Differential screw assembly, slide, and angle adjustment device for optical components

Abstract

This application discloses a differential screw assembly, a slide, and an angle adjustment device for optical components. The differential screw assembly includes a differential screw body, a fixed end, and a movable end. The first end of the differential screw body has a first external thread, and the second end of the differential screw body has a second external thread. The fixed end is sleeved on the first end of the differential screw body and has a first internal thread, which engages with the first external thread. The movable end is sleeved on the second end of the differential screw body and has a second internal thread, which engages with the second external thread. The first external thread and the second external thread have the same direction, and the lead of the first external thread is greater than the lead of the second external thread. This solution improves the precision and controllability of the adjustment device.

Description

Technical Field

[0001] This application generally relates to the field of precision adjustment machinery. More specifically, this application relates to a differential screw assembly, slide, and angle adjustment device for optical components. Background Technology

[0002] In high-end manufacturing fields such as semiconductor manufacturing, optical instrument R&D, and precision electronic processing, the core performance of high-precision equipment directly determines the quality and accuracy of the final product. In such equipment, the installation and adjustment precision requirements for core components such as optical lenses, laser emitters, and wafer stages are extremely high, generally requiring adjustment accuracy at the micrometer or even nanometer level to meet the equipment's design specifications and production needs. For example, in semiconductor lithography equipment, the lens assembly of the optical system needs precise fine-tuning to achieve accurate optical path calibration; any tiny positional deviation can lead to distortion of the lithographic pattern, thus affecting chip yield and performance. In high-precision laser measurement equipment, the positional fine-tuning accuracy of the laser emission module directly relates to the accuracy of the measurement data, having a critical impact on subsequent data analysis and applications. To achieve precise fine-tuning of the aforementioned core components, the industry currently employs two mainstream adjustment methods: micrometer fine-tuning slide adjustment and top-pull mechanism adjustment. The micrometer fine-tuning slide achieves displacement output through threaded transmission. While it offers a certain level of adjustment accuracy, its load capacity is typically limited, and it often uses a spring mechanism for return reset. This structure is prone to elastic deformation, return backlash, and response lag in applications involving heavy loads or high-frequency reciprocating motion, leading to decreased positioning accuracy and repeatability, making it difficult to meet the stringent dynamic performance and stability requirements of modern precision equipment. On the other hand, the top-pull mechanism adjusts the component's position by separately adjusting opposing push and pull screws. However, in this method, the contact between the screw tip and the adjusted component is often point-to-point or extremely small-area, resulting in high contact stress and susceptibility to wear and plastic deformation. Furthermore, this mechanism is prone to loosening under vibration or high-frequency micro-motion conditions, exhibiting insufficient contact stiffness and stability, making it unsuitable for precision motion control scenarios requiring long cycles and high stability.

[0003] In view of this, there is an urgent need to provide a solution for a differential screw assembly, slide, and angle adjustment device for optical components, so as to improve the precision and controllability of the adjustment device. Utility Model Content

[0004] In order to at least solve one or more of the technical problems mentioned above, this application proposes a differential screw assembly, slide, and angle adjustment device for optical components in several aspects.

[0005] In a first aspect, this application provides a differential screw assembly for an optical component, the differential screw assembly including a differential screw body, a fixed end, and a movable end; wherein, a first end of the differential screw body is provided with a first external thread, and a second end of the differential screw body is provided with a second external thread; the fixed end is sleeved on the first end of the differential screw body, and the fixed end is provided with a first internal thread, the first internal thread and the first external thread engaging; the movable end is sleeved on the second end of the differential screw body, and the movable end is provided with a second internal thread, the second internal thread and the second external thread engaging; wherein, the first external thread and the second external thread have the same direction, and the lead of the first external thread is greater than the lead of the second external thread.

[0006] In some embodiments, a rotating wheel is provided in the middle region of the differential screw body, and anti-slip stripes are provided on the side of the rotating wheel.

[0007] In some embodiments, the second external thread and the second internal thread are trapezoidal threads to achieve self-locking of the moving end.

[0008] In some embodiments, a first through hole is provided on the side of the fixed end, and the first through hole is connected to the base of the optical component to fix the fixed end.

[0009] In some embodiments, a second through hole is provided on the side of the movable end, the second through hole being connected to the moving component of the optical component, so that the moving component can move along the axis of the differential screw body.

