High-precision motor-driven vacuum magnetic coupling transmission rod

Abstract

The utility model relates to a kind of high-precision motor drive type vacuum magnetic coupling transmission rod, including, fixed flange, first sample pipe fixed seat, second transmission rod fixed seat and the magnetic force pole external component, the fixed flange and first sample pipe fixed seat between by bellows adjusting device connection, first sample pipe fixed seat and second transmission rod fixed seat between being provided with linear motion component and magnetic force sample pipe, rotary motion component is provided on the magnetic force pole external component;Magnetic force sample pipe is provided with magnetic force pole, the magnetic force pole is set through fixed flange, magnetic force pole one end is provided with inner magnetic block, other end is provided with end effector, the inner magnetic block with magnetic force pole external component position corresponds;The utility model combines rotary structure with linear moving mechanism, motion is contactlessly, abrasionlessly transferred to vacuum cavity by magnetic coupling system.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum equipment transmission and automation control technology, specifically a high-precision motor-driven vacuum magnetic coupling transmission rod. Background Technology

[0002] Magnetic coupling transmission rods (magnetic rods) are key components in vacuum equipment for achieving dynamic seal transmission. They transmit motion through a sample transfer tube using magnetic force, avoiding the contamination problems of traditional dynamic seals. However, most existing vacuum magnetic rods rely on manual operation, such as advancing the rod by rotating a screw with a handle, or making coarse angle adjustments using lever principles. This operating method has significant drawbacks: Control precision heavily relies on human experience: existing manual magnetic levers mostly achieve linear advancement through a "rotating handle - drive screw" mechanism, or achieve coarse angle adjustment through a "lever - gear" structure. Their displacement accuracy depends entirely on the operator's hand strength and visual judgment. For example, in some sample positioning scenarios, manual adjustment struggles to achieve positioning errors within ±0.01mm, with repeatability generally exceeding ±0.1mm, failing to meet the demands of more precise operations. During rotational adjustment, angular errors often exceed ±5°, making it impossible to achieve uniform, constant-angle, precise rotation.

[0003] Lack of automation integration capabilities: In manual operation mode, the magnetic rod cannot interact with the overall control system of the vacuum equipment (such as PLC or industrial computer), cannot receive preset motion commands, and cannot provide real-time status feedback. In multi-step, repetitive processes (such as multi-station sample switching in vacuum coating or multi-parameter step-by-step adjustment in precision testing), manual operation must be relied upon one after another, which is not only inefficient but also prone to poor process consistency due to differences in human operation.

[0004] The lack of feedback on motion status poses a high operational risk: Manual magnetic rods lack position and speed detection elements, meaning operators cannot know the real-time position of the rod within the vacuum chamber and can only indirectly judge it through the "external handle travel." This easily leads to problems such as "over-propulsion causing internal component collisions" or "insufficient propulsion resulting in substandard processes." For example, in vacuum valve control, if it cannot be confirmed whether the magnetic rod has completely closed the valve, it may cause vacuum leakage, resulting in equipment damage or experimental failure.

[0005] Although some electric magnetic rods have been developed, most of them have only one function (only realize one kind of motion) or do not involve a high-precision closed-loop control system, which cannot meet the growing demand for motion accuracy and automation in fields such as semiconductor processes and precision analytical instruments. Utility Model Content

[0006] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the present invention.

[0007] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a high-precision motor-driven vacuum magnetic coupling transmission rod, comprising, The system includes a fixed flange, a first sample transfer tube fixing seat, a second transfer rod fixing seat, and an external assembly of the magnetic rod. The fixed flange and the first sample transfer tube fixing seat are connected by a bellows adjustment device. A linear motion assembly and a magnetic sample transfer tube are provided between the first sample transfer tube fixing seat and the second transfer rod fixing seat. A rotary motion assembly is provided on the external assembly of the magnetic rod. A magnetic rod is installed inside the magnetic transfer tube. The magnetic rod passes through the fixed flange. An inner magnetic block is installed at one end of the magnetic rod, and an end effector is installed at the other end. The inner magnetic block corresponds to the position of the external components of the magnetic rod.

[0008] As a preferred technical solution for a high-precision motor-driven vacuum magnetic coupling transmission rod, the linear motion assembly includes a precision lead screw and a linear motion drive motor, wherein the linear motion drive motor is connected to the precision lead screw via a coupling.

[0009] As a preferred technical solution for a high-precision motor-driven vacuum magnetic coupling transmission rod, the external component of the magnetic rod includes a magnetic sleeve, and linear sliding sleeves are provided at both ends of the magnetic sleeve. The magnetic sleeve and the linear sliding sleeves are sleeved on the magnetic transfer tube.

