A device to prevent falling and a single crystal furnace

Abstract

This utility model applies to the field of single crystal furnaces and provides an anti-fall device, which includes a clamping assembly and a support rod assembly. The clamping assembly is disposed above the support rod assembly. The support rod assembly includes a tray and several support rods connected to the tray. The support rods are arranged circumferentially around the tray at intervals, and the support rods together define an accommodating space. The crystal rod is located in the accommodating space. A barb is provided on the side of the support rod away from the support rod assembly to hold the crystal rod and prevent it from falling. Due to the clamping assembly and the support rod assembly with barb structure, the barb holds the crystal rod in place, forming a physical limit and preventing the crystal rod from accidentally falling off due to excessive weight during the growth process. This effectively prevents equipment damage and explosion accidents caused by accidental crystal rod falling off, improving safety and economy.

Description

Technical Field

[0001] This utility model belongs to the field of single crystal furnace technology, and particularly relates to an anti-fall device and a single crystal furnace. Background Technology

[0002] In the production of monocrystalline silicon, the monocrystalline furnace requires sequential processes including feeding, melting, necking growth, shoulder growth, constant diameter growth, and tail growth. Polycrystalline silicon material is heated and melted in the monocrystalline furnace to form a silicon melt. After the temperature of the silicon melt stabilizes, a seed crystal is slowly immersed into the melt. Because the thermal stress generated when the seed crystal contacts the high-temperature melt can cause dislocations in the seed crystal, a necking growth process is needed to quickly pull the seed crystal, reducing the diameter of the grown crystal to form finer grains and eliminate dislocations. Subsequently, shoulder growth and constant diameter growth are performed to finally form a complete crystal rod.

[0003] In existing technologies, as the crystal growth process continues, the length and weight of the crystal ingot constantly increase, with the entire weight borne by the seed crystal and the fine grains. This continuously increasing load can easily cause the seed crystal or fine grains to fracture, resulting in the accidental detachment of the crystal ingot. The fallen crystal ingot not only damages critical components such as heat exchangers within the single crystal furnace, but more seriously, the contact between the high-temperature silicon melt and cooling water can trigger an explosion, damaging valuable components such as the graphite heaters inside the furnace, leading to significant safety hazards and economic losses. Utility Model Content

[0004] The anti-fall device provided in this embodiment of the utility model aims to solve the technical problem that existing crystal rods are prone to breakage during the growth process, thereby damaging the single crystal furnace.

[0005] This utility model embodiment is implemented as follows: an anti-fall device for a single crystal furnace, comprising: Clamping assembly; A support rod assembly is provided, with the clamping assembly disposed above the support rod assembly. The support rod assembly includes a tray and a plurality of support rods connected to the tray. The plurality of support rods are arranged circumferentially around the tray and together define an accommodating space. The crystal rod is located in the accommodating space. A barb is provided on the side of the support rod away from the support rod assembly. The barb is used to hold the crystal rod to prevent it from falling.

[0006] Furthermore, the clamping assembly includes a clamping sleeve having an installation space within it, the inner surface of which is adapted to the shape of the outer surface of the tray.

[0007] Furthermore, a first extension is provided on the outer side of the clamping sleeve, and the first extension extends along the circumference of the clamping sleeve.

[0008] Furthermore, the tray includes a body portion and a second extension portion connected to the body portion. The second extension portion extends circumferentially around the body portion. When the tray is engaged with the clamping assembly, the first extension portion and the second extension portion are configured to cooperate with the single crystal furnace to realize the placement and release of the weight within the accommodating space.

[0009] Furthermore, the tray is provided with a first opening, the clamping sleeve is provided with a second opening, and the single crystal furnace includes a tungsten wire rope, which enters the accommodating space through the first opening and the second opening and is connected to the counterweight.

[0010] Furthermore, the second extension is provided with a plurality of rotating ears, and the support rod is connected to the tray through the rotating ears.

[0011] Furthermore, the second extension is provided with a plurality of clearance openings, which are spaced apart along the axial direction of the second extension. The clearance openings are provided with the rotating lugs, and the support rod passes through the clearance openings.

