Filter and particle capture device

Abstract

This application proposes a filter and particulate capture device. The filter includes a multi-layered, nested annular filter element structure with a spatially efficient layout, achieving progressive filtration and dust load dispersion. Its core lies in coaxially nesting multiple annular filter elements within a single housing, significantly increasing the effective filtration area. During operation, airflow passes sequentially or synchronously through each filter element stage, intercepting dust at each stage. A central mounting tube and circumferential connectors provide stable support for the filter screen, ensuring a constant filtration gap. The chamber within the end cap and the mounting components jointly guide the airflow path, optimizing flow uniformity. This design disperses dust load through parallel multi-stage filtration, significantly delaying the rise in filter element pressure differential, thereby significantly extending the maintenance cycle. Its compact structure improves space utilization, while the modular design facilitates maintenance.

Description

Technical Field

[0001] This application relates to the field of air filtration, and in particular to a filter and a particulate capture device. Background Technology

[0002] Atomic layer deposition (ALD) is an advanced thin film fabrication process. In the reaction chamber, unreacted precursors and nano / submicron-sized solid particles generated from the gas-phase reaction can enter the exhaust gas duct of the vacuum system. If these substances directly enter the downstream high-precision vacuum pump, they will cause internal wear, jamming, or performance degradation, significantly increasing equipment maintenance costs and affecting production stability.

[0003] To ensure process safety, environmental protection, and protect the vacuum pump, modern ALD equipment is equipped with an exhaust gas treatment device between the reaction chamber and the vacuum pump. One mainstream treatment method is to provide deionized water to the exhaust gas treatment device, allowing unreacted precursor gases (such as flammable and explosive TMA) to undergo sufficient hydrolysis or neutralization reactions within the device, transforming them into less toxic substances. However, the gas-liquid reaction generates a large amount of solid or slurry-like byproducts (such as Al2O3 dust). Therefore, a particulate filter (or dust filter) is installed at the end of the exhaust gas treatment device and at the front end of the vacuum pump as a final barrier. Its core function is to effectively capture these reaction-generated dust particles and prevent them from entering the vacuum pump.

[0004] Most particulate filters in related technologies employ replaceable filter cartridges. However, in practical applications, a significant drawback has been identified: excessively short maintenance cycles. This is primarily due to the high concentration, strong adhesion, and nanoscale size of dust generated by the ALD process, which easily leads to rapid filter cartridge clogging and a sharp increase in pressure differential. Filter cartridge structures (such as simple folded filter paper or sintered filter cartridges) have insufficient effective dust holding capacity and limited dust loading capacity, quickly reaching saturation. Frequent filter cartridge clogging necessitates frequent downtime for replacement, increasing spare parts consumption and labor costs, and further reducing equipment uptime, severely impacting overall production efficiency and becoming one of the bottlenecks restricting the continuous and stable operation of ALD equipment. Utility Model Content

[0005] This application proposes a filter and a particle capture device, which can improve the dust holding capacity of the filter through a multi-layer specially designed filter element structure, thus extending the maintenance cycle.

[0006] This application proposes a filter, including:

[0007] The outer casing includes a hollow shell with openings at both ends, and end caps located at both ends of the shell;

[0008] Multiple filter elements are disposed in the housing, and the filter elements are arranged in a ring, nested sequentially from the outside to the inside and spaced apart from each other;

[0009] The mounting components are located in the two end caps and are used to install the filter element;

[0010] The filter element includes:

[0011] The mounting tube has its ends connected to the mounting components one by one, and the wall of the mounting tube has through holes.

[0012] Multiple connectors are provided at both ends on the mounting assembly, and the connectors are arranged around the outer periphery of the mounting tube;

[0013] A filter screen is arranged around the outer periphery of the connector to form a ring structure.

[0014] In some embodiments, the plurality of filter elements includes a first filter element disposed at the center of the housing, the first filter element comprising:

[0015] The first mounting tube is arranged along the length of the housing, and the tube wall is provided with through holes;

[0016] Multiple first connectors are arranged around the first mounting tube;

[0017] The first filter screen is arranged around the outer periphery of the first connector to form an annular structure surrounding the first mounting tube;

[0018] The installation assembly includes a first mounting component, which is disposed in the two end caps. The two ends of the first mounting tube are connected to the two first mounting components in a one-to-one correspondence. The two ends of the first connecting component are disposed on the first mounting component.

