Grinding slurry concentration detection device and grinding slurry supply system

Abstract

This application relates to a polishing slurry concentration detection device and a polishing slurry supply system. The polishing slurry concentration detection device includes: a supply container for storing the polishing slurry to be tested; a transfer cylinder for holding the polishing slurry to be tested; a tube assembly including an inlet pipe and an outlet pipe, wherein the supply container, inlet pipe, transfer cylinder, and outlet pipe are sequentially connected to form a circulation path for the polishing slurry; and a detection assembly including a detector disposed inside the transfer cylinder for detecting the concentration of the polishing slurry within the transfer cylinder. The polishing slurry concentration detection device of this application can achieve real-time monitoring of the polishing slurry concentration, improving the efficiency of polishing slurry concentration detection, and can provide real-time feedback on whether the polishing slurry concentration has decreased, facilitating timely adjustment of the polishing slurry concentration range by the user. This allows for real-time dynamic adjustment of the polishing slurry concentration, ensuring that the polishing slurry concentration remains within the required range to meet the processing requirements of optical components and improve the quality of optical components.

Description

Technical Field

[0001] This application relates to the field of liquid concentration detection technology, and in particular to a grinding fluid concentration detection device and a grinding fluid supply system. Background Technology

[0002] Polishing slurry (also known as polishing fluid or grinding fluid) is an indispensable material in ultra-precision polishing systems for optical components. Its parameters directly affect the surface quality and processing efficiency of optical components. For example, the concentration parameter of polishing slurry is closely related to the surface material removal efficiency and surface scratches of optical components. Therefore, the concentration detection of polishing slurry is crucial.

[0003] In related technologies, the polishing slurry is typically removed from the container intermittently and poured into the cavity of the corresponding testing device. A Baumé meter is then inserted into the cavity, and the real-time data displayed on the meter is read, which represents the concentration of the polishing slurry. This testing method has two drawbacks: firstly, manual testing is inefficient; secondly, the polishing slurry undergoes concentration decay during long-term storage, and intermittent testing makes it difficult to detect this concentration decay in a timely manner, leading to abnormalities in the quality of optical components. Utility Model Content

[0004] This application aims to at least solve one of the technical problems existing in the prior art. To this end, this application provides a polishing slurry concentration detection device and a polishing slurry supply system, which can automatically realize real-time monitoring of polishing slurry concentration, improve the efficiency of polishing slurry concentration detection, and provide real-time feedback on whether the polishing slurry concentration has decreased based on the detected polishing slurry concentration.

[0005] In a first aspect, this application provides a grinding fluid concentration detection device, comprising:

[0006] Liquid supply container, used to store the grinding slurry to be tested;

[0007] The transfer cylinder is used to hold the grinding fluid to be tested;

[0008] The tube assembly includes an inlet pipe and an outlet pipe. The supply container, the inlet pipe, the transfer cylinder, and the outlet pipe are connected in sequence to form a circulation path for the grinding fluid to flow.

[0009] The detection component includes a detector disposed inside the transfer cylinder for detecting the concentration of the grinding fluid inside the transfer cylinder.

[0010] The grinding fluid concentration detection device according to the first aspect of this application has at least the following beneficial effects:

[0011] The polishing slurry concentration detection device of this application, through a supply container, a transfer cylinder, an inlet pipe, an outlet pipe, and a detector, circulates the polishing slurry to be tested along the circulation path formed by the supply container, transfer cylinder, inlet pipe, and outlet pipe. The detector detects the concentration of the polishing slurry in real time during the flow process, which can automatically realize real-time monitoring of the polishing slurry concentration, improve the efficiency of polishing slurry concentration detection, and provide real-time feedback on whether the concentration of the polishing slurry has decayed based on the concentration value detected by the detector. This allows users to adjust the concentration range of the polishing slurry in a timely manner, realizing real-time dynamic adjustment of the polishing slurry concentration, so that the concentration of the polishing slurry is always maintained within the required range, meeting the processing requirements of optical components and improving the quality of optical components.

[0012] In some embodiments, the detector includes a detection section and a reading section, the detection section being immersed below the liquid surface of the transfer cylinder, and the reading section being located outside the transfer cylinder.

