description. For example, other memory architectures (e.g., dynamic RAM (DRAM)) may be used with the embodiments discussed.

[0081] The embodiments of this utility model are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the embodiments of this utility model should be included within the protection scope of this utility model.

Claims

1. A laser-driven white light source device, characterized in that, include: A laser source (100) includes a transmitter (101) for emitting a laser beam (110). An optical system (200) is provided in the emission direction of the transmitter (101) to focus the laser beam (110) to form a focusing area (500). A gas loading structure (300) is provided on the side of the optical system (200) away from the transmitter head (101). The gas loading structure (300) includes plasma. The center of the gas loading structure (300) corresponds to the focusing area (500) of the laser beam (110). A high-voltage drive assembly (400) includes an ignition head disposed on the sidewall of the gas loading structure (300) and extending into the gas loading structure (300) to ignite the plasma; The gas loading structure (300) includes a gas carrier incident surface (310) and a gas carrier exit surface (320) arranged opposite to each other along the propagation path of the laser beam (110), and the curvature of the gas carrier incident surface (310) and the gas carrier exit surface (320) is constant in the direction perpendicular to the propagation path.

2. The laser-driven white light source device according to claim 1, characterized in that, The optical system (200) includes an optical incident surface (210) for collimating the laser beam (110) and an optical exit surface (220) for focusing the laser beam (110), the optical incident surface (210) and the optical exit surface (220) being arranged opposite to each other along the propagation path of the laser beam (110).

3. The laser-driven white light source device according to claim 1, characterized in that, The gas loading structure (300) can be either a cylinder or a cube.

4. The laser-driven white light source device according to claim 2, characterized in that, The optical incident surface (210) and the optical exit surface (220) are either cylindrical lenses (230) or spherical lenses (240).

5. The laser-driven white light source device according to claim 2, characterized in that, The optical system (200) further includes a wedge mirror assembly (250) for compensating for aberrations of the laser beam (110) introduced by the optical incident surface (210), the wedge mirror assembly (250) being disposed between the optical incident surface (210) and the optical exit surface (220).

6. The laser-driven white light source device according to claim 1, characterized in that, The laser source (100) includes any one of a semiconductor laser, a gas laser, or a fiber laser.

7. The laser-driven white light source device according to claim 1, characterized in that, The optical system (200) includes at least one of a prism reflector, a DOE diffraction element, or an MLA array lens.

8. The laser-driven white light source device according to claim 1, characterized in that, The plasma is an inert gas or a mixture of gases.

9. The laser-driven white light source device according to claim 1, characterized in that, The ignition head is an electrode assembly (420), which includes two electrodes, which are respectively disposed on two opposite sidewalls of the gas loading structure (300).

10. The laser-driven white light source device according to claim 9, characterized in that, The high-voltage drive assembly (400) also includes a high-voltage discharge module (410), which is electrically connected to the two electrodes respectively.

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