A semiconductor wafer storage device

Abstract

The utility model discloses a kind of semiconductor wafer storage equipment, it is related to storage equipment technical field.The utility model includes storage component, the surface of storage component is fixedly connected with fetching component.The utility model passes through integrated automation fetching component, effectively solve the problem that traditional wafer storage equipment fetches high wafer and needs artificial climbing, servo motor drives screw rotation, converts rotating motion into moving seat linear motion along screw, cooperate the height adjustment of telescopic adjusting of hydraulic telescopic rod one, hydraulic telescopic rod two controls clamping seat horizontal telescopic, realize the accurate positioning of different height, depth storage box and grab, the cooperation of latch and handle pinhole ensures that grabbing is stable, whole process does not need artificial climbing, eliminate the security risk of climbing operation.Meanwhile, the tedious step of manual operation is reduced by the cooperative action of mechanical structure, the fetching length is significantly shortened, and the efficiency and safety of wafer storage are improved.

Description

Technical Field

[0001] This utility model belongs to the field of storage equipment technology, and in particular relates to a semiconductor wafer storage device. Background Technology

[0002] A wafer is a silicon chip used in the fabrication of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. Various circuit element structures can be fabricated on silicon wafers to create IC products with specific electrical functions. The manufactured wafers are typically stored in storage cabinets.

[0003] Chinese patent application CN216830831U discloses a wafer storage rack, including a storage rack whose internal cavity is divided into primary, secondary, and tertiary storage chambers by partitions. The primary storage chamber is further divided into several standard storage compartments by multiple fixed baffles, while the secondary and tertiary storage chambers are each divided into several adjustable storage compartments by multiple adjustable baffles. In this invention, the storage rack's internal cavity is divided into primary, secondary, and tertiary storage chambers by multiple partitions. The primary storage chamber is divided into several standard storage compartments by multiple fixed baffles, which are used to store commonly used standard-specification wafers. The secondary and tertiary storage chambers each have multiple vertically arranged adjustable baffles, and both are divided into several adjustable storage compartments by multiple adjustable baffles. The adjustable storage compartments can have their width adjusted to accommodate different wafer specifications.

[0004] However, this patent requires workers to climb to retrieve wafers from high positions, which not only poses safety hazards but is also inconvenient and time-consuming. Therefore, we provide a semiconductor wafer storage device to solve the aforementioned problems. Utility Model Content

[0005] The purpose of this invention is to provide a semiconductor wafer storage device that solves the problem of inconvenience in retrieving wafers from high positions by combining storage components and retrieval components.

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution.

[0007] This utility model relates to a semiconductor wafer storage device, comprising a storage component, a retrieval component fixedly connected to the surface of the storage component, a storage cabinet, a cabinet door hinged to the surface of the storage cabinet, a storage box slidably connected to the inner cavity of the storage cabinet via a slide rail, and a retrieval component including a mounting base fixedly connected to one side of the top of the storage cabinet, a servo motor fixedly connected to the bottom of the mounting base, a lead screw fixedly connected to the output shaft of the servo motor, a movable seat threadedly connected to the surface of the lead screw, a hydraulic telescopic rod I penetrating through the back of the movable seat, support plates fixedly connected to both sides of the hydraulic telescopic rod I, the front end of the support plate fixedly connected to the movable seat, one side of the support plate slidably connected to the storage cabinet, a connecting plate fixedly connected to the output end of the hydraulic telescopic rod I, a hydraulic telescopic rod II fixedly connected to the inner wall of the connecting plate, a clamping seat fixedly connected to the output end of the hydraulic telescopic rod II, a hydraulic telescopic rod III fixedly connected to the top of the clamping seat via a mounting base, and a pin fixedly connected to the output end of the hydraulic telescopic rod III.

[0008] The present invention is further provided that each of the four corners of the bottom of the storage cabinet is fixedly connected with a pad, and the bottom of the pad is provided with anti-slip texture. The pad and anti-slip texture design increases the friction between the equipment and the ground, effectively prevents the stored equipment from sliding and shifting during use, and improves the stability of the equipment placement.

[0009] The present invention is further configured such that a sealing ring is fixedly connected to the inner surface of the cabinet door, the sealing ring is in contact with the inner wall of the storage cabinet, and the sealing ring is in close contact with the inner wall of the storage cabinet to form a sealing structure, which can prevent external dust, moisture and other pollutants from entering the storage cabinet and provide a clean environment for wafer storage.