[0013] In some embodiments, the inlet pipe has a first connecting end and a second connecting end, the first connecting end being connected to the supply container and the second connecting end being connected to the transfer cylinder; the outlet pipe has a third connecting end and a fourth connecting end, the third connecting end being connected to the transfer cylinder and the fourth connecting end being connected to the supply container; along the height direction of the transfer cylinder, the third connecting end is higher than the second connecting end, and the detection unit is higher than the second connecting end and lower than the third connecting end.

[0014] In some embodiments, the detection assembly further includes a protective tube fixed inside the transfer cylinder and communicating with the transfer cylinder, and the detector is vertically inserted inside the protective tube.

[0015] In some embodiments, the protective tube is configured as a through tube, with a gap between the bottom of the protective tube and the bottom of the transfer cylinder; and / or, the diameter of the protective tube is smaller than the diameter of the transfer cylinder.

[0016] In some embodiments, the top of the transfer cylinder has an opening through which the detector extends into the transfer cylinder; the grinding fluid concentration detection device further includes a receiving cylinder, which is sleeved outside the transfer cylinder and is used to receive the grinding fluid overflowing from the transfer cylinder.

[0017] In some embodiments, the tube assembly further includes a return pipe, through which the receiving cylinder is connected to the supply container.

[0018] In some embodiments, the inlet pipe includes a first pipe section, a second pipe, a first elbow, and a first quick connector. The first pipe section extends vertically into the transfer cylinder and communicates with the transfer cylinder. The first pipe section and the second pipe are connected through the first elbow, and the second pipe is connected to the supply container through the first quick connector.

[0019] In some embodiments, the first pipe section is fixed to the inner wall of the transfer cylinder; and / or, the diameter of the first pipe section is smaller than the diameter of the transfer cylinder.

[0020] Secondly, this application provides a polishing slurry supply system, which includes the polishing slurry concentration detection device described above.

[0021] The grinding fluid supply system according to the second aspect of this application has at least the following beneficial effects:

[0022] The polishing slurry supply system of this application, being equipped with the polishing slurry concentration detection device of the above embodiment, also has the same technical effect brought by the polishing slurry concentration detection device, that is, it can automatically realize real-time monitoring of polishing slurry concentration, improve the efficiency of polishing slurry concentration detection, and can provide real-time feedback on whether there is concentration decay of polishing slurry based on the concentration value detected by the detector, so as to facilitate timely adjustment of polishing slurry concentration range, realize real-time dynamic adjustment of polishing slurry concentration, keep polishing slurry concentration within the required range, meet the processing requirements of optical components, and improve the quality of optical components.

[0023] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0024] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0025] Figure 1 This is a schematic diagram of the structure of the grinding fluid concentration detection device according to an embodiment of this application.

[0026] Figure 2 This is another structural schematic diagram of the grinding fluid concentration detection device according to an embodiment of this application.

[0027] Figure 3This is an exploded view of the grinding fluid concentration detection device according to an embodiment of this application.

[0028] Figure 4 This is a front view of the structure of the grinding fluid concentration detection device according to an embodiment of this application.

[0029] Figure 5 This is a top view of the structure of the grinding fluid concentration detection device according to an embodiment of this application.

[0030] Explanation of reference numerals in the attached drawings: Base frame 100; Transfer cylinder 200; Opening 210; Inlet pipe 300; First connecting end 310; Second connecting end 320; First pipe section 301; Second pipe 302; First elbow 303; First quick connector 304; Drain pipe 400; Third connecting end 410; Fourth connecting end 420; Second quick connector 401; Detection assembly 500; Detector 510; Detection unit 511; Reading unit 512; Protective pipe 520; Receiving cylinder 600; Return pipe 700; Height direction Z. Detailed Implementation

[0031] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0032] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0033] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0034] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0035] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0036] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0037] Polishing slurry (also known as polishing fluid or grinding fluid) is an indispensable material in ultra-precision polishing systems for optical components. Its parameters directly affect the surface quality and processing efficiency of optical components. For example, the concentration parameter of polishing slurry is closely related to the surface material removal efficiency and surface scratches of optical components. Therefore, the concentration detection of polishing slurry is crucial.

