A reinforced adaptive leveling mechanism

Abstract

This utility model relates to the field of leveling technology for precision double-sided polishing equipment, specifically a reinforced adaptive leveling mechanism, including a crossbeam and a main cylinder. A linear bearing is installed on the mounting surface of the crossbeam, and a linear guide rod passes through the linear bearing. A pressure sensor and a mounting plate are connected to the bottom of the linear guide rod. A cross joint and a base are provided at the lower part of the mounting plate. This reinforced adaptive leveling mechanism uses the main cylinder to drive the crossbeam to complete the lifting and lowering action and bear axial force. During this process, the pressure sensor and the precision electronically controlled proportional valve in the main cylinder perform closed-loop pressure control, thereby improving the pressure accuracy and stability of the polishing process on the polished parts.

Description

Technical Field

[0001] This utility model relates to the field of leveling technology for precision double-sided polishing equipment, specifically to a reinforced adaptive leveling mechanism. Background Technology

[0002] In high-end precision manufacturing fields such as semiconductors and photovoltaic cells, chemical mechanical planarization is one of the key processes to achieve global nanoscale planarization of wafers. As the linewidth of integrated circuits continues to shrink, silicon substrates must have global planarity at the nanoscale or even sub-nanometer level. However, any slight non-parallelism will lead to uneven polishing pressure, causing defects such as uneven thickness in the middle and edges of the silicon wafer, which directly affects the depth of focus and circuit performance of subsequent photolithography. Therefore, it is required that the pressure application process of the polishing equipment be kept uniform and stable, and the working surface of the polishing equipment needs to be able to adapt to the product and conform to the product to achieve a uniform polishing effect.

[0003] Current precision double-sided polishing equipment mainly consists of several leveling and pressurization methods, including passive floating type, tilt angle adjustment using displacement sensor and motor drive, and leveling method using strain gauge pressure sensor and air pressure suspension.

[0004] The passive floating leveling pressurization method uses spherical bearings, flexible hinges and other mechanisms to allow the upper plate to swing freely within a certain range to fit the lower plate. This leveling method has limited leveling capability and cannot perform active correction. The pressure uniformity depends on the sensitivity and accuracy of the mechanism itself and cannot cope with complex working conditions.

[0005] The pressurization method that uses displacement sensors and motor drives to adjust the tilt angle employs displacement sensors to measure the tilt amount and uses manual or semi-automatic adjustment of the tilt angle. This leveling method has a slow response speed, low control accuracy, poor system stability, and difficulty in maintaining stable pressure uniformity.

[0006] Using strain gauge pressure sensors and air-pressure suspension leveling allows for closed-loop feedback adjustment based on the force signal directly fed back from the pressure sensors. At the same time, adding a ball joint structure at the end allows the mechanism to fit the product more closely. Although this leveling method provides good leveling effect and high pressure control, it relies on the ball joint for adaptive leveling at the end. As the load increases, its shock resistance is weak and it is prone to greater radial unbalanced force, causing the upper plate to wobble.

[0007] To address the aforementioned issues, we propose an enhanced adaptive leveling mechanism. Utility Model Content

[0008] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0009] This utility model provides a reinforced adaptive leveling mechanism, including a crossbeam and a main cylinder. A linear bearing is provided on the mounting surface of the crossbeam, and a linear guide rod is inserted inside the linear bearing. A pressure sensor and a mounting plate are connected to the bottom of the linear guide rod.

[0010] The lower part of the mounting plate is provided with a cross joint and a chassis;

[0011] The cruciate joint comprises, from the inside out, an inner shell, a middle shell, and an outer shell.

[0012] The side walls of the joint inner shell and the joint outer shell are respectively provided with insertion holes, and an inner pin and an outer pin are respectively provided in the insertion holes of the joint inner shell and the joint outer shell;

[0013] The inner pin shaft is fitted with an inner shell needle roller bearing at its end, and the outer pin shaft is fitted with a middle shell needle roller bearing at its end.

[0014] The inner and outer pins are installed perpendicular to each other.

[0015] As a preferred embodiment of this utility model, the joint outer shell is inserted through the middle of the chassis, the joint outer shell is fitted over the outer side of the joint inner shell, and the joint inner shell and the joint outer shell are connected by an outer pin.

[0016] In a preferred embodiment of this invention, the middle shell of the joint is fitted outside the inner shell of the joint, and the middle shell of the joint and the inner shell of the joint are connected by an inner pin.

[0017] As a preferred embodiment of this utility model, a stabilizing seat is connected to the bottom of the joint inner shell, a central bearing is inserted into the middle of the joint inner shell, and a central shaft passes through the middle of the central bearing.

