A water-cooled base for a magnetically levitated molecular pump

Abstract

This application discloses a water-cooled base for a magnetic levitation molecular pump, including a base body. The base body has an inlet and an outlet on its side. A cooling water channel is integrally formed within the base body using a molding technique. The inlet and outlet are connected through the cooling water channel, which is annular in shape and has several curved structural segments. This water-cooled base for the magnetic levitation molecular pump can effectively improve the cooling efficiency of the water-cooled base.

Description

Technical Field

[0001] The embodiments of this utility model relate to the field of cooling magnetic levitation molecular pumps. More specifically, this utility model relates to a water-cooled base for a magnetic levitation molecular pump. Background Technology

[0002] The core function of the water-cooled base for the magnetic levitation molecular pump is to work with the heating system to achieve precise temperature control of the pump body. In particular, when the operating temperature of the pump body exceeds the set threshold, the cooling device of the water-cooled base is required to quickly cool down the pump body and ensure the stable operation of the magnetic levitation molecular pump.

[0003] Currently, the mainstream manufacturing method for water-cooled bases of magnetic levitation molecular pumps in the industry is as follows: first, 304 stainless steel pipes bent into shape are assembled with 304 stainless steel connectors through welding to form a water-cooled pipe assembly; then, this water-cooled pipe assembly is assembled with the main body of the water-cooled base; finally, resin potting is used to fix it, forming a complete water-cooled base component. Meanwhile, due to considerations of current manufacturing cost control, the cooling water circuit is designed as a single-circuit circular structure. However, the above-mentioned existing technical solutions have significant drawbacks and are difficult to meet actual usage requirements: First, the manufacturing process involves multiple complex steps such as welding, assembly, and potting, resulting in high manufacturing costs; second, the thermal conductivity of resin materials is much lower than that of metals, severely hindering heat transfer efficiency and significantly reducing the cooling performance of the water-cooled base; third, the single-circuit circular water circuit design further limits the cooling effect, making it impossible to achieve rapid cooling after the pump body overheats; fourth, the existing assembly and fixing methods have hidden dangers, with frequent water leakage problems in actual applications, which not only affect the normal operation of the cooling function but may also damage the core components of the magnetic levitation molecular pump. The overall technical solution urgently needs optimization. Utility Model Content

[0004] To address one or more of the technical problems mentioned above, this invention provides a water-cooled base for a magnetically levitated molecular pump, which can effectively improve the cooling efficiency of the water-cooled base.

[0005] According to a first aspect of the present invention, a water-cooled base for a magnetic levitation molecular pump is provided, including a water-cooled base body. The side of the water-cooled base body is provided with an inlet and an outlet. A cooling water channel is formed in the water-cooled base body by an integral molding technology. The inlet and outlet are connected through the cooling water channel. The cooling water channel is annular in structure, and several curved structural segments are formed on the annular shape.

[0006] In some embodiments, the integral molding technology includes 3D printing technology or casting technology.

[0007] In some embodiments, the cross-section of the water-cooled base body in the thickness direction is located in the X-axis direction, wherein the cooling water flow channel forms a plurality of curved structural segments along the X-axis direction.

[0008] In some embodiments, the thickness direction of the water-cooled base body is located in the Y-axis direction, wherein the cooling water flow channel forms several curved structural segments along the Y-axis direction.

[0009] In some embodiments, the cross section of the water-cooled base body in the thickness direction is located in the X-axis direction, and the thickness direction of the water-cooled base body is located in the Y-axis direction, wherein the cooling water flow channel forms several curved structural segments along both the X-axis and Y-axis directions.

[0010] In some embodiments, the cooling water flow channel is constructed in a spiral shape.

[0011] In some embodiments, there are multiple cooling water channels, and each cooling water channel is arranged independently in parallel or in series.

[0012] In some embodiments, the cross-sectional shape of the cooling water channel is circular, rectangular, or polygonal.

