A crystal separation device

Abstract

This application discloses a crystal separation device, including a base, a clamping mechanism, and a striking mechanism. The clamping mechanism is disposed on the base and is used to clamp the crystal. The striking mechanism is disposed on the base. When the clamping mechanism fixes the crystal, the striking mechanism outputs a striking action, and the impact force acts on the base, with the direction of the impact force from the crystal to the base, so as to separate the base from the crystal. Compared with related technologies, the crystal separation device disclosed in this application achieves the separation of the crystal from the base by clamping the crystal with the clamping mechanism and striking the base with the striking mechanism. The action is rapid, improving the efficiency of the crystal-base separation work. The mechanical structure ensures the controllability of positioning and striking force, eliminates the uncertainty of manual striking, ensures the consistency of the process for each separation, thereby ensuring the stability of crystal product quality and avoiding the risk of contamination caused by manually holding the crystal during striking.

Description

Technical Field

[0001] This application relates to the field of wafer growth technology, and more specifically, to a crystal separation apparatus. Background Technology

[0002] After the third-generation semiconductor silicon carbide crystal is grown in a single crystal furnace, the large silicon carbide crystal is bonded to a graphite base through a thin layer of graphite paper. At high temperatures, slight physical or chemical reactions may occur between the silicon carbide, the graphite paper, and the graphite base, resulting in a very tight bond.

[0003] Separating silicon carbide crystals from graphite substrates primarily relies on manual operation. The operator holds the crystal with one hand while gently tapping the edge of the graphite substrate with a tool in the other, causing vibration to break the bonding interface. Silicon carbide is highly hard and very brittle. This traditional method makes it difficult to precisely control the force and position of the taps, easily leading to excessive force or slippage, causing the crystal to bump or even break, resulting in significant economic losses. Manually holding the crystal may introduce contamination risks, and the separation efficiency is low. It depends on the operator's experience, cannot achieve standardized operation, and results in poor product quality consistency.

[0004] Therefore, how to improve the efficiency of crystal separation operations has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] The purpose of this application is to disclose a crystal separation apparatus to improve the efficiency of crystal separation operations.

[0006] A crystal separation device includes: a base, a clamping mechanism, and a striking mechanism;

[0007] The clamping mechanism is disposed on the base and is used to clamp the crystal;

[0008] The striking mechanism is disposed on the base;

[0009] When the clamping mechanism fixes the crystal, the striking mechanism outputs a striking action, and the impact force acts on the base. The direction of the impact force is from the crystal to the base, so as to separate the base from the crystal.

[0010] In one possible implementation, a protective mechanism is also included, which is disposed on the base; the base is provided with a first end face and a second end face, the first end face being the end face connected to the crystal, and the second end face being the end face opposite to the first end face;

[0011] When the clamping mechanism fixes the crystal, the base is located between the protective mechanism and the clamping mechanism, and there is a first preset gap between the protective mechanism and the second end face. The first preset gap is the gap from the crystal to the base.

[0012] In one possible implementation, the protective mechanism includes a limiting baffle and a support frame, the support frame being disposed on the base, the limiting baffle being connected to the support frame, and the limiting baffle having a working state and an avoidance state.

[0013] When the limiting baffle is in the working state, along the direction perpendicular to the second end face, the limiting baffle is located on the side of the second end face away from the first end face; in the direction from the crystal to the base, the gap between the limiting baffle and the second end face is the first preset gap;

[0014] When the limiting baffle is in the avoidance state, the projection of the limiting baffle on the plane where the second end face is located is outside the second end face, or along the direction perpendicular to the second end face, the limiting baffle is located on the side of the second end face away from the first end face; in the direction from the crystal to the base, the gap between the limiting baffle and the second end face is a second preset gap, and the second preset gap is greater than the first preset gap.

[0015] In one possible implementation, the striking mechanism includes at least one push rod and a first driving device;

[0016] The push rod is configured to reciprocate in a straight line and strike the base at the end of the movement path; the first drive device drives the push rod to move.

