Temperature rising and falling structure of photovoltaic device reaction chamber and photovoltaic dry method device

Abstract

The utility model discloses a photovoltaic equipment reaction chamber's temperature rising and falling structure, and reaction chamber includes inner cavity, heater, outer cavity, furnace door subassembly and furnace tail cover plate subassembly, and inner cavity, heater and outer cavity are sequentially arranged from inside to outside, and furnace door subassembly is located one end of inner cavity, and furnace door subassembly includes furnace door cover plate subassembly and furnace door, and furnace tail cover plate subassembly is located the other end of inner cavity, and inner cavity, furnace door cover plate subassembly, furnace door and furnace tail cover plate subassembly form inner chamber, and inner cavity, outer cavity, furnace door cover plate subassembly and furnace tail cover plate subassembly form outer chamber, and be equipped with second air inlet pipe and second exhaust pipe on outer chamber to import or exhaust gas to outer chamber. The utility model discloses that the second air inlet pipe and second exhaust pipe have been added in outer chamber, when the process needs to reduce temperature, import gas to outer chamber through the second air inlet pipe, and exhaust the hot gas of outer chamber through the second exhaust pipe, realize the quick cooling of reaction chamber, effectively improve production efficiency, and increase the production capacity.

Description

Technical Field

[0001] This utility model belongs to the technical field of photovoltaic cell manufacturing equipment, and particularly relates to a heating and cooling structure for a photovoltaic equipment reaction chamber and a photovoltaic dry process equipment. Background Technology

[0002] Solar energy has become the cleanest, most economical, and safest energy source, with the advantage of being inexhaustible, and has therefore received widespread attention from countries around the world.

[0003] Among various photovoltaic cell manufacturing equipment, tubular equipment accounts for a large proportion and is extremely critical, including equipment for diffusion, PECVD, ALD, oxidation, annealing, and LPCVD. The reaction chamber, as the reaction zone for process gases, is the soul of the tubular equipment, playing a vital role in improving quality and production efficiency, and reducing manufacturing costs.

[0004] Currently, the vast majority of reaction chambers in dry process equipment are single-chamber structures, consisting of only one enclosed inner cavity, such as... Figures 1 to 2 As shown, a heater 2a is arranged around the outside of the inner cavity 11a, and insulation material 3a is arranged outside the heater 2a. The closed inner cavity, combined with the furnace door mechanism 12a at the furnace opening and the cover plate 13a on the furnace tail side, can form a stable vacuum process environment. The heater 2a provides a heat source, which can form a high-temperature process environment. The insulation material 3a can reduce heat loss and waste. The inlet pipe 4a and the outlet pipe 5a provide process gas. In a few cases, there is also a dual-cavity structure, such as... Figure 3As shown, compared to the single-cavity structure, the main difference is the addition of a closed outer cavity. Specifically, the inner cavity 11b is surrounded by a heater 2b, and the heater 2b is surrounded by insulation material 3b. The closed inner cavity, combined with the furnace door mechanism 12b at the furnace opening and the furnace tail cover 13b on the furnace tail side, forms an inner chamber with a stable vacuum process environment. An outer cavity 14b is also arranged outside the insulation material 3b. The outer cavity 14b, furnace opening cover 15b, inner cavity 11b, and furnace tail cover 13b form the outer cavity. The inlet pipe 4b and outlet pipe 5b provide process gas to the inner cavity. The problem with the two structures mentioned above is that, in order to shorten process time and thus increase production capacity, it is generally desirable for the reaction chamber to be able to heat up and cool down rapidly. However, these two aspects are contradictory. Achieving rapid heating is relatively easy, mainly through increasing power and strengthening insulation. Strengthening insulation primarily involves thickening the insulation layer and using insulation materials with stronger thermal insulation properties. These can increase the heating rate, but excessively increasing power is a waste of energy. Strengthening insulation leads to a slower cooling rate, resulting in a significant, even several-fold, increase in cooling process time. Conversely, reducing insulation often speeds up the overall process time and increases production capacity, but it leads to heat loss and waste, increased equipment power consumption, and other problems, thus wasting energy and reducing equipment lifespan. Summary of the Invention

[0005] The purpose of this invention is to provide a heating and cooling structure for the reaction chamber of a photovoltaic device and a photovoltaic dry process device, so as to solve the problem that the reaction chamber in the prior art cannot be heated and cooled quickly.