[0010] In some embodiments, the lead of the first external thread is greater than the lead of the second external thread.

[0011] In some embodiments, the movement distance of the active end conforms to:

[0012] in, The distance traveled by the active device. Let be the lead of the first external thread. This is the lead of the second external thread.

[0013] In a second aspect, this application provides a slide for an optical component, including a differential screw assembly as described in any one of the first aspects, the slide further including a first plate and a second plate, wherein the first plate and the second plate are connected by one or more of the differential screw assemblies.

[0014] In a third aspect, this application provides an angle adjustment device for an optical component, comprising a differential screw assembly as described in any one of the first aspects. The angle adjustment device further comprises an optical platform, a mounting base, and a hinge assembly, wherein the optical platform is mounted on the mounting base via the hinge assembly; a first differential screw assembly and a second differential screw assembly are respectively provided on both sides of the hinge assembly, wherein the movable end of the first differential screw assembly is connected to a first side of the mounting base, and the movable end of the second differential screw assembly is connected to a second side of the mounting base, wherein the differential screw body of the first differential screw assembly and the differential screw body of the second differential screw assembly are arranged on the same straight line.

[0015] The differential screw assembly, slide, and angle adjustment device for optical components provided above, in this embodiment, a first external thread is provided at the first end of the differential screw body, and a second external thread is provided at the second end of the differential screw body. A fixed end is sleeved on the first end of the differential screw body, and a movable end is provided on the second end of the differential screw body. The lead of the first external thread is greater than the lead of the second external thread, so that when the differential screw body is rotated, the movable end will make a slight movement to compensate for the lead difference between the first and second external threads, thereby enabling better subdivision and control of the adjustment accuracy. Attached Figure Description

[0016] The above and other objects, features, and advantages of exemplary embodiments of this application will become readily understood by reading the following detailed description with reference to the accompanying drawings. In the drawings, several embodiments of this application are illustrated by way of example and not limitation, and the same or corresponding reference numerals denote the same or corresponding parts, wherein: Figure 1 Differential screw assemblies for optical components according to some embodiments of this application are shown; Figure 2 An exemplary structural diagram of a slide for an optical component according to some embodiments of this application is shown.

[0017] Tag name 10 - Differential screw body, 11 - First end, 111 - First external thread, 12 - Second end, 121 - Second external thread, 13 - Rotating wheel, 131 - Anti-slip stripe group, 20 - Fixed end, 21 - First through hole, 30 - Movable end, 31 - Second through hole, 41 - First plate, 42 - Second plate. Detailed Implementation

[0018] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0019] It should be understood that the terms "comprising" and "including" used in the specification and claims of this application indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0020] It should also be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application. As used in this specification and claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used in this specification and claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes such combinations.

[0021] As used in this specification and claims, the term "if" may be interpreted, depending on the context, as "when," "once," "in response to determination," or "in response to detection." Similarly, the phrase "if determined" or "if [described condition or event] is detected" may be interpreted, depending on the context, as "once determined," "in response to determination," "once [described condition or event] is detected," or "in response to detection of [described condition or event]."

[0022] The specific embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0023] Figure 1 Differential screw assemblies for optical components, as shown in some embodiments of this application, are illustrated. Figure 1As shown, the differential screw assembly includes a differential screw body 10, a fixed end 20, and a movable end 30. The first end 11 of the differential screw body 10 is provided with a first external thread 111, and the second end 12 of the differential screw body 10 is provided with a second external thread 121. The fixed end 20 is sleeved on the first end of the differential screw body 10, and a first internal thread is provided within the fixed end 20, which engages with the first external thread. The movable end 30 is sleeved on the second end of the differential screw body 10, and a second internal thread is provided within the movable end 30, which engages with the second external thread. The first external thread and the second external thread have the same direction, and the lead of the first external thread is greater than the lead of the second external thread.

[0024] In some embodiments, a rotating wheel 13 is provided in the middle region of the differential screw body 10, and anti-slip stripe group 131 is provided on the side of the rotating wheel.

[0025] In some embodiments, the lead of the first external thread is greater than the lead of the second external thread.

[0026] In some embodiments, the aforementioned differential screw body 10 may be a stepped shaft or a constant diameter shaft. The aforementioned differential screw body 10 may be composed of alloy steel, stainless steel, or tool steel, etc.

