A heating structure and coating equipment for planar ICP structures

Abstract

This invention provides a heating structure and coating equipment for a planar ICP structure, relating to the field of semiconductor equipment technology. It includes a planar ICP chamber with an ignition chamber, and further includes an air pipe connected to the planar ICP chamber. The air pipe is close to the outside of the ignition chamber to utilize the heat dissipated outward from the ignition chamber to heat the air pipe. This design makes the heating structure more compact and reduces interference.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to a heating structure for a planar ICP structure. Background Technology

[0002] In semiconductor manufacturing processes, RF plasma chambers are widely used in critical steps such as coating and etching, where gas pipe heating is crucial for ensuring stable delivery of process gases. Current technologies primarily rely on heating plates, wound heating tapes, or mold temperature controllers for gas pipe heating. Heating plates require additional power lines, inevitably introducing external power interference into the RF electric field area, exacerbating electromagnetic compatibility issues. Wound heating tapes, when dealing with complex gas path layouts within the chamber, require numerous connectors. These connectors are prone to physical overlap in confined spaces, especially in shallow chambers, easily leading to RF short circuits, damaging core components, and even posing a fire risk. Mold temperature controllers use water or mineral oil as the heat transfer medium; frequent disassembly during maintenance can cause leaks, contaminating equipment surfaces and hindering thorough cleaning. Long-term accumulation can affect chamber vacuum and process stability. These problems are particularly pronounced in planar ICP chambers. Due to their compact structure and limited depth, traditional active heating solutions inevitably involve external wiring, connectors, and hazardous media, increasing the probability of circuit failures and potentially causing significant property damage. Utility Model Content

[0003] This utility model discloses a heating structure for a planar ICP structure, which aims to solve the problems mentioned above.

[0004] The present invention adopts the following solution: This application provides a heating structure for a planar ICP structure, including a planar ICP chamber, wherein the planar ICP chamber is provided with an ignition chamber, characterized in that it further includes: an air pipe connected to the planar ICP chamber, the air pipe being close to the outside of the ignition chamber so as to use the heat emitted outward by the ignition chamber to heat the air pipe.

[0005] Furthermore, the trachea is secured to the outside of the ignition chamber by a fastener.

[0006] Furthermore, the fastener is made of slotted aluminum alloy to improve heat transfer efficiency, and the air pipe is adapted to pass through the slots in the slotted aluminum alloy.

[0007] Furthermore, a PTFE insulation layer is provided on the outer side of the fastener to reduce heat loss.

[0008] Furthermore, the ignition chamber includes a first ignition chamber and a second ignition chamber, and the trachea is fixed to the outer side of the second ignition chamber by the fixing member.

[0009] Furthermore, the first ignition chamber is disposed at the front end of the second ignition chamber, and a cavity is formed inside both of them, with the area of ​​the first ignition chamber being larger than that of the second ignition chamber.

[0010] Furthermore, the PTFE insulation layer is L-shaped, with one end abutting against the back side of the first ignition chamber and the other end extending to the back side of the second ignition chamber to wrap the fastener.

[0011] This utility model also provides a coating device, including the heating structure for planar ICP structures.

[0012] Beneficial effects: A heating structure and coating equipment for a planar ICP structure utilizes the heat emitted by the gas pipe closely attached to the outside of the ignition chamber for heating. This eliminates the need for additional power lines or the introduction of hazardous media, effectively removing potential hazards such as external flying wires, connectors, and oil or water. It ensures that only a single ICP coil circuit exists in the plasma chamber area, with no flying wires, connectors, oil, or water hazards on the outside, greatly avoiding RF short circuits caused by wiring connections and preventing property damage. Attached Figure Description

