An automatic rinsing and blowing device for a double-sided polishing machine

Abstract

This utility model includes a worktable and an air blowing assembly. A lower polishing disc is disposed at the bottom of the worktable, and an upper polishing disc is disposed at the top of the worktable. The air blowing assembly includes a rinsing pipe and an air blowing pipe, with connecting seats at the ends of both pipes. This type of double-sided polishing machine uses an automatic rinsing and air blowing device. It achieves automated rinsing and drying by using a rotary cylinder to control the movement direction and high-pressure nozzles to achieve large-area spraying and blowing. Furthermore, it has a compact structure and low space occupancy.

Description

Technical Field

[0001] This utility model relates to the field of double-sided polishing technology, specifically to an automatic rinsing and blowing device for a double-sided polishing machine. Background Technology

[0002] In the field of precision machining, such as the processing of semiconductor wafers, optical glass, and sapphire substrates, double-sided polishing technology is a key process to achieve high flatness, low surface roughness, and damage-free surfaces on workpieces. However, after the polishing process is completed, a large amount of polishing fluid, polishing debris, and chemical reaction products remain on the workpiece surface and the polishing machine carrier. If these residues are not removed in time and thoroughly, the remaining hard abrasive particles will scratch the polished precision surface during subsequent operations or removal, leading to a decrease in product yield. Alternatively, the residues may condense on the worktable, affecting the quality of the next batch of products and causing a series of serious problems.

[0003] Currently, the commonly used cleaning methods are manual cleaning or simple semi-automatic rinsing. However, manual cleaning is inefficient, labor-intensive, and is prone to secondary scratches or contamination due to human contact during the transfer process. Furthermore, it cannot guarantee the consistency of the cleaning effect.

[0004] Simple semi-automatic rinsing usually only has rinsing without air blowing function or the air blowing function is incomplete, resulting in a large amount of water film or water accumulation on the surface of the workpiece and carrier. During the subsequent drying process, the evaporation of water will leave water stains, which will also affect the surface quality of the workpiece.

[0005] To address the aforementioned issues, we propose an automatic rinsing and blowing device for a double-sided polishing machine. Utility Model Content

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0007] This utility model provides an automatic rinsing and blowing device for a double-sided polishing machine, including a worktable and a blowing assembly. A lower polishing disc is provided at the bottom of the worktable, and an upper polishing disc is provided at the top of the worktable.

[0008] The air blowing assembly includes a flushing pipe and an air blowing pipe, and the ends of the flushing pipe and the air blowing pipe are provided with connecting seats;

[0009] The upper part of the connecting seat is provided with a mounting bracket and a rotary cylinder, and the back of the mounting bracket is connected to a support rod and a connecting plate;

[0010] An arc-shaped baffle is installed on the workbench, and the bottom of the support rod is connected to the connecting plate.

[0011] As a preferred embodiment of this utility model, a rotating spindle is provided at the bottom of the worktable, and the lower polishing disc is coaxially and fixedly connected to the rotating spindle.

[0012] As a preferred technical solution of this utility model, a suspended rotating structure is provided on the top of the worktable, the upper polishing disc is coaxially and fixedly connected to the rotating shaft of the suspended rotating structure, and the suspended rotating structure is equipped with a lifting mechanism.

[0013] As a preferred embodiment of this utility model, the baffle plate is located on both sides of the lower polishing disc, the connecting plate is fixedly connected to the top of the baffle plate by bolts, and the mounting bracket is horizontally installed on the bottom front section of the connecting plate by bolts.

[0014] In a preferred embodiment of this utility model, the rotary cylinder is connected to the mounting bracket, and a connecting rod is provided at the bottom of the mounting bracket. The connecting rod is coaxially and fixedly connected to the rotating shaft of the rotary cylinder.

[0015] As a preferred embodiment of this utility model, the connecting seat is fixed to the end of the connecting rod, and the flushing pipe and the blowing pipe are respectively provided with solenoid valves inside the connecting seat.

[0016] As a preferred embodiment of this invention, the surfaces of the flushing pipe and the blowing pipe are evenly distributed with several high-pressure nozzles.

[0017] The beneficial effects of this utility model are:

[0018] 1. This type of double-sided polishing machine uses an automatic rinsing and blowing device, which uses a rotary cylinder to control the direction of action and a high-pressure nozzle to achieve large-area spraying and blowing, thus achieving the effect of automatic rinsing and drying. It also has a compact structure and low space occupancy.

[0019] 2. With two evenly distributed rinsing and blowing devices, the product can be sprayed and dried evenly, avoiding polishing liquid residue and reducing corrosion to the product. In addition, a water-blocking shield is added to avoid the problem of polishing liquid splashing onto the table surface due to manual rinsing and blowing. The product rinsing and drying can be automatically achieved without manual intervention, reducing the harm of polishing liquid to the human body. Attached Figure Description

[0020] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0022] Figure 2 This is a schematic diagram of the workbench structure of this utility model;

[0023] Figure 3 This is a schematic diagram of the connection structure between the flushing pipe and the blowing pipe of this utility model;

[0024] In the diagram: 1. Workbench; 2. Water baffle; 3. Upper polishing disc; 4. Lower polishing disc; 5. Rinse pipe; 6. Air blowing pipe; 7. Support rod; 8. Connecting plate; 9. Mounting bracket; 10. Rotary cylinder; 11. Connecting rod; 12. Connecting seat; 13. High-pressure nozzle. Detailed Implementation

[0025] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0026] Example: Figure 1-3 As shown, an automatic rinsing and blowing device for a double-sided polishing machine includes a worktable 1 and a blowing assembly. A lower polishing disc 4 is provided at the bottom of the worktable 1, and an upper polishing disc 3 is provided at the top of the worktable 1.