[0013] In some embodiments, the extension of the cooling water channel covers a predetermined cooling area of ​​the water-cooled base body.

[0014] In some embodiments, the minimum distance between the cooling water channel and the inner wall of the water-cooled base body is no more than 10 mm.

[0015] The magnetic levitation molecular pump water-cooled base of this invention, as described above, utilizes 3D printing technology or casting to directly form cooling water channels within the water-cooled base body. Compared to existing technologies, this invention eliminates the manufacturing and assembly steps and costs associated with existing water-cooling pipe components, and also eliminates the resin fixing method, thereby effectively improving the cooling effect of the magnetic levitation molecular pump water-cooled base. Furthermore, by changing the existing annular cooling water channel to a multi-segmented, irregularly shaped channel, the contact area between the cooling water and the isolation ring base is increased, further enhancing the cooling effect of the magnetic levitation molecular pump water-cooled base. Attached Figure Description

[0016] The above and other objects, features, and advantages of the present invention will become readily understood by reading the following detailed description of exemplary embodiments with reference to the accompanying drawings. In the drawings, several embodiments of the present invention are shown by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein: Figure 1 This is a schematic diagram of the structure of the water-cooled base of the magnetic levitation molecular pump according to an embodiment of the present invention; Figure 2 for Figure 1 The diagram shows the structure of the water-cooled base of the magnetic levitation molecular pump along the AA direction. Figure 3 This is a structural perspective view of the first embodiment of the water-cooled base for the magnetic levitation molecular pump of this utility model. Figure 4 This is a structural perspective view of the second embodiment of the water-cooled base for the magnetic levitation molecular pump of this utility model. Figure 5 This is a structural perspective view of the third embodiment of the water-cooled base for the magnetic levitation molecular pump of this utility model. Figure 6 This is a structural perspective view of the fourth embodiment of the water-cooled base for the magnetic levitation molecular pump of this utility model. Figure 7 for Figure 2 The simulation results of the cross-section of the water-cooled base of the magnetic levitation molecular pump are shown in the figure. Figure 8 for Figure 1 The diagram shows the simulation results of the cooling surface of the water-cooled base of the magnetic levitation molecular pump. Detailed Implementation

[0017] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0018] Figure 1 and Figure 2 The structure of a water-cooled base 100 for a magnetically levitated molecular pump according to an embodiment of the present invention is shown. Figure 1 and Figure 2 As shown, the water-cooled base 100 of the magnetic levitation molecular pump includes a water-cooled base body 1. The side of the water-cooled base body 1 is provided with an inlet (not shown in the figure) and an outlet (not shown in the figure). A cooling water channel 2 is formed inside the water-cooled base body 1 by integral molding technology. The inlet and outlet are connected through the cooling water channel 2. The cooling water channel 2 is constructed in a ring shape, and several curved structural segments are formed on the ring.

[0019] In some embodiments, the integral molding technology includes 3D printing technology or casting technology to meet the processing and manufacturing of the complex structure of the water-cooled base body 1.

[0020] In some embodiments, a sealing structure (not shown in the figure) is provided at the inlet and outlet ports. The sealing structure is an annular sealing ring groove or a sealing gasket mating surface to improve the sealing effect of the inlet and outlet connections with the connector. In some embodiments, the material of the water-cooled base body 1 may be 6061 aluminum alloy. In some embodiments, the bottom of the water-cooled base body 1 may be provided with a mounting flange adapted to the pump body, and the mounting flange has at least three bolt mounting holes evenly distributed on it for connecting the pump body.

[0021] The following are different structural forms of cooling water flow channel 2: Please refer to Figure 3 In the first embodiment, the cross section of the water-cooled base body 1 in the thickness direction is located in the X-axis direction, wherein the cooling water channel 2 forms several curved structural segments along the X-axis direction.