[0013] Figure 1 This is a cross-sectional schematic diagram of a heating structure for a planar ICP structure according to an embodiment of the present invention; Figure 2 This is a schematic diagram of a heating structure for a planar ICP structure according to an embodiment of the present invention; Figure 3 yes Figure 2 A schematic diagram of the structure after removing the slotted aluminum alloy. Figure 4 This is a schematic diagram of the connection between the gas pipe and the slotted aluminum alloy in a heating structure for a planar ICP structure according to an embodiment of the present invention. Figure 5 This is a cross-sectional schematic diagram of the connection between the gas pipe and the slotted aluminum alloy in a heating structure for a planar ICP structure according to an embodiment of the present invention. Reference numerals: 1. Planar ICP chamber; 11. First ignition chamber; 12. Second ignition chamber; 13. ICP coil; 2. Air tube; 3. Grooved aluminum alloy; 4. PTFE insulation layer. Detailed Implementation

[0014] Combination Figures 1 to 5As shown, this embodiment provides a coating device, including a heating structure for a planar ICP structure. The heating structure for the planar ICP structure includes a planar ICP chamber 1, which has an ignition chamber. It also includes a gas pipe 2 connected to the planar ICP chamber 1, with the gas pipe 2 closely attached to the outside of the ignition chamber to utilize the heat radiated outward from the ignition chamber to heat the gas pipe 2. This structure is suitable for planar ICP chambers 1 with a relatively small depth. This design ensures that only a single circuit, the ICP coil 13, exists in the plasma chamber area, and that there are no flying wires, connectors, or hazardous media such as oil or water present on the outside. This greatly reduces the risk of RF short circuits due to circuit overlap, preventing property damage.

[0015] The planar ICP chamber 1 can be understood as a chamber structure with planar inductively coupled plasma generation capability. It is typically made of metallic materials and possesses a certain degree of sealing performance, such as a rectangular or circular chamber made of stainless steel. The ignition chamber refers to a specific area used for initial discharge and maintaining plasma stability during plasma generation. It can be implemented through different geometries, such as a cylindrical or square chamber. The gas tube 2 can be implemented as a metal tube with a smooth inner wall to reduce gas flow resistance. Its exterior can be in close contact with the outer surface of the ignition chamber via thermally conductive tape or other fixing devices to improve heat transfer efficiency.

[0016] Furthermore, the way the trachea 2 is tightly attached to the outside of the ignition chamber can be achieved through various means. For example, the trachea 2 can be fixed to the outer surface of the ignition chamber with an elastic strap, or a clamping device can be used to keep the trachea 2 in close contact with the ignition chamber. In addition, the arrangement path of the trachea 2 can be adjusted according to the shape characteristics of the ignition chamber, for example, it can be arranged in a straight line along the length of the ignition chamber, or it can be spirally wrapped around its outer surface, so as to make full use of the heat emitted by the ignition chamber.

[0017] By passively utilizing the waste heat naturally generated during the operation of the ignition chamber to heat the gas pipe 2, the risks of power interference and wire bridging introduced by active heating methods in the radio frequency electric field are fundamentally avoided. Specifically, existing technologies such as heating plates, heating belts, and mold temperature controllers all require additional power or heat transfer media, which can easily lead to problems such as short circuits, fires, or leaks. In contrast, this application arranges the gas pipe 2 directly against the outer side of the ignition chamber, eliminating the need for additional energy input or complex connection structures. This simplifies the system design and eliminates the safety hazards associated with active heating methods, thereby significantly improving the safety and reliability of equipment operation.