[0012] Furthermore, a pivot hole is provided on the side of the support rod near the tray, and the pivot hole is connected to the rotating lug to realize the rotatable connection between the support rod and the support rod plate.

[0013] Furthermore, a ramp is formed within the tray, which is used to adapt to the counterweight.

[0014] A single crystal furnace, characterized in that it comprises: Deputy Office; The anti-fall device described in any of the above claims is installed above the auxiliary chamber.

[0015] The beneficial effects achieved by this utility model are that, due to the setting of the clamping component and the support rod component with the barb structure, the barb holds the crystal rod to form a physical limit, which avoids the crystal rod from accidentally falling off due to excessive weight during the growth process. It has the advantages of effectively preventing equipment damage and explosion accidents caused by accidental crystal rod falling off, and improving safety and economy. Attached Figure Description

[0016] Figure 1 This is a plan view of the anti-fall device provided in an embodiment of the present utility model; Figure 2 This is another plan view of the anti-fall device provided in this embodiment of the utility model; Figure 3 This is a cross-sectional view of the anti-fall device provided in an embodiment of this utility model. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0018] In existing technologies, as the crystal growth process continues, the length and weight of the crystal ingot constantly increase, with the entire weight borne by the seed crystal and the fine crystal portion. This continuously increasing load can easily lead to the breakage of the seed crystal or fine crystal, causing the crystal ingot to fall off unexpectedly. Falling crystal ingots not only damage critical components such as heat exchangers in the single crystal furnace, but more seriously, the contact between the high-temperature silicon melt and cooling water may trigger an explosion, causing damage to valuable components such as graphite heaters inside the furnace, resulting in significant safety hazards and economic losses. This application addresses this issue by using a clamping assembly and a support rod assembly with a barbed structure. The barbs hold the crystal ingot in place, creating a physical limit and preventing accidental detachment due to excessive weight during growth. This effectively prevents equipment damage and explosions caused by accidental crystal ingot detachment, improving both safety and economy.

[0019] Example 1 Please see Figures 1 to 3 This utility model embodiment is implemented as follows: an anti-fall device 100 for a single crystal furnace, comprising: Clamping assembly 10; The support rod assembly 20 and the clamping assembly 10 are disposed above the support rod assembly 20. The support rod assembly 20 includes a tray 201 and a plurality of support rods 30 connected to the tray 201. The plurality of support rods 30 are arranged circumferentially around the tray 201 and the plurality of support rods 30 together define an accommodating space 303. The crystal rod is located in the accommodating space 303. A barb 302 is provided on the side of the support rod 30 away from the support rod assembly 20. The barb 302 is used to hold the crystal rod to prevent the crystal rod from falling.

[0020] In this embodiment, the clamping assembly 10 refers to the constraint structure used to fix the support rod assembly 20, which can be implemented by an annular sleeve. The inner wall of the sleeve matches the outer contour of the tray 201 to form a stable connection. The support rod assembly 20 refers to the support system that bears the weight of the crystal rod, which may specifically include radially distributed rod-shaped components, with bent portions formed at the ends of the rods to limit the displacement of the crystal rod; The barb 302 refers to the anti-detachment structure set at the end of the support rod 30. Specifically, it can be implemented by an L-shaped metal protrusion, with the inner surface of the protrusion contacting the outer wall of the crystal rod to form a mechanical limit.

[0021] Furthermore, during the crystal growth process, the crystal rod gradually enters the accommodating space 303 surrounded by multiple support rods 30. When the weight of the crystal rod exceeds the set threshold, the barb 302 structure at the end of the support rod 30 automatically locks the outer surface of the crystal rod. The barb 302 and the contact surface of the crystal rod form frictional resistance, preventing the crystal rod from falling further. The support rods 30 form multi-point support through circumferential distribution, effectively dispersing the concentrated load of the crystal rod weight on the seed crystal. The cooperation and installation of the clamping component 10 and the support rods 30 ensure the overall stability of the support structure in a high-temperature environment.

