Grinding tools, coating equipment and photovoltaic cell production systems

Abstract

This application relates to a polishing tool, coating equipment, and a photovoltaic cell production system. The polishing tool includes a gripping part, a supporting part, a polishing part, and a driving part. The supporting part extends longitudinally along a first direction, and the gripping part is disposed at one end of the supporting part. The polishing part is rotatably mounted on the supporting part about a first axis intersecting the first direction and is located at the other end of the supporting part. The polishing part has a polishing surface disposed around the first axis. The driving part is connected to the polishing part and is used to drive the polishing part to rotate. This application allows for polishing of the discharge base without disassembling the discharge base, saving time and effort and improving the coating effect of the coating equipment.

Description

Technical Field

[0001] This application relates to the field of photovoltaic cell production technology, and in particular to polishing tools, coating equipment and photovoltaic cell production systems. Background Technology

[0002] Coating equipment such as PECVD uses microwaves or electric fields to ionize a gas containing the atoms that make up the thin film (Si, N), generating localized plasma. Because of the high chemical reactivity of this plasma, chemical reactions easily occur, depositing the desired SiNx thin film on the substrate. Due to the continuous ionization environment and the need to maintain a stable power output, the discharge device inside the coating furnace is prone to oxidation and silicon nitride adhesion, leading to discharge fluctuations and affecting the coating effect. Regular polishing of the discharge device's surface is usually required. Currently, before polishing the discharge device, it is typically necessary to remove it from the coating furnace, polish it externally, and then reinstall it, which is time-consuming and labor-intensive. Utility Model Content

[0003] Based on this, this application provides a polishing tool, coating equipment, and photovoltaic cell production system to solve the problem of time-consuming and labor-intensive process of disassembling and polishing the discharge device.

[0004] Firstly, this application proposes a polishing tool, comprising: Holding part; A support portion extends longitudinally along a first direction, and the grip portion is disposed at one end of the support portion; A grinding part is rotatably mounted on the support part about a first axis intersecting the first direction and located at the other end of the support part. The grinding part has a grinding surface arranged around the first axis. A drive unit, connected to the polishing unit, is used to drive the polishing unit to rotate.

[0005] In some embodiments, the drive unit includes a drive wheel, a drive member, and a transmission belt. The drive wheel is rotatably mounted on the support unit about a second axis parallel to the first axis and is arranged between the gripping unit and the polishing unit along the first direction. The transmission belt connects the drive wheel and the grinding part, and the driving component is connected to the drive wheel to drive the drive wheel to rotate.

[0006] In some embodiments, the drive belt is a chain.

[0007] In some embodiments, the drive component includes either a rotary motor or a rotary handle, both of which are connected to the drive wheel for controlling the rotation of the drive wheel.

[0008] In some embodiments, the polishing tool further includes a bracket, the support portion being supported on the bracket, and the bracket being located between the drive wheel and the grip portion along the first direction.

[0009] In some embodiments, the grinding section includes a grinding roller, a driven roller, and a rotating shaft. The grinding roller and the driven roller are rotatably mounted on the support section via the rotating shaft, and the grinding roller rotates following the driven roller. The drive belt connects to the driven roller, and the surface of the grinding roller serves as the grinding surface.

[0010] In some embodiments, the support portion includes a telescopic section and a fixed section, the telescopic section being telescopically oriented along the first direction, and the fixed section and the gripping portion being respectively connected to both ends of the telescopic section; The grinding section and the driving section are located in the fixed section.

[0011] In some embodiments, a negative pressure channel is provided in the polishing section, and the negative pressure channel penetrates the polishing surface; The polishing tool includes a negative pressure generator and a dust collection unit, wherein the dust collection unit is connected between the negative pressure channels of the negative pressure generator.

[0012] In some embodiments, a transition air passage is provided in the support portion, the negative pressure generator and the dust collection portion are both installed in the grip portion, and the transition air passage connects the dust collection portion and the negative pressure channel.

[0013] In some embodiments, the grip portion is provided with a mounting hole, and the dust collection portion is detachably mounted to the mounting hole.

[0014] In some embodiments, the grip portion is further provided with a control button, which is connected to the negative pressure generator.

[0015] Secondly, this application provides a coating apparatus, comprising: The polishing tools described in the first aspect; and A coating furnace, wherein a furnace tube is provided inside the coating furnace, and a discharge seat is provided on the furnace tube, and a polishing tool is used to polish the discharge seat.

[0016] Thirdly, this application proposes a photovoltaic cell production system, including the coating equipment described in the second aspect.