[0027] The air blowing assembly includes a flushing pipe 5 and an air blowing pipe 6, and the ends of the flushing pipe 5 and the air blowing pipe 6 are provided with connecting seats 12;

[0028] The upper part of the connecting seat 12 is provided with a mounting bracket 9 and a rotary cylinder 10, and the back of the mounting bracket 9 is connected to a support rod 7 and a connecting plate 8.

[0029] An arc-shaped baffle plate 2 is installed on the workbench 1, and the bottom of the support rod 7 is connected to the connecting plate 8.

[0030] A rotating spindle is installed at the bottom of the worktable 1, and the lower polishing disc 4 is coaxially and fixedly connected to the rotating spindle.

[0031] The top of the worktable 1 is equipped with a suspended rotating structure. The upper polishing disc 3 is coaxially fixedly connected to the rotating shaft of the suspended rotating structure. The suspended rotating structure is equipped with a lifting mechanism.

[0032] The baffle plate 2 is located on both sides of the lower polishing disc 4. The connecting plate 8 is fixedly connected to the top of the baffle plate 2 by bolts. The mounting bracket 9 is horizontally installed at the bottom front section of the connecting plate 8 by bolts.

[0033] The rotary cylinder 10 is connected to the mounting bracket 9. A connecting rod 11 is provided at the bottom of the mounting bracket 9. The connecting rod 11 is coaxially and fixedly connected to the rotating shaft of the rotary cylinder 10.

[0034] The connecting seat 12 is fixed to the end of the connecting rod 11, and the flushing pipe 5 and the blowing pipe 6 are respectively equipped with solenoid valves inside the connecting seat 12.

[0035] Several high-pressure nozzles 13 are evenly distributed on the surface of the flushing pipe 5 and the blowing pipe 6.

[0036] Working Principle: This double-sided polishing machine uses an automatic rinsing and blowing device. When not in operation, the rotary cylinder 10 drives the rinsing pipe 5 and the blowing pipe 6 to the idle position. At this time, the suspended rotating structure can drive the upper polishing disc 3 to perform normal lifting and processing operations. After processing is completed, the suspended rotating structure drives the upper polishing disc 3 to a certain distance. At the same time, the rinsing pipe 5 and the blowing pipe 6 are driven by the rotary cylinder 10 to the working position. The upper polishing disc 3 and the lower polishing disc 4 rotate and work respectively. After polishing is completed, the front solenoid valve of the rinsing pipe 5 opens simultaneously to perform spray rinsing. After rinsing is completed, the front solenoid valve of the rinsing pipe 5 closes, and the front solenoid valve of the blowing pipe 6 opens to perform air blowing and drying. After air blowing is completed, the front solenoid valve of the blowing pipe 6 closes, completing the rinsing and blowing action. After all is completed, the rotary cylinder 10 drives the entire rinsing and blowing device to rotate and reset, returning to the idle position.

[0037] Finally, it should be noted that the above are merely preferred embodiments of this utility model and are not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A double-sided polishing machine with an automatic rinsing and blowing device, comprising a worktable (1) and a blowing assembly, characterized in that, The bottom of the worktable (1) is provided with a lower polishing disc (4), and the top of the worktable (1) is provided with an upper polishing disc (3). The air blowing assembly includes a flushing pipe (5) and an air blowing pipe (6), and the ends of the flushing pipe (5) and the air blowing pipe (6) are provided with connecting seats (12); The upper part of the connecting seat (12) is provided with a mounting bracket (9) and a rotary cylinder (10), and the back of the mounting bracket (9) is connected to a support rod (7) and a connecting plate (8). An arc-shaped baffle plate (2) is installed on the workbench (1), and the bottom of the support rod (7) is connected to the connecting plate (8).

2. The automatic rinsing and blowing device for a double-sided polishing machine according to claim 1, characterized in that, A rotating spindle is provided at the bottom of the worktable (1), and the lower polishing disk (4) is coaxially and fixedly connected to the rotating spindle.

3. The automatic rinsing and blowing device for a double-sided polishing machine according to claim 1, characterized in that, The top of the workbench (1) is provided with a suspended rotating structure, the upper polishing disc (3) is coaxially fixedly connected to the rotating shaft of the suspended rotating structure, and the suspended rotating structure is equipped with a lifting mechanism.

4. The automatic rinsing and blowing device for a double-sided polishing machine according to claim 1, characterized in that, The baffle plate (2) is located on both sides of the lower polishing disc (4). The connecting plate (8) is fixedly connected to the top of the baffle plate (2) by bolts. The mounting bracket (9) is horizontally installed on the bottom front section of the connecting plate (8) by bolts.

5. The automatic rinsing and blowing device for a double-sided polishing machine according to claim 1, characterized in that, The rotary cylinder (10) is connected to the mounting bracket (9), and a connecting rod (11) is provided at the bottom of the mounting bracket (9). The connecting rod (11) is coaxially and fixedly connected to the rotating shaft of the rotary cylinder (10).

6. The automatic rinsing and blowing device for a double-sided polishing machine according to claim 5, characterized in that, The connecting seat (12) is fixed to the end of the connecting rod (11), and the flushing pipe (5) and the blowing pipe (6) are respectively equipped with solenoid valves inside the connecting seat (12).

7. The automatic rinsing and blowing device for a double-sided polishing machine according to claim 1, characterized in that, The surfaces of the flushing pipe (5) and the blowing pipe (6) are evenly distributed with several high-pressure nozzles (13).

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