[0019] In some embodiments, the plurality of filter elements includes a second filter element disposed on the outer periphery of the first filter element, the second filter element comprising:

[0020] The second mounting tube is located on the outer periphery of the first filter screen, and the tube wall is provided with through holes;

[0021] Multiple second connectors are arranged around the outer periphery of the second mounting tube;

[0022] The second filter screen is arranged around the outer periphery of the second connector, forming an annular structure surrounding the second mounting tube;

[0023] The mounting assembly includes a second mounting member, which is disposed in the two end caps. The two ends of the second mounting tube are connected to the two second mounting members in a one-to-one correspondence. The two ends of the second connecting member are disposed on the second mounting member.

[0024] In some embodiments, the plurality of filter elements includes a third filter element disposed on the outer periphery of the second filter element, the third filter element comprising:

[0025] The third mounting tube is located on the outer periphery of the second filter screen, and the tube wall is provided with through holes. The two ends of the third mounting tube are respectively located on the second mounting component.

[0026] Multiple third connectors are provided at both ends on the second mounting component, and the third connectors are arranged around the outer periphery of the third mounting tube;

[0027] The third filter screen is arranged around the outer periphery of the third connector, forming an annular structure surrounding the third mounting tube.

[0028] In some embodiments, the end cap includes a flange connected to the housing, and a cover plate disposed on the side of the flange away from the housing, the cover plate being used to close one end of the flange; the first mounting member and the second mounting member are spaced apart from the cover plate and form a cavity within the end cap, the cavity being in communication with the first mounting pipe.

[0029] In some embodiments, the filter is vertically arranged, and the end cap at the upward end is provided with a first air hole, and the housing is provided with a second air hole;

[0030] The first and second mounting components located at the upper end are arranged in a ring, with the first mounting component located at the center of the second mounting component; the inner edge of the second mounting component is provided with a slot, and the outer edge of the first connector is provided with a tooth, the tooth being adapted to the slot.

[0031] In some embodiments, the outer edge of the second mounting member located at the upper end is spaced apart from the annular inner wall of the end cap, a notch is formed between adjacent teeth on the first mounting member, and the airflow channel between the first filter element and the second filter element communicates with the chamber through the notch.

[0032] In some embodiments, the outer edge of the second mounting member located at the lower end is provided with a groove, and the airflow channel between the housing and the third filter element communicates with the chamber at the lower end through the groove.

[0033] In some embodiments, the third filter screen is provided with a first escape hole, and the second filter screen is provided with a second escape hole. The first escape hole and the second escape hole are offset along the axial direction and / or offset along the circumferential direction.

[0034] This application also proposes a particle capture device, including a filter and a conduit in communication with the filter.

[0035] This application proposes a filter and a particulate capture device. The filter includes a multi-layered, nested annular filter element structure with a highly efficient spatial layout, achieving progressive filtration and dust load dispersion. Its core lies in coaxially nesting multiple annular filter elements within a single housing, significantly increasing the effective filtration area. During operation, airflow passes sequentially or synchronously through each filter element stage, intercepting dust step by step. A central mounting tube and circumferential connectors provide stable support for the filter screen, ensuring a constant filtration gap. The chamber within the end cap and the mounting components jointly guide the airflow path, optimizing flow uniformity. This design disperses dust load through parallel multi-stage filtration, significantly delaying the rise in filter element pressure differential, thereby significantly extending the maintenance cycle. Its compact structure improves space utilization, while the modular design facilitates maintenance. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the filter installation structure in one embodiment of this application;

[0037] Figure 2 This is a cross-sectional view of a filter in one embodiment of this application;

[0038] Figure 3 This is a schematic diagram of the filter element structure in one embodiment of this application;

[0039] Figure 4 for Figure 2 A partial schematic diagram of the upper part of the filter in the embodiment;

[0040] Figure 5 for Figure 2 A partial schematic diagram of the upper part of the filter in the embodiment;

[0041] Figure 6 for Figure 2 A partial schematic diagram of the lower end of the filter in the embodiment.

