Heterojunction pvd ground improvement device

Abstract

The utility model relates to the technical field of grounding improvement device, concretely is a kind of heterojunction PVD grounding improvement device.The utility model, comprising: mounting plate, the section of mounting plate is rectangular;Several screws, screw thread is arranged in the side of mounting plate, screw is used to install and fix mounting plate;And adjusting structure;Adjusting structure is located in the side of mounting plate, adjusting structure includes adjusting mechanism and replacement mechanism;Among them, adjusting mechanism includes support block, the side of support block is fixedly connected with the side of mounting plate, the upper surface of support block is rotatably connected with threaded rod, the arc surface of threaded rod is connected with connecting block, the lower surface of connecting block is fixedly connected with fixed seat.Solve the elastic conductive wheel with the driving force of spring contact with carrier plate, spring is under stress and is easy to lose elasticity, will affect the bombardment effect of ion on target material;Elastic conductive wheel is not easy to replace after using wear, will increase the use cost of equipment.

Description

Technical Field

[0001] This application relates to the field of grounding improvement devices, and in particular to a heterojunction PVD grounding improvement device. Background Technology

[0002] The heterojunction solar cell mainly includes four processes: texturing and cleaning, PECVD, PVD, and screen printing. The PVD process is used to collect charge carriers in the TCO layer and reduce surface reflectivity.

[0003] Existing technologies, such as the invention with publication number CN115101446A, disclose a PVD coating equipment and a coating method for heterojunction solar cells. This equipment includes: a first process chamber with a first sputtering cathode for loading a TCO target; a second process chamber with a second sputtering cathode for loading a metal seed target; a third process chamber with a third sputtering cathode for loading a mask target; a first vacuum pump, installed between the first and second process chambers, and between the second and third process chambers, to maintain the atmosphere in each process chamber; and a transfer mechanism for loading and driving the material to be processed within the first, second, and third process chambers. This allows for integrated coating on a single unit, reducing production costs.

[0004] Regarding the above-mentioned content, the following technical defects were found: 1. In existing PVDS equipment, the elastic conductive wheel mainly relies on the driving force of the spring to maintain contact with the carrier plate, ensuring that the charge can be introduced to the ground. However, the spring is prone to elastic failure when under continuous force, which will prevent the charge from being introduced to the ground. The accumulated charge will cause arcing and will also affect the bombardment effect of ions on the target material, thereby affecting the sputtering rate and coating quality. 2. The elastic conductive wheel in the existing technology is not easy to replace after wear and tear, which will increase the operating cost of the equipment. Utility Model Content

[0005] The technical problem to be solved by this application is that: the elastic conductive wheel maintains contact with the carrier plate by means of the driving force of the spring, and the spring is prone to elastic failure under continuous force, which will affect the bombardment effect of ions on the target material; the elastic conductive wheel is not easy to replace after use and wear, which will increase the operating cost of the equipment.

[0006] To address the aforementioned technical problems, embodiments of this application provide a heterojunction PVD grounding improvement device, comprising: Mounting plate, the cross-section of the mounting plate is rectangular; Several screws, with their threads passing through the side of the mounting plate, are used to secure the mounting plate in place; and Adjustment structure; The adjustment structure is located on one side of the mounting plate, and includes an adjustment mechanism and a replacement mechanism; The adjustment mechanism includes a support block, one side of which is fixedly connected to one side of the mounting plate. A threaded rod is rotatably connected to the upper surface of the support block, and a connecting block is threadedly connected to the arc surface of the threaded rod. A fixed seat is fixedly connected to the lower surface of the connecting block. A rotating shaft is rotatably inserted through the inner wall of the fixed seat, and a rotating block is fixedly connected to the arc surface of the rotating shaft. The rotating block has an "H" shaped cross-section. The replacement mechanism includes a metal conductive ring, both sides of which are in contact with the rotating block. Several fixing grooves are opened on the inner wall of the metal conductive ring, and fixing blocks are slidably inserted into the inner wall of the fixing grooves. A rotating wheel is attached to the inner wall of the metal conductive ring, and the arc surface of the rotating wheel is fixedly connected to the fixing block. A bolt is slidably inserted through one side of the rotating block, and a circular hole is opened on the side of the rotating wheel, the size of which matches the bolt. An annular hole is opened on the other side of the rotating block, and a nut is fixedly connected to the inner wall of the annular hole. The inner wall of the nut is threadedly connected to the bolt.