[0017] In practical applications, the aforementioned polishing tools, coating equipment, and photovoltaic cell production system allow maintenance personnel to hold the handle, insert one end of the support into the coating furnace, bring the polishing part into contact with the discharge base, and then control the rotation of the polishing part through the drive unit to polish the discharge base. Compared with related technologies that require removing the discharge base and polishing outside the furnace, this application can polish the discharge base without disassembling it, saving time and effort and improving the coating effect. Attached Figure Description

[0018] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings: Figure 1 This is a front view schematic diagram of a polishing tool according to some embodiments; Figure 2 This is a front view schematic diagram of a polishing tool according to other embodiments; Figure 3 This is a front view schematic diagram of a polishing tool according to some other embodiments; Figure 4 This is a top view schematic diagram of a polishing tool according to some embodiments; Figure 5 for Figure 4 The diagram shows the internal structure of the polishing tool. Figure 6 This is an exploded view of the gripping portion in some embodiments; Figure 7 This is a schematic diagram of the polishing process of a coating apparatus according to some embodiments.

[0019] The reference numerals in the detailed embodiments are as follows: 1000. Coating equipment; 200. Coating furnace; 210. Furnace tube; 211. Discharge base; 100. Grinding tool; 110. Grip part; 111. Control button; 112. Dust collection air duct; 120. Support part; X, First direction; 121. Telescopic section; 122. Fixed section; 123. Transition air duct; 124. Fork; 125. Mounting hole; 126. Magnetic suction part; 130. Grinding part; F1. First axis; 131 131a Grinding roller; 131b Grinding surface; 131b Negative pressure channel; b1 Central channel; b2 Radial channel; 132 Driven roller; 133 Rotating shaft; 133a Air passage; 140 Drive unit; 141 Drive wheel; 142 Drive component; 142a Rotating handle; 142b Rotary motor; 143 Transmission belt; F2 Second axis; 150 Support; 160 Negative pressure generator; 170 Dust collection unit. Detailed Implementation

[0020] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0021] In the description of this application, it should be understood that, where they appear, the terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0022] Furthermore, where applicable, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0023] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., shall be interpreted broadly. For example, they may refer to a fixed connection, a detachable connection, or an integral part; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; they may refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0024] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0025] It should be noted that, if an element is described as "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is described as "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0026] To address the problems mentioned in the background art, this application first proposes a polishing tool that can extend into the interior of a coating furnace and be used to polish the discharge holder on the furnace tube without disassembling the discharge holder, saving time and effort. It is worth noting that the polishing tool proposed in this application can also be applied to polishing the internal structures of other furnace bodies.

[0027] Please refer to Figure 1 and Figure 2 The polishing tool 100 proposed in this application includes a gripping part 110, a support part 120, a polishing part 130, and a driving part 140. The support part 120 extends longitudinally along a first direction X, and the gripping part 110 is disposed at one end of the support part 120. The polishing part 130 is rotatably mounted on the support part 120 about a first axis F1 intersecting the first direction X, and is located at the other end of the support part 120. The polishing part 130 has a polishing surface 131a disposed around the first axis F1. The driving part 140 is connected to the polishing part 130 and is used to drive the polishing part 130 to rotate.

[0028] The support portion 120 may be in the shape of a long rod, with the grip portion 110 and the polishing portion 130 disposed at its two ends. The polishing portion 130 has a polishing surface 131a, which is annular around the first axis F1. Generally, the support portion 120 extends linearly, and the first axis F1 is configured to be perpendicular to the extension direction of the support portion 120 (i.e., the first direction X).

[0029] When the grinding unit 130 rotates around the first axis F1 under the action of the drive unit 140, the grinding surface 131a can grind the discharge base 211 it contacts. The drive unit 140 is mounted on the support unit 120 and is connected to the grinding unit 130 for transmission, and is used to control the rotation of the grinding unit 130. The drive unit 140 can be electrically driven or manually driven.

[0030] The grip 110 is for the user to hold. In practical application, the maintenance personnel hold the grip 110, insert one end of the support 120 into the coating furnace 200, and bring the polishing part 130 into contact with the discharge seat 211. Then, the drive part 140 controls the rotation of the polishing part 130 to polish the discharge seat 211. Compared with the related technology, which requires the discharge seat 211 to be removed and polished outside the furnace, this application can polish the discharge seat 211 without removing it, saving time and effort and improving the coating effect of the coating equipment 1000.