[0006] To achieve the above objectives, this utility model provides a heating and cooling structure for a photovoltaic equipment reaction chamber. The reaction chamber includes an inner cavity, a heater, an outer cavity, a furnace door assembly, and a furnace tail cover assembly. The inner cavity, the heater, and the outer cavity are arranged sequentially from the inside to the outside. The furnace door assembly is located at one end of the inner cavity and includes a furnace door cover assembly and a furnace door. The furnace tail cover assembly is located at the other end of the inner cavity. The inner cavity, the furnace door cover assembly, the furnace door, and the furnace tail cover assembly form an inner chamber. The inner cavity, the outer cavity, the furnace door cover assembly, and the furnace tail cover assembly form an outer chamber. The inner chamber is provided with a first air inlet pipe and a first air outlet pipe to introduce or discharge gas into or out of the inner chamber. The outer chamber is provided with a second air inlet pipe and a second air outlet pipe to introduce or discharge gas into or out of the outer chamber.

[0007] Preferably, the second air inlet pipe passes through the furnace tail cover plate assembly or the furnace door cover plate assembly and extends into the outer chamber, with the length direction of the second air inlet pipe parallel to or perpendicular to the axial direction of the outer chamber; the second exhaust pipe passes through the furnace tail cover plate assembly or the furnace door cover plate assembly and extends into the outer chamber, with the length direction of the second exhaust pipe parallel to or perpendicular to the axial direction of the outer chamber.

[0008] Preferably, the second air inlet pipe passes through the furnace tail cover assembly and extends into the outer chamber. The second air inlet pipe is located outside the second exhaust pipe, and the air outlet of the second air inlet pipe located in the outer chamber is close to the furnace door cover assembly. The second exhaust pipe passes through the furnace tail cover assembly and extends into the outer chamber. The length direction of the second exhaust pipe is parallel to the axial direction of the outer chamber. The air inlet of the second exhaust pipe located in the outer chamber is located between the heater and the furnace tail cover assembly and is close to the heater.

[0009] Preferably, it further includes a heat insulation component, which covers the outer periphery of the heater, and the second air inlet pipe is disposed between the heat insulation component and the outer cavity, and a gas flow channel is provided between the heat insulation component and the heater.

[0010] Preferably, the thickness of the thermal insulation component is less than or equal to 120 mm, and the thermal insulation component includes at least one thermal insulation layer.

[0011] Preferably, the material of the insulation layer is selected from at least one of cured carbon felt, ceramic fiber board and nano-insulation board.

[0012] Preferably, the length direction of the first air inlet pipe and the first exhaust pipe is parallel to the axial direction of the inner cavity, and the first air inlet pipe and the first exhaust pipe are both installed on the furnace tail cover assembly, with the first air inlet pipe and / or the first exhaust pipe extending into the interior of the inner cavity.

[0013] Preferably, the heat insulation component is provided with an outer frame, the heat insulation component is installed on the outer frame, and the lower part of the outer frame is provided with a roller assembly.

[0014] Preferably, the exhaust port on the second exhaust pipe located outside the outer cavity is connected to a vacuum pump, which is selected from one of a diaphragm pump, a rotary vane pump, a dry screw pump, and a Roots pump.

[0015] This utility model also provides a photovoltaic dry process equipment, including the heating and cooling structure of the reaction chamber of the photovoltaic equipment described above.

[0016] Compared with the prior art, this utility model adds an independently controllable second air inlet pipe and a second exhaust pipe to the outer chamber. When the process requires cooling, gas is introduced into the outer chamber through the second air inlet pipe and hot gas from the outer chamber is discharged through the second exhaust pipe. Through active cooling, the reaction chamber is rapidly cooled, effectively improving production efficiency and increasing production capacity. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of a photovoltaic device reaction chamber in the prior art.

[0018] Figure 2 for Figure 1 Schematic diagram of the cross-sectional structure along the AA direction.