[0022] In this embodiment, by adding a mechanical support structure to share the load, the accidental fall of the crystal rod due to seed crystal breakage is effectively prevented, avoiding the crystal rod from hitting the heat exchanger or causing the melt to explode. The support structure shares the seed crystal load, reducing the risk of fine crystal breakage. The barbed 302 design ensures that the crystal rod maintains a stable position during the growth process, improving the safety of the single crystal furnace operation.

[0023] Preferably, the barb 302 may have an adhesive film attached inside. The adhesive film prevents the barb 302 from being damaged by rigid contact with the crystal rod. The structure is simple and easy to implement.

[0024] Example 2 Please see Figures 1 to 3 Furthermore, the clamping assembly 10 includes a clamping sleeve 101, in which an installation space 1011 is formed, the shape of the inner surface of the installation space 1011 being adapted to the shape of the outer surface of the tray 201.

[0025] Among them, the clamping sleeve 101 refers to a metal sleeve with a ring structure, which can be made of stainless steel or high-temperature resistant alloy material, without limitation. It is used to wrap and fix the support rod assembly 20. Its inner wall shape matches the outer contour of the tray 201 to form a tight physical contact and prevent the support rod assembly 20 from shifting under high temperature or vibration environment.

[0026] Specifically, the installation space 1011 refers to the cavity area formed inside the clamping sleeve 101, which can be formed by machining or casting. The size and shape of the cavity are perfectly matched with the outer surface of the tray 201, so that the tray 201 can be embedded in the installation space 1011. The self-positioning function is achieved through shape matching, eliminating gaps caused by assembly errors.

[0027] Preferably, the clamping sleeve 101 adapts its shape to the inner surface of the mounting space 1011 and the outer surface of the tray 201 to form a stable mechanical connection. When the support rod assembly 20 bears the weight of the crystal rod, the contact surface between the clamping sleeve 101 and the tray 201 distributes the load evenly, avoiding local stress concentration. The shape adaptation of the mounting space 1011 constrains the tray 201 in both the axial and radial directions, preventing the support rod assembly 20 from shifting due to crystal rod swing or single crystal furnace vibration, thereby maintaining the limiting effect of the accommodating space 303 on the crystal rod.

[0028] In other embodiments, the clamping sleeve 101 with a matching shape cooperates with the tray 201 to ensure that the support rod assembly 20 remains fixed in a high temperature and vibration environment, and to prevent the crystal rod from leaving the accommodating space 303 due to structural displacement.

[0029] Example 3 Please refer to it again. Figures 1 to 3 Furthermore, a first extension 1012 is provided on the outer side of the clamping sleeve 101, and the first extension 1012 extends along the circumference of the clamping sleeve 101.

[0030] In this embodiment, the first extension 1012 refers to the annular protrusion structure provided on the outside of the clamping sleeve 101. Specifically, it can be achieved by welding metal rings or integral molding. The circumferential extension means that the structure is continuously or intermittently distributed along the circumferential direction of the clamping sleeve 101. Specifically, it can be achieved by annular grooves or continuous flanges. It is used to ensure that the clamping sleeve 101 transmits the load evenly and maintains the structural integrity when subjected to force.

[0031] Specifically, the first extension 1012 is configured as an annular flange surrounding the outer wall of the clamping sleeve 101. Its width and thickness can be adjusted according to the size of the clamping sleeve 101. During operation, the first extension 1012 can cooperate with the pick-and-place mechanism on the single crystal furnace to achieve the engagement or disengagement of the counterweight 50.

[0032] Example 4 Please see Figure 1 Furthermore, the tray 201 includes a body portion 202 and a second extension portion 203 connected to the body portion 202. The second extension portion 203 extends circumferentially around the body portion 202. When the tray 201 is engaged with the clamping assembly 10, the first extension portion 1012 and the second extension portion 203 are configured to cooperate with the single crystal furnace to realize the placement and release of the counterweight 50 in the accommodating space 303.

[0033] In this embodiment, the main body 202 refers to the basic structure that supports the support rod 30, which can be implemented as an annular metal disc to provide an installation reference for the second extension 203. The second extension 203 refers to an annular flange that extends outward from the edge of the main body 202, which can be implemented as a metal ring integrally formed with the main body 202.