[0022] Please refer to Figure 4 In the second embodiment, the thickness direction of the water-cooled base body 1 is located in the Y-axis direction, wherein the cooling water channel 2 forms several curved structural segments along the Y-axis direction.

[0023] In the third embodiment, the cross section of the water-cooled base body 1 in the thickness direction is located in the X-axis direction, and the thickness direction of the water-cooled base body 1 is located in the Y-axis direction. The cooling water channel 2 forms several curved structural segments along both the X-axis and Y-axis directions.

[0024] Please refer to Figure 5 In the fourth embodiment, the cooling water channel 2 is constructed as a spiral structure.

[0025] Please refer to Figure 6 In the fifth embodiment, there are multiple cooling water channels 2, and each cooling water channel 2 is arranged independently in parallel or in series.

[0026] The water-cooled base 100 for the magnetic levitation molecular pump of this embodiment, according to the above-described configuration, on the one hand, uses 3D printing technology or casting to directly form the cooling water channel 2 inside the water-cooled base body 1. Compared with the prior art, the water-cooled base 100 for the magnetic levitation molecular pump of this embodiment eliminates the manufacturing and assembly steps and costs of the water-cooling pipe assembly in the prior art, and also eliminates the resin fixing method, thereby effectively improving the cooling effect of the water-cooled base 100 for the magnetic levitation molecular pump of this embodiment. On the other hand, the existing annular cooling water channel 2 is changed to an irregularly shaped channel with multiple curved structural segments in this embodiment, increasing the contact area between the cooling water and the isolation ring base, thereby further improving the cooling effect of the water-cooled base 100 for the magnetic levitation molecular pump of this embodiment.

[0027] In some embodiments, the cross-sectional shape of the cooling water channel 2 is circular, rectangular, or polygonal.

[0028] In some embodiments, the extension range of the cooling water channel 2 covers the preset cooling area of ​​the water-cooled base body 1 to improve the effective cooling efficiency of the cooling water channel 2.

[0029] In some embodiments, the minimum distance between the cooling water channel 2 and the inner wall of the water-cooled base body 1 is no more than 10 mm, so as to get closer to the surface to be cooled and improve the cooling effect.

[0030] The following is the analysis process and results of the water-cooled base 100 for the magnetic levitation molecular pump according to an embodiment of this utility model: 1) Optimization of boundary conditions and mesh generation: The fluid domain inlet is set to an inlet volumetric flow rate of 3 L / min, the outlet to ambient pressure, the inlet water temperature to 20.5℃, and the initial solid temperature to 70℃. Transient analysis is performed for 10 seconds. After mesh generation, the total number of meshes is 153,182, with 39,224 fluid meshes, 113,958 solid meshes, 23,953 contact meshes, and 0 irregular or trimmed meshes.

[0031] 2) The simulation results can be referenced as follows: Figure 7 and Figure 8 The simulation screenshot shown.

[0032] 3) Results Analysis: First, the same location was analyzed as in existing technologies. Both analyses used the same cross-sectional views and displayed 20 color levels. The analysis was conducted from three dimensions:

[0033] (1) Temperature comparison of the isolation ring seat: Simulation results show that the temperature in each region of the optimized scheme is significantly lower than that of the original scheme.

[0034] (2) Comparison of temperature distribution in the top view section: By comparing the top-view cross-sectional views, the original design's cooling area was confined to the contact area between the resin and the water-cooling pipe, completely failing to diffuse into the metal area. Simulation results of the optimized design show that the cooling area has reached the bottom of the isolation ring seat, and the cooling location completely covers A and B (in combination with...). Figure 2 As shown, the main cooling area), the location with higher temperature is C (in conjunction with...). Figure 2 As shown, the secondary cooling area has a temperature distribution that fully meets the design requirements.