[0019] Figure 3 This is a schematic diagram of the reaction chamber of a photovoltaic device with another existing structure.

[0020] Figure 4 This is a schematic diagram of one embodiment of the heating and cooling structure of the photovoltaic equipment reaction chamber according to this utility model.

[0021] Figure 5 for Figure 4 Schematic diagram of the cross-sectional structure in the BB direction.

[0022] Figure 6 This is a schematic diagram of another structure of the heating and cooling structure of the photovoltaic equipment reaction chamber according to an embodiment of this utility model.

[0023] Figure 7 This is a schematic diagram of the structure of the heating and cooling structure of the photovoltaic equipment reaction chamber in an embodiment of the present invention, in which the heat insulation component is set on the outer frame. Detailed Implementation

[0024] To explain in detail the technical content, structural features, and effects achieved by this utility model, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0025] like Figures 4 to 7As shown, this utility model embodiment provides a heating and cooling structure for a photovoltaic equipment reaction chamber. The reaction chamber includes an inner cavity 11, a heater 2, an outer cavity 14, a furnace door assembly, and a furnace tail cover assembly 13. The inner cavity 11, heater 2, and outer cavity 14 are arranged sequentially from the inside to the outside. The furnace door assembly is located at one end of the inner cavity 11 and includes a furnace door cover assembly 15 and a furnace door 12. The furnace tail cover assembly 13 is located at the other end of the inner cavity 11. The inner cavity 11, furnace door cover assembly 15, furnace door 12, and furnace tail cover assembly 13 form an inner chamber 10. The inner cavity 11, outer cavity 14, furnace door cover assembly 15, and furnace tail cover assembly 13 form an outer chamber 20. The inner chamber 10 is provided with a first air inlet pipe 4 and a first exhaust pipe 5 to allow gas to enter or exit the inner chamber 10. The outer chamber 20 is provided with a second air inlet pipe 6 and a second exhaust pipe 7 to allow gas to enter or exit the outer chamber 20. Specifically, the reaction chamber of photovoltaic equipment is typically a long cylindrical cavity, with only one end face frequently open and closed for loading and unloading materials. The other end face is usually closed and only opened for maintenance. The side that is frequently open and closed is called the furnace opening, and the other side is called the furnace tail. The inner chamber 10 is the process reaction zone, and the outer chamber 14 is the auxiliary area. During the production process, the reaction chamber of photovoltaic equipment often requires both rapid heating and rapid cooling. For example, in PECVD and LPCVD equipment, the optimal process temperature differs for preparing different thin film layers. Similarly, in high-temperature equipment, the silicon wafer needs to be cooled before being removed from the reaction chamber; otherwise, the excessively hot wafer may crack if directly removed. All these processes require both rapid heating and rapid cooling to avoid prolonging the process time. In this embodiment, a second air inlet pipe is provided on the outer chamber 20. 6 and the second exhaust pipe 7, and the first intake pipe 4, the first exhaust pipe 5, the second intake pipe 6 and the second exhaust pipe 7 can be controlled independently. When the process requires cooling, gas with a temperature lower than that of the outer chamber 20 is introduced into the outer chamber 20 through the second intake pipe 6 of the outer chamber 20. Room temperature gas is preferred, and the hot gas in the outer chamber 14 is discharged through the second exhaust pipe 7 of the outer chamber 20. The reaction chamber is rapidly cooled through active cooling. The design is ingenious. In addition, the materials of the first intake pipe 4, the first exhaust pipe 5, the second intake pipe 6 and the second exhaust pipe 7 are usually stainless steel, quartz or silicon carbide. Stainless steel, quartz or silicon carbide have relatively good corrosion resistance and high temperature resistance. The gas introduced into the second intake pipe 6 is preferably high-purity nitrogen, inert gas or other gases that will not react and will not pollute the outer chamber 20. Depending on the severity of the process, other optional gases include argon, air, etc.

[0026] This embodiment of the invention adds an independently controllable second air inlet pipe 6 and a second exhaust pipe 7 to the outer chamber 20. When the process requires cooling, gas is introduced into the outer chamber 20 through the second air inlet pipe 6 and hot gas is discharged from the outer chamber 20 through the second exhaust pipe 7. Through active cooling, the reaction chamber is rapidly cooled, which effectively improves production efficiency and increases production capacity.