[0018] As a preferred embodiment of this utility model, the central axis extends upward through the mounting plate, and the central axis and the mounting plate are coaxially fixedly connected by bolts.

[0019] As a preferred embodiment of this utility model, linear guide rod mounting seats are provided at both ends of the upper part of the mounting plate, and the linear guide rod mounting seats are respectively connected to the bottom of the linear guide rod.

[0020] In a preferred embodiment of this invention, the linear bearings are located on both sides of the main cylinder, and the main cylinder is fixedly connected to the mounting surface of the crossbeam by bolts. The output end of the main cylinder is connected to a pressure sensor.

[0021] The beneficial effects of this utility model are:

[0022] 1. This type of reinforced adaptive leveling mechanism uses a main cylinder to drive the crossbeam to complete the lifting and lowering action and bear the axial force. During this process, the pressure sensor and the precision electronic proportional valve in the main cylinder are used for closed-loop pressure control, thereby improving the pressure accuracy of the polished parts and the stability of the polishing process.

[0023] 2. The two linear guide rods bear the radial unbalanced force generated during processing, which not only ensures the rotational stability of the mechanism, but also avoids the periodic oscillation of the cylinder shaft caused by the main cylinder under heavy load.

[0024] 3. Adaptive leveling is achieved using a cross joint. During the polishing process, the inner shell and the middle shell, as well as the middle shell and the outer shell, rotate along the two directions of the cross joint through the inner and outer pins, respectively. This interaction between the inner shell and the middle shell, and between the middle shell and the outer shell, enables the overall joint to rotate adaptively, allowing the polishing structure to better fit the product and ensuring the uniformity of the external pressure applied to the product. Attached Figure Description

[0025] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0026] Figure 1 This is a schematic diagram of the overall structural composition of this utility model;

[0027] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0028] Figure 3 This is an enlarged structural diagram of point A of this utility model;

[0029] Figure 4 This is a schematic diagram of the overall structure of the cross joint of this utility model;

[0030] Figure 5 This is a schematic diagram of the cross-sectional structure of the cross joint of this utility model;

[0031] In the diagram: 1. Crossbeam; 2. Main cylinder; 3. Linear bearing; 4. Linear guide rod; 5. Pressure sensor; 6. Linear guide rod mounting base; 7. Cross joint; 8. Joint inner shell; 9. Inner shell needle roller bearing; 10. Joint middle shell; 11. Inner pin; 12. Outer pin; 13. Joint outer shell; 14. Middle shell needle roller bearing; 15. Mounting plate; 16. Chassis; 17. Center bearing; 18. Center shaft; 19. Insertion hole; 20. Stabilizer. Detailed Implementation

[0032] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0033] Example: Figure 1-5 As shown, an enhanced adaptive leveling mechanism includes a crossbeam 1 and a main cylinder 2. A linear bearing 3 is provided on the mounting surface of the crossbeam 1, and a linear guide rod 4 passes through the linear bearing 3. A pressure sensor 5 and a mounting plate 15 are connected to the bottom of the linear guide rod 4.

[0034] The lower part of the mounting plate 15 is provided with a cross joint 7 and a base 16;

[0035] The cruciate joint 7 comprises, from the inside out, an inner shell 8, a middle shell 10, and an outer shell 13.

[0036] The side walls of the joint middle shell 10 and the joint outer shell 13 are respectively provided with insertion holes 19, and the insertion holes 19 of the joint middle shell 10 and the joint outer shell 13 are respectively provided with an inner pin 11 and an outer pin 12.

[0037] The end of the inner pin shaft 11 is fitted with an inner shell needle roller bearing 9, and the end of the outer pin shaft 12 is fitted with a middle shell needle roller bearing 14.

[0038] The inner pin 11 and the outer pin 12 are installed perpendicular to each other.

[0039] If the inner pin 11 is set along the X-axis, then the outer pin 12 is set along the Y-axis.

[0040] The joint outer shell 13 passes through the middle of the chassis 16 and is fitted over the outside of the joint middle shell 10. The joint middle shell 10 and the joint outer shell 13 are connected by an outer pin 12.

[0041] The middle shell 10 of the joint is sleeved outside the inner shell 8 of the joint, and the middle shell 10 of the joint and the inner shell 8 are connected by an inner pin 11.

[0042] The bottom of the joint inner shell 8 is connected to a stabilizing seat 20, and a central bearing 17 is inserted into the middle of the joint inner shell 8. A central shaft 18 passes through the middle of the central bearing 17.