[0010] As a preferred technical solution for a high-precision motor-driven vacuum magnetic coupling transmission rod, the external component of the magnetic rod also includes a magnetic sleeve fixing plate, on which a magnetic sleeve adapter flange is provided, and the linear sliding sleeve is connected to the magnetic sleeve adapter flange via a rotary bearing.

[0011] As a preferred technical solution for a high-precision motor-driven vacuum magnetic coupling transmission rod, the magnetic sleeve fixing plate is also provided with a lead screw nut, which is connected to a precision lead screw.

[0012] As a preferred technical solution for a high-precision motor-driven vacuum magnetic coupling transmission rod, a rotary driven gear is provided on the outer side of the linear sliding sleeve, a rotary motion motor is fixed on the magnetic sleeve fixing plate, the output shaft of the rotary motion motor is connected to a rotary drive gear, and the rotary driven gear meshes with the rotary drive gear.

[0013] As a preferred technical solution for a high-precision motor-driven vacuum magnetic coupling transmission rod, the magnetic sample transfer tube is provided with a first limiting ring and a second limiting ring near both ends.

[0014] The beneficial effects of this utility model are: This utility model combines a rotating structure with a linear motion mechanism, and transmits motion to the vacuum cavity without contact or wear through a magnetic coupling system. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them: Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the external component of the magnetic rod in this utility model; Figure 3 This is a cross-sectional structural diagram of the external component of the magnetic rod in this utility model; Figure 4 This is a schematic diagram of the structure of one end of the end effector in this utility model.

[0016] Reference numerals: 6. Fixed flange; 5. Bellows adjusting device; 19. First sample transfer tube fixing seat; 16. Second transfer rod fixing seat; 2. Rotary motion assembly; 4. Magnetic rod; 7. End effector; 41. Inner magnetic block; 1. Linear motion assembly; 11. Linear motion drive motor; 12. Coupling; 31. Magnetic sleeve; 3. External assembly of magnetic rod; 22. Magnetic sleeve adapter flange; 33. Rotary bearing; 14. Lead screw nut; 13. Precision lead screw; 34. Linear sliding sleeve; 15. Magnetic sleeve fixing plate; 21. Rotary motion motor; 24. Rotary driven gear; 23. Rotary drive gear; 32. Magnetic sample transfer tube; 17. First limit ring; 18. Second limit ring. Detailed Implementation

[0017] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0018] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0019] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0020] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0021] Example 1

[0022] Reference Figures 1-4 This embodiment provides a high-precision motor-driven vacuum magnetic coupling transmission rod, including a fixed flange 6, a first sample transfer tube fixing seat 19, a second transmission rod fixing seat 16, and a magnetic rod external assembly 3. The fixed flange 6 and the first sample transfer tube fixing seat 19 are connected by a bellows adjustment device 5. A linear motion assembly 1 and a magnetic sample transfer tube 32 are arranged between the first sample transfer tube fixing seat 19 and the second transmission rod fixing seat 16. A rotary motion assembly 2 is arranged on the magnetic rod external assembly 3. A magnetic rod 4 is installed inside the magnetic sample transfer tube 32. The magnetic rod 4 passes through the fixed flange 6. An inner magnetic block 41 is installed at one end of the magnetic rod 4, and an end effector 7 is installed at the other end. The inner magnetic block 41 corresponds to the position of the outer component 3 of the magnetic rod.

[0023] The magnetic sample transfer tube 32 is fixedly connected at both ends to the first sample transfer tube fixing seat 19 and the second transfer rod fixing seat 16. The first sample transfer tube fixing seat 19 and the second transfer rod fixing seat 16 can be equipped with movable plates to lock the ends of the magnetic sample transfer tube 32 onto the first sample transfer tube fixing seat 19 and the second transfer rod fixing seat 16. For details, please refer to... Figure 2 The structure on the second transmission rod fixing seat 16.

[0024] The magnetic transfer tube 32 itself is non-magnetic and serves as an isolation device. The inside of the magnetic transfer tube 32 is a vacuum, and the outside is an atmosphere. The fixed flange 6 is connected to the window flange of the vacuum chamber, so that the end effector 7 is located in the vacuum chamber. It is controlled by external equipment to rotate and move the magnetic rod 4 linearly.

[0025] The inner magnetic block 41 and the magnetic sleeve 31 are connected by magnetic coupling. The specific structure and principle are existing technologies and are not shown in the figure.

[0026] The linear motion assembly 1 includes a precision lead screw 13 and a linear motion drive motor 11, which is connected to the precision lead screw 13 via a coupling 12.

[0027] The precision lead screw 13 is connected at both ends to the first sample transfer tube fixing seat 19 and the second transfer rod fixing seat 16. Specifically, the precision lead screw 13 has bare shafts at both ends, which are connected to the first sample transfer tube fixing seat 19 and the second transfer rod fixing seat 16 via bearings. See [reference needed] for details. Figure 3 The cross-sectional structure shown.

