A cleaning fixture suitable for large-sized semi-ceramic parts

Abstract

This utility model relates to the ceramics field and discloses a cleaning fixture suitable for large-sized semi-ceramic parts. It includes a cleaning box with a rotatable lid on top and a control panel on the front. A clamping box is rotatably connected to the inner wall of the cleaning box, and a lid is connected to the top of the clamping box via a torsion spring. Spray nozzles are located on both sides of the inner wall of the cleaning box. Two locking plates are fixedly connected to the front of the lid, and two locking seats are fixedly connected to the top of the clamping box. The outer wall of the locking seats is inserted into the inner wall of the locking plates. Two limiting grooves are formed on the top of the clamping box. In this utility model, a servo motor drives the clamping box to rotate in both directions, which, in conjunction with the meshing of a first and second bevel gear, drives a threaded rod to rotate. This causes the displacement box to repeatedly move the parts. Combined with water spraying from the spray nozzles on both sides of the cleaning box, the water flow fully reaches the sides, corners, deep holes, hollow areas, and other concealed areas of the parts.

Description

Technical Field

[0001] This utility model relates to the field of ceramics, and in particular to a cleaning fixture suitable for large-sized semi-ceramic parts. Background Technology

[0002] With technological advancements, the mainstream substrate size is transitioning from 6 inches to 8 inches or even larger. Cleaning is a crucial step in semiconductor manufacturing processes, aimed at removing particles, metal ion contamination, and organic residues from the substrate surface.

[0003] However, existing cleaning devices, when cleaning semi-ceramic parts, rely on clamping for cleaning, completely obstructing the sides and corners where the clamps contact, making it difficult for the sprayed water to reach them. Furthermore, their complex structures, often featuring deep holes or hollow areas, allow ceramic powder and processing residue to easily accumulate in hidden areas after clamping, directly affecting the subsequent assembly accuracy and operational stability of the parts. To address this technical problem, this application proposes a cleaning fixture suitable for large-sized semi-ceramic parts. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a cleaning fixture suitable for large-sized semi-ceramic parts. The fixture is driven by a servo motor to rotate the clamping box in both directions. This, combined with the meshing of the first and second bevel gears, drives the threaded rod to rotate, causing the displacement box to repeatedly move the parts. In addition, water is sprayed from the nozzles on both sides of the cleaning box, allowing the water flow to fully reach the sides, corners, deep holes, hollow areas, and other hidden areas of the parts, effectively removing ceramic powder and processing residue.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A cleaning fixture suitable for large-sized semi-ceramic parts includes a cleaning box with a rotatable lid on top. A control panel is located on the front of the cleaning box. A clamping box is rotatably connected to the inner wall of the cleaning box. A lid is connected to the top of the clamping box via a torsion spring. Spray nozzles are located on both sides of the inner wall of the cleaning box. Two locking plates are fixedly connected to the front of the lid. Two locking seats are fixedly connected to the top of the clamping box. The outer wall of the locking seat is inserted into the inner wall of the locking plate. Two limiting grooves are formed on the top of the clamping box. Limiting rods are slidably connected to the inner walls of the limiting grooves. The outer walls of the limiting rods are inserted into the inner walls of the locking seats. The two limiting rods are released from the locking seats via a limiting mechanism. Two sliding grooves are formed on the front of the inner wall of the clamping box. Displacement boxes are slidably connected to the inner walls of the sliding grooves. The inner walls of the two displacement boxes are connected by a sliding assembly to control the sliding of the displacement boxes.

[0006] Furthermore, the limiting mechanism includes a limiting spring disposed on the inner wall of the limiting groove, an inclined push plate is slidably connected to the front side of the clamping box, and a limiting rod is fixedly connected to the inner wall of the limiting groove.

[0007] Furthermore, the limiting rod passes through the left and right sides of the limiting insert rod, the limiting spring is sleeved on the outer wall of the limiting rod, the left end of the limiting spring is fixedly connected to the left side of the inner wall of the limiting groove, and the right end of the limiting spring is fixedly connected to the left side of the limiting insert rod.

[0008] Furthermore, a push block is fixedly connected to the front side of the inclined push plate.