[0038] In related technologies, the polishing slurry is typically manually and intermittently removed from the container and placed into the cavity of the corresponding testing device. A Baumé meter is then inserted into the cavity, and the real-time data displayed on the meter is read, which represents the concentration of the polishing slurry. This testing method has two drawbacks: firstly, manual testing is inefficient; secondly, the polishing slurry undergoes concentration decay during long-term storage, and intermittent testing makes it difficult to detect this concentration decay in a timely manner, leading to abnormalities in the quality of optical components.

[0039] Based on this, one or more embodiments of this application provide a polishing slurry concentration detection device. Through a supply container, a transfer cylinder, an inlet pipe, a drain pipe, and a detector, the polishing slurry to be tested circulates along a circulation path formed by the supply container, transfer cylinder, inlet pipe, and drain pipe. The detector detects the concentration of the polishing slurry in real time during the flow process. This automatically achieves real-time monitoring of the polishing slurry concentration, improving the efficiency of concentration detection. Furthermore, it can provide real-time feedback on whether there is concentration decay in the polishing slurry based on the concentration value detected by the detector, allowing users to adjust the concentration range of the polishing slurry in a timely manner. This enables real-time dynamic adjustment of the polishing slurry concentration, ensuring that the concentration remains within the required range to meet the processing requirements of optical components and improve the quality of the optical components.

[0040] See Figure 1 , Figure 2 , Figure 3 and Figure 5 This application provides a grinding fluid concentration detection device, which includes a liquid supply container, a transfer cylinder 200, a tube assembly, and a detection assembly 500.

[0041] A supply container (not shown) is used to store the grinding slurry to be tested. A transfer cylinder 200 is used to hold the grinding slurry to be tested. The tube assembly includes an inlet pipe 300 and a drain pipe 400. The supply container, inlet pipe 300, transfer cylinder 200, and drain pipe 400 are sequentially connected to form a circulating flow path for the grinding slurry. The detection assembly 500 includes a detector 510, which is located inside the transfer cylinder 200 and used to detect the concentration of the grinding slurry within the transfer cylinder 200.

[0042] It should be noted that, in this application, the liquid supply container refers to a structure used to store the grinding slurry to be tested. The liquid supply solution can be a liquid supply tank, a liquid supply bucket, etc., and the liquid supply container can also be a grinding bucket configured in the grinding system. The grinding slurry to be tested has a certain concentration. The concentration of the grinding slurry refers to the percentage of effective functional components in a unit volume of grinding slurry. Effective functional components include abrasive particles, auxiliary components, etc., and auxiliary components can be, but are not limited to, dispersants, lubricants, oxidants, etc.

[0043] In this application, the transfer cylinder 200 refers to a cylindrical structure used to temporarily hold the grinding fluid. The transfer cylinder 200 can be a sealed cylinder or an open cylinder with an opening at one end. Its shape can be, but is not limited to, a cylinder, a cuboid, an ellipse, etc., and there is no specific limitation.

[0044] In this application, for the pipe assembly, the inlet pipe 300 refers to a tubular body used to connect the liquid supply container and the transfer cylinder 200, and similarly, the outlet pipe 400 refers to a tubular body used to connect the liquid supply container and the transfer cylinder 200.

[0045] The supply container, inlet pipe 300, transfer cylinder 200, and outlet pipe 400 are sequentially connected to form a circulating flow path for the grinding slurry. This can be understood as follows: the grinding slurry to be tested in the supply container flows sequentially through the inlet pipe 300, transfer cylinder 200, and outlet pipe 400, and finally flows back to the supply container. In other words, the grinding slurry to be tested in the supply container can circulate along the aforementioned circulating flow path. In some embodiments, a pump body can be provided on the supply container, and the pump body drives the grinding slurry to be tested to flow rapidly along the aforementioned circulating flow path.

[0046] In this application, for the detection component 500, the detector 510 refers to a structure capable of detecting the concentration of the polishing slurry. The detector 510 can be a Baumé meter, which determines the concentration of the polishing slurry by measuring its density or specific gravity and can directly display the concentration value for the user to read directly. Of course, in other embodiments, the detector 510 can also be a viscometer. The higher the concentration of the polishing slurry, the more abrasive particles (effective functional components) there are in the polishing slurry, the greater the internal friction of the polishing slurry, and the higher the viscosity. The concentration of the polishing slurry can be inferred by detecting the viscosity value of the polishing slurry with a viscometer.