[0017] In one possible implementation, the first drive device includes a ball screw assembly and a motor. The ball screw assembly includes a screw and a nut that is threadedly engaged with the screw. The screw is driven by the output shaft of the motor. The push rod is fixedly connected to the nut.

[0018] In one possible implementation, the clamping mechanism includes at least two clamping blocks, wherein at least one of the clamping blocks is movable in the radial direction of the crystal to clamp the crystal.

[0019] In one possible implementation, the clamping mechanism further includes a bushing disposed on the side of the clamping block facing the crystal.

[0020] In one possible implementation, the clamping mechanism further includes a transmission screw and a second drive device;

[0021] The transmission screw has a first threaded section and a second threaded section with opposite directions of rotation. The first threaded section and the second threaded section are each threadedly connected to one of the clamping blocks. The transmission screw is driven to the output shaft of the second drive device. The transmission screw drives the clamping blocks to move closer to each other or further away from each other.

[0022] In one possible implementation, a first sensor is also included, which is used to detect the contact force of the push rod;

[0023] The striking mechanism further includes a starting action, which is output before the striking mechanism outputs the striking action. The starting action is configured such that the top rod extends and contacts the base until the contact force reaches a preset contact force. The striking action is configured such that the striking stroke of the top rod is controlled according to the preset contact force.

[0024] In one possible implementation, a second sensor is also included, which is used to detect the clamping force of the clamping mechanism.

[0025] In the operation of the crystal separation device disclosed in this application, the operator first places the bonded crystal and base in the center of the clamping mechanism, and operates the clamping mechanism to clamp the crystal, with the crystal below and the base above, fixed on the worktable. After clamping, the striking mechanism reciprocates and strikes the base, the impact force breaking the adhesive interface between the base and the crystal, causing the crystal to separate from the base. The operator removes the base, operates the clamping mechanism to release the crystal, and can then remove the crystal, completing the separation of the crystal from the base.

[0026] Compared to related technologies, the crystal separation device disclosed in this application separates the crystal from the base by clamping the crystal with a clamping mechanism and striking the base with a striking mechanism. This rapid action improves the efficiency of crystal-base separation. The mechanical structure ensures controllability of positioning and striking force, eliminates the uncertainty of manual striking, and guarantees the consistency of the separation process each time. This ensures the stability of crystal product quality and avoids the risk of contamination caused by manually holding the crystal during striking. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments or related technologies of this application, the accompanying drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the crystal separation device disclosed in the embodiments of this application.

[0029] The attached figures are labeled as follows:

[0030] 100. Base;

[0031] 200. Clamping mechanism;

[0032] 300. Striking mechanism;

[0033] 400. Protective facilities;

[0034] 500, base;

[0035] 600. Crystal;

[0036] 700. Operation panel;

[0037] 800. Control button; 810. Switch button; 820. Emergency stop button. Detailed Implementation

[0038] The purpose of this application is to disclose a crystal separation apparatus to improve the efficiency of crystal separation operations.

[0039] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0040] See Figure 1 The crystal separation device disclosed in this application is used to separate crystal 600 from base 500, and includes base 100, clamping mechanism 200 and striking mechanism 300.

[0041] The base 100 can be a square equipment platform, serving as the basic framework of the entire device. The upper surface of the base 100 has a worktable with grooves for mounting and adjusting other components. The clamping mechanism 200 is mounted on the worktable of the base 100 and can be any existing device capable of clamping, securely holding the crystal 600.

[0042] The striking mechanism 300 is installed within the base 100, with its output end extending out of the worktable surface. When the clamping mechanism 200 clamps the crystal 600, the crystal 600 and the base 500 are fixed to the worktable surface in a coupled state. The striking mechanism 300 reciprocates and strikes the base 500, thereby outputting a striking action. The impact force acts on the base 500, and its direction is from the crystal 600 to the base 500, causing the base 500 to tend to move away from the crystal 600 under the action of the impact force. The crystal 600 is fixed, and the adhesive surface between the crystal 600 and the base 500 is destroyed, ultimately causing the base 500 to separate from the crystal 600. The striking mechanism 300 can be implemented in ways including but not limited to using a high-speed pneumatic cylinder or an electric cylinder to drive the impact component to perform the impact action; those skilled in the art can design it according to their needs.