[0009] Furthermore, the sliding assembly includes a threaded rod rotatably connected to the inner walls of the two sliding grooves, the outer wall of the threaded rod being threadedly connected to the inner wall of the displacement box, a first bevel gear being fixedly connected to the outer wall of the threaded rod, a connecting rod being fixedly connected to the front side of the inner wall of the cleaning box, and a second bevel gear being fixedly connected to the front side of the connecting rod.

[0010] Furthermore, the outer wall of the second bevel gear meshes with the outer wall of the first bevel gear, and a servo motor is fixedly connected to the rear side of the cleaning box. The drive end of the servo motor is fixedly connected to the rear side of the clamping box slide groove.

[0011] Furthermore, two large telescopic folding plates are fixedly connected to the inner wall of the slide groove, and the two large telescopic folding plates are fixedly connected to the left and right sides of the displacement box on the side closest to each other. Two small telescopic folding plates are fixedly connected to the inner wall of the limiting groove, and the two small telescopic folding plates are fixedly connected to the left and right sides of the limiting rod on the side closest to each other.

[0012] This utility model has the following beneficial effects: In this invention, a servo motor drives the clamping box to rotate in both directions, which in turn drives the threaded rod to rotate by meshing the first and second bevel gears. This causes the displacement box to repeatedly move the components. Combined with the water spraying from the nozzles on both sides of the cleaning box, the water flow fully reaches the sides, corners, deep holes, hollow areas, and other hidden areas of the components, effectively removing ceramic powder and processing residue.

[0013] In this invention, a locking plate is inserted into a locking seat, and a limiting rod is used for locking. The limiting spring can automatically reset and reinforce the mechanism, preventing parts from loosening during cleaning. To unlock, pressing the push block moves the limiting rod, and the torsion spring causes the lid to open automatically, making it convenient to take out and put in parts. At the same time, large and small telescopic folding plates protect the slide groove and the limiting groove respectively, preventing impurities from entering and ensuring the long-term reliable operation of the mechanism. Attached Figure Description

[0014] Figure 1 This is a perspective view of a cleaning fixture for large-sized semi-ceramic parts proposed in this utility model; Figure 2This is a schematic diagram of a clamping box for a cleaning fixture suitable for large-sized semi-ceramic parts proposed in this utility model; Figure 3 This is a schematic diagram of an inclined push plate for a cleaning fixture for large-sized semi-ceramic parts proposed in this utility model; Figure 4 A schematic diagram of a threaded rod for a cleaning fixture for large-sized semi-ceramic parts proposed in this utility model; Figure 5 This is a schematic diagram of a No. 2 bevel gear for a cleaning fixture suitable for large-sized semi-ceramic parts proposed in this utility model.