[0028] The coupling 12 and the precision lead screw 13 are located on the outside of the second transmission rod fixing seat 16.

[0029] The external component 3 of the magnetic rod includes a magnetic sleeve 31, with linear sliding sleeves 34 at both ends of the magnetic sleeve 31. The magnetic sleeve 31 and the linear sliding sleeves 34 are fitted onto the magnetic transfer tube 32.

[0030] The magnetic rod external assembly 3 also includes a magnetic sleeve fixing plate 15, on which a magnetic sleeve adapter flange 22 is provided. The linear sliding sleeve 34 is connected to the magnetic sleeve adapter flange 22 via a rotary bearing 33.

[0031] It should be noted that the magnetic sleeve fixing plate 15 is provided with a through hole, through which the magnetic sample transfer tube 32 passes. The rotary bearing 33 is disposed in the through hole, and a magnetic sleeve adapter flange 22 is provided at the through hole. The two sides of the rotary bearing 33 are connected to the linear sliding sleeve 34 and the magnetic sleeve adapter flange 22 through the rotary bearing 33.

[0032] The magnetic sleeve fixing plate 15 is also provided with a lead screw nut 14, which is connected to the precision lead screw 13.

[0033] Another through hole is provided on the magnetic sleeve fixing plate 15, and the lead screw nut 14 is fixed in the through hole. By controlling the rotation of the precision lead screw 13, the lead screw nut 14 can be moved, thereby driving the magnetic sleeve fixing plate 15 and the magnetic sleeve 31 to slide on the magnetic sample transfer tube 32 through the linear sliding sleeve 34.

[0034] A rotary driven gear 24 is provided on the outer side of the linear sliding sleeve 34. A rotary motion motor 21 is fixed on the magnetic sleeve fixing plate 15. The output shaft of the rotary motion motor 21 is connected to a rotary drive gear 23. The rotary driven gear 24 meshes with the rotary drive gear 23.

[0035] The magnetic sample transfer tube 32 is provided with a first limiting ring 17 and a second limiting ring 18 near both ends.

[0036] This utility model proposes a technical solution that deeply integrates high-precision motor drive technology with magnetic coupling transmission technology: a high-precision motor-driven vacuum magnetic coupling transmission rod, the core of which lies in the independent and precise digital control of the rotary drive motor and the linear drive motor through the system controller, and then transmitting the motion to the vacuum cavity without contact or wear through the magnetic coupling system.

[0037] Reference Figure 1 The system controller (which can be a branded driver or motion control card) receives instructions from the host computer via a communication interface (such as EtherCAT, Ethernet). After parsing the instructions, it sends pulse signals to the rotary drive motor and the linear drive motor respectively.

[0038] Linear motion control: A linear drive motor rotates, driving a precision lead screw via a coupling, converting the rotational motion into precise linear movement of the external linear magnetic ring assembly. An encoder coaxially connected to the motor provides real-time feedback of the motor's rotation angle. The system controller calculates the theoretical displacement (lead screw lead * rotation angle) and performs closed-loop adjustment. Optionally, a linear scale can be installed on the linear movement component to directly detect the absolute position of the external linear magnetic ring assembly, forming a fully closed loop for even higher precision.

[0039] Rotary motion control: The rotary drive motor directly drives the outer rotating magnetic ring sleeve. Its built-in encoder provides real-time feedback on the rotational speed and angle. The system controller dynamically adjusts the motor's operating speed by comparing the setpoint with the feedback value, ensuring smooth and precise rotary motion.

[0040] Linear rotary interpolation: This method transmits two precisely controlled motions to a transmission rod on the vacuum side, which ultimately drives the end effector (such as a valve or sample stage) to complete a high-precision composite action.

[0041] Magnetic coupling: The magnetic sleeve 31 has a strong magnet inside, and the magnetic transfer tube 32 has a magnetic rod 4 running through the middle. The magnetic rod 4 and the magnetic sleeve 31 are installed at one end and have magnetism. The magnetic sleeve 31 and the inner magnetic block 41 at the end of the magnetic rod 4 form a magnetic coupling structure. One example model can be MLT40-42-20-H-TL900-RL180_SCD16.

[0042] At this time, controlling the movement of the magnetic sleeve can indirectly control the movement of the magnetic rod. The end of the magnetic rod 4 is equipped with an end effector 7. Precise control of the end effector can be achieved by controlling the movement of the magnetic rod.