[0043] In the operation of the crystal separation device disclosed in this application, the operator first places the bonded crystal 600 and the base 500 at the center of the clamping mechanism 200. The clamping mechanism 200 clamps the crystal 600, with the crystal 600 below and the base 500 above, and fixes it on the worktable. After clamping, the striking mechanism 300 reciprocates and strikes the base 500. The impact force breaks the bonding interface between the base 500 and the crystal 600, causing the crystal 600 to separate from the base 500. The operator removes the base 500, operates the clamping mechanism 200 to release the crystal 600, and can then remove the crystal 600, completing the separation of the crystal 600 from the base 500.

[0044] Compared to related technologies, the crystal separation device disclosed in this application separates the crystal 600 from the base 500 by clamping the crystal 600 with a clamping mechanism 200 and striking the base 500 with a striking mechanism 300. This rapid action improves the efficiency of the separation process. The mechanical structure ensures controllability of the positioning and striking force, eliminating the uncertainty of manual striking and guaranteeing consistency in the separation process. This ensures stable crystal product quality and avoids the risk of contamination from manually holding the crystal 600 during striking.

[0045] To enhance the safety of the device, the crystal separation apparatus may further include a protective mechanism 400. The protective mechanism 400 is mounted on the base 100. The base 500 has a first end face and a second end face; the first end face is the one connected to the crystal 600, and the second end face is the one opposite to the first end face. When the clamping mechanism 200 fixes the crystal, the base 500 is located between the protective mechanism 400 and the clamping mechanism 200, with the first end face of the base 500 facing downwards and the second end face facing upwards. The protective mechanism 400 may be a movable protective beam or baffle, disposed on the second end face of the base 500. A first preset gap exists between the protective mechanism 400 and the second end face of the base 500 in the direction from the crystal 600 to the base 500.

[0046] During operation, after the striking mechanism 300 separates the base 500 from the crystal 600, the base 500 continues to move upward due to its own inertia. When the second end face of the base 500 contacts the protective mechanism 400, the base 500 is stopped and falls back to its original position. This design effectively blocks and restricts the separated base 500, preventing it from flying at high speed and protecting the safety of operators and surrounding equipment. It also avoids the risk of the base 500 hitting something when falling from a height. The first preset gap is designed to allow the base 500 to separate from the crystal 600 and effectively prevents the base 500 from being thrown too high due to excessive impact force. In this embodiment, the first preset gap can be set in the range of 1-3mm.

[0047] In one specific embodiment, the protective mechanism 400 may include a limiting baffle 410 and a support frame 420. The support frame 420 is disposed on the base 100 and may consist of a horizontal beam and a vertical beam, symmetrically arranged on both sides of the base 100, with the horizontal beam located above the base 100. Each horizontal beam of the support frame 420 is provided with a limiting baffle 410. The limiting baffle 410 has a working state and an avoidance state.

[0048] Specifically, the limiting baffle 410 and the support frame 420 can be connected by a slide rail and a slider, allowing the limiting baffle 410 to slide relative to the support frame 420 in the radial direction along the base 500. When the limiting baffle 410 is in the working state, it moves above the base 500. The gap between the lower surface of the limiting baffle 410 and the second end face in the direction from the crystal 600 to the base 500 is a first preset gap. When the limiting baffle 410 is moved radially to the avoidance state, such that the projection of the limiting baffle 410 onto the plane of the second end face is located outside the second end face, the base 500 can be removed or inserted from above.