[0015] Legend: 1. Cleaning box; 2. Door; 3. Clamping box; 4. Box cover; 5. Control panel; 6. Servo motor; 7. Connecting rod; 8. Locking plate; 9. Displacement box; 10. Locking seat; 11. Limiting rod; 12. Limiting rod; 13. Limiting spring; 14. Inclined push plate; 15. Push block; 16. Small telescopic folding plate; 17. Threaded rod; 18. First bevel gear; 19. Second bevel gear; 20. Nozzle; 21. Large telescopic folding plate. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Reference Figures 1-3This utility model provides an embodiment of a cleaning fixture suitable for large-sized semi-ceramic parts, comprising a cleaning box 1, a top cover 2 rotatably connected to the top of the cleaning box 1 for easy loading and unloading of parts; a control panel 5 is provided on the front side of the cleaning box 1 for controlling the cleaning process; a clamping box 3 is rotatably connected to the inner wall of the cleaning box 1, and a lid 4 is connected to the top of the clamping box 3 via a torsion spring. The clamping box 3 is used to support parts, and its lid 4 is opened and closed by a torsion spring, cooperating with a locking plate 8. The insertion of the lock seat 10 and the locking of the limiting rod 11 can securely fix the components; nozzles 20 are provided on both the left and right sides of the inner wall of the cleaning tank 1, and water can be sprayed from the nozzles 20 on both sides of the inner wall of the cleaning tank 1; two locking plates 8 are fixedly connected to the front side of the box cover 4, and two lock seats 10 are fixedly connected to the top of the clamping box 3. The outer wall of the lock seat 10 is inserted into the inner wall of the locking plate 8. Two limiting grooves are opened on the top of the clamping box 3. The inner wall of the limiting groove is slidably connected to the limiting rod 11. The outer wall of the limiting rod 11 is inserted into the inner wall of the lock seat 10, and the locking plate... 8 is initially fixed by inserting it into the lock seat 10, and the limiting rod 11 is inserted into the lock seat 10 for further reinforcement to prevent the box cover 4 from loosening during cleaning; a limiting spring 13 is provided on the inner wall of the limiting groove, and an inclined push plate 14 is slidably connected to the front side of the clamping box 3; a limiting rod 12 is fixedly connected to the inner wall of the limiting groove, and the limiting rod 12 passes through the left and right sides of the limiting rod 11; the limiting spring 13 is sleeved on the outer wall of the limiting rod 12, the left end of the limiting spring 13 is fixedly connected to the left side of the inner wall of the limiting groove, and the right end of the limiting spring 13 is fixed to the left side of the limiting rod 11. The inclined push plate 14 is fixedly connected to a push block 15. The limiting rod 12 restricts the sliding direction of the limiting rod 11. The limiting spring 13 provides elastic force to automatically reset and lock it. The push block 15 drives the inclined push plate 14 to push the limiting rod 11 to unlock. Two small telescopic folding plates 16 are fixedly connected to the inner wall of the limiting groove. The two small telescopic folding plates 16 are fixedly connected to the left and right sides of the limiting rod 11 on the side closest to each other. The small telescopic folding plates 16 prevent impurities from entering the limiting groove and ensure the reliable operation of the locking mechanism. Reference Figure 1 , Figure 4 and Figure 5Two sliding grooves are formed on the front side of the inner wall of the clamping box 3. A displacement box 9 is slidably connected to the inner wall of the sliding grooves, and the sliding grooves provide a sliding track for the displacement box 9, which is used to place the parts to be cleaned. Threaded rods 17 are rotatably connected to the inner walls of the two sliding grooves. The outer wall of the threaded rod 17 is threadedly connected to the inner wall of the displacement box 9. The rotation of the threaded rod 17 can drive the displacement box 9 to move along the sliding grooves, realizing the adjustment of the part position. A first bevel gear 18 is fixedly connected to the outer wall of the threaded rod 17. A connecting rod 7 is fixedly connected to the front side of the inner wall of the cleaning box 1. A second bevel gear 19 is fixedly connected to the front side of the connecting rod 7. The outer wall of the second bevel gear 19 meshes with the outer wall of the first bevel gear 18. The first bevel gear fixed on the threaded rod 17... Wheel 18 meshes with the second bevel gear 19 fixed to the connecting rod 7, which can transmit power to the threaded rod 17 to drive it to rotate, thereby changing the position of the component during cleaning, and working with the nozzle 20 to achieve cleaning without dead angles; a servo motor 6 is fixedly connected to the rear side of the cleaning box 1, and the drive end of the servo motor 6 is fixedly connected to the rear side of the slide of the clamping box 3. The servo motor 6 serves as a power source, and the drive end is connected to the rear side of the slide of the clamping box 3, which can drive the clamping box 3 to rotate; two large telescopic folding plates 21 are fixedly connected to the inner wall of the slide. The two large telescopic folding plates 21 are fixedly connected to the left and right sides of the displacement box 9 on the side closest to each other. The large telescopic folding plates 21 are connected to the displacement box 9 and can slide and extend with the displacement box 9 to prevent cleaning impurities from entering the slide.

[0018] Working principle: When starting work, open the cover 2 and press the push block 15 to push the inclined push plate 14 to slide, thereby pushing the inclined push plate 14 to slide the limiting rod 11. Thus, the basic limiting rod 11 limits the lock seat 10, causing the torsion spring to release its elastic force and drive the box cover 4 to rotate, thereby placing the component into the displacement box 9. Close the box cover 4 and release the push block 15, causing the limiting spring 13 to release its elastic force and push the limiting rod 11 to slide into the lock seat 10, thereby fixing the lock piece 8.

