A substrate sheet gripper pick-up device

Abstract

The utility model relates to the technical field of semiconductor, disclose a kind of substrate piece jig piece device, including jig, vacuum component and inflation component, jig is provided with accommodating groove, lower gas guide groove and sliding slot, pneumatic component is equipped in sliding slot, and sliding slot is located between accommodating groove and lower gas guide groove;Lower gas guide groove is used to pass into gas, to drive pneumatic component to move in sliding slot, and pneumatic component abuts substrate piece edge to be used to lift substrate piece;Vacuum component includes suction cup, and suction cup is used to form vacuum negative pressure environment on substrate piece upper end surface;Inflation component includes baffle, and baffle is arranged between suction cup and jig;The middle part of baffle is provided with suction hole, and suction hole is used to communicate suction cup and jig;The utility model is driven by air pressure slider to lift the edge of substrate piece, and provide support for substrate piece bottom surface by gas guide channel, so that substrate piece and jig are stably separated, cooperate with suction cup, so that substrate piece is more easily sucked, and suction efficiency is higher, and suction state is also more stable and reliable.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a substrate wafer jig pick-up device. Background Technology

[0002] Indium phosphide substrates have a wide range of applications in the manufacture of high-frequency, high-power devices, fiber optic communications, wireless transmission, radio astronomy, and other radio frequency devices. During the manufacturing process of indium phosphide substrates, after the wafer rods undergo slicing to form substrate wafers, the substrate wafers require multiple processes such as cleaning and testing. Between these processes, the substrate wafers need to be frequently transferred between different equipment and different fixtures in different processes.

[0003] In existing technologies, the transfer of substrates between different jigs often employs manual prying mechanisms. This method is not only time-consuming and labor-intensive but also prone to damaging the edges of the substrate. While some structures use suction cups to hold the substrate, these suction cups are often too simple, merely creating a vacuum environment above the substrate. This fails to provide a stable and effective suction force, leading to problems such as difficulty in lifting the substrate, low transfer efficiency, unstable suction during transfer, and the substrate easily falling off. Utility Model Content

[0004] The technical problem this invention aims to solve is how to improve the substrate pick-up efficiency and the stability of the pick-up state. To address this problem, this invention provides a substrate jig pick-up device, including a jig, a vacuum assembly, and a gas filling assembly. The jig is provided with a receiving groove, a lower gas guide groove, and a sliding groove. A pneumatic component is movably disposed within the sliding groove. The sliding groove is located between the receiving groove and the lower gas guide groove along the radial direction of the jig. The receiving groove is used to receive the substrate to be picked up, and the lower gas guide groove is used to introduce gas to drive the pneumatic component to move within the sliding groove along the radial direction of the jig. The pneumatic component abuts against the edge of the substrate to lift the substrate. The vacuum assembly includes a suction cup disposed above the fixture, and a vacuum cavity is formed between the suction cup and the fixture to create a vacuum negative pressure environment on the upper surface of the substrate. The inflation assembly includes a partition plate disposed between the suction cup and the fixture; the partition plate has an air intake hole in the middle for connecting the suction cup and the fixture; the partition plate has an inflation connector that is connected to the lower air guide groove to introduce gas into the lower air guide groove.

[0005] Preferably, the pneumatic component includes a slider, the top of which is provided with an inclined surface facing the center of the fixture, the inclined surface being used to abut against the substrate.

[0006] Preferably, the slider has a slot on the side facing the center of the fixture, and a return spring is provided in the slot. One end of the return spring abuts against the slider, and the other end abuts against the inner wall of the slot.

[0007] Preferably, the partition plate has an upper air guide groove on the side facing the fixture, corresponding to the lower air guide groove, and the upper air guide groove is connected to the lower air guide groove; the upper air guide groove and the lower air guide groove are annular grooves.

[0008] Preferably, the lower air guide groove is provided with an air inlet notch corresponding to the slide groove, and the air inlet notch is connected to the upper air guide groove.

[0009] Preferably, the fixture is provided with an air guiding channel, which includes an air inlet and an air outlet. The air inlet is located in the lower air guiding groove and is connected to the lower air guiding groove; the air outlet is located in the middle of the receiving groove and is connected to the receiving groove.