[0049] Alternatively, the limiting baffle 410 and the support frame 420 can be hinged together via a hinge shaft, allowing the limiting baffle 410 to rotate around the hinge shaft, the axis of which is parallel to the radial direction of the base 500. When the limiting baffle 410 is in the working state, it rotates to be perpendicular to the second end face of the base 500. The gap between the lower surface of the limiting baffle 410 and the second end face in the direction from the crystal 600 to the base 500 is a first preset gap. When the limiting baffle 410 is rotated to the clearance state, the gap between the lower surface of the limiting baffle 410 and the second end face in the direction from the crystal 600 to the base 500 is a second preset gap, which is larger than the first preset gap. The second preset gap must be sufficient to allow the base 500 to be removed or inserted from the side.

[0050] The protective mechanism designed in this way provides a safe operating space by switching between working and avoidance modes. This makes it easier to pick up and place the base tray 500, and facilitates observation of whether the clamping is in place, allowing for precise positioning of the crystal 600. The limit baffle 410 can be driven by a motor or other device to achieve automated switching, saving operation time.

[0051] In one embodiment, the striking mechanism 300 includes at least one push rod and a first driving device. The push rod is configured to reciprocate in a linear direction, and at the end of its movement path, the push rod strikes the base 500. The first driving device drives the push rod to move. To balance the force on the base 500, in this embodiment, four push rods are included and evenly arranged along the circumference. For ease of equipment maintenance, an impact head can be provided at the easily worn end of the push rod, and the impact head is directly fixed to the push rod by a threaded connection or a set screw. The material and head shape of the impact head can be changed according to actual needs; for example, a high-temperature resistant alloy material can be used.

[0052] In one specific embodiment, the first drive device includes a motor and a ball screw pair. The motor is fixedly mounted on the base 100. In this embodiment, the motor is preferably a servo motor, which has high control precision, a wide speed range, and stable torque control. Of course, in other alternatives, a stepper motor can also be used.

[0053] The ball screw assembly is the core component for motion conversion, consisting of a screw and a nut. The screw can be directly connected to the motor's output shaft via a coupling, ensuring precise power transmission. The push rod is fixedly connected to the nut. The motor drives the screw to rotate synchronously, and the screw's rotational motion is converted into the linear motion of the nut along the screw axis, thereby moving the push rod. By precisely controlling the motor's rotational speed and direction, the push rod can achieve precise reciprocating linear motion, completing the striking action. Due to the high response characteristics of the motor, combined with the high transmission efficiency of the ball screw assembly, this design can achieve extremely high acceleration and instantaneous speed with fast response. It also provides a foundation for subsequent digital and precise control of the striking action, allowing for independent and stepless adjustment of the striking force, striking frequency, and striking stroke by directly and independently adjusting the motor's motion parameters. The ball screw assembly itself has high mechanical rigidity and transmission accuracy, resulting in higher durability and reliability, and a longer service life, making it particularly suitable for high-frequency, long-cycle automated testing scenarios.

[0054] In one specific implementation, the clamping mechanism 200 includes at least two clamping blocks, at least one of which is movable along the radial direction of the crystal 600 to clamp the crystal 600. Specifically, the clamping blocks may have V-shaped clamping openings, which are formed by two symmetrical inclined planes, the included angle of which can be selected by the designer to accommodate crystals 600 of different sizes. For easy adjustment of its position, the clamping blocks can be mounted by hinge.

[0055] To ensure stable clamping, four clamping blocks are evenly arranged along the circumference in this embodiment. If there are two clamping blocks, they must be arranged symmetrically. The movable clamping blocks can be driven manually or by a cylinder, motor, or other device.

[0056] After the crystal 600 is placed between the clamping blocks, the clamping blocks move towards each other. The two beveled surfaces of the V-shaped clamping openings contact the outer periphery of the crystal 600. Due to the geometric characteristics of the V-shape, under the action of the clamping forces on both sides, the clamping blocks rotate around the hinge axis to adjust their angles. The center O of the crystal 600 is automatically adjusted and stabilized at a fixed position on the symmetrical center line of the two V-shaped clamping openings, achieving excellent automatic centering function and adapting to crystals of different sizes. At the same time, the beveled surfaces of the V-shaped clamping openings form two line contacts with the outer periphery of the crystal 600, which results in more uniform force distribution and more stable clamping compared to point contact.

