A machining fixture for silicon carbide PIN products

Abstract

This utility model relates to the field of silicon carbide ceramic processing and discloses a processing fixture suitable for silicon carbide PIN products. It includes a clamping base, a semi-circular fixing base fixedly connected to the lower right side of the clamping base, a square groove on the upper end of the semi-circular fixing base, and two small threaded holes on the front side of the semi-circular fixing base. Small bolts are threaded into the inner walls of the small threaded holes, and the rear ends of the small bolts extend into the square groove. An anti-slip pad is rotatably connected to the rear ends of the small bolts. A square silicon carbide part is disposed on the inner wall of the square groove, and a clamping plate is disposed on the upper end of the square silicon carbide part. In this utility model, the side bolts and anti-slip pads cooperate to clamp the side of the part, while the large bolts press the end face, achieving stable clamping from multiple directions, preventing slippage and displacement, and improving processing accuracy and consistency. The optimized structure adapts to silicon carbide parts of different sizes, reduces the precision requirements of raw materials, improves clamping efficiency, and has a wide range of applications.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide ceramic processing, and in particular to a processing fixture suitable for silicon carbide PIN pin products. Background Technology

[0002] With the continuous advancement of semiconductor manufacturing technology, the performance requirements for core components of equipment are increasing. Silicon carbide ceramics, due to their excellent high-temperature resistance, corrosion resistance, low pollution, and high hardness, are widely used in semiconductor manufacturing equipment, especially in high-precision, high-stability PIN pin components. These silicon carbide PIN pins typically feature small diameters, long lengths, and slender structures, and often include high-precision bevels, chamfers, and rounded corners, placing extremely high demands on processing accuracy and finished product consistency.

[0003] However, due to the high hardness and brittleness of silicon carbide, it is prone to chipping and breakage during processing, especially under unstable clamping conditions. Furthermore, existing fixtures are mostly general-purpose designs, which cannot meet the high-precision clamping requirements of the slender structure of silicon carbide PINs. Problems such as unstable clamping, positioning difficulties, and low clamping efficiency often occur, leading to parts easily shifting, slipping, or even being damaged during processing, affecting processing efficiency and product yield. At the same time, traditional fixtures have high requirements for the shape and dimensional consistency of the silicon carbide scrap, increasing the difficulty and cost of pre-processing. Therefore, there is an urgent need to design a specialized fixture with a reasonable structure, stable clamping, and strong adaptability to improve the processing efficiency and quality stability of silicon carbide PIN products. Utility Model Content

[0004] The purpose of this utility model is to address the shortcomings of existing technologies by proposing a processing fixture suitable for silicon carbide PIN products. It uses small lateral bolts and anti-slip pads to clamp the side of the part, while large bolts press the end face, achieving stable clamping in multiple directions, preventing slippage and deviation, and improving processing accuracy and consistency. The structure is optimized to adapt to silicon carbide parts of different sizes, reduce the precision requirements of raw materials, improve clamping efficiency, and has a wide range of applications.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a processing fixture suitable for silicon carbide PIN pin products, including a clamping base, a semi-circular fixing base fixedly connected to the lower right side of the clamping base, a square groove opened at the upper end of the semi-circular fixing base, two small threaded holes opened on the front side of the semi-circular fixing base, small bolts threadedly connected to the inner wall of the small threaded holes, the rear end of the small bolts extending into the interior of the square groove, an anti-slip pad rotatably connected to the rear end of the small bolts, a square silicon carbide part provided on the inner wall of the square groove, and a clamping plate provided on the upper end of the square silicon carbide part.

[0006] Furthermore, the upper end of the semi-circular fixing base is provided with large threaded holes around the perimeter, and the upper end of the clamping plate is provided with countersunk through holes around the perimeter.

[0007] Furthermore, a large bolt is provided on the inner wall of the countersunk through hole, and the lower end of the large bolt is threaded to the inner wall of the large threaded hole.

[0008] Furthermore, the square groove is located at the upper center of the semi-circular fixing base, slightly off-center from the front end.

[0009] Furthermore, the anti-slip pad is made of silicone, and the rear end of the anti-slip pad abuts against the front side of the square silicon carbide part.