[0034] Specifically, when the tray 201 is assembled with the clamping assembly 10, the second extension 203 abuts against the bottom of the clamping assembly 10. The two support each other through the annular contact surface, forming a stable load-bearing structure. During the crystal growth process, the contact state between the counterweight 50 and the tray 201 can be controlled by adjusting the relative position of the first extension 1012 and the second extension 203, thereby realizing the vertical hoisting or detachment of the counterweight 50. The structure is simple and easy to implement.

[0035] Example 5 Furthermore, the tray 201 is provided with a first opening, the clamping sleeve 101 is provided with a second opening, and the single crystal furnace includes a tungsten wire rope 40, which enters the accommodating space 303 through the first and second openings and is connected to the counterweight 50.

[0036] The first opening refers to the through-hole structure provided on the tray 201, which can be implemented by a circular or rectangular hole. Its position corresponds to the suspension point of the counterweight 50 and is used to guide the tungsten wire rope 40 through the tray 201. The second opening refers to the through-hole structure provided on the clamping sleeve 101, which can be implemented by a hole coaxially aligned with the first opening, and is used to ensure that the tungsten wire rope 40 is not obstructed when passing through the clamping sleeve 101.

[0037] Furthermore, the tungsten wire rope 40 refers to the flexible traction component that connects the single crystal furnace drive mechanism and the counterweight 50. Specifically, it can be made of high-temperature resistant metal wire. After passing through the first opening and the second opening, it is directly fixed to the counterweight 50 and used to control the lifting and lowering movement of the counterweight 50 within the accommodating space 303.

[0038] In this embodiment, during the crystal rod growth process, the weight 50 is suspended below the drive mechanism of the single crystal furnace by a tungsten wire rope 40. When the weight 50 needs to be placed into the accommodating space 303, the tungsten wire rope 40 passes through the second opening of the clamping sleeve 101 and the first opening of the tray 201 in sequence, and finally connects to the top of the weight 50. Due to the axial alignment design of the first and second openings, the tungsten wire rope 40 will not rub against the edge of the tray 201 or the inner wall of the clamping sleeve 101 when passing through, thereby avoiding the weight 50 from tilting or getting stuck due to positional displacement. When the weight of the crystal rod increases, the weight 50 remains stable by the traction force of the tungsten wire rope 40. The barb 302 structure of the support rod assembly 20 further restricts the displacement of the crystal rod and prevents it from accidentally leaving the accommodating space 303.

[0039] Example 6 Please see Figures 1 to 3 Furthermore, the second extension 203 is provided with a plurality of rotating ears 204, and the support rod assembly 20 is connected to the tray 201 through the rotating ears 204.

[0040] In this embodiment, the rotating ear 204 refers to the connecting component fixed on the second extension 203. Specifically, it can be achieved by welding metal ear pieces or fixing with bolts. It is used to provide a rotatable connection fulcrum for the support rod 30. The connection between the support rod 30 and the tray 201 through the rotating ear 204 means that the end of the support rod 30 and the rotating ear 204 form a hinge structure. Specifically, it can be achieved by using a pin engagement, allowing the support rod 30 to rotate around the axis of the rotating ear 204 to achieve switching between the unfolded and retracted states.

[0041] Furthermore, during the operation of the single crystal furnace, when the crystal rod grows to the stage requiring support, the operator can drive the support rod 30 to adjust its angle around the rotating ear 204. The rotating ear 204 serves as a hinge fulcrum, allowing the support rod 30 to expand outward to form an accommodating space 303, or to retract inward to accommodate crystal rods of different diameters. The rotating pair formed by the support rod 30 and the rotating ear 204 ensures that each support rod 30 moves synchronously, ensuring that the accommodating space 303 remains centrally symmetrical. When the weight of the crystal rod increases, the connection structure between the rotating ear 204 and the second extension 203 can evenly transfer the load to the tray 201 body, avoiding stress concentration that could lead to structural failure. In other words, the rotating ear 204 structure allows the support rod 30 to adjust its angle according to the crystal rod growth stage, ensuring that the accommodating space 303 always matches the outer diameter of the crystal rod. The hinged connection reduces the assembly stress between components, avoids structural deformation caused by differences in thermal expansion, and significantly improves the operational reliability of the anti-fall device 100.