[0018] The working principle is as follows: During plasma generation, the ignition chamber in the planar ICP chamber 1 continuously dissipates heat, which is typically lost to the environment. Based on the physical characteristics of the ignition chamber's outward heat dissipation, the gas pipe 2 is closely positioned on its outer side, allowing it to directly absorb and utilize this dissipated heat for self-heating. This eliminates the need for an additional active heating device, thus avoiding the introduction of new power interference and wire bridging risks into the radio frequency electric field. Furthermore, the close fit between the gas pipe 2 and the ignition chamber ensures efficient and direct heat transfer, guaranteeing that the gas pipe 2 can stably maintain the required temperature conditions. Therefore, the entire system only needs to maintain a single circuit for the ICP coil 13, eliminating the basis for the presence of flying wires, connectors, and potentially hazardous media such as oil or water, effectively preventing RF short circuits and fire hazards. In addition, this design simplifies the system structure, eliminates the possibility of media leakage, and significantly improves the safety and reliability of equipment operation. As a preferred embodiment, this solution is particularly suitable for planar ICP chambers 1 with a relatively small chamber depth, better adapting to the design requirements of compact equipment.

[0019] Continue to combine Figures 1 to 5 As shown, in this embodiment, the air tube 2 can be locked to the outside of the ignition chamber by a fastener. The fastener uses slotted aluminum alloy 3 to improve heat transfer efficiency, and the air tube 2 is suitable for passing through the slots in the slotted aluminum alloy 3. The slotted aluminum alloy 3 refers to a metal material with high thermal conductivity, which can be made of common aluminum alloys such as 6061 aluminum alloy or 7075 aluminum alloy. The slotting design involves machining a slot structure with a specific geometric shape on the aluminum alloy material. Its purpose is to optimize the heat transfer path and reduce contact thermal resistance, thereby achieving efficient heat conduction. By selecting slotted aluminum alloy 3 as the fastener material, the excellent thermal conductivity of aluminum alloy itself is fully utilized, and the heat emitted from the ignition chamber can be quickly transferred to the entire fastener. The slotting design further optimizes the heat transfer path. The geometry of the slot allows the air tube 2 to be directly embedded in the fastener, reducing the air gap between the air tube 2 and the fastener, thereby significantly reducing contact thermal resistance. This design not only achieves stable positioning of the air tube 2, but also allows heat to be evenly conducted to the surface of the air tube 2 along the slot wall. At the same time, this structural design maximizes the thermal contact area while ensuring the locking function of the fasteners, making the heat transfer process more direct and efficient.

[0020] In a preferred embodiment, a PTFE insulation layer 4 is provided on the outer side of the fastener to reduce heat loss. The PTFE insulation layer 4 refers to a thermal insulation structure made of polytetrafluoroethylene (PTFE), which can be bonded to the fastener through spraying, wrapping, or bonding. The purpose of this design is to utilize the low thermal conductivity of PTFE to form a thermal barrier, effectively blocking heat conduction from the fastener to the external environment. Furthermore, the choice of PTFE material is also due to its chemical stability and heat resistance in radio frequency environments, avoiding the introduction of additional risky media such as oil or water, thus ensuring the safety of the heating process.

[0021] In this embodiment, the ignition chamber includes a first ignition chamber 11 and a second ignition chamber 12. The air tube 2 is fixed to the outer side of the second ignition chamber 12 by a fastener. Specifically, the first ignition chamber 11 is located at the front end of the second ignition chamber 12, and a cavity is formed inside both; the area of ​​the first ignition chamber 11 is larger than that of the second ignition chamber 12. The first ignition chamber 11 is the chamber part that undertakes the high-energy ignition function and generates a higher temperature. It can be made of a metal material with high heat resistance and thermal conductivity, such as stainless steel or aluminum alloy, to concentrate the heat generated during the ignition process and prevent the heat from dissipating to other areas. The second ignition chamber 12 is the chamber part that forms a relatively stable and moderate temperature area. Dividing the ignition chamber into two independent but interconnected parts achieves zoned control and efficient utilization of heat. The first ignition chamber 11 concentrates on the high-energy ignition function and can effectively generate a higher temperature, while the second ignition chamber 12, through its relatively stable temperature characteristics, provides suitable heating conditions for the air tube 2. The trachea 2 is fixed to the outer surface of the second ignition chamber 12 by a fastener, rather than directly contacting the high-temperature area of ​​the first ignition chamber 11, thus avoiding the aging or damage of the trachea 2 material due to excessively high local temperatures. The larger area design of the first ignition chamber 11 significantly improves its heat capacity and radiation range, allowing heat to flow efficiently to the smaller second ignition chamber 12, compensating for the latter's insufficient heat output.