[0042] Label Explanation:

[0043] 10. Housing; 11. End cap; 13. First vent; 14. Second vent; 15. Flange; 16. Cover plate; 17. Chamber; 20. Mounting assembly; 21. First mounting component; 22. Second mounting component; 30. Filter element; 31. Mounting tube; 32. Connector; 33. Filter screen; 311. First mounting tube; 321. First connector; 331. First filter screen; 312. Second mounting tube; 332. Second filter screen; 313. Third mounting tube; 333. Third filter screen; 38. First escape hole; 39. Second escape hole.

[0044] The purpose, features, and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0045] The solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments in this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0046] It should be noted that all directional indications in the embodiments of this application, such as up, down, left, right, front, back, etc., are only used to explain the relative positional relationship and movement of the components in a specific posture as shown in the attached figure. If the specific posture changes, the directional indication will also change accordingly.

[0047] It should also be noted that when a component is described as "fixed to" or "set on" another component, it can be directly on the other component or there may be an intervening component present. When a component is described as "connected to" another component, it can be directly connected to the other component or there may be an intervening component present.

[0048] Furthermore, the use of terms such as "first" and "second" in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed in this application.

[0049] This application provides an embodiment of a filter, referring to... Figures 1 to 6The filter includes: a housing, comprising a hollow housing 10 with openings at both ends, and end caps 11 at both ends of the housing 10; a plurality of filter elements 30 disposed within the housing 10, the filter elements 30 being arranged in a ring and nested sequentially from the outside in and spaced apart from each other; mounting assemblies 20 disposed within the end caps 11 for mounting the filter elements 30; each filter element 30 includes: a mounting tube 31, the ends of which are connected to the mounting assemblies 20 respectively, and the tube wall of the mounting tube 31 having through holes; a plurality of connectors 32, the ends of which are respectively disposed on the mounting assemblies 20, and the connectors 32 surrounding the outer periphery of the mounting tube 31; and a filter screen 33 surrounding the outer periphery of the connectors 32, forming a ring structure. In this embodiment, the mounting assemblies 20, mounting tubes 31, connectors 32, and filter screen 33 may be made of stainless steel, the mounting tubes 31 and connectors 32 are connected by welding or screws, and the filter screen 33 can be fixed to the connectors 32 by clamps. The mounting pipe 31 not only provides structural support, but its through-holes also form part of the internal flow channel, allowing fluid to flow in both the radial and axial directions. The connectors 32 are evenly spaced to ensure uniform stress on the filter screen 33. The coaxially nested annular filter element 30 structure maximizes the filtration area within a limited space. Multiple filter elements 30 form parallel or series filtration units, achieving several times the effective filtration area in the same volume compared to traditional single-element designs, significantly improving filtration efficiency and reducing pressure drop.

[0050] In some embodiments, refer to Figure 3 and Figure 4 The system comprises multiple filter elements 30, including a first filter element located at the center of the housing. The first filter element includes: a first mounting tube 311, arranged along the length of the housing 10, with through holes in its wall; multiple first connectors 321, arranged around the first mounting tube 311; and a first filter screen 331, arranged around the outer periphery of the first connectors 321, forming an annular structure surrounding the first mounting tube 311. The mounting assembly 20 includes first mounting members 21, which are disposed in the end caps 11. The two ends of the first mounting tube 311 are connected to two corresponding first mounting members 21, and the two ends of the first connectors 321 are disposed on the first mounting members 21. In this embodiment, the first filter element serves as the innermost filtration unit, and its first mounting tube 311 is typically designed with maximum porosity to ensure unobstructed flow in the central channel. The first connectors 321 are radially distributed, forming a stable support frame. The centrally located first filter element constitutes the core flow channel of the filtration system, serving as the final filtration stage to process the fluid pre-filtered from the outer layer. Establish a tiered filtration system from the outside in to prevent large particles from directly impacting the core filter element and extend its overall service life.

[0051] In some embodiments, refer to Figure 3 and Figure 4The system includes multiple filter elements 30, including a second filter element disposed around the outer periphery of the first filter element. The second filter element includes: a second mounting tube 312 disposed around the outer periphery of the first filter screen 331, with through holes in its wall; multiple second connectors disposed around the outer periphery of the second mounting tube 312; and a second filter screen 332 disposed around the outer periphery of the second connectors, forming an annular structure surrounding the second mounting tube 312. The mounting assembly 20 includes second mounting members 22, which are disposed in the end caps 11. The two ends of the second mounting tube 312 are connected to two corresponding second mounting members 22, and the two ends of the second connectors are disposed on the second mounting members 22. In this embodiment, the second filter element serves as an intermediate filtration layer. The pore size of its second filter screen 332 is typically between that of the outer and inner layers, achieving progressive filtration. The second mounting tube 312 maintains an appropriate gap with the first filter screen 331, forming an annular flow channel. The intermediate layer filter element undertakes the main filtration task, capturing particles of medium size while protecting the inner fine filter element from clogging. It achieves gradient interception of particulate matter, increases overall dust holding capacity, and slows down the rate of increase in pressure difference.