[0010] Furthermore, the semi-circular fixing seat and the clamping plate work together to clamp the upper and lower ends of the square silicon carbide part.

[0011] Furthermore, the height of the square silicon carbide part is greater than the depth of the square groove, and the clamping seat has an elliptical through hole in the middle.

[0012] This utility model has the following beneficial effects: This invention employs a structure where small lateral bolts, anti-slip pads, and the inner wall of a square groove jointly clamp the side of a silicon carbide part. Simultaneously, a large bolt connects the clamping plate to a semi-circular fixing seat, achieving pressure on the upper and lower surfaces of the part and forming a multi-directional clamping structure. This design effectively prevents slippage, displacement, or loosening of the part during processing, significantly improving the stability of the processing and the dimensional consistency of the final product. It is particularly suitable for processing high-precision PIN pin-type parts.

[0013] In this invention, the device, through optimized structural design, enables the fixture to adapt to silicon carbide parts with slight differences in size and shape, reducing the requirements for the shape accuracy and dimensional consistency of silicon carbide scrap and decreasing the amount of pre-processing work. Simultaneously, the clamping method is simple and reliable, significantly shortening the positioning and clamping time of the parts, improving overall processing efficiency, and demonstrating good practicality and wide applicability. Attached Figure Description

[0014] Figure 1 A perspective view of a processing fixture for silicon carbide PIN pin products proposed in this utility model; Figure 2 This utility model provides a semi-circular fixing base structure suitable for silicon carbide PIN pin products. Figure 3 This utility model presents a clamping plate structure suitable for silicon carbide PIN products.

[0015] Legend: 1. Clamping seat; 2. Semi-circular fixing seat; 3. Elliptical through hole; 4. Square groove; 5. Large threaded hole; 6. Small bolt; 7. Small threaded hole; 8. Anti-slip pad; 9. Clamping plate; 10. Countersunk through hole; 11. Square silicon carbide part; 12. Large bolt. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Reference Figures 1-3 This utility model provides an embodiment of a processing fixture suitable for silicon carbide PIN pin products, including a clamping base 1. An elliptical through hole 3 is formed in the center of the clamping base 1. A semi-circular fixing base 2 is fixedly connected to the lower right end of the clamping base 1. A square groove 4 is formed at the upper end of the semi-circular fixing base 2, slightly offset from the front end of the upper center. Small threaded holes 7 are formed on both sides of the front side of the semi-circular fixing base 2. Small bolts 6 are threadedly connected to the inner wall of the small threaded holes 7. The rear end of the small bolts 6 extends into the interior of the square groove 4. An anti-slip pad 8 is rotatably connected to the rear end of the small bolts 6. The inner wall of the groove 4 is provided with a square silicon carbide part 11. The anti-slip pad 8 is made of silicone. The rear end of the anti-slip pad 8 abuts against the front side of the square silicon carbide part 11. The upper end of the square silicon carbide part 11 is provided with a clamping plate 9. The height of the square silicon carbide part 11 is higher than the depth of the square groove 4. The semi-circular fixing seat 2 and the clamping plate 9 work together to clamp the upper and lower ends of the square silicon carbide part 11. The upper end of the semi-circular fixing seat 2 is provided with large threaded holes 5 around its perimeter. The upper end of the clamping plate 9 is provided with countersunk through holes 10 around its perimeter. The inner wall of the countersunk through holes 10 is provided with large bolts 12. The lower end of the large bolts 12 is threadedly connected to the inner wall of the large threaded holes 5.

[0018] Specifically, when using this device, the residue from the application of high-purity silicon carbide material is first machined into square silicon carbide parts 11 by surface grinding. These parts are then placed into the square grooves 4 on the fixture. If the parts are long, their extensions can be placed into the elliptical through-holes 3 in the center of the clamping base 1 to accommodate parts of different sizes. Since the height of the square silicon carbide parts 11 is designed to be slightly higher than the depth of the square grooves 4, good coaxiality is ensured when machining pin-type components on a lathe.