[0043] The central shaft 18 extends upward through the mounting plate 15, and the central shaft 18 and the mounting plate 15 are coaxially fixedly connected by bolts.

[0044] Linear guide rod mounting seats 6 are provided at both ends of the upper part of the mounting plate 15, and the linear guide rod mounting seats 6 are respectively connected to the bottom of the linear guide rod 4.

[0045] Linear bearings 3 are located on both sides of the main cylinder 2, and the main cylinder 2 is fixedly connected to the mounting surface of the crossbeam 1 by bolts. The output end of the main cylinder 2 is connected to the pressure sensor 5.

[0046] Working Principle: This reinforced adaptive leveling mechanism, during use, uses the main cylinder 2 to drive the crossbeam 1 to complete the lifting action and bear the axial force. During this process, the pressure sensor 5 and the precision electronic proportional valve inside the main cylinder 2 perform closed-loop pressure control, thereby improving the pressure accuracy and stability of the polished parts during the polishing process. The two linear guide rods 4 bear the radial unbalanced force generated during processing, which not only ensures the rotational stability of the mechanism, but also avoids the periodic oscillation problem of the cylinder shaft caused by the main cylinder 2 under heavy load. Adaptive leveling is achieved by using the cross joint 7. During the polishing process, the inner shell 8 and the middle shell 10 of the joint rotate along the inner pin shaft 11 from the X-axis direction, and the middle shell 10 and the outer shell 13 of the joint rotate along the outer pin shaft 12 from the Y-axis direction. Thus, through the interaction between the inner shell 8 and the middle shell 10, and between the middle shell 10 and the outer shell 13, the cross joint 7 as a whole achieves adaptive rotation, so that the polishing structure can better fit the product and ensure the uniformity of the external pressure acting on the product.

[0047] Finally, it should be noted that the above are merely preferred embodiments of this utility model and are not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A reinforced adaptive leveling mechanism, characterized in that: It includes a crossbeam (1) and a main cylinder (2). A linear bearing (3) is provided on the mounting surface of the crossbeam (1). A linear guide rod (4) is inserted inside the linear bearing (3). A pressure sensor (5) and a mounting plate (15) are connected to the bottom of the linear guide rod (4). The lower part of the mounting plate (15) is provided with a cross joint (7) and a chassis (16). The cruciate joint (7) comprises, from the inside out, an inner shell (8), a middle shell (10), and an outer shell (13). The sidewalls of the joint middle shell (10) and the joint outer shell (13) are respectively provided with insertion holes (19), and the insertion holes (19) of the joint middle shell (10) and the joint outer shell (13) are respectively provided with an inner pin (11) and an outer pin (12). The inner pin (11) is fitted with an inner shell needle roller bearing (9) at its end, and the outer pin (12) is fitted with a middle shell needle roller bearing (14) at its end. The inner pin (11) and the outer pin (12) are installed in directions perpendicular to each other.

2. The reinforced adaptive leveling mechanism according to claim 1, characterized in that, The joint outer shell (13) passes through the middle of the chassis (16), the joint outer shell (13) is fitted on the outside of the joint middle shell (10), and the joint middle shell (10) and the joint outer shell (13) are connected by an outer pin (12).

3. The reinforced adaptive leveling mechanism according to claim 1, characterized in that, The middle shell (10) of the joint is sleeved outside the inner shell (8) of the joint, and the middle shell (10) of the joint and the inner shell (8) are connected by an inner pin (11).

4. The reinforced adaptive leveling mechanism according to claim 1, characterized in that, The bottom of the joint inner shell (8) is connected to a stabilizing seat (20), and a central bearing (17) is inserted into the middle of the joint inner shell (8). A central shaft (18) passes through the middle of the central bearing (17).

5. The reinforced adaptive leveling mechanism according to claim 4, characterized in that, The central shaft (18) extends upward through the mounting plate (15), and the central shaft (18) and the mounting plate (15) are coaxially fixedly connected by bolts.

6. The reinforced adaptive leveling mechanism according to claim 1, characterized in that, The upper two ends of the mounting plate (15) are provided with linear guide rod mounting seats (6), and the linear guide rod mounting seats (6) are respectively connected to the bottom of the linear guide rod (4).

7. The reinforced adaptive leveling mechanism according to claim 1, characterized in that, The linear bearing (3) is located on both sides of the main cylinder (2), and the main cylinder (2) is fixedly connected to the mounting surface of the crossbeam (1) by bolts. The output end of the main cylinder (2) is connected to the pressure sensor (5).

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