[0052] In some embodiments, refer to Figure 3 and Figure 4 The system includes multiple filter elements 30, including a third filter element disposed around the outer periphery of the second filter element. The third filter element comprises: a third mounting tube 313 disposed around the outer periphery of the second filter screen 332, with through holes in its wall; both ends of the third mounting tube 313 are respectively disposed on the second mounting member 22; multiple third connecting members, both ends of which are respectively disposed on the second mounting member 22, and the third connecting members are arranged around the outer periphery of the third mounting tube 313; and a third filter screen 333 arranged around the outer periphery of the third connecting members, forming an annular structure surrounding the third mounting tube 313. In this embodiment, the third filter element, as the outermost layer, directly contacts the untreated fluid. Its third filter screen 333 has a larger pore size, primarily intercepting large particles. The third mounting tube 313 and the inner wall of the housing 10 form an air intake channel. The outer filter element performs a pre-filtration function, removing large particulate impurities and reducing the burden on the inner filter element. This effectively prevents large particles from causing rapid clogging of the inner filter element, achieving load balance.

[0053] In some embodiments, refer to Figures 4 to 6 The end cap 11 includes a flange 15 connected to the housing 10, and a cover plate 16 located on the side of the flange 15 away from the housing 10, which closes one end of the flange 15. A first mounting member 21 and a second mounting member 22 are spaced apart from the cover plate 16 and form a chamber 17 within the end cap 11, which communicates with the first mounting pipe 311. In this embodiment, the chamber 17 inside the end cap 11 is designed as a tapered structure, which facilitates smooth fluid diversion. A sealing element is provided between the flange 15 and the cover plate 16 to ensure system sealing. The chamber 17 structure enables fluid distribution and collection, ensuring uniform flow distribution across each filter element 30. This reduces flow resistance, avoids flow deviation, and improves filtration efficiency.

[0054] In some embodiments, the filter is vertically arranged, with a first air hole 13 on the end cap 11 facing upwards and a second air hole 14 on the housing 10. A first mounting member 21 and a second mounting member 22 located at the upper end are arranged in a ring, with the first mounting member 21 positioned at the center of the second mounting member 22. The inner edge of the second mounting member 22 has a groove, and the outer edge of the first connector 321 has teeth that fit into the groove. In this embodiment, the second air hole 14 serves as an air inlet, and the first air hole 13 serves as an air outlet, following a standard airflow path that enters from the side of the housing, passes through all 30 filter elements from bottom to top, and finally exits from the top. This is achieved by forcing the airflow through a narrow, tortuous annular flow channel. The gas cannot directly bypass the outlet; instead, it must bypass the mounting member, pass through the filter screen, flow in the interlayer between the filter elements 30, and finally exit through the notch in the upper end cap 11 into the central chamber 17. This "bypass" significantly increases the effective contact area and contact time between the gas and the filter, making it more likely that dust will be captured, thereby greatly improving filtration efficiency. The slots and teeth adopt a wedge-shaped design to achieve self-centering and locking functions. The first air hole 13 is directly connected to the central chamber 17, serving as the outlet for purified fluid. The snap-fit ​​structure enables rapid positioning and installation of the filter element 30, ensuring the coaxiality of each filter element 30 layer. This facilitates installation and maintenance, ensures the uniformity of the filtration gaps, and improves product consistency.