[0022] Combination Figure 1 As shown, in the preferred embodiment, the PTFE insulation layer 4 is L-shaped, with one end abutting the back side of the first ignition chamber 11 and the other end extending to the back side of the second ignition chamber 12 to enclose the fastener. The shape design precisely adapts to the spatial layout of the two ignition chambers, ensuring a tight fit between the insulation layer and the chamber surface. The L-shaped PTFE insulation layer 4 cleverly solves the heat loss problem in the dual-chamber structure.

[0023] Through the above technical solution, the ignition chamber in the planar ICP chamber 1 continuously dissipates heat during plasma generation, which is typically lost to the environment. Based on the physical characteristics of the ignition chamber's outward heat dissipation, the gas pipe 2 is closely positioned on its outer side, allowing it to directly absorb and utilize this dissipated heat for self-heating. This eliminates the need for an additional active heating device, thus avoiding the introduction of new power interference and wire bridging risks into the radio frequency electric field. Furthermore, the close fit between the gas pipe 2 and the ignition chamber ensures efficient and direct heat transfer, guaranteeing that the gas pipe 2 can stably maintain the required temperature conditions. Therefore, the entire system only needs to maintain a single circuit for the ICP coil 13, eliminating the basis for the presence of flying wires, connectors, and risky media such as oil or water, effectively preventing RF short circuits and fire hazards. In addition, this design simplifies the system structure, eliminates the possibility of media leakage, and significantly improves the safety and reliability of equipment operation. As a preferred embodiment, this solution is particularly suitable for planar ICP chambers 1 with a small chamber depth, better adapting to the design requirements of compact equipment.

[0024] It should be understood that the above are only preferred embodiments of the present utility model, and the protection scope of the present utility model is not limited to the above embodiments. All technical solutions that fall within the scope of the present utility model are protected by the present utility model.

[0025] The accompanying drawings used in the above description of the embodiments only show some embodiments of the present invention and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

Claims

1. A heating structure for a planar ICP structure, comprising a planar ICP chamber, wherein the planar ICP chamber is provided with an ignition chamber, characterized in that, Also includes: A trachea is connected to the planar ICP chamber, and the trachea is close to the outside of the ignition chamber so as to use the heat emitted outward by the ignition chamber to heat the trachea.

2. The heating structure for a planar ICP structure according to claim 1, characterized in that, The trachea is secured to the outside of the ignition chamber by a fastener.

3. The heating structure for a planar ICP structure according to claim 2, characterized in that, The fastener is made of slotted aluminum alloy to improve heat transfer efficiency, and the air pipe is adapted to pass through the slots in the slotted aluminum alloy.

4. The heating structure for a planar ICP structure according to claim 2, characterized in that, The fastener is provided with a PTFE insulation layer on its outer side to reduce heat loss.

5. The heating structure for a planar ICP structure according to claim 4, characterized in that, The ignition chamber includes a first ignition chamber and a second ignition chamber, and the trachea is fixed to the outer side of the second ignition chamber by the fixing member.

6. The heating structure for a planar ICP structure according to claim 5, characterized in that, The first ignition chamber is located at the front end of the second ignition chamber, and a cavity is formed inside both of them, with the area of ​​the first ignition chamber being larger than that of the second ignition chamber.

7. The heating structure for a planar ICP structure according to claim 6, characterized in that, The PTFE insulation layer is L-shaped, with one end abutting against the back side of the first ignition chamber and the other end extending to the back side of the second ignition chamber to wrap the fastener.

8. A coating apparatus, characterized in that, The heating structure for a planar ICP structure includes any one of claims 1-7.

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