[0047] In this embodiment, the inlet pipe 300, the transfer cylinder 200, and the outlet pipe 400 can all be made of PVC pipe, which can reduce the overall structural cost of the grinding fluid concentration detection device.

[0048] The grinding slurry concentration detection device of this application operates as follows: a supply container, an inlet pipe 300, a transfer cylinder 200, and a drain pipe 400 are connected end to end to form a circulation path. The grinding slurry to be tested in the supply container circulates along this circulation path. The detector 510 is located inside the transfer cylinder 200 and detects the concentration of the grinding slurry flowing through the transfer cylinder 200 in real time. The user can directly read the reading of the detector 510. Alternatively, the detector 510 can be communicatively connected to the controller of the grinding slurry concentration detection device. The controller acquires the detection signal from the detector 510 and converts the detection signal into a directly readable concentration value. In this way, real-time monitoring of the grinding slurry concentration is achieved.

[0049] Furthermore, when the detector 510 detects that the concentration of the polishing slurry in the transfer cylinder 200 is too low, it indicates that there is a concentration decay of the polishing slurry in the supply container. The user can add a high concentration of polishing slurry or add effective functional components (such as abrasive particles) to the supply container to increase the concentration of polishing slurry in the supply container. In this way, the concentration of polishing slurry can be dynamically adjusted in real time based on the real-time monitoring of the polishing slurry concentration, so that the concentration of polishing slurry is always maintained within the required range to meet the processing requirements of optical components and improve the quality of optical components.

[0050] It is easy to understand that the polishing slurry concentration detection device of this application embodiment, through the supply container, transfer cylinder 200, inlet pipe 300, outlet pipe 400 and detector 510, allows the polishing slurry to be tested to circulate along the circulation path formed by the supply container, transfer cylinder 200, inlet pipe 300 and outlet pipe 400. The detector 510 detects the concentration of the polishing slurry in real time during the flow process, which can automatically realize real-time monitoring of the polishing slurry concentration, improve the efficiency of polishing slurry concentration detection, and can provide real-time feedback on whether the polishing slurry concentration has decreased based on the concentration value detected by the detector 510. This allows users to adjust the polishing slurry concentration range in a timely manner, realize real-time dynamic adjustment of the polishing slurry concentration, keep the polishing slurry concentration within the required range, meet the processing requirements of optical components, and improve the quality of optical components.

[0051] In some embodiments of this application, see Figure 2 , Figure 3 and Figure 4 The detector 510 includes a detection unit 511 and a reading unit 512. The detection unit 511 is immersed below the liquid surface of the transfer cylinder 200, and the reading unit 512 is located outside the transfer cylinder 200.

[0052] Specifically, the detector 510 is a Baumé meter, and the detection part 511 and the reading part 512 of the detector 510 are located at the upper and lower parts of the detector 510, respectively.

[0053] The detection unit 511 of the detector 510 is immersed in the liquid surface of the transfer cylinder 200, allowing the detection unit 511 to directly contact the polishing slurry inside the transfer cylinder 200. The concentration of the polishing slurry is indirectly calculated by directly detecting the change in the dielectric constant within the slurry. The reading unit 512 can be understood as the display module of the detector 510. The reading unit 512 directly displays the detection signal of the detector 510 as a digital signal on its own screen. Located outside the transfer cylinder 200, the reading unit 512 allows the user to clearly and intuitively read the concentration value of the polishing slurry detected by the detector 510.

[0054] Of course, in other embodiments, the grinding fluid concentration detection device also includes a controller. The controller is communicatively connected to the detector 510, acquires the detection signal of the detector 510 in real time, processes the detection signal, and finally displays the detection signal directly on the display screen of the controller in the form of numbers, pointers, or graphics, so that the user can directly read the real-time concentration value of the grinding fluid.