[0055] In some embodiments, the outer edge of the second mounting member 22 located at the upper end is spaced apart from the annular inner wall of the end cap 11, and a notch is formed between adjacent teeth on the first mounting member 21. The airflow channel between the first filter element and the second filter element communicates with the chamber 17 through the notch. In this embodiment, the notch is designed as a fan shape or trapezoid, and the total area is calculated to ensure matching flow capacity. The spacing distance is determined through fluid simulation optimization. A graded flow channel from the outer layer to the inner layer can be established, allowing the fluid to pass through each filtration stage in sequence. This achieves a true multi-stage filtration effect, improving filtration accuracy and efficiency. The core of the notch design lies in creating a controlled bypass path. The airflow passes through the third filter element, the second filter element, and the first filter element in sequence. Each stage of filtration will generate a certain pressure loss (pressure drop). When the gas passes through the second filter element, most of its dust has been captured. At this time, the notch provides an option to allow this pre-treated, relatively clean airflow to directly enter the chamber 17 of the end cap 11 and flow to the outlet without having to force it through the innermost first filter element. The flow rate of this bypass path is not constant. Its flow rate through the first filter element is dynamically related. When the resistance (pressure drop) of the first filter element increases due to dust accumulation, more airflow will "naturally choose" the path with less resistance, i.e., bypassing through the gap. This self-regulating characteristic can very effectively suppress the rapid increase of the total pressure drop of the filter, preventing it from exceeding the maximum allowable value of the system, thereby protecting the downstream vacuum pump. By diverting part of the airflow, the design of the gap effectively reduces the load on the innermost first filter element. This not only slows down the clogging rate of the first filter element, but also allows for a more balanced use of the dust holding capacity of the entire filter, because the dust load is more intelligently distributed, rather than all concentrated on the most delicate final filter element.

[0056] In some embodiments, refer to Figures 1 to 6The outer edge of the second mounting piece 22 at the lower end has a groove, through which the airflow channel between the housing 10 and the third filter element connects to the lower chamber 17. Airflow entering the housing 10 can also enter the lower chamber 17 via the groove and exit through the central mounting pipe, thus preventing excessive pressure drop. When dust-laden gas enters through the air inlet at the lower part of the housing 10, most of the gas follows the designed main path, passing through the third, second, and first filter elements from the outside in for filtration. The groove provides another option for some gas: allowing it to bypass the filter element and directly enter the chamber 17 of the lower end cover 11, then exit through the central mounting pipe. The resistance of this bypass channel is much lower than the path through the filter element. According to fluid mechanics principles, fluids automatically flow towards the path of lower resistance. When the filter element's resistance (pressure drop) increases due to dust accumulation, the airflow through the main filtration path decreases accordingly, while the airflow through the bypass groove automatically increases. This dynamic self-regulating characteristic can effectively suppress the rapid increase of the total pressure difference of the filter, thereby protecting the downstream vacuum pump and preventing energy consumption from increasing or the system from alarming due to excessive pressure difference.

[0057] Of course, the flow rate of this branch path must be controlled to a low level to avoid excessive dust escape. The flow rate of the bypass channel is not arbitrarily set. Through precise calculations and fluid simulation, the total flow cross-sectional area of ​​the groove is designed to be much smaller than the effective filtration area of ​​the main filtration path. This ensures that under any operating condition, the airflow through the bypass only accounts for a very small, acceptable proportion (e.g., 1%-5%) of the total flow rate, thereby keeping the total amount of unfiltered "dust escape" at an extremely low level. It is important to emphasize that this bypass airflow is not completely "untreated." When flowing through the lower chamber 17 and the central mounting pipe, due to changes in flow velocity and direction, some heavier particles may settle due to inertia. This design prioritizes the system's flow capacity and stability while ensuring basic filtration effects. In addition, the grooves can be arranged in a ring or multi-point distribution to ensure uniform flow distribution. The groove depth and width are precisely designed according to the flow parameters. This forms a complete fluid circulation path, ensuring smooth flow within the filtration system. It avoids dead zones, improves filter media utilization, and extends maintenance cycles.