[0031] In some embodiments, please refer to Figure 1 and Figure 2 The drive unit 140 includes a drive wheel 141, a drive member 142, and a transmission belt 143. The drive wheel 141 is rotatably mounted on the support unit 120 about a second axis F2 parallel to the first axis F1, and is arranged between the gripping unit 110 and the grinding unit 130 along the first direction X. The transmission belt 143 connects the drive wheel 141 and the grinding unit 130, and the drive member 142 is connected to the drive wheel 141 for driving the drive wheel 141 to rotate.

[0032] The conveyor belt can be a belt, chain, or similar type. Specifically, the drive wheel 141 is rotatably mounted on the support 120 via a rotating shaft. The drive unit 142 can be manually driven or electrically driven.

[0033] In one embodiment, reference is made to... Figure 1 The drive unit 142 includes a rotary handle 142a, which is connected to the drive wheel 141 and is used to control the rotation of the drive wheel 141. In practical applications, when the operator rotates the rotary handle 142a, it drives the drive wheel 141 to rotate. At this time, manually controlling the rotation of the drive wheel 141 by rotating the rotary handle 142a can reduce costs.

[0034] In another embodiment, refer to Figure 2 The drive unit 142 includes a rotary motor 142b, which is connected to the drive wheel 141 and is used to control the rotation of the drive wheel 141. In practical applications, the operator starts the rotary motor 142b, and the rotation of the rotary motor 142b drives the drive wheel 141 to rotate. At this time, controlling the rotation of the drive wheel 141 by the rotary motor 142b is more labor-saving and the grinding efficiency is higher.

[0035] Regardless of whether the drive unit 142 is manually or electrically driven, in practical applications, the operator operates the drive unit 142 to rotate the drive wheel 141, which in turn drives the grinding section 130 to rotate synchronously via the transmission belt 143, thus realizing the grinding function of the grinding section 130. This solution has a simple structure, is easy to implement, and has a low cost.

[0036] In some embodiments, please refer to Figure 3 The grinding tool 100 also includes a bracket 150, with a support portion 120 supported on the bracket 150. Along the first direction X, the bracket 150 is located between the drive wheel 141 and the grip portion 110.

[0037] The bracket 150 is used to support the ground, etc., and supports the grinding tool 100 when the worker operates it, reducing the stress on the worker and making it more convenient to use.

[0038] In one embodiment, the support 150 is configured to be height-adjustable. In practical applications, the height of the support 150 is adjusted according to the different heights of the discharge seat 211 so that the support 150 can be effectively supported on the ground when the grinding part 130 contacts the discharge seat 211. By positioning the support 150 between the drive wheel 141 and the gripping part 110, in practical applications, a larger length of the support part 120 can be reserved to extend into the coating furnace 200, enabling grinding treatment of the discharge seat 211 at a deeper location.

[0039] In some embodiments, please refer to Figure 4 The grinding section 130 includes a grinding roller 131, a driven roller 132, and a rotating shaft 133. Both the grinding roller 131 and the driven roller 132 are rotatably mounted on the support section 120 via the rotating shaft 133, and the grinding roller 131 rotates following the driven roller 132. A transmission belt 143 connects to the driven roller 132, and the roller surface of the grinding roller 131 serves as the grinding surface 131a.

[0040] Optionally, the support portion 120 includes two branches 124, which are spaced apart along the direction of the first axis F1. A grinding roller 131 is disposed between the two branches 124 and is rotatably connected to each branch 124 via a rotating shaft 133. A driven roller 132 is provided on both sides of the grinding roller 131, and each driven roller 132 is rotatably connected to each branch 124 via a rotating shaft 133. The driven roller 132 is located on the side of the two branches 124 that are opposite to each other.

[0041] The drive belt 143 connects the driving roller and the driven roller 132. The driving roller drives the driven roller 132 to rotate via the drive belt 143. When the driven roller 132 rotates, it drives the grinding roller 131 to rotate synchronously via the rotating shaft 133. Understandably, the driven roller 132 and the grinding roller 131 are fixedly connected via the rotating shaft 133 to rotate synchronously.

[0042] At this time, the grinding roller 131 forms the grinding surface 131a, the driven roller 132 forms the transmission area of ​​the grinding roller 131, and when the transmission belt 143 drives the grinding part 130 to rotate, it will not affect the grinding operation of the grinding surface 131a.

[0043] In some embodiments, refer to Figure 3 The support portion 120 includes a telescopic section 121 and a fixed section 122. The telescopic section 121 is telescopically oriented along a first direction X. The fixed section 122 and the gripping portion 110 are respectively connected to both ends of the telescopic section 121. The grinding portion 130 and the driving portion 140 are disposed on the fixed section 122.