[0055] The controller may also include alarms such as buzzers. When the detector 510 detects that the concentration of the polishing slurry is too low or too high, that is, the concentration of the polishing slurry is not within the required concentration range, the controller controls the alarm to sound an alarm in the form of a buzzer and colored light display, so that the user can adjust the concentration of the polishing slurry in the supply container in time, so that the concentration of the polishing slurry is always maintained within the required range, to meet the processing requirements of optical components and improve the quality of optical components.

[0056] In some embodiments of this application, see Figure 2 and Figure 3 The inlet pipe 300 has a first connecting end 310 and a second connecting end 320. The first connecting end 310 is connected to the liquid supply container, and the second connecting end 320 is connected to the transfer cylinder 200. The outlet pipe 400 has a third connecting end 410 and a fourth connecting end 420. The third connecting end 410 is connected to the transfer cylinder 200, and the fourth connecting end 420 is connected to the liquid supply container. Along the height direction Z of the transfer cylinder 200, the third connecting end 410 is higher than the second connecting end 320, and the detection part 511 of the detector 510 is higher than the second connecting end 320 and lower than the third connecting end 410.

[0057] It is understandable that the second connecting end 320 of the liquid inlet pipe 300 and the third connecting end 410 of the liquid outlet pipe 400 are respectively connected to different parts of the transfer cylinder 200.

[0058] Along the height direction Z of the transfer cylinder 200, the second connecting end 320 is spaced from the bottom of the transfer cylinder 200, and the third connecting end 410 is spaced from the bottom of the transfer cylinder 200. The distance between the second connecting end 320 and the bottom of the transfer cylinder 200 is smaller than the distance between the third connecting end 410 and the bottom of the transfer cylinder 200.

[0059] Similarly, the detection section 511 of the detector 510 has a gap with the bottom of the transfer cylinder 200, which is greater than the gap between the second connecting end 320 and the bottom of the transfer cylinder 200, and less than the gap between the third connecting end 410 and the bottom of the transfer cylinder 200.

[0060] In the above structure, along the height direction Z of the transfer cylinder 200, the detection part 511 of the detector 510 is located between the second connecting end 320 of the inlet pipe 300 and the third connecting end 410 of the outlet pipe 400. When the grinding fluid to be tested in the supply container flows from the inlet pipe 300 into the transfer cylinder 200 and then flows back from the outlet pipe 400 into the supply container, the grinding fluid will always contact the detection part 511 of the detector 510 or immerse the detection part 511 of the detector 510. This allows the detection part 511 of the detector 510 to detect the concentration of the grinding fluid in real time and dynamically along the circulation path, realizing real-time monitoring of the grinding fluid concentration and facilitating dynamic adjustment of the grinding fluid concentration by the user.

[0061] In some embodiments of this application, see Figure 2 , Figure 3 and Figure 4 The detection component 500 also includes a protective tube 520, which is fixed inside the transfer cylinder 200 and connected to the transfer cylinder 200. The detector 510 is vertically inserted inside the protective tube 520.

[0062] Specifically, the protective tube 520 can be vertically fixed to the inner wall of the transfer cylinder 200 by welding, glue, or other means, so that the installation position of the protective tube 520 inside the transfer cylinder 200 is fixed.

[0063] The protective tube 520 is constructed as a through tube, with a gap between the bottom of the protective tube 520 and the bottom of the transfer cylinder 200. The diameter of the protective tube 520 is smaller than the diameter of the transfer cylinder 200, and the diameter of the protective tube 520 is larger than the outer diameter of the detector 510, so that the grinding fluid can flow smoothly into the protective tube 520 and immerse the detection part 511 of the detector 510.

[0064] Thus, the detector 510 can be inserted into the protective tube 520 by its own weight. When the rotating drum 200 contains continuously circulating grinding fluid, the grinding fluid will flow into the protective tube 520, submerging the detection part 511 of the detector 510, so that the detector 510 can monitor the concentration of the grinding fluid in real time. At the same time, the detector 510 can be kept vertically suspended in the protective tube 520 by the buoyancy of the grinding fluid.

[0065] The protective tube 520 provides support for the outer wall of the detector 510. When the detector 510 tilts to the side of the central rotating cylinder 200 due to the impact of the grinding fluid flow, the protective tube 520 can effectively support the detector 510, preventing the detector 510 from tilting horizontally into the central rotating cylinder 200 and causing inaccurate grinding fluid concentration.