[0010] Preferably, there are multiple air inlets, and the multiple air inlets are evenly distributed among the multiple pneumatic components.

[0011] Preferably, the inflation connector is located on the side of the partition away from the fixture, and multiple inflation connectors are provided corresponding to the pneumatic components.

[0012] Preferably, a vacuum connector and a lifting device are provided on the side of the suction cup away from the fixture; the vacuum connector is used to connect to an external vacuum device; the lifting device includes a lifting arm and a lifting cylinder, one end of the lifting arm is fixedly connected to the suction cup, and the other end of the lifting arm is fixedly connected to the output end of the cylinder.

[0013] Preferably, the top of the partition is provided with a receiving groove for accommodating the suction cup, and multiple suction holes are provided in the receiving groove.

[0014] Compared with the prior art, the substrate wafer pick-up device provided in this embodiment of the present invention has the following advantages: In this embodiment, when it is necessary to remove the substrate from the fixture, a vacuum negative pressure environment is formed above the substrate by a suction cup to pick up the substrate. On the other hand, gas is introduced into the downward air guide groove through the gas inlet. The introduced gas drives the pneumatic component to move, bringing the pneumatic component closer to the substrate, thereby lifting the substrate from the receiving groove. This makes it easier for the substrate to be picked up by the suction cup, the substrate is less likely to be damaged, the substrate picking and transfer efficiency is higher, and the state of the substrate is more stable and reliable during the transfer process. Attached Figure Description

[0015] Figure 1 This is a perspective view of the present invention; Figure 2 This is an exploded view of the present invention; Figure 3 This is a cross-sectional view of the present invention; Figure 4 This is a cross-sectional view of the tooling of this utility model.

[0016] In the diagram: 1. Fixture; 11. Receiving groove; 12. Lower air guide groove; 13. Slide groove; 14. Air guide channel; 141. Air inlet end; 142. Air outlet end; 15. Vacuum connector; 2. Suction cup; 3. Partition; 31. Intake hole; 32. Inflation connector; 33. Upper air guide groove; 34. Intake notch; 35. Accommodation recess; 4. Pneumatic components; 41. Slider; 42. Inclined surface; 43. Slot; 44. Return spring; 45. Guide rod; 5. Substrate; 6. Lifting arm; 7. Lifting cylinder. Detailed Implementation

[0017] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0018] like Figures 1 to 4 As shown, a preferred embodiment of this utility model provides a substrate jig pick-up device, which includes a jig 1, a vacuum component and a gas filling component. The jig 1 is provided with a receiving groove 11, a lower gas guide groove 12 and a sliding groove 13. A pneumatic component 4 is movably disposed in the sliding groove 13. The sliding groove 13 is disposed between the receiving groove 11 and the lower gas guide groove 12 along the radial direction of the jig 1. The receiving groove 11 is used to receive the substrate 5 to be picked up. The lower gas guide groove 12 is used to introduce gas to drive the pneumatic component 4 to move in the sliding groove 13 along the radial direction of the jig 1. The pneumatic component 4 abuts against the edge of the substrate 5 to lift the substrate 5. The vacuum assembly includes a suction cup 2, which is positioned above the fixture 1. A vacuum cavity is formed between the suction cup 2 and the fixture 1 to create a vacuum negative pressure environment on the upper surface of the substrate 5. The inflation assembly includes a partition 3, which is disposed between the suction cup 2 and the fixture 1; the partition 3 has an air intake hole 31 in the middle, which is used to connect the suction cup 2 and the fixture 1; the partition 3 has an inflation connector 32, which is connected to the lower air guide groove 12 to introduce gas into the lower air guide groove 12.

