A quick-release electrode structure and a hot-wire CVD apparatus having the quick-release structure.

Abstract

This utility model relates to a quick-release electrode structure and a hot-wire CVD equipment having the quick-release structure. The quick-release electrode structure includes: an electrode block; a first limiting plate located on one side of the electrode block to limit its movement; and a second limiting plate located on the other side of the electrode block, opposite to the first limiting plate to fix the electrode block. The second limiting plate is movable relative to the first limiting plate so that the distance between them adapts to the size of the electrode block. Inserting the electrode block between the first and second limiting plates allows for quicker and easier assembly and disassembly. Therefore, when the hot wire needs to be replaced, only the electrode block needs to be pulled out, avoiding the problems of operation in confined spaces, thus improving both ease of operation and replacement efficiency. Furthermore, this design avoids the impact of repeated bolt removal on the electrode, better protecting the internal components of the equipment and extending their service life.

Description

Technical Field

[0001] This utility model relates to hot-wire CVD equipment, and more specifically, to an electrode quick-release structure and a hot-wire CVD equipment having the quick-release structure. Background Technology

[0002] Hot-filament chemical vapor deposition (HoFCVD) is a technique that uses a hot filament to decompose reactive gases to achieve thin film deposition. In HoFCVD equipment, the hot filament plays a key role. The hot filament generates high temperature by applying an electric current, which catalytically decomposes the reactive gases into active particles, which are then deposited on the substrate to form a film.

[0003] Currently, the common way to install the hot wire in HoFCVD equipment is to fix it to the electrode at the top of the cavity with bolts. When the hot wire is disassembled and replaced, it is necessary to work in the narrow space of the cavity, which is cumbersome and time-consuming. In addition, the bolts are frequently loosened and tightened, which can cause damage to the appearance of the electrode and affect its conductivity.

[0004] Based on the above background, there is an urgent need to provide an electrode quick-release structure for use in vacuum chambers and confined environments. Utility Model Content

[0005] The problem to be solved by this utility model is to provide an electrode quick-release structure, comprising: To address the aforementioned problems in the prior art, this utility model provides an electrode quick-release structure. Electrode blocks; The first limiting plate is located on one side of the electrode block and limits its movement; The second limiting plate is located on the other side of the electrode block and is disposed opposite to the first limiting plate to fix the electrode block. The second limiting plate can move relative to the first limiting plate so that the distance between the two is adapted to the size of the electrode block.

[0006] In some embodiments, the first limiting plate and the second limiting plate are connected by an elastic telescopic component or a spiral lifting component.

[0007] In some embodiments, the first limiting plate and the second limiting plate are connected by an elastic element and a connecting rod. When the electrode block is inserted, the second limiting plate cooperates with the first limiting plate to clamp the electrode block under the elastic force of the elastic element.

[0008] In some embodiments, a baffle is connected to one side of the first limiting plate to restrict the position of the electrode block inserted between the first limiting plate and the second limiting plate.

[0009] In some embodiments, mounting holes are provided at both ends or the outer extensions of both ends of the first limiting plate, and fixing holes corresponding to the mounting holes are provided on the second limiting plate. The elastic element is mounted on the connecting rod, and both ends of the connecting rod are respectively mounted on the mounting holes and the fixing holes.

[0010] In some embodiments, the insertion side of the electrode block, and the insertion side of the first limiting plate and / or the second limiting plate that contacts the insertion side, are provided with a chamfered structure.

[0011] In some embodiments, a third limiting plate is further included, the second limiting plate is installed between the first limiting plate and the third limiting plate, the third limiting plate and the second limiting plate are connected by an elastic telescopic component or a spiral lifting component, and the electrode block is inserted between the first limiting plate and the second limiting plate.

[0012] In some embodiments, a baffle is provided between the first limiting plate and the third limiting plate, so that the overall structure is U-shaped.

[0013] In some embodiments, the electrode block is provided with a mounting groove, the mounting groove has a U-shaped structure, and the connection between its bottom surface and side surface is set in a stepped shape, so that the opening size of the mounting groove is larger than the bottom size, and the bottom size matches the size of the second limiting plate.