[0007] In some embodiments, a groove is provided on the side of the mounting plate, and a slider is slidably connected to the inner wall of the groove. One side of the slider is fixedly connected to one side of the connecting block.

[0008] In some embodiments, a rubber block is fixedly connected to one side of the support block.

[0009] In some embodiments, a toothed block is rotatably connected to the lower surface of the support block, the toothed block is fixedly connected to the lower end of the threaded rod, a partition is fixedly connected to the lower surface of the support block, an adjusting rod is threaded through the side of the partition, an arc plate is rotatably connected to one end of the adjusting rod, a plurality of locking blocks are fixedly connected to the side of the arc plate near the toothed block, the toothed block engages with the locking blocks, a guide rod is slidably passed through the side of the partition, and one end of the guide rod is fixedly connected to the arc plate.

[0010] In some embodiments, an arc-shaped hole is provided on one side of the fixed base, and a slide rod is slidably connected to the inner wall of the arc-shaped hole. One end of the slide rod is fixedly connected to one side of the rotating block.

[0011] In some embodiments, a plurality of rotating plates are fixedly connected to the upper end of the threaded rod, and the rotating plates are evenly distributed on the upper end of the threaded rod.

[0012] In some embodiments, a guide block is fixedly connected to one end of the bolt, and the guide block is configured as a tapered structure.

[0013] The above technical solution achieves two effects by setting up an adjustment structure: First, the height of the metal conductive ring can be adjusted simply by rotating the threaded rod, ensuring that the metal conductive ring can stably contact the carrier plate. The entire operation does not require complicated steps, thus improving work efficiency in actual use and maintenance. Second, the metal conductive ring can be easily replaced when it wears out, reducing the maintenance cost of the entire structure. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a three-dimensional structural schematic diagram of an embodiment disclosed in this application; Figure 2 This is a schematic diagram of the adjustment structure disclosed in the embodiments of this application; Figure 3 This is a partial structural disassembly diagram of the replacement mechanism disclosed in the embodiments of this application; Figure 4 This is a partial structural schematic diagram of the adjustment mechanism disclosed in the embodiments of this application; Figure 5 This is a partial structural schematic diagram of the fixing seat disclosed in the embodiments of this application.

[0016] Explanation of reference numerals in the attached figures: 1. Mounting plate; 2. Screw; 3. Adjustment structure; 31. Adjustment mechanism; 3101. Support block; 3102. Threaded rod; 3103. Connecting block; 3104. Fixing seat; 3105. Rotating shaft; 3106. Rotating block; 3107. Rotating plate; 3108. Sliding block; 3109. Slide groove; 3110. Tooth block; 3111. Partition plate; 3112. Adjusting rod; 3113. Arc plate; 3114. Locking block; 3115. Guide rod; 3116. Rubber block; 3117. Arc hole; 3118. Slide rod; 32. Replacement mechanism; 3201. Metal conductive ring; 3202. Fixing groove; 3203. Rotating wheel; 3204. Fixing block; 3205. Round hole; 3206. Bolt; 3207. Annular hole; 3208. Nut; 3209. Guide block. Detailed Implementation

[0017] The embodiments of this application will be further described in detail below with reference to the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to illustrate the principles of this application by way of example, but should not be used to limit the scope of this application. This application can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0018] These embodiments are provided to make the application thorough and complete, and to fully express the scope of the application to those skilled in the art. It should be noted that, unless otherwise specifically stated, the relative arrangement of components and steps, material composition, numerical expressions, and values ​​illustrated in these embodiments should be interpreted as merely exemplary and not as limiting.