[0057] To increase clamping friction, the clamping mechanism 200 may also include a bushing disposed on the side of the clamping block facing the crystal 600. For example, the bushing may be made of high-temperature resistant silicone material. High-temperature resistant silicone material not only increases friction and prevents the crystal 600 from slipping during processing, but also protects the surface of the crystal 600 to a certain extent, preventing damage to the crystal 600.

[0058] To improve clamping efficiency, the clamping mechanism 200 may further include a transmission screw and a second drive device. The transmission screw is rotatably supported on the base 100 and has a first threaded section and a second threaded section with opposite directions of rotation. Each of the first and second threaded sections is threadedly connected to a clamping block. The output shafts of the transmission screw and the second drive device are drively connected. When the transmission screw rotates, due to the opposite directions of rotation of the threads, the two clamping blocks will synchronously move closer to or further away from each other along the radial direction of the crystal 600. The second drive device can be a servo motor or a stepper motor. This drive method has a self-locking function, and even if there is external vibration or impact, the clamping device can maintain the clamping force stably for a long time, and the workpiece will not loosen, greatly improving the safety and reliability of the operation.

[0059] In one specific embodiment, the crystal separation device further includes a first sensor for detecting the contact force of the push rod. The clamping mechanism 200 clamps the crystal 600, and after fixing the crystal 600 and the base 500 to the work platform, the push rod is in a retracted position and not in contact with the base 500. The striking mechanism 300 outputs a starting action before outputting the striking action. The starting action is configured such that the push rod extends and contacts the base 500 until the contact force reaches a preset contact force. The striking action is configured such that, according to the preset contact force, the striking stroke of the push rod is controlled, causing the push rod to reciprocate within the striking stroke, thereby performing short pulse striking. For example, the preset contact force can be set to 20N. This design, through real-time feedback and control, ensures that the striking force of each strike falls within the preset expected range, completely eliminating striking force fluctuations caused by mechanical wear or individual workpiece differences, and guaranteeing process accuracy and consistency.

[0060] To prevent the clamping mechanism 200 from over-clamping and damaging the crystal 600, the crystal separation device also includes a second sensor. This second sensor detects the clamping force of the clamping mechanism 200. The second sensor monitors the clamping force in real time and compares it with a preset target clamping force. Based on the comparison result, the clamping force can be adjusted accordingly. Through force control, the clamping force can be precisely limited to a range that securely fixes the crystal 600 while ensuring absolute safety, preventing excessive clamping force from causing deformation or surface damage to the crystal 600, thus achieving non-destructive clamping.

[0061] To enhance the intelligence of the device, the crystal separation unit may also include a system start button, an emergency stop button, and an HMI (Human Machine Interface). The HMI can be an industrial touchscreen for parameter setting (such as clamping force, push rod force, and stroke), issuing operation commands, and displaying equipment status. The system start button is used to start the equipment system after power-on. The emergency stop button is used to immediately cut off the power supply in abnormal situations. All systems are integrated on the base 100. The control unit is connected to the drive components of the clamping mechanism 200, the striking mechanism 300, and the protective mechanism 400 via electrical wiring. The servo motor and force sensor are controlled by a central PLC (Programmable Logic Controller). The PLC receives commands from the touchscreen and feedback signals from the sensors, coordinating the actions of each component. Servo closed-loop control and force sensor feedback ensure precise and controllable striking force, preventing crystal breakage, standardizing process parameters, and improving product yield.

[0062] The terms "first" and "second," etc., used in the specification and claims of this application are used to distinguish different objects, not to describe a specific order, and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units may include steps or units not listed, but rather steps or units not listed. Additionally, in the description of embodiments in this application, "a plurality of" means two or more.

[0063] In the description of this application, it should be understood that the terms "height," "thickness," "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. In the description of this application, "a plurality of" means two or more, and "at least one" can mean one, two, or more, unless otherwise expressly specified.