[0014] The quick-release electrode structure provided by this utility model features a first and second limiting plate that can move relative to each other. The electrode block is inserted between the first and second limiting plates, allowing for faster and more convenient assembly and disassembly. Therefore, when the heating wire needs to be replaced, simply pull out the electrode block, avoiding the problems associated with operating in confined spaces. This improves both ease of operation and replacement efficiency. Furthermore, this design avoids the impact of repeatedly disassembling bolts on the electrode, better protecting the internal components and extending their service life.

[0015] Based on the above-mentioned quick-release electrode structure, this utility model also provides a hot-wire CVD device, including a hot wire and a quick-release electrode structure for fixing the hot wire, wherein the quick-release electrode structure is any of the quick-release electrode structures described above.

[0016] Because the hot-wire CVD equipment has the aforementioned quick-release electrode structure, it directly or indirectly possesses the characteristics of high efficiency in assembly and disassembly and low component wear associated with quick-release electrode structures. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the electrode quick-release structure provided in one embodiment of the present invention; Figure 2This is a side view of the quick-release electrode structure; Figure 3 for Figure 2 Sectional view along the middle AA direction; Figure 4 An exploded view of the electrode quick-release structure; Figure 5 A schematic diagram of the electrode quick-release structure provided in another embodiment of this utility model; Figure 6 for Figure 5 Sectional view of AA; Figure 7 An exploded view of the electrode quick-release structure; Figure 8 This is a schematic diagram of the first limiting plate in the quick-release electrode structure. Figure 9 This is a schematic diagram of the electrode block in the quick-release electrode structure.

[0018] Figure label: 10 is an electrode block, 11 is a mounting groove, 12 is a handle; 20 is a first limiting plate, 21 is a baffle, 22 is a mounting hole, 23 is a third limiting plate, 24 is a limiting strip; 30 is a second limiting plate, 31 is a fixing hole; 40 is an elastic element, 50 is a connecting rod. Detailed Implementation

[0019] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not the entire structure.

[0020] Please refer to the accompanying drawings, which illustrate the quick-release electrode structure provided in this embodiment. The structure includes an electrode block 10, a first limiting plate 20, and a second limiting plate 30. The first limiting plate 20 is located on one side of the electrode block 10 and limits its movement. The second limiting plate 30 is located on the other side of the electrode block 10 and is positioned opposite to the first limiting plate 30 to fix the electrode block 10. The second limiting plate 30 is movable relative to the first limiting plate 20 so that the distance between them adapts to the size of the electrode block 10. In this embodiment, the electrode block 10 can be installed simply by inserting it between the first limiting plate 20 and the second limiting plate 30. During disassembly, the electrode block 10 can be directly pulled out. The distance between the first limiting plate 20 and the second limiting plate 30 adapts to the size of the electrode block 10 and fixes it during insertion.

[0021] In a specific embodiment, the first limiting plate 20 and the second limiting plate 30 can be connected by an elastic telescopic component or a spiral lifting component, so as to adjust the distance between the first limiting plate 20 and the second limiting plate 30 and fix the electrode block 10.

[0022] As a preferred embodiment of this application, the first limiting plate 20 and the second limiting plate 30 are connected by an elastic member 40 and a connecting rod 50. When the electrode block 10 is inserted, the second limiting plate 30 cooperates with the first limiting plate 20 to clamp the electrode block 10 under the elastic force of the elastic member 40.

[0023] In addition, a baffle 21 is connected to one side of the first limiting plate 20 to restrict the position of the electrode block 10 inserted between the first limiting plate 20 and the second limiting plate 30.

[0024] Mounting holes 22 are provided at both ends or on the outer extensions of both ends of the first limiting plate 20, and fixing holes 31 corresponding to the mounting holes 22 are provided on the second limiting plate 30. Figures 1 to 4 As shown, in this embodiment, the mounting holes 22 are provided on the outer extensions at both ends of the first limiting plate 20, that is, at both ends of the first limiting plate 20, so that a portion of the plate extends outwards, and the mounting holes 22 are provided there. See details below. Figure 4 .