[0058] In some embodiments, refer to Figures 1 to 6The third filter screen 333 has a first escape hole 38, and the second filter screen 332 has a second escape hole 39. The first escape hole 38 and the second escape hole 39 are staggered axially and / or circumferentially. The diameter of the escape hole is more than twice the diameter of the filter screen pores, the circumferential stagger angle is 30-60 degrees, and the axial stagger distance, i.e., the distance between the centers of the two holes, is greater than the sum of the radii of the two holes. In a multi-stage filtration system, due to the different density and contamination velocity of each filter layer, pressure loss occurs when the airflow passes through each layer. Without escape holes, the airflow must completely penetrate all filter layers in sequence. When a certain layer (especially the outermost layer) experiences increased resistance due to the adsorption of more particles, it will quickly cause the total pressure difference between the inlet and outlet of the entire filter to surge. The escape hole, as a controlled "pressure relief channel," allows some airflow to "detour" at specific locations or enter the next stage in advance, thereby avoiding the formation of airflow "bottlenecks" in local high-resistance areas and effectively preventing the overall system pressure difference from increasing too quickly. This is crucial for protecting the downstream vacuum pump or compressor, as excessive pressure differentials significantly increase energy consumption and may cause equipment failure. Optimizing the flow field distribution improves filtration efficiency. By staggering the escape holes on different filter elements axially or circumferentially, the airflow path can be guided, creating a more uniform lateral flow or vortex between the filter elements, rather than simply moving in a straight line along the shortest path. This avoids airflow concentrating only through a portion of the area, allowing the entire filter surface to participate more evenly in intercepting particulate matter, thereby maximizing the utilization of the filtration area. A uniform flow field prevents excessive dust accumulation in specific locations on the filter, slows down the clogging rate of the filter elements, and helps extend the overall service life of the filter elements.

[0059] In some embodiments, a support member is also provided in the chamber 17 of the lower end cap 11. The support member is connected to the mounting assembly 20 and is used to support the filter element 30. The mounting assembly 20 and the filter element 30 can be removed from the upper opening of the housing. The support member located in the chamber 17 of the lower end cap 11 has the core function of providing solid axial support for the entire filter element 30 stack structure. It bears the weight and load from the multiple filter elements 30, the mounting assembly 20, and the fluid pressure, and can effectively prevent the filter elements 30 from sinking, deforming, or shifting due to gravity or pressure. This design ensures that the filter elements 30 maintain the correct relative position and seal between each filter element 30 and between the filter element 30 and the housing, which is crucial for maintaining the preset flow path and filtration effect. Designing the mounting assembly 20 (such as the first mounting member 21 and the second mounting member 22) and all the filter elements 30 as a module that can be removed as a whole from the upper opening of the housing greatly simplifies the maintenance process. When cleaning or replacing filter element 30 is required, maintenance personnel do not need to enter the bottom of the equipment or perform complex disassembly. They can simply open the upper cover 11 to lift out the entire filter element 30 system for operation. This "drawer-style" design is particularly suitable for use in situations where space is limited or the filter requires frequent maintenance, significantly improving maintenance efficiency and reducing labor intensity and downtime. It is worth noting that the distance between the outer edge of the upper second mounting piece 22 and the annular inner edge of the end cover 11 is kept within 5mm to prevent excessive airflow and dust from escaping directly through the upper gap. The aforementioned gap is mainly to ensure that the second mounting piece 22 can be pulled out from the opening at the top of the housing.

[0060] This application also proposes a particulate capture device, including a filter and a pipeline connected to the filter. The filter is connected to a vacuum pump via the pipeline and can filter dust generated by the ALD process to provide pre-protection for the vacuum pump.

[0061] The working principle of the filter and particle capture device in this embodiment is as follows:

[0062] The filter element 30 is arranged in a coaxial, multi-layered, annular, nested configuration (such as the first, second, and third filter elements) to maximize the filtration area within a limited housing space. The fluid follows a path from the outside to the inside, passing through the filter elements 30 of different precision in sequence, achieving progressive, graded filtration (the outer layer intercepts large particles, while the inner layer captures fine particles).

[0063] The system innovatively incorporates notches and grooves to create a controlled airflow bypass path. When dust accumulation increases resistance in the main filtration path, some pre-treated or untreated airflow intelligently selects a low-resistance bypass, thereby dynamically suppressing the rapid increase in the total pressure difference of the filter and protecting the downstream vacuum pump.

[0064] A robust support frame, comprised of mounting pipes, connectors, and mounting components, ensures the annular filter screen remains undeformed under pressure, maintaining a constant filtration gap. Staggered escape vents optimize the internal flow field, promoting uniform airflow distribution, preventing localized blockages, and improving overall filtration efficiency and lifespan.

[0065] The filter element 30 is precisely positioned using slots and teeth to form a modular unit. Combined with the design of the lower support component, the entire filter core can be removed as a whole from the upper opening, greatly simplifying the cleaning and replacement process and shortening maintenance downtime.