[0027] In this embodiment of the present invention, the second air inlet pipe 6 passes through the furnace tail cover plate assembly 13 or the furnace door cover plate assembly 15 and extends into the outer chamber 20. The length direction of the second air inlet pipe 6 is parallel to the axial direction of the outer chamber 20 or perpendicular to the axial direction of the outer chamber 20. The second exhaust pipe 7 passes through the furnace tail cover plate assembly 13 or the furnace door cover plate assembly 15 and extends into the outer chamber 20. The length direction of the second exhaust pipe is parallel to the axial direction of the outer chamber 20 or perpendicular to the axial direction of the outer chamber 20. Specifically, the second air inlet pipe 6 passes through the furnace tail cover assembly 13 and extends into the outer chamber 20. The second air inlet pipe 6 is located outside the second exhaust pipe 7, and the air outlet of the second air inlet pipe 6 located in the outer chamber 20 is close to the furnace door cover assembly 15. The second exhaust pipe 7 passes through the furnace tail cover assembly 13 and extends into the outer chamber 20. The length direction of the second exhaust pipe 7 is parallel to the axial direction of the outer chamber 20. The air inlet of the second exhaust pipe 7 located in the outer chamber 20 is located between the heater 2 and the furnace tail cover assembly 13 and is close to the heater 2. This allows the second air inlet pipe 6 to extend to the position of the outer chamber 20 close to the furnace door cover assembly 15, and the air inlet of the second exhaust pipe 7 to be close to the furnace tail cover assembly 13, ensuring more efficient discharge of hot air from the outer chamber 20 and achieving a rapid cooling effect.

[0028] In this embodiment of the utility model, such as Figure 4 , Figure 5 as well as Figure 7 As shown, the heating and cooling structure of the photovoltaic equipment reaction chamber also includes a heat insulation component 3, which covers the outer periphery of the heater 2. A second air inlet pipe 6 is located between the heat insulation component 3 and the outer cavity 14, and a gas flow channel is provided between the heat insulation component 3 and the heater 2. Specifically, as... Figure 4 As shown, with the thermal insulation protection of the insulation component 3, heat loss and waste are significantly reduced, heating power can be decreased, energy waste is effectively avoided, and equipment lifespan is improved. Simultaneously, the second air inlet pipe 6 and the second exhaust pipe 7 enable rapid cooling. Furthermore, a gas flow channel is provided between the thermal insulation component 3 and the heater 2, and this gas flow channel is interconnected with the second air inlet pipe 6 and the second exhaust pipe 7, as detailed below. Figure 4 As indicated by the middle arrow, this is to remove heat from the outer chamber 20.

[0029] Of course, in some other specific embodiments of this utility model, such as Figure 6 As shown, the second exhaust pipe 7 can also be positioned outside the second intake pipe 6, with the intake port of the second exhaust pipe 7 located in the outer chamber 20 near the furnace door cover assembly 15. The exhaust port of the second intake pipe 6 located in the outer chamber 20 is positioned between the heater 2 and the furnace tail cover assembly 13 and is located near the heater 2. This allows the second exhaust pipe 7 to extend into the outer chamber 20 near the furnace door cover assembly 15, and the second intake pipe 6 to be near the furnace tail cover assembly 13. The gas flow channel is interconnected with the second intake pipe 6 and the second exhaust pipe 7. The specific gas flow direction is as follows: Figure 6 As shown by the middle arrow, the arrangement of the second intake pipe 6 and the second exhaust pipe 7 can also effectively dissipate heat.