[0025] The second limiting plate 30 can be a complete limiting plate, or it can be like... Figure 4 The two limiting plates shown allow for adjustments to the spacing between the second limiting plate 30 and the first limiting plate 20 based on the specific structure of the electrode block 10. For example, when the electrode block 10 has a structure that is thin at one end and thick at the other, the spacing between one second limiting plate 30 and the first limiting plate 20 is made greater than the spacing between the other second limiting plate 30 and the first limiting plate 20, thereby better fixing the electrode block 10.

[0026] In such Figures 1 to 4 In the specific embodiment shown, the elastic element 40 is mounted on the connecting rod 50, and the two ends of the connecting rod 50 are respectively mounted on the mounting hole 22 and the fixing hole 31. At this time, when the electrode block 10 is inserted, the elastic element 40 is in a stretched state, which can better fix the electrode block 10. Specifically, one end of the connecting rod 50 can be threaded to one of the mounting hole 22 and the fixing hole 31, while the other end is clearance-fitted to the other of the mounting hole 22 and the fixing hole 31. This allows the connecting rod 50 to move relative to the electrode block 10 in the hole under the action of elastic force when the electrode block 10 is inserted between the first limiting plate 20 and the second limiting plate 30, thereby changing the distance between the two limiting plates and thus fixing the electrode block 10.

[0027] Preferably, in order to facilitate the assembly and disassembly of the electrode block 10, the insertion side of the electrode block 10, and the insertion side of the first limiting plate 20 and / or the second limiting plate 30 that are in contact with the insertion side are provided with a chamfered structure, so that the electrode block 10 can enter the space between the first limiting plate 20 and the second limiting plate 30 more smoothly when inserted.

[0028] In another embodiment of this application, the quick-release structure further includes a third limiting plate 23, such as... Figure 7 and Figure 8 As shown, the second limiting plate 30 is installed between the first limiting plate 20 and the third limiting plate 23. The third limiting plate 23 and the second limiting plate 30 are connected by an elastic telescopic component or a spiral lifting component. The electrode block 10 is inserted between the first limiting plate 20 and the second limiting plate 30. That is, in this embodiment, the elastic telescopic component or the spiral lifting component is disposed outside the first limiting plate 20 and the second limiting plate 30. If it is an elastic telescopic component, when the electrode block 10 is inserted, the elastic telescopic component is in a compressed state, and the electrode block 10 is fixed between the first limiting plate 20 and the second limiting plate 30 by pressure. For the specific structure, see [link to specific details]. Figure 6 .

[0029] In addition, a baffle 21 is provided between the first limiting plate 20 and the third limiting plate 23, making the overall structure U-shaped, such as Figure 7 and Figure 8 As shown, the baffle 21 can limit the insertion depth of the electrode block 10, so as to avoid excessive insertion and affect disassembly.

[0030] In a specific embodiment, the electrode block 10 is provided with a mounting groove 11. The mounting groove 11 has a U-shaped structure, and the connection between its bottom surface and the side surface is set in a stepped shape, so that the opening size of the mounting groove 11 is larger than the bottom size. The bottom size matches the size of the second limiting plate 20. After the bottom is installed in conjunction with the second limiting plate 20, the lateral movement of the electrode block 10 can be effectively limited, making its installation more stable. See [reference needed]. Figure 6 and Figure 9 As shown. Of course, the opening size of its mounting slot 11 can also be the same as the size of the second limiting plate 20.

[0031] In addition, to facilitate the installation or removal of the electrode block 10, it is preferable to provide a handle 12 on the electrode block 10, such as... Figure 5 and Figure 9 As shown, in order to facilitate the application of force to the electrode block 10 during disassembly and assembly, it is positioned on the side of the non-mounting surface of the electrode block 10, so that it is exposed for easy gripping.