[0044] The length of the telescopic section 121 along the first direction X is variable. Optionally, the telescopic section 121 is formed by multiple sleeves nested sequentially along the first direction X. The length of the fixed section 122 along the first direction X is fixed. The telescopic section 121 allows the extension length of the support 120 to be variable, enabling it to extend and retract according to the different arrangement positions of the discharge base 211 within the coating furnace 200, thereby achieving grinding of the discharge base 211 at different positions.

[0045] In some embodiments, refer to Figure 5 The grinding section 130 is provided with a negative pressure channel 131b, which penetrates the grinding surface 131a. The grinding tool 100 includes a negative pressure generator 160 and a dust collection section 170, which is connected between the negative pressure generator 160 and the negative pressure channel 131b.

[0046] Specifically, the negative pressure channel 131b includes multiple micropores penetrating the polishing surface 131a. Optionally, these micropores are evenly arranged on the polishing surface 131a. The negative pressure generator 160 is used to generate negative pressure. When the polishing tool 100 polishes the discharge base 211, the dust and debris generated during polishing are adsorbed into the negative pressure channel 131b through the micropores under the action of negative pressure, and are finally collected in the dust collection section 170.

[0047] The dust collection section 170 is located between the negative pressure generator 160 and the negative pressure channel 131b. When airflow flows towards the negative pressure generator 160, it passes through the dust collection section 170. Dust and debris carried by the airflow are trapped in the dust collection section 170, thus achieving dust collection. Understandably, the dust collection section 170 has an inlet end and an outlet end. The inlet end allows airflow, dust, and debris to pass through and can be designed as an open design. The outlet end only allows airflow to pass through while trapping dust and debris and can be designed as a filter screen. Specifically, the dust collection section 170 can optionally be a dust collection bag.

[0048] In this way, the polishing tool 100 can also collect dust and debris when polishing the discharge seat 211, simplifying the cleaning of the coating furnace 200.

[0049] In one embodiment, reference is made to... Figure 5The negative pressure channel 131b includes a central channel b1 and a radiation channel b2. The central channel b1 extends along the first axis F1, and the negative pressure channel 131b is connected to the negative pressure generator 160 through both ends of the central channel b1. Multiple sets of radiation channels b2 are arranged along the central channel b1. Each set of radiation channels b2 includes multiple radiation channels b2 connected to the same position as the central channel b1, and the other end of each set of radiation channels b2 has the aforementioned micropores. The multiple micropores of the same set of radiation channels b2 are located in the same circumferential direction around the first axis F1.

[0050] In some embodiments, refer to Figure 5 The support part 120 is provided with a transition air passage 123. The negative pressure generator 160 and the dust collection part 170 are both installed on the grip part 110. The transition air passage 123 connects the dust collection part 170 and the negative pressure channel 131b.

[0051] On the one hand, by integrating the negative pressure generator 160 and the dust collection unit 170 into the grip unit 110, the structure of the polishing tool 100 becomes more compact. On the other hand, by utilizing the transition air passage 123 built into the support unit 120 to connect the negative pressure channel 131b and the dust collection unit 170, an external air passage is eliminated, avoiding interference between the external air passage and the coating furnace 200 during polishing, which would increase the difficulty of polishing.

[0052] It is worth noting that when the support part 120 includes the aforementioned branch 124, the transition air passage 123 passes through the interior of each branch 124, and the transition air passage 123 is connected to the negative pressure channel 131b inside the grinding roller 131 through both ends of the grinding roller 131, so that the negative pressure is transmitted more evenly.

[0053] In one embodiment, reference is made to... Figure 5 The two ends of the grinding roller 131 are mounted on the fork 124 via a rotating shaft 133. An air passage 133a is provided inside the rotating shaft 133, which connects the negative pressure passage 131b and the transition air passage 123. In this way, the negative pressure generated by the negative pressure generator 160 passes through the transition air passage 123 and the air passage 133a to reach the negative pressure passage 131b.

[0054] In one embodiment, reference is made to... Figure 6 The grip portion 110 is provided with a mounting hole 125, and the dust collection portion 170 is detachably mounted in the mounting hole 125. Specifically, the mounting hole 125 and the dust collection portion 170 can be detachably snap-fitted, magnetically connected, or otherwise. Understandably, when the dust collection portion 170 is installed in the mounting hole 125, the air inlet of the dust collection portion 170 is connected to the negative pressure channel 131b, and its air outlet is connected to the negative pressure generator 160.

[0055] Optionally, a magnetic part 126 is provided in the mounting hole 125, which is magnetically connected to the dust collection part 170, making it convenient to install and remove the dust collection part 170.