[0042] Example 7 Please see Figure 1 and Figure 2 Furthermore, the second extension 203 is provided with a plurality of clearance openings 70, which are spaced apart along the axial direction of the second extension 203. A rotating ear 204 is provided at each clearance opening 70, and the support rod 30 passes through the clearance opening 70.

[0043] Furthermore, the clearance 70 refers to the opening structure formed on the surface of the second extension 203, which can be formed by machining or casting, and is used to provide a space channel for the installation of the support rod 300.

[0044] The axial spacing setting refers to the distribution of the clearance openings 70 along the axial direction of the second extension 203 at a preset interval. Specifically, it can be achieved by equidistant or non-equidistant arrangement to ensure that the layout of the support rod 30 meets the support requirements. The rotating ear 204 refers to the protruding structure set in the clearance opening 70. Specifically, it can be fixed to the second extension 203 by welding or integral molding. It is used to connect the support rod 30 and allow it to rotate around the axis. The support rod 30 passing through the clearance opening 70 means that one end of the support rod 30 passes through the clearance opening 70 and is connected to the rotating ear 204. Specifically, it can be achieved by a pin or hinge structure, so that the support rod 30 can swing relative to the second extension 203.

[0045] Specifically, the clearance openings 70 are spaced axially along the second extension 203, providing a fixed path for the installation of the support rod 30. Meanwhile, the rotating lug 204 is located at the edge of the clearance opening 70 and connected to the support rod 30 via a pin, allowing the support rod 30 to rotate around the rotating lug 204. When the crystal rod is placed in the receiving space 303, the support rod 30 abuts against the surface of the crystal rod via the barb 302. At this time, the structure of the support rod 30 penetrating the clearance opening 70 ensures its stable position, preventing support failure due to force displacement. During crystal rod growth, the support rod 30 can adjust its angle according to the change in crystal rod diameter. The cooperation between the rotating lug 204 and the clearance opening 70 limits the swing range of the support rod 30, thereby maintaining continuous constraint on the crystal rod.

[0046] Example 8 Please see Figures 1 to 3 Furthermore, the support rod 30 is provided with a pivot hole 301 on the side near the tray 201. The pivot hole 301 is connected to the rotating ear 204 to realize the rotational connection between the support rod 30 and the support rod 30 disc.

[0047] In this embodiment, the pivot hole 301 refers to the through hole provided on the side of the support rod 30 near the tray 201. Specifically, a cylindrical hole structure can be used in conjunction with a pin to achieve a rotatable connection. By inserting the pin into the pivot hole 301, a hinge structure is formed with the rotating ear 204, so that the support rod 30 can rotate around the pin.

[0048] Furthermore, after the support rod 30 is connected to the rotating ear 204 through the pivot hole 301, it can rotate around the pivot at a certain angle. When the crystal rod is displaced due to the increase in weight during the growth process, the support rod 30 can adaptively adjust the angle so that the barb 302 always fits the surface of the crystal rod, avoiding support failure due to crystal rod shaking or displacement. In addition, the rotating connection structure can reduce the rigid contact between the support rod 30 and the tray 201, reducing the risk of stress concentration.

[0049] Example 9 Furthermore, a ramp is formed inside the tray 201, which is used to adapt to the counterweight 50.

[0050] Furthermore, the ramp refers to the inclined structure set inside the pallet 201, which can be implemented by using a slope or an arc surface. Its function is to contact the surface of the counterweight 50 and guide the position of the counterweight 50 within the accommodating space 303.

[0051] Among them, the matching of the weight 50 means that the shape of the ramp matches the contact surface of the weight 50. Specifically, this can be achieved by adjusting the curvature or tilt angle of the ramp to ensure that the contact area between the weight 50 and the ramp is maximized, thereby preventing the weight 50 from shifting when subjected to force.