[0010] The present invention is further configured such that the storage box includes a box body, and the inner cavity of the box body is bonded with shock-absorbing foam by an adhesive. The top of the shock-absorbing foam is provided with a groove for placing the wafer. The shock-absorbing foam can absorb vibration and impact, and prevent the wafer from being mechanically damaged by collision during storage or movement, thus playing a buffering and protective role.

[0011] The present invention is further configured such that the inner wall of the box body is provided with a sliding groove, the inner cavity of the sliding groove is slidably connected to a cover plate, the top of the cover plate is provided with a snap groove, the sliding groove allows the cover plate to slide open and close, the cover plate can close the top opening of the box body to prevent external contaminants from falling into the wafer surface, and the snap groove design facilitates manual operation of opening and closing the cover plate.

[0012] The present invention is further configured such that a handle is fixedly connected to the surface of the box body, and a pin hole is opened in the inner cavity of the handle for use with a pin. The handle provides a force point for pulling out the storage box, and the pin hole cooperates with the pin to enable the picking component to firmly clamp the storage box and ensure the reliability of the automated gripping process.

[0013] The present invention is further configured such that a label bag is fixedly connected to the surface of the box body, and a label is placed in the inner cavity of the label bag. The label bag can hold labels that record wafer information, so as to realize the visual management of wafer specifications, batch and other information, and facilitate quick identification and retrieval.

[0014] The present invention is further configured such that limit grooves are provided at both the front and rear ends of one side of the storage cabinet, and limit blocks are slidably connected to the inner cavity of the limit grooves. The other side of the limit blocks is fixedly connected to the support plate. The limit grooves and limit blocks are slidably engaged to provide guiding constraints for the lifting and lowering movement of the support plate, prevent it from deviating and shaking, and ensure the stability of the component retrieval operation.

[0015] The present invention has the following beneficial effects.

[0016] 1. This utility model effectively solves the problem of manual climbing required for retrieving wafers from high locations using traditional wafer storage equipment by integrating automated retrieval components. A servo motor drives a lead screw to rotate, converting the rotational motion into linear motion of a moving seat along the lead screw. Combined with the height adjustment via hydraulic telescopic rod one and the horizontal extension / retraction of hydraulic telescopic rod two, it achieves precise positioning and retrieval of storage boxes of different heights and depths. The engagement of the pin and handle pin hole ensures a stable grip. The entire process eliminates the need for manual climbing, thus removing the safety hazards associated with working at heights. Simultaneously, the coordinated action of the mechanical structure reduces the tedious steps of manual operation, significantly shortens the retrieval time, and improves the efficiency and safety of wafer storage and retrieval.

[0017] 2. This utility model provides a highly protected storage environment for wafers through multiple structural optimizations. The sealing ring on the inner surface of the cabinet door is in close contact with the inner wall of the storage cabinet, forming an effective sealing barrier that prevents external dust and moisture from intruding. The shock-absorbing foam inside the storage box has grooves adapted to the shape of the wafer, which can absorb vibration and impact during transportation or storage, preventing damage to the wafer edges. The cover plate slides and closes through a groove, further isolating contaminants. The label bag enables intuitive identification and management of wafer information. These designs together solve the problems of wafers being easily contaminated, damaged, and difficult to identify in traditional storage, ensuring the storage quality of wafers. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0019] Figure 1 This is a perspective view of a semiconductor wafer storage device.

[0020] Figure 2 This is a rear view schematic diagram of a semiconductor wafer storage device.

[0021] Figure 3This is a schematic diagram of an explosion of a storage box in a semiconductor wafer storage device.

[0022] Figure 4 This is a three-dimensional schematic diagram of a component retrieval device in a semiconductor wafer storage device.

[0023] Figure 5 In a semiconductor wafer storage device Figure 4 Enlarged diagram of point A in the middle.

[0024] In the attached diagram: 1. Storage component; 11. Storage cabinet; 12. Cabinet door; 13. Storage box; 131. Box body; 132. Shock-absorbing foam; 133. Cover plate; 134. Label bag; 14. Limiting groove; 15. Limiting block; 2. Retrieval component; 21. Servo motor; 22. Lead screw; 23. Moving seat; 24. Hydraulic telescopic rod one; 25. Support plate; 26. Connecting plate; 27. Hydraulic telescopic rod two; 28. Clamping seat; 29. ​​Hydraulic telescopic rod three; 210. Pin. Detailed Implementation