[0066] In some embodiments of this application, see Figure 2 and Figure 3 The top of the transfer cylinder 200 has an opening 210, through which the detector 510 extends into the transfer cylinder 200; the grinding fluid concentration detection device also includes a receiving cylinder 600, which is sleeved outside the transfer cylinder 200 and is used to receive the grinding fluid overflowing from the transfer cylinder 200.

[0067] Specifically, the grinding fluid concentration detection device also includes a base frame 100, a transfer cylinder 200 fixed to the base frame 100, an opening 210 at the top of the transfer cylinder 200, and a seal at the bottom of the transfer cylinder 200.

[0068] The opening 210 on the transfer cylinder 200 is used to allow the detector 510 to be inserted into the transfer cylinder 200, and to allow the detection part 511 of the detector 510 to be immersed below the liquid surface of the transfer cylinder 200. At the same time, the reading part 512 of the detector 510 is above the opening 210 and will not be submerged by the grinding liquid, so that the user can read the value directly.

[0069] The liquid receiving cylinder 600 is also fixed to the base frame 100. The liquid receiving cylinder 600 is sleeved outside the transfer cylinder 200, and the central axis of the liquid receiving cylinder 600 coincides with the central axis of the transfer cylinder 200. Both the liquid receiving cylinder 600 and the transfer cylinder 200 are cylindrical, and the diameter of the liquid receiving cylinder 600 is larger than the diameter of the transfer cylinder 200, so that the inner wall of the liquid receiving cylinder 600 and the outer wall of the transfer cylinder 200 form a liquid receiving cavity.

[0070] When the grinding fluid in the supply container flows continuously into the transfer cylinder 200 through the inlet pipe 300, the liquid level in the transfer cylinder 200 rises continuously, and there is a possibility that the grinding fluid will overflow from the opening 210 of the transfer cylinder 200.

[0071] Based on this, by setting up the liquid receiving cylinder 600, the liquid receiving cylinder 600 can stably receive the grinding liquid overflowing from the opening 210 of the transfer cylinder 200, avoiding the grinding liquid from overflowing and being wasted, and improving the reliability and safety of the concentration detection of the grinding liquid.

[0072] Further, see Figure 3 and Figure 4 The pipe assembly also includes a return pipe 700, and the receiving cylinder 600 is connected to the supply container through the return pipe 700.

[0073] Specifically, a reflux port is provided at the bottom of the liquid receiving cylinder 600, one end of the reflux pipe 700 is connected to the reflux port, and the other end is connected to the liquid supply container.

[0074] With this configuration, the grinding fluid in the receiving cylinder 600 can be returned to the supply container through the return pipe 700, making full use of the grinding fluid and avoiding waste.

[0075] In some embodiments of this application, see Figure 2 , Figure 3 and Figure 4 The inlet pipe 300 includes a first pipe section 301, a second pipe 302, a first elbow 303, and a first quick connector 304. The first pipe section 301 extends vertically into the transfer cylinder 200 and is connected to the transfer cylinder 200. The first pipe section 301 and the second pipe 302 are connected through the first elbow 303. The second pipe 302 is connected to the liquid supply container through the first quick connector 304.

[0076] Specifically, the first pipe section 301 is vertically fixed to the inner wall of the transfer cylinder 200 by welding, glue, or other means. The diameter of the first pipe section 301 is smaller than the diameter of the transfer cylinder 200. The lower end of the first pipe section 301 is connected to the cavity of the transfer cylinder 200, and the upper end of the first pipe section 301 is connected to the second pipe 302 through the first elbow 303. There can be multiple second pipes 302 and first elbows 303. Two adjacent second pipes 302 are connected through corresponding first elbows 303. The second pipe 302 farthest from the first pipe section 301 is connected to the liquid supply container through the first quick connector 304.

[0077] The above structure allows the first pipe section 301 to serve as a fixed pipe within the transfer cylinder 200, while the remaining components—the second pipe 302, the first elbow 303, and the first quick connector 304—are detachable and replaceable. By changing the specifications of the second pipe 302, the first elbow 303, and the first quick connector 304, it can be adapted to connect to different types and sizes of liquid supply containers. This improves the overall compatibility and consistency of the grinding fluid concentration detection device.