[0019] The servo motor 6 is started by the control panel 5, which drives the clamping box 3 to rotate continuously in both directions. When the clamping box 3 rotates, the first bevel gear 18 and the second bevel gear 19 mesh, which causes the first bevel gear 18 to drive the threaded rod 17 to rotate. The rotation of the threaded rod 17 causes the displacement box 9 to slide, which in turn pushes the components inside the displacement box 9 to move repeatedly within the clamping box 3. Combined with the water flow sprayed from the nozzle 20 started by the control panel 5, the components are continuously cleaned.

[0020] It is worth noting that the circuits, nozzles, torsion springs, and water flow inlet and outlet involved in the above embodiments all adopt corresponding existing technologies according to the actual situation, and therefore will not be described in detail in the embodiments of this application.

[0021] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A cleaning fixture suitable for large-sized semi-ceramic parts, characterized in that, The system includes a cleaning tank (1), a cover (2) rotatably connected to the top of the cleaning tank (1), a control panel (5) on the front side of the cleaning tank (1), a clamping box (3) rotatably connected to the inner wall of the cleaning tank (1), a box cover (4) connected to the top of the clamping box (3) via a torsion spring, nozzles (20) on both the left and right sides of the inner wall of the cleaning tank (1), two locking plates (8) fixedly connected to the front side of the box cover (4), and two locking seats (10) fixedly connected to the top of the clamping box (3). The outer wall of the locking seats (10) is connected to... The inner wall of the locking plate (8) is inserted, and two limiting grooves are opened on the top of the clamping box (3). The inner wall of the limiting groove is slidably connected to the limiting rod (11). The outer wall of the limiting rod (11) is inserted into the inner wall of the lock seat (10). The two limiting rods (11) are disconnected from the lock seat (10) through the limiting mechanism. Two sliding grooves are opened on the front side of the inner wall of the clamping box (3). The inner wall of the sliding groove is slidably connected to the displacement box (9). The inner walls of the two displacement boxes (9) are connected by a sliding assembly to control the sliding of the displacement box (9).

2. The cleaning fixture for large-sized semi-ceramic parts according to claim 1, characterized in that: The limiting mechanism includes a limiting spring (13) set on the inner wall of the limiting groove, a slidable push plate (14) slidably connected to the front side of the clamping box (3), and a limiting rod (12) fixedly connected to the inner wall of the limiting groove.

3. A cleaning fixture for large-sized semi-ceramic parts according to claim 2, characterized in that: The limiting rod (12) passes through the left and right sides of the limiting insert rod (11). The limiting spring (13) is sleeved on the outer wall of the limiting rod (12). The left end of the limiting spring (13) is fixedly connected to the left side of the inner wall of the limiting groove, and the right end of the limiting spring (13) is fixedly connected to the left side of the limiting insert rod (11).

4. A cleaning fixture for large-sized semi-ceramic parts according to claim 3, characterized in that: A push block (15) is fixedly connected to the front side of the inclined push plate (14).

5. A cleaning fixture for large-sized semi-ceramic parts according to claim 1, characterized in that: The sliding assembly includes a threaded rod (17) rotatably connected to the inner walls of two sliding grooves. The outer wall of the threaded rod (17) is threadedly connected to the inner wall of the displacement box (9). A first bevel gear (18) is fixedly connected to the outer wall of the threaded rod (17). A connecting rod (7) is fixedly connected to the front side of the inner wall of the cleaning box (1). A second bevel gear (19) is fixedly connected to the front side of the connecting rod (7).

6. A cleaning fixture for large-sized semi-ceramic parts according to claim 5, characterized in that: The outer wall of the second bevel gear (19) meshes with the outer wall of the first bevel gear (18). A servo motor (6) is fixedly connected to the rear side of the cleaning box (1). The drive end of the servo motor (6) is fixedly connected to the rear side of the groove of the clamping box (3).

7. A cleaning fixture for large-sized semi-ceramic parts according to claim 1, characterized in that: The inner wall of the chute is fixedly connected to two large telescopic folding plates (21), and the two large telescopic folding plates (21) are fixedly connected to the left and right sides of the displacement box (9) on the side closest to each other. The inner wall of the limiting groove is fixedly connected to two small telescopic folding plates (16), and the two small telescopic folding plates (16) are fixedly connected to the left and right sides of the limiting rod (11) on the side closest to each other.

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