[0025] The technical solutions of the present utility model will be described below with reference to the accompanying drawings. The described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0026] Example 1 Please see Figure 1-5 This utility model relates to a semiconductor wafer storage device, comprising a storage component 1, a retrieval component 2 fixedly connected to the surface of the storage component 1, a storage cabinet 11, a cabinet door 12 hinged to the surface of the storage cabinet 11, and a storage box 13 slidably connected to the inner cavity of the storage cabinet 11 via a slide rail. The retrieval component 2 includes a mounting base fixedly connected to one side of the top of the storage cabinet 11, a servo motor 21 fixedly connected to the bottom of the mounting base, a lead screw 22 fixedly connected to the output shaft of the servo motor 21, a movable seat 23 threadedly connected to the surface of the lead screw 22, and a movable seat 23 on the back of the movable seat 23. A hydraulic telescopic rod 24 is installed through the structure. Support plates 25 are fixedly connected to both sides of the hydraulic telescopic rod 24. The front end of the support plate 25 is fixedly connected to the movable seat 23. One side of the support plate 25 is slidably connected to the storage cabinet 11. A connecting plate 26 is fixedly connected to the output end of the hydraulic telescopic rod 24. A hydraulic telescopic rod 27 is fixedly connected to the inner wall of the connecting plate 26. A clamping seat 28 is fixedly connected to the output end of the hydraulic telescopic rod 27. A hydraulic telescopic rod 29 is fixedly connected to the top of the clamping seat 28 through a mounting seat. A pin 210 is fixedly connected to the output end of the hydraulic telescopic rod 29.

[0027] Specifically: the inner cavity of the storage cabinet 11 is connected to the storage box 13 by a slide rail, the bottom of the screw 22 is fixedly connected to a bearing seat, one side of the bearing seat is fixedly connected to the surface of the storage cabinet 11, the setting of the bearing seat ensures the stability of the rotation of the screw 22, the pin 210 includes a mounting plate, the top of the mounting plate is welded to the output end of the hydraulic telescopic rod 29, and pins are welded to both sides of the bottom of the mounting plate.

[0028] Example 2 Please see Figure 1-5 Based on Embodiment 1, pads are fixedly connected to the four corners of the bottom of the storage cabinet 11. The bottom of the pads is provided with anti-slip texture. A sealing ring is fixedly connected to the inner surface of the cabinet door 12. The sealing ring contacts the inner wall of the storage cabinet 11. The storage box 13 includes a box body 131. The inner cavity of the box body 131 is bonded with shock-absorbing foam 132 by adhesive. The top of the shock-absorbing foam 132 is provided with a groove for placing wafers. The inner wall of the box body 131 is provided with a sliding groove. A cover plate 133 is slidably connected to the inner cavity of the sliding groove. A buckle groove is provided on the top of the cover plate 133. A handle is fixedly connected to the surface of the box body 131. A pin hole for use with a pin 210 is provided in the inner cavity of the handle. A label bag 134 is fixedly connected to the surface of the box body 131. A label is placed in the inner cavity of the label bag 134. Limiting grooves 14 are provided at both the front and rear ends of one side of the storage cabinet 11. Limiting blocks 15 are slidably connected to the inner cavity of the limiting grooves 14. The other side of the limiting blocks 15 is fixedly connected to the support plate 25.

[0029] Specifically: the padding and anti-slip texture design increases the friction between the equipment and the ground, effectively preventing the equipment from sliding during use and improving the stability of the equipment placement. The sealing ring is in close contact with the inner wall of the storage cabinet 11, forming a sealed structure that can prevent external dust, moisture, and other contaminants from entering the storage cabinet 11, providing a clean environment for wafer storage. The shock-absorbing foam 132 can absorb vibration and impact, preventing mechanical damage to the wafers due to collisions during storage or movement, and playing a buffering protection role. The sliding groove allows the cover plate 133 to slide open and close, and the cover plate 133 can close the top opening of the box 131 to prevent... External contaminants fall onto the wafer surface. The slotted design facilitates the manual opening and closing of the cover 133. The handle provides a force point for pulling out the storage box 13. The pin hole and the pin 210 cooperate to ensure that the picking component 2 can firmly clamp the storage box 13, ensuring the reliability of the automated picking process. The label bag 134 can hold labels that record wafer information, realizing the visual management of wafer specifications, batches and other information, which is convenient for quick identification and retrieval. The limiting groove 14 and the limiting block 15 slide together to provide guidance and constraint for the lifting and lowering movement of the support plate 25, preventing it from deviating and shaking, and ensuring the stability of the picking component 2.