[0030] In this embodiment of the invention, the thickness of the heat insulation component 3 is less than or equal to 120 mm, and the heat insulation component 3 includes at least one heat insulation layer. Specifically, setting the thickness of the heat insulation component 3 to less than or equal to 120 mm achieves effective heat insulation while avoiding excessive thickness. Photovoltaic equipment typically requires multiple reaction chambers to be stacked in the height direction. If the heat insulation component 3 is too thick, it will be too large and heavy, making installation difficult. It may also lead to the equipment being too tall, making site layout impossible, or the reduced number of stacked layers will result in reduced production capacity. The material of the insulation layer can be selected from at least one of cured carbon felt, ceramic fiber board and nano heat insulation board. The insulation layer can include a first insulation sub-layer and a second insulation sub-layer, with the second insulation sub-layer covering the first insulation sub-layer. The first insulation sub-layer is preferably made of cured carbon felt or ceramic fiber board, and the second insulation sub-layer is preferably made of nano heat insulation board. This is because cured carbon felt and ceramic fiber board have strong high temperature resistance but general heat insulation properties, while nano heat insulation board has weak high temperature resistance, generally around 700℃, but excellent heat insulation properties. Therefore, the combination of the first insulation sub-layer and the second insulation sub-layer can achieve the best heat insulation effect with the minimum thickness.

[0031] In this embodiment of the invention, the length directions of the first intake pipe 4 and the first exhaust pipe 5 are parallel to the axial direction of the inner chamber 10. Both the first intake pipe 4 and the first exhaust pipe 5 pass through the furnace tail cover assembly 13, and the first intake pipe 4 and / or the first exhaust pipe 5 extend into the interior of the inner chamber 10. Specifically, as shown... Figure 4 As shown, the first air inlet pipe 4 extends into the interior of the inner cavity 10 and the air outlet end of the first air inlet pipe 4 is located near the furnace door 12. The first exhaust pipe 5 is located on the furnace tail cover assembly 13 and is connected to the inner cavity 11.

[0032] In this embodiment of the invention, an outer frame 8 is provided outside the heat insulation component 3, and the heat insulation component 3 is installed on the outer frame 8. A roller assembly 9 is provided at the lower part of the outer frame 8. Specifically, because the reaction chamber of photovoltaic equipment is usually large in volume and long in length, for convenient disassembly and maintenance, such as... Figure 7 As shown, an outer frame 8 is provided outside the heat insulation component 3, and the heat insulation component 3 is fixed on the outer frame 8 to form an integrated installation structure. For ease of movement, a sliding guide structure is preferably provided on the outer frame 8. This sliding guide structure can be a roller 92. For example, a roller assembly 9 is provided at the lower part of the outer frame 8. The roller assembly 9 includes a roller fixing member 91, which is mounted on the outer frame 8. A roller 92 is mounted on the roller fixing member 91, and at least one side of the roller 92 is provided with a positioning member 93 to facilitate movement of the roller 92 along a preset path. By installing the heat insulation component 3 on the outer frame 8 with the roller 92, it is easy to move the heat insulation component 3 to the desired installation position, making movement more convenient. Additionally, the heater 2 and the inner cavity 11 can also be fixed on the outer frame 8. In some other specific embodiments of this utility model, the sliding guide structure can also be a slider combined with a sliding guide rail, etc. The specific implementation method is not limited, as long as it facilitates the movement of the heat insulation component 3.

[0033] In this embodiment of the invention, a vacuum pump is connected to the exhaust port of the second exhaust pipe 7 located outside the outer chamber 20. The vacuum pump is selected from one of a diaphragm pump, a rotary vane pump, a dry screw pump, or a Roots pump. Specifically, the vacuum pump is connected to the second exhaust pipe 7. Through the suction and discharge action of the vacuum pump, the gas inside the outer chamber 20 is discharged. One vacuum pump can control one outer chamber 20 independently, or it can control multiple outer chambers 20 and inner chambers 10 simultaneously through parallel connection. When using the parallel connection method, check valves are installed on the branches connecting the outer chambers 20 and the inner chambers 10 to achieve individual control of each branch.

[0034] This utility model embodiment also provides a photovoltaic dry process equipment, including the heating and cooling structure of the reaction chamber of the above-mentioned photovoltaic equipment. By adding an independently controllable second air inlet pipe 6 and a second exhaust pipe 7 to the outer chamber 20, when the process requires cooling, gas is introduced into the outer chamber 20 through the second air inlet pipe 6 and hot gas is discharged from the outer chamber 20 through the second exhaust pipe 7. Through active cooling, the reaction chamber is rapidly cooled, effectively improving production efficiency and increasing production capacity.