[0019] Specifically, in the actual production process, there is water bonding between the jig 1 and the substrate 5. The tension of the water connects the substrate 5 and the jig 1, which makes it difficult for the traditional single suction cup 2 structure to stably and efficiently pick up the substrate 5 from the receiving groove 11 of the jig 1. In this embodiment, when transferring the substrate 5, in addition to creating a vacuum negative pressure environment above the substrate 5 using the suction cup 2 in the vacuum assembly to apply suction force to the substrate 5, high-speed, high-pressure gas is also introduced into the lower air guide groove 12 of the fixture 1 through the air inlet 32 ​​on the partition plate 3. This gas flows along the lower air guide groove 12 into the slide groove 13, and its pressure drives the pneumatic component 4 in the slide groove 13 to move along the slide groove 13, that is, drives the pneumatic component 4 to move towards the center of the fixture 1 in the radial direction, thereby lifting the substrate 5 and breaking the water tension between the substrate 5 and the fixture 1, making it easier and more efficient for the suction cup 2 to pick up the substrate 5. At the same time, the suction cup 2 can also apply a more stable and uniform suction force to the substrate 5, making the transfer of the substrate 5 more efficient, stable and reliable. Compared with the traditional method of using a skid, using gas to drive the pneumatic component 4 to lift the substrate 5 is safer and less likely to damage the substrate 5.

[0020] In some embodiments, the pneumatic component 4 includes a slider 41, the top of which is provided with a slope 42 facing the center of the fixture 1, and the slope 42 is used to abut against the substrate 5.

[0021] Specifically, the gas in the lower gas guide groove 12 pushes the slider 41 to slide towards the center of the fixture 1 within the slide groove 13. As the slider 41 moves, the contact state between the inclined surface 42 and the substrate 5 changes. The inclined surface 42 gradually lifts the substrate 5, increasing the distance between the substrate 5 and the bottom of the receiving groove 11, thereby disrupting the water connection between the substrate 5 and the fixture 1, making it easier to stably pick up the substrate 5. Simultaneously, some of the gas in the lower gas guide groove 12 also enters the receiving groove 11 through the slide groove 13. This gas blows air onto the substrate 5, further disrupting the water connection between the substrate 5 and the fixture 1, and providing support for the substrate 5, making it easier to remove.

[0022] In this embodiment, an annular rib is provided between the lower gas guide groove 12 and the receiving groove 11 to separate the lower gas guide groove 12 and the receiving groove 11. In a secondary embodiment, a notch is also provided on the rib to facilitate gas to enter the receiving groove 11 through the notch and blow up the substrate 5.

[0023] In some embodiments, a slot 43 is provided on the side of the slider 41 facing the center of the fixture 1, and a return spring 44 is provided in the slot 43. One end of the return spring 44 abuts against the slider 41, and the other end abuts against the inner wall of the groove 13.

[0024] Specifically, when the slider 41 is driven by air pressure to move towards the center of the fixture 1, it compresses the return spring 44. When the air inlet 32 ​​stops guiding air downwards, the return spring 44 drives the slider 41 to move away from the center of the fixture 1, thus resetting the slider 41. This facilitates the next use of the fixture 1 and improves its reusability. In this embodiment, the slot 43 can limit the return spring 44, preventing it from shifting and failing to stably drive the slider 41 to reset. In another embodiment, a guide rod 45 can be provided in the groove 13 along the radial direction of the fixture 1, passing through the slider 41 and slidably connected to it. The guide rod 45 can limit and guide the movement of the slider 41, making its movement smoother and thus better able to lift the substrate 5. Of course, the slot 43 and the guide rod 45 are not necessary. In a secondary embodiment, the slot 43 may not be provided, and the reset spring 44 may be provided between the fixture 1 and the slider 41.

[0025] In some embodiments, the partition plate 3 is provided with an upper air guide groove 33 on the side facing the fixture 1 corresponding to the lower air guide groove 12, and the upper air guide groove 33 is connected to the lower air guide groove 12; the upper air guide groove 33 and the lower air guide groove 12 are annular grooves.

[0026] Specifically, the upper air guide groove 33, together with the lower air guide groove 12, can evenly distribute the gas input from the inflation connector 32 to different positions of the lower air guide groove 12. With the help of pneumatic components 4 at different positions, the substrate 5 can be stably lifted without causing the substrate 5 to tilt. This allows the suction cup 2 to pick up the substrate 5 more stably and efficiently, avoiding problems such as pressure imbalance and the substrate 5 falling off. It also avoids the problem of the suction cup 2 being unable to pick up the substrate 5 due to the connection between the suction cup 2 and the inflation connector 32.

