Valve plate motion control device and vacuum valve

Abstract

This application provides a valve plate motion control device and a vacuum valve. The valve plate motion control device includes a cylinder, a piston plate, a slider, a valve stem, a longitudinal drive mechanism, and a translation drive mechanism. The cylinder has a communicating clearance hole and a translation cavity. The piston plate is slidably disposed within the translation cavity. The piston plate forms a longitudinal sliding cavity. The slider is located within the longitudinal sliding cavity and is slidably connected to the piston plate. The valve stem is connected to the slider through the clearance hole. The end of the valve stem located outside the cylinder is used to connect to the valve plate. The longitudinal drive mechanism is disposed on the piston plate. The power output end of the longitudinal drive mechanism is fixedly connected to the slider. The translation drive mechanism is disposed on the cylinder. The power output end of the translation drive mechanism is fixedly connected to the piston plate. The driving direction of the translation drive mechanism is perpendicular to the driving direction of the longitudinal drive mechanism. Compared to traditional vacuum valves, the bidirectional drive method reduces the likelihood of malfunctions.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum valves, and in particular to a valve plate motion control device and a vacuum valve. Background Technology

[0002] In the semiconductor manufacturing process, a process cavity with a vacuum environment is required. During operation, the process cavity needs to be isolated from the outside world through a vacuum valve and the vacuum flow rate needs to be controlled to protect the wafer from foreign object contamination during the process process.

[0003] The valve plate of the vacuum valve moves from the open position to the middle position, and then from the middle position to the closed position. The entire movement path of the valve plate is L-shaped, so this type of vacuum valve is also called an L-valve.

[0004] In existing vacuum valves, the valve stem moves longitudinally via a piston cylinder unit and is guided laterally by a guide device. The valve stem's lateral position is adjusted to move the valve plate to the closed position.

[0005] However, when the driving force of the longitudinal drive device is large, the closing force of the valve plate, which is laterally guided by the guide device to move to the closed position, is also large, which makes the guide device easy to be damaged, and thus makes the vacuum valve prone to failure. Utility Model Content

[0006] The purpose of this invention is to overcome the shortcomings of the prior art and provide a valve plate motion control device and vacuum valve that are less prone to failure.

[0007] The objective of this utility model is achieved through the following technical solution: A valve plate motion control device, comprising: The cylinder body has interconnected clearance holes and translation chambers; A piston plate is slidably disposed within the translational cavity, and the piston plate forms a longitudinal sliding cavity; The slider is located within the longitudinal sliding cavity and is slidably connected to the piston plate. A valve stem, which is connected to the slider through the clearance hole, and the end of the valve stem located on the outside of the cylinder body is used to connect to the valve plate; A longitudinal drive mechanism is provided on the piston plate, and the power output end of the longitudinal drive mechanism is fixedly connected to the slider; A translation drive mechanism is mounted on the cylinder block. The power output end of the translation drive mechanism is fixedly connected to the piston plate. The driving direction of the translation drive mechanism is perpendicular to the driving direction of the longitudinal drive mechanism.

[0008] In one embodiment, the cylinder body is further provided with a translation through hole communicating with the translation cavity, the translation drive mechanism is located outside the translation cavity, and the power output end of the translation drive mechanism is fixedly connected to the piston plate through the translation through hole.

[0009] In one embodiment, the translation drive mechanism is a cylinder piston mechanism.

[0010] In one embodiment, the longitudinal drive mechanism includes a longitudinal piston and a longitudinal piston rod, the longitudinal piston being sleeved on the longitudinal piston rod; the piston plate is formed with a piston stroke hole group, the piston stroke hole group including a communicating longitudinal piston cavity and a sliding hole, the longitudinal piston being located in the longitudinal piston cavity, the longitudinal piston rod passing through the sliding hole and being slidably and sealingly connected to the piston plate, and the longitudinal piston rod being fixedly connected to the slider through the sliding hole.