[0035] The above-disclosed examples are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any equivalent changes made in accordance with the scope of the present utility model application shall still fall within the scope of the present utility model.

Claims

1. A heating and cooling structure for a photovoltaic equipment reaction chamber, characterized in that, The reaction chamber includes an inner cavity, a heater, an outer cavity, a furnace door assembly, and a furnace tail cover assembly. The inner cavity, the heater, and the outer cavity are arranged sequentially from the inside to the outside. The furnace door assembly is located at one end of the inner cavity and includes a furnace door cover assembly and a furnace door. The furnace tail cover assembly is located at the other end of the inner cavity. The inner cavity, the furnace door cover assembly, the furnace door, and the furnace tail cover assembly form the inner cavity. The inner cavity, the outer cavity, the furnace door cover assembly, and the furnace tail cover assembly form the outer cavity. The inner cavity is provided with a first air inlet pipe and a first air outlet pipe to introduce or discharge gas into the inner cavity. The outer cavity is provided with a second air inlet pipe and a second air outlet pipe to introduce or discharge gas into the outer cavity.

2. The heating and cooling structure for the photovoltaic equipment reaction chamber according to claim 1, characterized in that, The second air inlet pipe passes through the furnace tail cover plate assembly or the furnace door cover plate assembly and extends into the outer chamber. The length direction of the second air inlet pipe is parallel to the axial direction of the outer chamber or perpendicular to the axial direction of the outer chamber. The second exhaust pipe passes through the furnace tail cover plate assembly or the furnace door cover plate assembly and extends into the outer chamber. The length direction of the second exhaust pipe is parallel to the axial direction of the outer chamber or perpendicular to the axial direction of the outer chamber.

3. The heating and cooling structure for the photovoltaic equipment reaction chamber according to claim 1, characterized in that, The second air inlet pipe passes through the furnace tail cover assembly and extends into the outer chamber. The second air inlet pipe is located outside the second exhaust pipe, and the air outlet of the second air inlet pipe located in the outer chamber is close to the furnace door cover assembly. The second exhaust pipe passes through the furnace tail cover assembly and extends into the outer chamber. The length direction of the second exhaust pipe is parallel to the axial direction of the outer chamber. The air inlet of the second exhaust pipe located in the outer chamber is located between the heater and the furnace tail cover assembly and is close to the heater.

4. The heating and cooling structure of the photovoltaic equipment reaction chamber according to claim 3, characterized in that, It also includes a heat insulation component, which covers the outer periphery of the heater, and a second air inlet pipe is disposed between the heat insulation component and the outer cavity. A gas flow channel is provided between the heat insulation component and the heater.

5. The heating and cooling structure for the photovoltaic equipment reaction chamber according to claim 4, characterized in that, The thickness of the thermal insulation component is less than or equal to 120 mm, and the thermal insulation component includes at least one thermal insulation layer.

6. The heating and cooling structure for the photovoltaic equipment reaction chamber according to claim 5, characterized in that, The material of the insulation layer is selected from at least one of cured carbon felt, ceramic fiber board and nano insulation board.

7. The heating and cooling structure for the photovoltaic equipment reaction chamber according to claim 1, characterized in that, The length direction of the first air inlet pipe and the first exhaust pipe is parallel to the axial direction of the inner cavity. The first air inlet pipe and the first exhaust pipe are both installed on the furnace tail cover assembly, and the first air inlet pipe and / or the first exhaust pipe extends into the interior of the inner cavity.

8. The heating and cooling structure for the photovoltaic equipment reaction chamber according to claim 4, characterized in that, The heat insulation component is provided with an outer frame, the heat insulation component is installed on the outer frame, and the lower part of the outer frame is provided with a roller assembly.

9. The heating and cooling structure for the photovoltaic equipment reaction chamber according to claim 1, characterized in that, The exhaust port on the second exhaust pipe located outside the outer cavity is connected to a vacuum pump, which is selected from one of the following: diaphragm pump, rotary vane pump, dry screw pump, and Roots pump.

10. A photovoltaic dry process equipment, characterized in that: The heating and cooling structure of the photovoltaic equipment reaction chamber as described in any one of claims 1 to 9.

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