[0027] Furthermore, sealing elements and sealing grooves can be provided between the upper air guide groove 33 and the lower air guide groove 12. The upper air guide groove 33 and the lower air guide groove 12 can also be configured as arc-shaped structures. It should also be noted that, in one embodiment, the lower air guide groove 12, away from the center of the fixture 1, does not have a side edge; sealing is achieved solely through the contact between the bottom wall of the partition plate 3 and the upper surface of the fixture 1. Of course, sealing grooves and sealing rings can also be used in conjunction to achieve sealing.

[0028] Furthermore, in some embodiments, the lower air guide groove 12 is provided with an air inlet notch 34 corresponding to the slide groove 13, and the air inlet notch 34 is connected to the upper air guide groove 33. The air inlet notch 34 can concentrate the gas located in the lower air guide groove 12 into the slide groove 13, thereby allowing the slider 41 to receive a greater thrust, and making it easier for the slider 41 to lift the substrate 5.

[0029] In some embodiments, the fixture 1 is provided with an air guide channel 14, which includes an air inlet end 141 and an air outlet end 142. The air inlet end 141 is disposed in the lower air guide groove 12 and communicates with the lower air guide groove 12; the air outlet end 142 is disposed in the middle of the receiving groove 11 and communicates with the receiving groove 11.

[0030] Specifically, in addition to using pneumatically driven slider 41 to lift the edge of substrate 5, this embodiment also guides the gas in the lower gas guide groove 12 to the middle of the receiving groove 11 through the gas guide channel 14, and allows high-pressure gas to rush out in the middle of the receiving groove 11 through the gas outlet 142. This, combined with the edge position slider 41 lifting substrate 5, makes the force on the bottom of substrate 5 more uniform, allowing substrate 5 to be lifted more stably, improving the absorption and transfer efficiency of substrate 5, as well as the stability and reliability of the absorption and transfer process.

[0031] In some embodiments, multiple air inlets 141 are provided, and the multiple air inlets 141 are evenly arranged between multiple pneumatic components 4. Multiple air inlets 141 can be provided between each group of adjacent pneumatic components 4, thereby making the air pressure in the air guide channel 14 and the lower air guide groove 12 more stable, and thus making the driving of different sliders 41 more stable. In other embodiments, multiple air outlets 142 can also be provided, with multiple air outlets 142 evenly arranged circumferentially along the axis of the fixture 1, or multiple groups of multiple air outlets 142 in each group evenly distributed circumferentially along the axis of the fixture 1.

[0032] Furthermore, the inflation connector 32 is located on the side of the partition 3 away from the fixture 1, and multiple inflation connectors 32 are provided corresponding to the pneumatic components 4. The multiple inflation connectors 32 correspond to different pneumatic components 4, making the air pressure in the lower air guide groove 12 more uniform and stable, without large pressure differences. Different sliders 41 can receive the same pressure drive, thereby stably lifting the substrate 5 and allowing the substrate 5 to be better picked up.

[0033] In some embodiments, a vacuum connector 15 and a lifting device are provided on the side of the suction cup 2 away from the fixture 1; the vacuum connector 15 is used to connect an external vacuum device; the lifting device includes a lifting arm 6 and a lifting cylinder 7, one end of the lifting arm 6 is fixedly connected to the suction cup 2, and the other end of the lifting arm 6 is fixedly connected to the output end of the cylinder.

[0034] Furthermore, the top of the partition 3 is provided with a receiving groove 35, which is used to receive the suction cup 2, and multiple suction holes 31 are provided in the receiving groove 35.

[0035] Specifically, the partition 3 and the suction cup 2 are fixedly connected by bolts, and the suction cup 2 is fixedly connected to the lifting arm 6 via a screwdriver. In actual use, the lifting cylinder 7 drives the suction cup 2 and the partition 3 away from or towards the fixture 1 via the lifting arm 6. When it is necessary to pick up the substrate 5, the partition 3 comes into contact with the fixture 1, and then the vacuum connector 15 and the gas filling connector 32 are activated, so that the substrate 5 is picked up and fixed on the side of the partition 3 away from the suction cup 2, realizing the picking up and transfer of the substrate 5. The receiving groove 35 can prevent gas leakage between the suction cup 2 and the partition 3, ensuring the stability and reliability of the vacuum environment, and ensuring the stability and reliability of the substrate 5 picking up process. The multiple suction holes 31 are evenly distributed around the circumference or in a ring-shaped diffusion distribution, which can further provide a stable and uniform suction force above the substrate 5, making the position of the substrate 5 more stable during the picking up process.