[0078] In addition, second quick connectors 401 can be installed at opposite ends of the drain pipe 400, and the opposite ends of the drain pipe 400 are respectively connected to the transfer cylinder 200 and the supply container through the corresponding second quick connectors 401. By changing the specifications of the second quick connectors 401, different types and specifications of supply containers can be adapted to connect, further improving the overall compatibility and consistency of the grinding fluid concentration detection device.

[0079] In addition, this application also provides a polishing slurry supply system, which includes the polishing slurry concentration detection device of any of the above embodiments.

[0080] The polishing slurry supply system of this application embodiment, being equipped with the polishing slurry concentration detection device of the above embodiment, also has the same technical effect brought by the polishing slurry concentration detection device, that is, it can automatically realize real-time monitoring of polishing slurry concentration, improve the efficiency of polishing slurry concentration detection, and can provide real-time feedback on whether there is concentration decay of polishing slurry based on the concentration value detected by the detector 510, so as to facilitate timely adjustment of polishing slurry concentration range, realize real-time dynamic adjustment of polishing slurry concentration, keep polishing slurry concentration within the required range, meet the processing requirements of optical components, and improve the quality of optical components.

[0081] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0082] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A polishing liquid concentration detecting device characterized by comprising: include: Liquid supply container, used to store the grinding slurry to be tested; The transfer cylinder is used to hold the grinding fluid to be tested; The tube assembly includes an inlet pipe and an outlet pipe. The supply container, the inlet pipe, the transfer cylinder, and the outlet pipe are connected in sequence to form a circulation path for the grinding fluid to flow. The detection component includes a detector disposed inside the transfer cylinder for detecting the concentration of the grinding fluid inside the transfer cylinder.

2. The grinding fluid concentration detection device according to claim 1, characterized in that, The detector includes a detection section and a reading section. The detection section is immersed below the liquid surface of the transfer cylinder, and the reading section is located outside the transfer cylinder.

3. The grinding fluid concentration detection device according to claim 2, characterized in that, The inlet pipe has a first connecting end and a second connecting end, the first connecting end being connected to the supply container and the second connecting end being connected to the transfer cylinder; the outlet pipe has a third connecting end and a fourth connecting end, the third connecting end being connected to the transfer cylinder and the fourth connecting end being connected to the supply container. Along the height direction of the transfer cylinder, the third connecting end is higher than the second connecting end, and the detection part is higher than the second connecting end and lower than the third connecting end.

4. The grinding fluid concentration detection device according to claim 1, characterized in that, The detection assembly also includes a protective tube, which is fixed inside the transfer cylinder and communicates with the transfer cylinder, and the detector is vertically inserted inside the protective tube.

5. The grinding fluid concentration detection device according to claim 4, characterized in that, The protective tube is constructed as a through tube, with a gap between the bottom of the protective tube and the bottom of the transfer cylinder; and / or, the diameter of the protective tube is smaller than the diameter of the transfer cylinder.

6. The grinding fluid concentration detection device according to any one of claims 1 to 5, characterized in that, The top of the transfer tube has an opening, and the detector extends into the transfer tube through the opening; The grinding fluid concentration detection device also includes a receiving cylinder, which is sleeved outside the transfer cylinder and is used to receive the grinding fluid overflowing from the transfer cylinder.

7. The grinding fluid concentration detection device according to claim 6, characterized in that, The tube assembly also includes a return pipe, and the receiving cylinder is connected to the supply container through the return pipe.

8. The grinding fluid concentration detection device according to any one of claims 1 to 5, characterized in that, The inlet pipe includes a first pipe section, a second pipe, a first elbow, and a first quick connector. The first pipe section extends vertically into the transfer cylinder and is connected to the transfer cylinder. The first pipe section and the second pipe are connected through the first elbow. The second pipe is connected to the supply container through the first quick connector.

9. The polishing liquid concentration detecting apparatus according to claim 8, wherein The first pipe section is fixed to the inner wall of the transfer cylinder; and / or, the diameter of the first pipe section is smaller than the diameter of the transfer cylinder.

10. A polishing liquid supply system characterized by comprising: Includes the grinding fluid concentration detection device as described in any one of claims 1 to 9.

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