[0019] It should be noted that, in the description of this application, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicating orientation or positional relationship, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0020] Furthermore, the terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different parts. "Vertical" is not strictly vertical, but within the permissible margin of error. "Parallel" is not strictly parallel, but within the permissible margin of error. Terms such as "including" or "contains" mean that the element preceding the word encompasses the element listed after it, and do not exclude the possibility of encompassing other elements as well.

[0021] It should also be noted that, in the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application depending on the specific circumstances. When a specific device is described as being located between a first device and a second device, an intermediary device may or may not be present between the specific device and the first or second device.

[0022] All terms used in this application have the same meaning as understood by one of ordinary skill in the art to which this application pertains, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant art, and not as idealized or highly formalized, unless expressly defined herein.

[0023] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, they should be considered part of the specification.

[0024] Reference Figure 1 As shown, this utility model provides a technical solution: a heterojunction PVD grounding improvement device, including a mounting plate 1, the mounting plate 1 having a rectangular cross-section; a plurality of screws 2, the screws 2 being threaded through the side of the mounting plate 1, the screws 2 being used to install and fix the mounting plate 1; and an adjustment structure 3; the adjustment structure 3 being located on one side of the mounting plate 1.

[0025] The specific settings and functions of adjustment structure 3 will be explained below.

[0026] Reference Figures 2 to 5 As shown in this embodiment: the adjustment structure 3 includes an adjustment mechanism 31 and a replacement mechanism 32. The adjustment mechanism 31 includes a support block 3101. One side of the support block 3101 is fixedly connected to one side of the mounting plate 1. A threaded rod 3102 is rotatably connected to the upper surface of the support block 3101. A connecting block 3103 is threadedly connected to the arc surface of the threaded rod 3102. A fixed seat 3104 is fixedly connected to the lower surface of the connecting block 3103. A rotating shaft 3105 is rotatably inserted through the inner wall of the fixed seat 3104. A rotating block 3106 is fixedly connected to the arc surface of the rotating shaft 3105. The cross-section of the rotating block 3106 is "H" shaped.

[0027] In addition, the replacement mechanism 32 includes a metal conductive ring 3201. The two sides of the metal conductive ring 3201 are in contact with the rotating block 3106. The inner wall of the metal conductive ring 3201 is provided with several fixing grooves 3202. Fixing blocks 3204 are slidably inserted into the inner wall of the fixing grooves 3202. A rotating wheel 3203 is attached to the inner wall of the metal conductive ring 3201. The arc surface of the rotating wheel 3203 is fixedly connected to the fixing block 3204. A bolt 3206 is slidably inserted through one side of the rotating block 3106. A round hole 3205 is provided on the side of the rotating wheel 3203. The round hole 3205 is adapted to the size of the bolt 3206. An annular hole 3207 is provided on the other side of the rotating block 3106. A nut 3208 is fixedly connected to the inner wall of the annular hole 3207. The inner wall of the nut 3208 is threadedly connected to the bolt 3206.