[0027] In some embodiments, the differential screw body 10 may include two ends of the screw and a middle region of the screw, wherein the two ends of the screw may be the first end and the second end of the differential screw body 10, respectively, and the middle region of the screw may be the position between the first end and the second end.

[0028] In some embodiments, a rotating wheel may be provided on the screw middle region of the aforementioned differential screw body 10.

[0029] In some embodiments, the aforementioned rotating wheel can be connected to the differential screw body 10 via screws. Specifically, the middle region of the aforementioned screw can be configured as a smooth shaft section, and the interior of the aforementioned rotating wheel can be provided with a rotating wheel through hole. The smooth shaft section of the aforementioned differential screw body 10 can be connected to the rotating wheel through hole, for example, through an transition fit or an interference fit. Furthermore, one or more threaded holes can be provided on the side of the aforementioned rotating wheel for mounting screws, wherein the aforementioned screws may include set screws.

[0030] Understandably, the aforementioned rotating wheel can be fitted onto the middle region of the screw of the aforementioned differential screw body 10, and the set screw can be placed in the threaded hole. By tightening the aforementioned set screw, the tip of the set screw can press against the middle region of the screw of the differential screw body 10, generating friction. At this time, the aforementioned differential screw body 10 can be rotated by rotating the rotating wheel.

[0031] Furthermore, a groove can be provided in the middle area of ​​the screw at the position where it contacts the set screw, so that the tip of the set screw can be engaged, thereby improving the stability of the transmission.

[0032] In other embodiments, the aforementioned rotating wheel can be connected to the differential screw body 10 via a key connection. Specifically, a first keyway can be provided in the middle region of the screw of the differential screw body 10, and a second keyway corresponding to the first keyway can be provided on the inner surface of the rotating wheel's through hole, forming a keyway receiving space between the first and second keyways. Furthermore, a key can be embedded in the keyway receiving space, and the sidewall of the key can be connected to the sidewalls of the first and second keyways, so that the torque generated when the rotating wheel rotates can be transmitted to the differential screw body 10 via the key connection, thereby driving the differential screw body 10 to rotate.

[0033] Furthermore, an elastic retaining ring or end cap can be provided on the aforementioned differential screw body 10. The aforementioned elastic retaining ring or end cap can abut against the rotating wheel, thereby restricting the axial movement of the rotating wheel.

[0034] In some other embodiments, the aforementioned rotating wheel can be integrally formed with the differential screw body 10. In this case, the aforementioned rotating wheel and the differential screw body can be integrated, which has high strength and tight connection.

[0035] In some embodiments, the sidewalls of the aforementioned roller may be provided with anti-slip stripe sets. Specifically, the aforementioned anti-slip stripe sets may include straight knurling, mesh knurling, and irregular knurling. It should be understood that the straight knurling pattern may include multiple sets of parallel straight lines, the mesh knurling may consist of two sets of intersecting diagonal lines forming a rhombus or diamond pattern, and the irregular knurling may include sunburst patterns and concentric circle patterns, etc.

[0036] By incorporating anti-slip stripes, the friction between the user's hand and the joystick is increased, thereby facilitating more accurate and effortless joystick operation and preventing misoperation due to slippage.

[0037] In some embodiments, the first end of the aforementioned differential screw body 10 is provided with a first external thread, and the second end of the differential screw body 10 is provided with a second external thread. It is understood that the aforementioned first and second external threads can be obtained by turning, grinding, or whirl milling.

[0038] In some embodiments, the first end of the aforementioned differential screw body 10 may be connected to the fixed end, and the second end of the aforementioned differential screw body 10 may be connected to the movable end.

[0039] In some embodiments, the aforementioned fixed base may be provided with threads, which can be connected to the differential screw body 10 via the threads.

[0040] In some embodiments, the aforementioned mounting base can be mounted on the frame of the optical components of the device, and a threaded hole can be provided in the middle of the mounting base. The mounting base can be made of aluminum alloy or steel. In some embodiments, a first internal thread can be provided on the aforementioned threaded hole, and the first internal thread can engage with a first external thread on the first end of the differential screw body 10.

[0041] It is understood that by connecting the first end of the differential screw body 10 to the fixed end 20, the differential screw body 10 can rotate within the fixed base while simultaneously undergoing axial relative movement relative to the fixed base. It is understood that when the differential screw body rotates one revolution, the distance by which the differential screw body 10 undergoes axial relative movement relative to the fixed base can be the lead of the first external thread.