[0052] Specifically, during the crystal ingot growth process, the weight 50 is suspended within the accommodating space 303 by a tungsten wire rope 40. As the weight of the crystal ingot increases, the weight 50 experiences a downward pulling force. At this time, the ramp within the tray 201 provides support through contact with the surface of the weight 50, distributing the pulling force to multiple areas of the tray 201 and preventing stress concentration at a single location. Simultaneously, the inclined design of the ramp guides the weight 50 to move along a predetermined direction during placement or detachment, reducing the risk of swaying due to positional deviation.

[0053] In some specific implementations, the ramp can be designed as an arc-shaped structure, for example, matching the curvature of the bottom of the counterweight 50, or it can be an inclined plane, for example, with an inclination angle ranging from 30 degrees to 60 degrees. Furthermore, the ramp surface can be further provided with anti-slip textures or coatings, for example, to improve fit stability by increasing the coefficient of friction.

[0054] Example 10 A single crystal furnace, characterized in that it comprises: Deputy Office; The anti-fall device 100 of any of the above is installed above the auxiliary compartment.

[0055] The beneficial effects achieved by this utility model are that, due to the setting of the clamping component 10 and the support rod component 20 with the barb 302 structure, the barb 302 abuts against the crystal rod to form a physical limit, which avoids the crystal rod from accidentally falling off due to excessive weight during the growth process. It has the advantages of effectively preventing the equipment from being damaged or exploded due to the accidental falling of the crystal rod, and improving safety and economy.

[0056] It is understood that those skilled in the art can combine various implementation methods in the above embodiments under the guidance of the above examples to obtain technical solutions with multiple implementation methods.

[0057] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A device for preventing falling, used in a single crystal furnace, characterized in that, It includes: Clamping assembly; A support rod assembly is provided, with the clamping assembly disposed above the support rod assembly. The support rod assembly includes a tray and a plurality of support rods connected to the tray. The plurality of support rods are arranged circumferentially around the tray and together define an accommodating space. The crystal rod is located in the accommodating space. A barb is provided on the side of the support rod away from the support rod assembly. The barb is used to hold the crystal rod to prevent it from falling.

2. The anti-fall device as described in claim 1, characterized in that, The clamping assembly includes a clamping sleeve, within which an installation space is formed, the shape of the inner surface of the installation space being adapted to the shape of the outer surface of the tray.

3. The anti-fall device as described in claim 2, characterized in that, The outer side of the clamping sleeve is provided with a first extension portion, which extends along the circumference of the clamping sleeve.

4. The anti-fall device as described in claim 3, characterized in that, The tray includes a main body and a second extension connected to the main body. The second extension extends circumferentially around the main body. When the tray is engaged with the clamping assembly, the first extension and the second extension are configured to cooperate with the single crystal furnace to realize the placement and release of the weight within the accommodating space.

5. The anti-fall device as described in claim 4, characterized in that, The tray has a first opening, the clamping sleeve has a second opening, and the single crystal furnace includes a tungsten wire rope. The tungsten wire rope enters the accommodating space through the first opening and the second opening and is connected to the counterweight.

6. The anti-fall device as described in claim 4, characterized in that, The second extension is provided with a plurality of rotating ears, and the support rod is connected to the tray through the rotating ears.

7. The anti-fall device as described in claim 6, characterized in that, The second extension is provided with a plurality of clearance openings, which are spaced apart along the axial direction of the second extension. The clearance openings are provided with the rotating lugs, and the support rods pass through the clearance openings.

8. The anti-fall device as described in claim 7, characterized in that, The support rod has a pivot hole on the side near the tray, and the pivot hole is connected to the rotating lug to realize the rotatable connection between the support rod and the support rod plate.

9. The anti-fall device as described in claim 8, characterized in that, The tray has a ramp formed inside, which is used to adapt to the weight.

10. A single crystal furnace, characterized in that, It includes: Deputy Office; The anti-fall device according to any one of claims 1-9 is installed above the auxiliary chamber.

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