[0035] (3) Comparison of temperature distribution in the front view screenshot: Comparing the front cross-sectional view with the top cross-sectional view, the results are basically consistent. The original design limited the cooling area to the contact point between the resin and the water-cooling pipe, failing to diffuse to the metal area. The simulation results of the optimized design show that the cooling area extends to the bottom of the isolation ring seat, and the cooling position completely covers A and B (the main cooling areas). The area with higher temperature is C (the secondary cooling area), and the temperature distribution fully meets the design requirements.

[0036] In the foregoing description of this application, unless otherwise expressly specified and limited, the terms "fixed," "installed," "connected," or "linked" should be interpreted broadly. For example, the term "linked" can refer to a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; or it can refer to the internal communication of two components or the interaction between two components. Therefore, unless otherwise expressly limited in this application, those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0037] Based on the above description of this application, those skilled in the art will also understand that the following terms used, such as "upper," "lower," "front," "rear," "left," "right," "length," "width," "thickness," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," "center," "longitudinal," "transverse," "clockwise," or "counterclockwise," are terms indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings of this application. They are only for the purpose of facilitating the explanation of the present invention and simplifying the description, and do not explicitly or implicitly suggest that the device or element involved must have the specific orientation, or be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as a limitation on the present invention.

[0038] Furthermore, the terms "first" or "second," etc., used in this application to refer to numbers or ordinal numbers are for descriptive purposes only and should not be construed as explicitly or implicitly indicating relative importance or specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, or more, unless otherwise explicitly specified.

[0039] While various embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many modifications, alterations, and alternatives will occur to those skilled in the art without departing from the spirit and intent of the present invention. It should be understood that various alternatives to the embodiments of the present invention described herein may be employed in the practice of the present invention. The appended claims are intended to define the scope of protection of the present invention and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A water-cooled base for a magnetically levitated molecular pump, characterized in that, The device includes a water-cooled base body, on the side of which is provided with a water inlet and a water outlet. A cooling water channel is formed in the body of the water-cooled base body by integral molding technology. The water inlet and the water outlet are connected through the cooling water channel. The cooling water channel is annular in structure, and several curved structural segments are formed on the annular shape.

2. The water-cooled base for the magnetic levitation molecular pump according to claim 1, characterized in that, The integral molding technology includes 3D printing technology or casting technology.

3. The water-cooled base for the magnetic levitation molecular pump according to claim 1 or 2, characterized in that, The cross-section of the water-cooled base body in the thickness direction is located in the X-axis direction, wherein the cooling water flow channel forms several curved structural segments along the X-axis direction.

4. The water-cooled base for the magnetic levitation molecular pump according to claim 1 or 2, characterized in that, The thickness direction of the water-cooled base body is located in the Y-axis direction, wherein the cooling water flow channel forms several curved structural segments along the Y-axis direction.

5. The water-cooled base for the magnetic levitation molecular pump according to claim 1 or 2, characterized in that, The cross-section of the water-cooled base body in the thickness direction is located in the X-axis direction, and the thickness direction of the water-cooled base body is located in the Y-axis direction. The cooling water channel forms several curved structural segments along both the X-axis and Y-axis directions.

6. The water-cooled base for the magnetic levitation molecular pump according to claim 1 or 2, characterized in that, The cooling water flow channel is constructed in a spiral shape.

7. The water-cooled base for the magnetic levitation molecular pump according to claim 1 or 2, characterized in that, The cooling water channels are multiple, and each cooling water channel is arranged independently in parallel or in series.

8. The water-cooled base for the magnetic levitation molecular pump according to claim 1 or 2, characterized in that, The cross-sectional shape of the cooling water channel is circular, rectangular, or polygonal.

9. The water-cooled base for the magnetic levitation molecular pump according to claim 1 or 2, characterized in that, The cooling water channel extends to cover the preset cooling area of ​​the water-cooled base body.

10. The water-cooled base for the magnetic levitation molecular pump according to claim 1 or 2, characterized in that, The minimum distance between the cooling water channel and the inner wall of the water-cooled base body is no more than 10mm.

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