[0042] In some embodiments, the aforementioned movable end 30 may include a movable platform, which can be connected to the second end of the differential screw body 10 via a movable nut. Specifically, the aforementioned movable nut can be securely fixed to the lower part or inside the movable platform by a screw. A mounting sleeve or a fish-eye recess can be provided on the connection hole connecting the movable platform and the movable nut. The alignment of the nut can be finely adjusted by adjusting the screw, thereby ensuring that the nut axis is parallel to the platform's motion axis.

[0043] In some embodiments, the second end of the aforementioned differential screw body 10 can pass through a fixed end bearing fixed to the base, and then be screwed into a movable nut at the movable end. In some embodiments, the aforementioned movable nut may include an elastic nut.

[0044] In some embodiments, the aforementioned differential screw assembly may further include a guide mechanism, which may include a guide rail assembly such as a linear guide rail or a sliding guide rail. Furthermore, the guide mechanism may also include a combination of an optical axis and a linear bearing.

[0045] In some embodiments, the aforementioned guide mechanism can be connected to the mobile platform to prevent the mobile platform from rotating. It is understood that when the aforementioned screw rotates, it generates a rotational force on the movable nut while simultaneously driving the movable nut to move. This movable nut can generate a rotational force on the mobile platform. To prevent the mobile platform from rotating, the guide mechanism can limit its movement, thus ensuring that the mobile platform can only move.

[0046] In some embodiments, the aforementioned guiding mechanism may include a linear guide rail, which may consist of the guide rail and a plurality of sliders. The sliders contain a ball or roller circulation system. The balls or rollers roll on precision raceways between the guide rail and the sliders, converting sliding friction into rolling friction. In other embodiments, the aforementioned guiding mechanism may include an optical shaft and a linear bearing fitted onto the optical shaft. The linear bearing contains balls or a cage.

[0047] In some embodiments, the moving distance of the active end 30 conforms to: ,in, The distance traveled by the active device. Let be the lead of the first external thread. This is the lead of the second external thread.

[0048] It is understood that the lead of the first external thread can be the same as the lead of the first internal thread, and the lead of the second external thread can be the same as the lead of the second external thread. In some embodiments, the lead of the first external thread can be the linear distance it moves about the axis when the first external thread rotates one revolution; the lead of the second external thread can be the linear distance it moves about the axis when the second external thread rotates one revolution. Since the lead of the first external thread can be greater than the lead of the second external thread, and the fixed end can be mounted on the frame and remain stationary, the moving distance of the moving end when the screw body is rotated can be equal to the difference between the lead of the first external thread and the lead of the second external thread.

[0049] In some embodiments, the first internal thread on the aforementioned fixed end 20 can be engaged with the first external thread on the first end of the differential screw body 10, and the second internal thread on the aforementioned movable end 30 can be engaged with the second external thread on the second end of the differential screw body 10.

[0050] In some embodiments, the direction of the first internal thread can be the same as the direction of the second internal thread, and the direction of the first external thread can be the same as the direction of the second external thread. Furthermore, the lead of the first internal thread is greater than the lead of the second internal thread, and the lead of the first external thread is greater than the lead of the second external thread. It is understood that when the differential screw body 10 rotates, the first external thread at the first end of the differential screw body 10 can rotate relative to the first internal thread at the fixed end 20, thereby causing the differential screw body 10 to move axially along the fixed end. Further, the second external thread at the second end of the differential screw body 10 can rotate relative to the second internal thread at the movable end 30, thereby causing the differential screw body 10 to move along the movable end. Since the lead of the first internal thread is greater than the lead of the second internal thread, there is a distance difference between the displacements of the differential screw body 10 relative to the fixed end and the movable end. This allows adjustment of the distance between the movable end and the fixed end, and consequently, the distance between the moving platform connected to the movable end and the frame connected to the fixed end.

[0051] In some embodiments, the movement distance of the aforementioned movable end can be obtained by the difference between the lead of the first external thread and the lead of the second external thread, which can be the relative displacement between the movable end and the fixed end when the screw assembly rotates one revolution.

[0052] In some embodiments, the second external thread and the second internal thread are trapezoidal threads to achieve self-locking of the movable end 30.

[0053] In some embodiments, the aforementioned trapezoidal thread may have a helix angle and an equivalent friction angle. By setting the helix angle of the trapezoidal thread to be greater than the equivalent friction angle, it can achieve self-locking.