[0028] When the position of the charge extraction structure needs to be adjusted, first rotate the threaded rod 3102. The threaded rod 3102 drives the connecting block 3103, causing the connecting block 3103 to move along the arc surface of the threaded rod 3102. As the connecting block 3103 rises and falls, it also drives the metal conductive ring 3201 to move. When the carrier plate is being transported, the metal conductive ring 3201 will contact it. The continued movement of the carrier plate will cause the metal conductive ring 3201 to drive the rotating wheel 3203 to rotate at its upper end, thus ensuring that the charge in the chamber can be completely extracted. During this process, the rotating block 3106 will tilt at a certain angle against the inner wall of the fixing seat 3104 at the lower end of the connecting block 3103. When the carrier plate has completed its transport, the rotating wheel 3203 will, due to its own weight, cause the rotating block 3106 to return to its original position. The device is fixed with screw 2. When the metal conductive ring 3201 is worn and needs to be replaced, first loosen the bolt 3206 so that the bolt 3206 separates from the nut 3208 and the round hole 3205 on the side of the rotating wheel 3203 in sequence, causing the tightness between the rotating wheel 3203 and the rotating block 3106 to be released. At this time, the rotating wheel 3203 can be removed. Then, slide the metal conductive ring 3201 out of the rotating wheel 3203. Subsequently, align the new metal conductive ring 3201 with the fixing block 3204 through the fixing groove 3202 and slide it into the outside of the rotating wheel 3203. Then, use the bolt 3206 to make it pass through the round hole 3205 and connect it with the nut 3208, thereby completing the replacement operation of the metal conductive ring 3201.

[0029] The mounting plate 1 has a groove 3109 on its side. A slider 3108 is slidably connected to the inner wall of the groove 3109. One side of the slider 3108 is fixedly connected to one side of the connecting block 3103. When the threaded rod 3102 drives the connecting block 3103 to move, the connecting block 3103 will synchronously drive the slider 3108 on one side to slide in the groove 3109, which plays a guiding role for the connecting block 3103 and prevents the connecting block 3103 from rotating or shifting when it moves.

[0030] A rubber block 3116 is fixedly connected to one side of the support block 3101. During the transport of the carrier plate, the metal conductive ring 3201 contacts it and rotates at the upper end of the carrier plate as the carrier plate continues to move, ensuring that the charge in the cavity can be completely discharged. At the same time, it will cause the rotating block 3106 to tilt. Once the carrier plate has completed the transport, the rotating wheel 3203 will cause the rotating block 3106 to return to its original position by its own gravity. When the rotating block 3106 resets, it will have a certain impact on the rubber block 3116, but the rubber block 3116 can effectively absorb the impact force and reduce damage.

[0031] A toothed block 3110 is rotatably connected to the lower surface of the support block 3101. The toothed block 3110 is fixedly connected to the lower end of the threaded rod 3102. A partition plate 3111 is fixedly connected to the lower surface of the support block 3101. An adjusting rod 3112 is threaded through the side of the partition plate 3111. An arc plate 3113 is rotatably connected to one end of the adjusting rod 3112. Several locking blocks 3114 are fixedly connected to the side of the arc plate 3113 near the toothed block 3110. The toothed block 3110 is engaged with the locking blocks 3114. A guide rod 3115 is slidably passed through the side of the partition plate 3111. One end of the guide rod 3115 is fixedly connected to the arc plate 3113. When the threaded rod 3102 drives the connecting block 3103 to rise and fall to a suitable position, and it is necessary to lock the threaded rod 3102, first rotate the adjusting rod 3112 to move through the partition 3111. The adjusting rod 3112 drives the arc plate 3113, causing the arc plate 3113 to move towards the gear block 3110 under the guidance of the guide rod 3115. The arc plate 3113 drives the locking block 3114 to lock the gear fixed at the lower end of the threaded rod. After locking, the rotation of the adjusting rod 3112 can be stopped, and the threaded rod 3102 can be locked, thereby improving the connection block 3103's ability to drive the metal conductive ring 320. 1. Stability after moving to the appropriate position: When it is necessary to release the lock on the threaded rod 3102, the operator only needs to rotate the adjusting rod 3112 in the opposite direction, so that the adjusting rod 3112 drives the arc plate 3113, and the arc plate 3113 drives the locking block 3114 to separate from the toothed block 3110, thereby releasing the lock on the threaded rod 3102. By setting the above structure, when the threaded rod 3102 drives the connecting block 3103 and the metal conductive ring 3201 to rise and fall to the appropriate position, the threaded rod 3102 can be locked, thereby improving the stability after the connecting block 3103 drives the metal conductive ring 3201 to move to the appropriate position.