[0064] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Specific technical means in some embodiments may be incorporated, in whole or in part, into another embodiment unless explicitly excluded by another embodiment. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A crystal separation device for separating a crystal (600) from a seed holder (500), characterized in that, include: Base (100), clamping mechanism (200) and striking mechanism (300); The clamping mechanism (200) is disposed on the base (100) and is used to clamp the crystal (600). The striking mechanism (300) is disposed on the base (100); When the clamping mechanism (200) fixes the crystal (600), the striking mechanism (300) outputs a striking action, and the impact force acts on the base (500). The direction of the impact force is from the crystal (600) to the base (500), so as to separate the base (500) from the crystal (600).

2. The crystal separation apparatus of claim 1, wherein It also includes a protective mechanism (400), which is disposed on the base (100); the base (500) is provided with a first end face and a second end face, the first end face being the end face connected to the crystal (600), and the second end face being the end face opposite to the first end face; When the clamping mechanism (200) fixes the crystal, the base (500) is located between the protective mechanism (400) and the clamping mechanism (200), and there is a first preset gap between the protective mechanism (400) and the second end face. The first preset gap is the gap from the crystal (600) to the base (500).

3. The crystal separation apparatus of claim 2, wherein The protective mechanism (400) includes a limiting baffle (410) and a support frame (420). The support frame (420) is disposed on the base (100). The limiting baffle (410) is connected to the support frame (420). The limiting baffle (410) has a working state and an avoidance state. When the limiting baffle (410) is in the working state, along the direction perpendicular to the second end face, the limiting baffle (410) is located on the side of the second end face away from the first end face; in the direction from the crystal (600) to the base (500), the gap between the limiting baffle (410) and the second end face is the first preset gap; When the limiting baffle (410) is in the avoidance state, the projection of the limiting baffle (410) on the plane where the second end face is located is outside the second end face, or along the direction perpendicular to the second end face, the limiting baffle (410) is located on the side of the second end face away from the first end face; in the direction from the crystal (600) to the base (500), the gap between the limiting baffle (410) and the second end face is a second preset gap, and the second preset gap is greater than the first preset gap.

4. The crystal detachment apparatus of claim 1, wherein The striking mechanism (300) includes at least one push rod and a first driving device; The push rod is configured to reciprocate in a straight line and strike the base (500) at the end of the movement path; the first drive device drives the push rod to move.

5. The crystal detachment apparatus of claim 4, wherein The first driving device includes a ball screw assembly and a motor. The ball screw assembly includes a lead screw and a nut that is threadedly engaged with the lead screw. The lead screw is driven by the output shaft of the motor. The push rod is fixedly connected to the nut.

6. The crystal separation apparatus as described in claim 1, characterized in that, The clamping mechanism (200) includes at least two clamping blocks, wherein at least one of the clamping blocks is movable in the radial direction of the crystal (600) to clamp the crystal (600).

7. The crystal separation apparatus as described in claim 6, characterized in that, The clamping mechanism (200) further includes a bushing disposed on the side of the clamping block facing the crystal (600).

8. The crystal separation apparatus as described in claim 6, characterized in that, The clamping mechanism (200) also includes a transmission screw and a second drive device; The transmission screw has a first threaded section and a second threaded section with opposite directions of rotation. The first threaded section and the second threaded section are each threadedly connected to one of the clamping blocks. The transmission screw is driven to the output shaft of the second drive device. The transmission screw drives the clamping blocks to move closer to each other or further away from each other.

9. The crystal separation apparatus as described in claim 4, characterized in that, It also includes a first sensor, which is used to detect the contact force of the push rod; The striking mechanism (300) further includes a starting action, which is output before the striking action is output. The starting action is configured such that the top rod extends and contacts the base (500) until the contact force reaches a preset contact force. The striking action is configured such that the striking stroke of the top rod is controlled according to the preset contact force.

10. The crystal separation apparatus as described in claim 1, characterized in that, It also includes a second sensor for detecting the clamping force of the clamping mechanism (200).

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