[0054] Understandably, when the screw body is rotated, a torque is applied to the screw assembly. This torque overcomes the friction in the threaded joint, thereby driving the system to move. When the screw body stops rotating, the load at the moving end generates a reverse axial force through the moving platform and the moving nut. At this time, the aforementioned reverse axial force cannot overcome the static friction torque generated by the trapezoidal thread at the fixed end, thus preventing relative movement and achieving self-locking, thereby fixing the position.

[0055] By using the solution in this application, the second external thread and the second internal thread are set as trapezoidal threads and self-locking of the moving end is achieved, which can prevent the moving platform from moving accidentally, thereby improving safety and reliability.

[0056] In some embodiments, a first through hole is provided on the side of the fixed end 20, and the first through hole is connected to the base of the optical component to fix the fixed end 20.

[0057] In some embodiments, a second through hole is provided on the side of the movable end 30, and the second through hole is connected to the moving component of the optical component so that the moving component can move along the axis of the differential screw body 10.

[0058] In some embodiments, the aforementioned fixed end can be connected to the frame via a connecting shaft. It should be understood that the surface of the fixed end 20 with the through hole for connection to the screw body can be the top and side of the fixed end, while the other four surfaces of the fixed end can be the sides of the fixed end. The side of the aforementioned fixed end can be provided with one or more first through holes 21, wherein the aforementioned first through holes 21 can be connected to the connecting shaft. Specifically, the aforementioned first through hole can be fixedly connected to the first end of the connecting shaft, and the second end of the connecting shaft can be fixedly connected to the frame, thereby realizing the connection between the fixed end and the frame. It is understood that since the frame is fixed, the aforementioned fixed end can also remain fixed.

[0059] In some embodiments, the surface of the aforementioned movable end 30 with the through hole connected to the screw body can be the top and side of the movable end 30, while the other four surfaces of the movable end 30 can be the side of the movable end 30. In some embodiments, the side of the aforementioned movable end 30 can be provided with a second through hole 31, and the moving component of the aforementioned optical assembly can include a moving platform, and the side of the movable end 30 can be connected to the moving platform via a movable connecting rod. In some embodiments, the first end of the movable connecting rod can be connected to the second through hole 31 of the movable end 30, and the second end of the movable connecting rod can be connected to the moving platform.

[0060] The solution of this application provides a first external thread at the first end of the differential screw body and a second external thread at the second end of the differential screw body. The fixed end is sleeved on the first end of the differential screw body, and the movable end is located on the second end of the differential screw body. The lead of the first external thread is greater than the lead of the second external thread, so that when the differential screw body is rotated, the movable end will make a slight movement to compensate for the lead difference between the first and second external threads. This allows for better subdivision and control of the adjustment accuracy.

[0061] Figure 2 Exemplary structural diagrams of slides for optical components according to some embodiments of this application are shown, such as... Figure 2 As shown, the slide table includes a differential screw assembly as described in any of the preceding descriptions, and the slide table also includes a first plate 41 and a second plate 42, wherein the first plate 41 and the second plate 42 are connected by one or more of the differential screw assemblies.

[0062] In some embodiments, the aforementioned first plate 41 can be connected to the fixed end 20 of the differential screw assembly, and the aforementioned second plate 42 can be connected to the movable end 30 of the differential screw assembly. When the rotating wheel 13 of the screw body is rotated, the distance between the movable end 30 and the fixed end 20 of the differential screw assembly can be controlled, thereby controlling the distance between the first plate 41 and the second plate 42.

[0063] This application also provides an angle adjustment device for an optical component, including a differential screw assembly as described in any of the preceding claims. The angle adjustment device further includes an optical platform, a mounting base, and a hinge assembly, wherein the optical platform is mounted on the mounting base via the hinge assembly; a first differential screw assembly and a second differential screw assembly are respectively provided on both sides of the hinge assembly, wherein the movable end of the first differential screw assembly is connected to a first side of the mounting base, and the movable end of the second differential screw assembly is connected to a second side of the mounting base, wherein the differential screw body of the first differential screw assembly and the differential screw body of the second differential screw assembly are arranged on the same straight line.