[0066] The above are only some or preferred embodiments of this application. Neither the text nor the drawings should limit the scope of protection of this application. All equivalent structural transformations made using the content of this application's specification and drawings under the overall concept of this application, or direct / indirect applications in other related technical fields, are included within the scope of protection of this application.

Claims

1. A filter, characterized in that, include: The outer casing includes a hollow shell with openings at both ends, and end caps located at both ends of the shell; Multiple filter elements are disposed in the housing. The filter elements have a ring structure and are nested sequentially from the outside to the inside, with intervals between them. The mounting components are respectively disposed in the two end caps and are used to install the filter element; The filter element includes: The mounting tube has two ends that are connected to the mounting components one by one, and the tube wall has through holes. Multiple connectors, with their two ends respectively mounted on the mounting assembly, are arranged around the outer periphery of the mounting tube; A filter screen is disposed around the outer periphery of the connector.

2. The filter according to claim 1, characterized in that, The plurality of filter elements includes a first filter element disposed at the center of the housing, the first filter element comprising: The first mounting tube is arranged along the length of the housing, and the tube wall is provided with through holes; Multiple first connectors are arranged around the first mounting tube; The first filter screen is arranged around the outer periphery of the first connector to form an annular structure surrounding the first mounting tube; The installation assembly includes a first mounting component, which is disposed in the two end caps. The two ends of the first mounting tube are connected to the two first mounting components in a one-to-one correspondence. The two ends of the first connecting component are disposed on the first mounting component.

3. The filter according to claim 2, characterized in that, The plurality of filter elements includes a second filter element disposed on the outer periphery of the first filter element, the second filter element comprising: The second mounting tube is located on the outer periphery of the first filter screen, and the tube wall is provided with through holes; Multiple second connectors are arranged around the outer periphery of the second mounting tube; The second filter screen is arranged around the outer periphery of the second connector, forming an annular structure surrounding the second mounting tube; The mounting assembly includes a second mounting member, which is disposed in the two end caps. The two ends of the second mounting tube are connected to the two second mounting members in a one-to-one correspondence. The two ends of the second connecting member are disposed on the second mounting member.

4. The filter according to claim 3, characterized in that, The plurality of filter elements includes a third filter element disposed on the outer periphery of the second filter element, the third filter element comprising: The third mounting tube is located on the outer periphery of the second filter screen, and the tube wall is provided with through holes. The two ends of the third mounting tube are respectively located on the second mounting component. Multiple third connectors are provided at both ends on the second mounting component, and the third connectors are arranged around the outer periphery of the third mounting tube; The third filter screen is arranged around the outer periphery of the third connector, forming an annular structure surrounding the third mounting tube.

5. The filter according to claim 4, characterized in that, The end cap includes a flange connected to the housing, and a cover plate disposed on the side of the flange away from the housing, the cover plate being used to close one end of the flange; the first mounting member and the second mounting member are spaced apart from the cover plate and form a cavity in the end cap, the cavity being in communication with the first mounting pipe.

6. The filter according to claim 5, characterized in that, The filter is vertically arranged, and the end cap at the upward end is provided with a first air hole, and the housing is provided with a second air hole; The first and second mounting components located at the upper end are arranged in a ring, with the first mounting component located at the center of the second mounting component; the inner edge of the second mounting component is provided with a slot, and the outer edge of the first connector is provided with a tooth, the tooth being adapted to the slot.

7. The filter according to claim 6, characterized in that, The outer edge of the second mounting member located at the upper end is spaced apart from the annular inner wall of the end cap. A notch is formed between adjacent teeth on the first mounting member. The airflow channel between the first filter element and the second filter element communicates with the chamber through the notch.

8. The filter according to claim 7, characterized in that, The outer edge of the second mounting member located at the lower end is provided with a groove, and the airflow channel between the housing and the third filter element is connected to the lower end chamber through the groove.

9. The filter according to claim 4, characterized in that, The third filter screen is provided with a first escape hole, and the second filter screen is provided with a second escape hole. The first escape hole and the second escape hole are offset along the axial direction and / or offset along the circumferential direction.

10. A particle capture device, characterized in that, It includes a filter as described in any one of claims 1 to 9, and a conduit in communication with the filter.

Images