[0043] Linear Motion: The linear motion drive motor 11 transmits power to the precision lead screw 13 via the coupling 12. Two lead screw nuts 14 are mounted on the precision lead screw 13, forming a sliding pair. The lead screw nuts 14 are mounted on two magnetic sleeve fixing plates 15. Rotary bearings 33 are located at both ends of the magnetic sleeve 31, and these bearings are mounted on the linear sliding sleeve 34 and fixed to the magnetic sleeve fixing plate 15 via the magnetic sleeve adapter flange 22. The magnetic sleeve 31 has a hollow structure with a magnetic sample transfer tube 32 running through it. The magnetic sample transfer tube 32 and the precision lead screw 13 are respectively fixed to the first sample transfer tube fixing seat 16 and the second sample transfer tube fixing seat 19. When the linear motion program is executed, the motor drives the magnetic sleeve 31 to drive the magnetic rod 4 inside the magnetic sample transfer tube 32 in a linear reciprocating motion.

[0044] Rotational motion: A rotary drive gear 23 is mounted on the output shaft of the rotary motion motor 21. Rotary bearings 33 are provided at both ends of the magnetic sleeve 31, and a rotary driven gear 24 is mounted at one end of the magnetic sleeve 31, forming a gear pair with the rotary drive gear 23. When the rotational motion program is executed, the motor drives the magnetic sleeve 31 to drive the magnetic rod 4 in the magnetic sample tube 32 to rotate.

[0045] Rotary linear interpolation: By programming the controller or controlling the host computer, rotation and motion can be controlled simultaneously to achieve rotary linear interpolation motion, which can handle more complex working conditions.

[0046] This invention addresses the shortcomings of existing manual magnetic rods (low precision, lack of automation, and lack of status feedback) and existing electric magnetic rods (limited functionality and lack of high-precision closed-loop control). The core objective of this invention is to provide a high-precision, programmable motor-driven vacuum magnetic coupling transmission rod and its control system with full closed-loop control capability, specifically achieving the following objectives: Breaking through the precision limitations of traditional magnetic rods, it achieves linear positioning accuracy of ±0.01mm and rotational angle accuracy of ±0.1°, meeting the precision transmission requirements of high-end vacuum equipment; it supports independent control and compound linkage of linear and rotary motion, can preset complex motion trajectories, and realize fully automated operation; it has a standardized industrial interface, which can be seamlessly integrated into mainstream control systems such as PLC and industrial control computers, reducing the difficulty of automation upgrades for vacuum equipment.

[0047] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0048] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A high-precision motor-driven vacuum magnetic coupling transmission rod, characterized in that: include, The fixed flange (6), the first sample transfer tube fixing seat (19), the second transfer rod fixing seat (16) and the magnetic rod external assembly (3) are connected by a bellows adjustment device (5). A linear motion assembly (1) and a magnetic sample transfer tube (32) are provided between the first sample transfer tube fixing seat (19) and the second transfer rod fixing seat (16). A rotary motion assembly (2) is provided on the magnetic rod external assembly (3). A magnetic rod (4) is provided inside the magnetic transfer tube (32). The magnetic rod (4) passes through the fixed flange (6). An inner magnetic block (41) is provided at one end of the magnetic rod (4), and an end effector (7) is provided at the other end. The inner magnetic block (41) corresponds to the position of the outer component (3) of the magnetic rod.

2. The high-precision motor-driven vacuum magnetic coupling transmission rod according to claim 1, characterized in that: The linear motion assembly (1) includes a precision lead screw (13) and a linear motion drive motor (11), wherein the linear motion drive motor (11) is connected to the precision lead screw (13) via a coupling (12).

3. The high-precision motor-driven vacuum magnetic coupling transmission rod according to claim 2, characterized in that: The external component (3) of the magnetic rod includes a magnetic sleeve (31), and linear sliding sleeves (34) are provided at both ends of the magnetic sleeve (31). The magnetic sleeve (31) and the linear sliding sleeves (34) are sleeved on the magnetic transfer tube (32).

4. The high-precision motor-driven vacuum magnetic coupling transmission rod according to claim 3, characterized in that: The magnetic rod external assembly (3) also includes a magnetic sleeve fixing plate (15), on which a magnetic sleeve adapter flange (22) is provided, and the linear sliding sleeve (34) is connected to the magnetic sleeve adapter flange (22) through a rotary bearing (33).

5. The high-precision motor-driven vacuum magnetic coupling transmission rod according to claim 4, characterized in that: The magnetic sleeve fixing plate (15) is also provided with a lead screw nut (14), which is connected to the precision lead screw (13).

6. The high-precision motor-driven vacuum magnetic coupling transmission rod according to claim 5, characterized in that: A rotary driven gear (24) is provided on the outside of the linear sliding sleeve (34), and a rotary motion motor (21) is fixed on the magnetic sleeve fixing plate (15). The output shaft of the rotary motion motor (21) is connected to a rotary drive gear (23), and the rotary driven gear (24) meshes with the rotary drive gear (23).

7. The high-precision motor-driven vacuum magnetic coupling transmission rod according to claim 6, characterized in that: The magnetic transfer tube (32) is provided with a first limiting ring (17) and a second limiting ring (18) near both ends.

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