[0056] In some embodiments, refer to Figure 5 The grip 110 is also equipped with a control button 111, which is connected to the negative pressure generator 160. When using the grinding tool 100, the negative pressure generator 160 is started and stopped by operating the control button 111. The control button 111 is located on the grip 110 for easy operation by the worker.

[0057] In addition, this application embodiment also provides a coating equipment 1000, including the polishing tool 100 and the coating furnace 200 in the above embodiment. The coating furnace 200 is provided with a furnace tube 210, and a discharge seat 211 is provided on the furnace tube 210. The polishing tool 100 is used to polish the discharge seat 211.

[0058] Reference Figure 7 In practical applications, the manual hand holds the gripping part 110 and inserts the end where the polishing part 130 is located into the coating furnace 200 to polish the discharge seat 211 on the furnace tube 210 to ensure the coating quality of the coating furnace 200.

[0059] In addition, this application embodiment also provides a photovoltaic cell production system, including the coating equipment 1000 in the above embodiment.

[0060] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0061] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A polishing tool (100), characterized in that, include: Holding part (110); The support portion (120) extends longitudinally along a first direction (X), and the grip portion (110) is disposed at one end of the support portion (120); A polishing part (130) is rotatably mounted on the support part (120) about a first axis (F1) intersecting the first direction (X), and is located at the other end of the support part (120). The polishing part (130) has a polishing surface (131a) arranged around the first axis (F1); and A drive unit (140) is connected to the polishing unit (130) and is used to drive the polishing unit (130) to rotate; The drive unit (140) includes a drive wheel (141), a drive member (142), and a transmission belt (143). The drive wheel (141) is rotatably mounted on the support unit (120) about a second axis (F2) parallel to the first axis (F1), and is arranged between the gripping unit (110) and the polishing unit (130) along the first direction (X). The transmission belt (143) connects the drive wheel (141) and the grinding part (130), and the drive member (142) is connected to the drive wheel (141) to drive the drive wheel (141) to rotate.

2. The polishing tool (100) according to claim 1, characterized in that, The drive belt (143) is a chain; and / or, The drive unit (142) includes either a rotary motor (142b) or a rotary handle (142a), both of which are connected to the drive wheel (141) for controlling the rotation of the drive wheel (141); and / or, The polishing tool (100) also includes a bracket (150), on which the support (120) is supported. Along the first direction (X), the bracket (150) is located between the drive wheel (141) and the grip (110).

3. The polishing tool (100) according to claim 1, characterized in that, The grinding section (130) includes a grinding roller (131), a driven roller (132), and a rotating shaft (133). The grinding roller (131) and the driven roller (132) are rotatably mounted on the support section (120) via the rotating shaft (133). The grinding roller (131) rotates following the driven roller (132). The drive belt (143) is connected to the driven roller (132), and the roller surface of the grinding roller (131) serves as the grinding surface (131a).

4. The polishing tool (100) according to claim 1, characterized in that, The support (120) includes a telescopic section (121) and a fixed section (122). The telescopic section (121) is telescopically oriented along the first direction (X). The fixed section (122) and the grip (110) are respectively connected to the two ends of the telescopic section (121). The polishing part (130) and the driving part (140) are disposed on the fixed section (122).

5. The polishing tool (100) according to claim 1, characterized in that, The polishing section (130) is provided with a negative pressure channel (131b), which penetrates the polishing surface (131a); The polishing tool (100) includes a negative pressure generator (160) and a dust collection unit (170), the dust collection unit (170) being connected between the negative pressure channel (131b) of the negative pressure generator (160).

6. The polishing tool (100) according to claim 5, characterized in that, The support part (120) is provided with a transition air passage (123), the negative pressure generator (160) and the dust collection part (170) are both installed on the grip part (110), and the transition air passage (123) connects the dust collection part (170) and the negative pressure channel (131b).

7. The polishing tool (100) according to claim 6, characterized in that, The grip (110) is provided with a mounting hole (125), and the dust collection part (170) is detachably mounted to the mounting hole (125); and / or, The grip (110) is also provided with a control button (111), which is connected to the negative pressure generator (160).

8. A coating apparatus (1000), characterized in that, include: The polishing tool (100) as described in any one of claims 1 to 7; and A coating furnace (200) is provided with a furnace tube (210) inside the coating furnace (200), and a discharge seat (211) is provided on the furnace tube (210). The polishing tool (100) is used to polish the discharge seat (211).

9. A photovoltaic cell production system, characterized in that, Includes the coating equipment (1000) as described in claim 8.

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