[0032] An arc-shaped hole 3117 is provided on one side of the fixed base 3104. A slide rod 3118 is slidably connected to the inner wall of the arc-shaped hole 3117. One end of the slide rod 3118 is fixedly connected to one side of the rotating block 3106. When the rotating block 3106 rotates, it will drive the slide rod 3118 to slide along the inner wall of the arc-shaped hole 3117, thereby improving the stability of the rotation process of the rotating block 3106. Furthermore, since the angle of the arc-shaped hole 3117 is limited, the rotation angle of the rotating block 3106 can be limited.

[0033] Several rotating plates 3107 are fixedly connected to the upper end of the threaded rod 3102, and the rotating plates 3107 are evenly distributed on the upper end of the threaded rod 3102. Personnel can use the rotating plates 3107 to rotate the threaded rod 3102, achieving the effect of conveniently controlling the rotation of the threaded rod 3102.

[0034] A guide block 3209 is fixedly connected to one end of the bolt 3206. The guide block 3209 is designed with a tapered structure. By providing a tapered guide block 3209 at one end of the bolt 3206, it is convenient for personnel to insert the bolt 3206 into the round hole 3205 and the nut 3208.

[0035] Working Principle: When using this device, if the position of the charge extraction structure needs to be adjusted, the threaded rod 3102 is first rotated using the rotating plate 3107. The threaded rod 3102 drives the connecting block 3103, causing the connecting block 3103 to move along the arc surface of the threaded rod 3102. As the threaded rod 3102 drives the connecting block 3103 to move, the connecting block 3103 will simultaneously drive the slider 3108 on one side to slide in the groove 3109, which plays a guiding role for the connecting block 3103 and prevents the connecting block 3103 from rotating during movement. As the connecting block 3103 rises and falls, it drives the metal conductive ring 3201 to move. When the carrier plate is being conveyed, the metal conductive ring 3201 will contact it. The continued movement of the carrier plate will cause the metal conductive ring 3201 to drive the rotating wheel 3203 to rotate at its upper end, thereby ensuring that the charge in the cavity can be completely discharged. During this process, the rotating block 3106 will tilt at a certain angle on the inner wall of the fixing seat 3104 at the lower end of the connecting block 3103. When the carrier plate completes the conveying, the rotating wheel 3203 will tilt due to its own... The weight of the rotating block 3106 causes it to reset. This reset will impact the rubber block 3116, which cushions the impact and reduces damage from the reset, thus effectively extending its service life. The entire device is secured with screws 2. When the metal conductive ring 3201 wears out and needs replacement, first loosen the bolts 3206, then engage the bolts 3206 with the nut 3208 and the round hole 3205 on the side of the rotating wheel 3203. Separation causes the fastening between the rotating wheel 3203 and the rotating block 3106 to be released. At this time, the rotating wheel 3203 can be removed. Then, the metal conductive ring 3201 is slid out from the outside of the rotating wheel 3203. Subsequently, the new metal conductive ring 3201 is aligned with the fixing block 3204 through the fixing groove 3202 and slid into the outside of the rotating wheel 3203. Then, it is made to pass through the round hole 3205 by the bolt 3206 and connected to the nut 3208, thereby completing the replacement operation of the metal conductive ring 3201.

[0036] The embodiments of this application have now been described in detail. To avoid obscuring the concept of this application, some details known in the art have not been described. Those skilled in the art can fully understand how to implement the technical solutions disclosed herein based on the above description.

[0037] While specific embodiments of this application have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of this application. Those skilled in the art should understand that modifications can be made to the above embodiments or equivalent substitutions can be made to some technical features without departing from the scope and spirit of this application. In particular, as long as there is no structural conflict, the various technical features mentioned in the embodiments can be combined in any manner.