[0064] In some embodiments, the first differential screw assembly rotates toward a direction away from the second differential screw assembly, and the second differential screw assembly rotates toward a direction away from the first differential screw assembly to increase the angle; the first differential screw assembly rotates toward a direction closer to the second differential screw assembly, and the second differential screw assembly rotates toward a direction closer to the first differential screw assembly to decrease the angle.

[0065] In some embodiments, the aforementioned optical platform is mounted on the mounting base via the hinge assembly, allowing the optical platform to rotate relative to the mounting base. Further, a first end of the aforementioned mounting base can be connected to a first differential screw assembly, and a second end of the mounting base can be connected to a second differential screw assembly, allowing the first and second differential screw assemblies to rotate relative to the optical platform, thereby adjusting the angle of the optical component.

[0066] In summary, the solution proposed in this application involves a first external thread at the first end of the differential screw body and a second external thread at the second end of the differential screw body. A fixed end is fitted onto the first end of the differential screw body, and a movable end is located on the second end of the differential screw body. Furthermore, the lead of the first external thread is greater than the lead of the second external thread. This allows the movable end to make a slight movement when the differential screw body is rotated, thus compensating for the lead difference between the first and second external threads. This enables better subdivision and control of the adjustment precision.

[0067] While numerous embodiments of this application have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many modifications, alterations, and alternatives will arise for those skilled in the art without departing from the spirit and intent of this application. It should be understood that various alternatives to the embodiments of this application described herein may be employed in the practice of this application. The appended claims are intended to define the scope of protection of this application and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A differential screw assembly for an optical assembly, characterized by, The differential screw assembly includes a differential screw body (10), a fixed end (20), and a movable end (30); wherein, The first end of the differential screw body (10) is provided with a first external thread, and the second end of the differential screw body (10) is provided with a second external thread; The fixed end (20) is sleeved on the first end of the differential screw body (10), and the fixed end (20) is provided with a first internal thread, which is connected to the first external thread. The movable end (30) is sleeved on the second end of the differential screw body (10), and the movable end (30) is provided with a second internal thread, which is connected to the second external thread. Wherein, the first external thread and the second external thread have the same direction, and the lead of the first external thread is greater than the lead of the second external thread.

2. The differential screw assembly of claim 1, wherein, The differential screw body (10) has a rotating wheel in the middle area, and the side of the rotating wheel is provided with anti-slip stripes.

3. The differential screw assembly according to claim 1, characterized in that, The second external thread and the second internal thread are trapezoidal threads to achieve self-locking of the movable end (30).

4. The differential screw assembly according to claim 1, characterized in that, The fixed end (20) has a first through hole on its side, and the first through hole is connected to the base of the optical component to fix the fixed end (20).

5. The differential screw assembly according to claim 1, characterized in that, The side of the movable end (30) is provided with a second through hole, which is connected to the moving component of the optical component so that the moving component can move along the axis of the differential screw body (10).

6. The differential screw assembly according to claim 1, characterized in that, The lead of the first external thread is greater than the lead of the second external thread.

7. The differential screw assembly according to any one of claims 1-6, characterized in that, The moving distance of the active end (30) conforms to: in, The distance traveled by the active device. Let be the lead of the first external thread. This is the lead of the second external thread.

8. A slide stage for an optical component, characterized in that, The slide includes the differential screw assembly as described in any one of claims 1-7, and further includes a first plate and a second plate, wherein the first plate and the second plate are connected by one or more of the differential screw assemblies.

9. An angle adjustment device for an optical component, characterized in that, Including the differential screw assembly as described in any one of claims 1-7, the angle adjustment device further includes an optical platform, a mounting base, and a hinge assembly, wherein, The optical platform is mounted on the mounting base via the hinge assembly; The hinge assembly has a first differential screw assembly and a second differential screw assembly on its two sides respectively. The movable end of the first differential screw assembly is connected to the first side of the mounting base, and the movable end of the second differential screw assembly is connected to the second side of the mounting base. The differential screw body of the first differential screw assembly and the differential screw body of the second differential screw assembly are arranged on the same straight line.

10. The angle adjustment device according to claim 9, characterized in that, The first differential screw assembly rotates in a direction away from the second differential screw assembly, and the second differential screw assembly rotates in a direction away from the first differential screw assembly to increase the angle; The first differential screw assembly rotates toward the direction of approaching the second differential screw assembly, and the second differential screw assembly rotates toward the direction of approaching the first differential screw assembly to reduce the angle.

Images