[0019] Next, by adjusting the small bolt 6, the anti-slip pad 8 connected to its rear end is brought into close contact with the side of the square silicon carbide part 11. At this time, the inner wall of the square groove 4 and the anti-slip pad 8 work together to clamp and fix the side wall of the part. This clamping method effectively reduces the high requirements for the shape and dimensional accuracy of the silicon carbide part, while significantly shortening the time required for positioning and clamping. To further enhance the clamping stability, a large bolt 12 can be passed through the countersunk hole on the clamping plate 9 and threadedly connected to the large threaded hole 5 on the semi-circular fixing seat 2, thereby applying clamping force to the upper and lower ends of the silicon carbide part. This double clamping structure effectively prevents slippage, displacement and other adverse phenomena during the machining process, significantly improves the overall clamping effect and machining accuracy, and ensures the stability and reliability of PIN-type silicon carbide parts during lathe machining.

[0020] Working Principle: When using this device, the remaining material after the application of high-purity silicon carbide material is first ground into a square silicon carbide part 11, which is then placed inside the square groove 4. If the square silicon carbide part 11 is too long, it can extend into the elliptical through hole 3 in the middle of the clamping seat 1. The height of the square silicon carbide part 11 is greater than the depth of the square groove 4 to ensure the coaxiality of the PIN pin components processed on the lathe. Then, a tool is used to tighten the small bolt 6 so that the anti-slip pad 8 at the rear end of the small bolt 6 abuts against the side of the square silicon carbide part 11. The side wall of the square silicon carbide part 11 is clamped by the inner wall of the square groove 4 and the anti-slip pad 8, which reduces the requirements for the shape and dimensional accuracy of the square silicon carbide part 11 and shortens the positioning time. Then, a large bolt 12 passes through the countersunk through hole 10 of the clamping plate 9 and is threaded into the large threaded hole 5 on the semi-circular fixing seat 2 to clamp the upper and lower ends of the square silicon carbide part 11.

[0021] It is worth noting that the bolts, square silicon carbide parts, and anti-slip pads involved in the above embodiments are all based on the corresponding existing technologies according to the actual situation, and therefore will not be described in detail in the embodiments of this application.

[0022] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A processing fixture suitable for silicon carbide PIN pin products, comprising a clamping base (1), characterized in that: A semi-circular fixing seat (2) is fixedly connected to the lower right side of the clamping seat (1). A square groove (4) is provided at the upper end of the semi-circular fixing seat (2). Small threaded holes (7) are provided on both sides at the front side of the semi-circular fixing seat (2). Small bolts (6) are threadedly connected to the inner wall of the small threaded holes (7). The rear end of the small bolts (6) extends into the interior of the square groove (4). An anti-slip pad (8) is rotatably connected to the rear end of the small bolts (6). A square silicon carbide part (11) is provided on the inner wall of the square groove (4). A clamping plate (9) is provided at the upper end of the square silicon carbide part (11).

2. The processing fixture for silicon carbide PIN pin products according to claim 1, characterized in that: The semicircular fixing seat (2) has large threaded holes (5) around its upper end, and the clamping plate (9) has countersunk through holes (10) around its upper end.

3. A processing fixture for silicon carbide PIN products according to claim 2, characterized in that: The inner wall of the countersunk through hole (10) is provided with a large bolt (12), and the lower end of the large bolt (12) is threaded to the inner wall of the large thread hole (5).

4. The processing fixture for silicon carbide PIN pin products according to claim 1, characterized in that: The square groove (4) is located at the upper center of the semi-circular fixing seat (2) and slightly off-center from the front end.

5. A processing fixture for silicon carbide PIN pin products according to claim 1, characterized in that: The anti-slip pad (8) is made of silicone, and the rear end of the anti-slip pad (8) abuts against the front side of the square silicon carbide part (11).

6. A processing fixture for silicon carbide PIN products according to claim 1, characterized in that: The semi-circular fixing seat (2) and the clamping plate (9) work together to clamp the upper and lower ends of the square silicon carbide part (11).

7. A processing fixture for silicon carbide PIN pin products according to claim 1, characterized in that: The height of the square silicon carbide part (11) is higher than the depth of the square groove (4), and the clamping seat (1) has an elliptical through hole (3) in the middle.

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