Claims

1. A heterojunction PVD grounding improvement device, characterized in that, include: Mounting plate (1), the cross-section of which is rectangular; Several screws (2) are threaded through the side of the mounting plate (1) and are used to install and fix the mounting plate (1); and Adjustment structure (3); The adjustment structure (3) is located on one side of the mounting plate (1), and the adjustment structure (3) includes an adjustment mechanism (31) and a replacement mechanism (32). The adjustment mechanism (31) includes a support block (3101), one side of which is fixedly connected to one side of the mounting plate (1), and a threaded rod (3102) is rotatably connected to the upper surface of the support block (3101), and a connecting block (3103) is threadedly connected to the arc surface of the threaded rod (3102).

2. The heterojunction PVD grounding improvement device according to claim 1, characterized in that, The lower surface of the connecting block (3103) is fixedly connected to a fixed seat (3104), and a rotating shaft (3105) is rotatably passed through the inner wall of the fixed seat (3104). A rotating block (3106) is fixedly connected to the arc surface of the rotating shaft (3105), and the cross section of the rotating block (3106) is "H" shaped.

3. The heterojunction PVD grounding improvement device according to claim 2, characterized in that, The replacement mechanism (32) includes a metal conductive ring (3201), with both sides of the metal conductive ring (3201) in contact with the rotating block (3106). The inner wall of the metal conductive ring (3201) is provided with a plurality of fixing grooves (3202). Fixing blocks (3204) are slidably inserted into the inner wall of the fixing grooves (3202). A rotating wheel (3203) is attached to the inner wall of the metal conductive ring (3201). The arc surface of the rotating wheel (3203) is fixedly connected to the fixing block (3204). A bolt (3206) is slidably inserted through one side of the rotating block (3106). A circular hole (3205) is provided on the side of the rotating wheel (3203). The size of the circular hole (3205) is adapted to the size of the bolt (3206). An annular hole (3207) is provided on the other side of the rotating block (3106).

4. The heterojunction PVD grounding improvement device according to claim 3, characterized in that, A nut (3208) is fixedly connected to the inner wall of the annular hole (3207), and the inner wall of the nut (3208) is threadedly connected to the bolt (3206).

5. The heterojunction PVD grounding improvement device according to claim 1, characterized in that, The mounting plate (1) has a sliding groove (3109) on its side. A slider (3108) is slidably connected to the inner wall of the sliding groove (3109). One side of the slider (3108) is fixedly connected to one side of the connecting block (3103).

6. The heterojunction PVD grounding improvement device according to claim 1, characterized in that, A rubber block (3116) is fixedly connected to one side of the support block (3101).

7. The heterojunction PVD grounding improvement device according to claim 1, characterized in that, A toothed block (3110) is rotatably connected to the lower surface of the support block (3101). The toothed block (3110) is fixedly connected to the lower end of the threaded rod (3102). A partition plate (3111) is fixedly connected to the lower surface of the support block (3101). An adjusting rod (3112) is threaded through the side of the partition plate (3111). One end of the adjusting rod (3112) is rotatably connected to an arc plate (3113). Several locking blocks (3114) are fixedly connected to the side of the arc plate (3113) near the toothed block (3110). The toothed block (3110) is engaged with the locking blocks (3114). A guide rod (3115) is slidably connected to the side of the partition plate (3111). One end of the guide rod (3115) is fixedly connected to the arc plate (3113).

8. The heterojunction PVD grounding improvement device according to claim 2, characterized in that, An arc-shaped hole (3117) is provided on one side of the fixed base (3104), and a slide rod (3118) is slidably connected to the inner wall of the arc-shaped hole (3117). One end of the slide rod (3118) is fixedly connected to one side of the rotating block (3106).

9. The heterojunction PVD grounding improvement device according to claim 1, characterized in that, The upper end of the threaded rod (3102) is fixedly connected with several rotating plates (3107), which are evenly distributed on the upper end of the threaded rod (3102).

10. The heterojunction PVD grounding improvement device according to claim 3, characterized in that, One end of the bolt (3206) is fixedly connected to a guide block (3209), and the guide block (3209) is configured as a tapered structure.

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