[0030] The working principle of this utility model is as follows: During storage, the wafer is placed in the groove of the shock-absorbing foam 132 inside the storage box 13. The cover plate 133 is closed through the slide groove. The storage box 13 is pushed into the inner cavity of the storage cabinet 11 through the slide rail. After the cabinet door 12 is closed, it is sealed by the sealing ring. When the wafer is taken out, the servo motor 21 drives the lead screw 22 to rotate, which drives the moving seat 23 to move up and down to the target storage box 13 position. The hydraulic telescopic rod 24 extends and retracts, which drives the connecting plate 26 away from the cabinet door 12. At this time, the cabinet door 12 can be opened. Then the hydraulic telescopic rod 24 is retracted, so that the clamping seat 28 is aligned with the handle of the storage box 13. Then, the second hydraulic telescopic rod 27 extends to push the clamping seat 28 to fit the handle, and the third hydraulic telescopic rod 29 drives the pin 210 to insert into the handle pin hole to complete the locking. Then, the second hydraulic telescopic rod 27 retracts to pull the storage box 13 out of the storage cabinet 11. Then, the first hydraulic telescopic rod 24 extends and retracts to pull the storage box 13 out of the inner cavity of the storage cabinet 11. Then, the servo motor 21 drives the lead screw 22 to rotate, which can move the pulled-out storage box 13 to the operator's operating position. Then, the operator holds the storage box 13, and the third hydraulic telescopic rod 29 retracts to drive the pin 210 to separate from the pin hole, so that the storage box 13 can be taken away.

[0031] The preferred embodiments of the present utility model disclosed above are only used to help illustrate the present utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the present utility model to the specific implementation methods described. The present specification selects and specifically describes these embodiments in order to better explain the principle and practical application of the present utility model, so that those skilled in the art can better understand and utilize the present utility model.

Claims

1. A semiconductor wafer storage device, comprising a storage component (1), characterized in that: The surface of the storage component (1) is fixedly connected to the retrieval component (2); The storage component (1) includes a storage cabinet (11), the surface of which is hinged with a cabinet door (12), and the inner cavity of which is slidably connected with a storage box (13) via a slide rail. The retrieval component (2) includes a mounting base fixedly connected to one side of the top of the storage cabinet (11). A servo motor (21) is fixedly connected to the bottom of the mounting base. A lead screw (22) is fixedly connected to the output shaft of the servo motor (21). A movable seat (23) is threaded onto the surface of the lead screw (22). A hydraulic telescopic rod (24) is provided through the back of the movable seat (23). Support plates (25) are fixedly connected to both sides of the hydraulic telescopic rod (24). The front end of the support plate (25) is connected to the movable seat (23). The support plate (25) is slidably connected to the storage cabinet (11) on one side. The output end of the first hydraulic telescopic rod (24) is fixedly connected to the connecting plate (26). The inner wall of the connecting plate (26) is fixedly connected to the second hydraulic telescopic rod (27). The output end of the second hydraulic telescopic rod (27) is fixedly connected to the clamping seat (28). The top of the clamping seat (28) is fixedly connected to the third hydraulic telescopic rod (29) through the mounting seat. The output end of the third hydraulic telescopic rod (29) is fixedly connected to the pin (210).

2. The semiconductor wafer storage device according to claim 1, characterized in that: The storage cabinet (11) has four corners at the bottom fixed with pads, and the bottom of the pads is provided with anti-slip texture.

3. The semiconductor wafer storage device according to claim 1, characterized in that: A sealing ring is fixedly connected to the inner surface of the cabinet door (12), and the sealing ring is in contact with the inner wall of the storage cabinet (11).

4. A semiconductor wafer storage device according to claim 1, characterized in that: The storage box (13) includes a box body (131), and the inner cavity of the box body (131) is bonded with shock-absorbing foam (132) by adhesive. The top of the shock-absorbing foam (132) has a groove for placing wafers.

5. A semiconductor wafer storage device according to claim 4, characterized in that: The inner wall of the box (131) is provided with a sliding groove, and a cover plate (133) is slidably connected to the inner cavity of the sliding groove. A buckle groove is provided on the top of the cover plate (133).

6. A semiconductor wafer storage device according to claim 4, characterized in that: A handle is fixedly connected to the surface of the box (131), and the inner cavity of the handle is provided with a pin hole for use with a pin (210).

7. A semiconductor wafer storage device according to claim 4, characterized in that: A label bag (134) is fixedly connected to the surface of the box (131), and a label is placed inside the label bag (134).

8. A semiconductor wafer storage device according to claim 1, characterized in that: Limiting grooves (14) are provided at both the front and rear ends of one side of the storage cabinet (11). A limiting block (15) is slidably connected to the inner cavity of the limiting groove (14). The other side of the limiting block (15) is fixedly connected to the support plate (25).

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