[0036] In summary, this utility model embodiment provides a substrate 5 jig pick-up device, which uses air pressure to drive the slider 41 to lift the edge of the substrate 5 and provides support force to the center of the bottom surface of the substrate 5 through the air guide channel 14, thereby disengaging the substrate 5 from the jig 1 and providing stable and uniform support for the substrate 5. Combined with the vacuum negative pressure environment created by the suction cup 2, the substrate 5 can be picked up more easily, the picking efficiency of the substrate 5 is higher, and the picking state of the substrate 5 is more stable and reliable.

[0037] The above are merely preferred embodiments of this utility model. It should be noted that, for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of this utility model, and these improvements and substitutions should also be considered within the protection scope of this utility model.

Claims

1. A substrate wafer pick-up device, characterized in that, include: A jig is provided with a receiving groove, a lower air guide groove, and a sliding groove. A pneumatic component is movably disposed in the sliding groove. The sliding groove is disposed between the receiving groove and the lower air guide groove along the radial direction of the jig. The receiving groove is used to receive a substrate sheet to be gripped. The lower air guide groove is used to introduce gas to drive the pneumatic component to move in the sliding groove along the radial direction of the jig. The pneumatic component abuts against the edge of the substrate sheet to lift the substrate sheet. A vacuum assembly, comprising a suction cup disposed above the fixture, wherein a vacuum cavity is formed between the suction cup and the fixture for creating a vacuum negative pressure environment on the upper surface of the substrate. An inflation assembly includes a partition disposed between the suction cup and the fixture; the partition has a suction hole in the middle for connecting the suction cup and the fixture; the partition has an inflation connector connected to the lower air guide groove for introducing gas into the lower air guide groove.

2. The substrate wafer pick-up device according to claim 1, characterized in that, The pneumatic component includes a slider with a bevel at its top facing the center of the fixture, the bevel being used to abut against the substrate.

3. The substrate wafer pick-up device according to claim 2, characterized in that, The slider has a slot on the side facing the center of the fixture, and a return spring is installed in the slot. One end of the return spring abuts against the slider, and the other end abuts against the inner wall of the slot.

4. The substrate wafer pick-up device according to claim 1, characterized in that, The partition plate is provided with an upper air guide groove on the side facing the fixture, corresponding to the lower air guide groove. The upper air guide groove is connected to the lower air guide groove. The upper air guide groove and the lower air guide groove are annular grooves.

5. The substrate wafer pick-up device according to claim 4, characterized in that, The lower air guide groove is provided with an air inlet notch corresponding to the slide groove, and the air inlet notch is connected to the upper air guide groove.

6. The substrate wafer pick-up device according to claim 1, characterized in that, The fixture is provided with an air guiding channel, which includes an air inlet and an air outlet. The air inlet is located in the lower air guiding groove and is connected to the lower air guiding groove. The air outlet is located in the middle of the receiving groove and is connected to the receiving groove.

7. The substrate wafer pick-up device according to claim 6, characterized in that, The air inlet is provided in multiple ways, and the multiple air inlets are evenly arranged between the multiple pneumatic components.

8. The substrate wafer pick-up device according to claim 1, characterized in that, The inflation connector is located on the side of the partition away from the fixture, and multiple inflation connectors are provided corresponding to the pneumatic components.

9. The substrate wafer pick-up device according to claim 1, characterized in that, A vacuum connector and a lifting device are provided on the side of the suction cup away from the fixture; the vacuum connector is used to connect to an external vacuum device; the lifting device includes a lifting arm and a lifting cylinder, one end of the lifting arm is fixedly connected to the suction cup, and the other end of the lifting arm is fixedly connected to the output end of the cylinder.

10. The substrate wafer pick-up device according to claim 1, characterized in that, The top of the partition is provided with a receiving groove for accommodating the suction cup, and multiple suction holes are provided in the receiving groove.

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