[0032] In summary, the quick-release electrode structure provided in this application embodiment features a first limiting plate 20 and a second limiting plate 30 that are relatively movable. The electrode block 10 is inserted between the first limiting plate 20 and the second limiting plate 30, allowing for faster and more convenient assembly and disassembly of the electrode block 10. Therefore, when the heating wire needs to be replaced, simply pulling out the electrode block avoids the problems associated with operating in confined spaces, facilitating operation and increasing replacement efficiency. Furthermore, this design avoids the impact of repeated bolt disassembly on the electrode, better protecting the internal components and extending their service life.

[0033] Based on the above-mentioned quick-release electrode structure, this application embodiment also provides a hot-wire CVD device, including a hot wire and a quick-release electrode structure for fixing the hot wire, wherein the quick-release electrode structure is any of the quick-release electrode structures described above.

[0034] Because the hot-wire CVD equipment has the aforementioned quick-release electrode structure, it directly or indirectly possesses the characteristics of high efficiency in assembly and disassembly and low component wear associated with quick-release electrode structures.

[0035] It should be noted that, without conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. For those skilled in the art, any modifications or alterations made based on the above embodiments of this utility model, without departing from the spirit of this utility model, should be included within the protection scope of this utility model.

Claims

1. A quick-release electrode structure, characterized in that, include: Electrode block (10); The first limiting plate (20) is located on one side of the electrode block (10) and limits its movement; The second limiting plate (30) is located on the other side of the electrode block (10) and is arranged opposite to the first limiting plate (20) to fix the electrode block (10). The second limiting plate (30) can move relative to the first limiting plate (20) so that the distance between the two is adapted to the size of the electrode block (10).

2. The quick-release electrode structure according to claim 1, characterized in that, The first limiting plate (20) and the second limiting plate (30) are connected by an elastic telescopic component or a spiral lifting component.

3. The electrode quick-release structure according to claim 2, characterized in that, The first limiting plate (20) and the second limiting plate (30) are connected by an elastic element (40) and a connecting rod (50). When the electrode block (10) is inserted, the second limiting plate (30) cooperates with the first limiting plate (20) to clamp the electrode block (10) under the elastic force of the elastic element (40).

4. The quick-release electrode structure according to claim 3, characterized in that, A baffle (21) is connected to one side of the first limiting plate (20) to restrict the position of the electrode block (10) inserted between the first limiting plate (20) and the second limiting plate (30).

5. The quick-release electrode structure according to claim 3, characterized in that, Mounting holes (22) are provided at both ends or at the outer extensions of both ends of the first limiting plate (20). Fixing holes (31) corresponding to the mounting holes (22) are provided on the second limiting plate (30). The elastic element (40) is mounted on the connecting rod (50). The two ends of the connecting rod (50) are respectively mounted on the mounting holes (22) and the fixing holes (31).

6. The quick-release electrode structure according to claim 3, characterized in that, The insertion side of the electrode block (10), and the insertion side of the first limiting plate (20) and / or the second limiting plate (30) that are in contact with the insertion side are provided with a chamfered structure.

7. The electrode quick-release structure according to claim 1, characterized in that, It also includes a third limiting plate (23), the second limiting plate (30) is installed between the first limiting plate (20) and the third limiting plate (23), the third limiting plate (23) and the second limiting plate (30) are connected by an elastic telescopic component or a spiral lifting component, and the electrode block (10) is inserted between the first limiting plate (20) and the second limiting plate (30).

8. The quick-release electrode structure according to claim 7, characterized in that, A baffle (21) is provided between the first limiting plate (20) and the third limiting plate (23) to make the overall structure U-shaped.

9. The quick-release electrode structure according to claim 7, characterized in that, The electrode block (10) is provided with an installation groove (11). The installation groove (11) has a U-shaped structure, and the connection between its bottom surface and side surface is set as a step, so that the opening size of the installation groove (11) is larger than the bottom size, and the bottom size matches the size of the second limiting plate (30).

10. A hot-wire CVD apparatus, characterized in that, It includes a hot wire and a quick-release electrode structure for fixing the hot wire, wherein the quick-release electrode structure is the quick-release electrode structure according to any one of claims 1 to 9.

Images