[0011] In one embodiment, there are two longitudinal drive mechanisms and two piston stroke hole groups. The longitudinal piston of each longitudinal drive mechanism is located in the longitudinal piston chamber of the corresponding piston stroke hole group. The longitudinal piston rod of each longitudinal drive mechanism passes through the sliding hole of the corresponding piston stroke hole group and is slidably connected to the piston plate in a sealing manner. The longitudinal piston rod of each longitudinal drive mechanism is fixedly connected to the slider through the sliding hole of the corresponding piston stroke hole group. The two longitudinal drive mechanisms are located on both sides of the valve stem.

[0012] In one embodiment, the inner wall of the translation cavity is provided with at least two bellows, the piston plate is formed with at least two air holes, each bellows is connected to the corresponding air hole, each air hole is also connected to the longitudinal piston cavity, and the longitudinal piston is located between the two air holes.

[0013] In one embodiment, the inner wall of the translation chamber is provided with at least two valves, the piston plate is formed with at least two air holes, each valve is connected to the corresponding air hole, each air hole is also connected to the longitudinal piston chamber, and the longitudinal piston is located between the two air holes.

[0014] In one embodiment, each of the valve stems is located within a corresponding air orifice and is slidably connected to the piston plate.

[0015] In one embodiment, a guide block protrudes from the side wall of the piston plate, and the cylinder body has a guide hole communicating with the translation cavity. The guide block is located in the guide hole and is slidably connected to the cylinder body. The sliding direction of the guide block relative to the guide hole is parallel to the sliding direction of the piston plate.

[0016] In one embodiment, the slider includes a slider body and a clamping block. The slider body has a first groove, and the clamping block has a second groove. The clamping block is fixedly connected to the slider body to jointly form a fixing hole, and the valve stem passes through the fixing hole.

[0017] A vacuum valve includes a valve plate and a valve plate motion control device as described in any of the above embodiments, wherein the valve stem is connected to the valve plate.

[0018] Compared with the prior art, the present invention has at least the following advantages: 1) In the above-mentioned valve plate motion control device, the piston plate is slidably disposed in the translation cavity, the translation drive mechanism is disposed on the cylinder body, and the power output end of the translation drive mechanism is fixedly connected to the piston plate, so that the translation drive mechanism drives the piston plate to translate relative to the cylinder body. Also, since the slider is located in the longitudinal sliding cavity and is slidably connected to the piston plate, one end of the valve rod is connected to the slider through the clearance hole, so that the piston plate drives the slider to translate, and then the valve rod moves horizontally relative to the cylinder body with the slider. The other end of the valve rod is connected to the valve plate, so that the valve plate is driven to move horizontally relative to the cylinder body. 2) Since the longitudinal drive mechanism is located on the piston plate, the power output end of the longitudinal drive mechanism is fixedly connected to the slider. The slider is located in the longitudinal slide cavity and is slidably connected to the piston plate, so that the longitudinal drive mechanism drives the slider to move longitudinally relative to the piston plate. The valve stem moves longitudinally relative to the cylinder along with the slider, thus driving the valve plate to move longitudinally relative to the cylinder. 3) Since the driving direction of the translation drive mechanism is perpendicular to the driving direction of the longitudinal drive mechanism, when driving the valve plate to the closed position, the longitudinal drive mechanism first drives the slider to move longitudinally relative to the piston plate, so that the valve plate moves from the open position to the middle position. Then, the translation drive mechanism drives the piston plate to translate relative to the cylinder, so that the valve plate moves from the middle position to the closed position. Compared with the traditional vacuum valve, the bidirectional drive method is less prone to failure. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a vacuum valve according to one embodiment; Figure 2 for Figure 1 A cross-sectional view of the vacuum valve shown. Figure 3 for Figure 1An exploded schematic diagram of the vacuum valve shown. Figure 3a for Figure 3 A partial explosion diagram of the vacuum valve from another perspective; Figure 4 for Figure 3 A partial structural schematic diagram of the vacuum valve shown. Figure 5 for Figure 3 A schematic diagram of the piston plate of the vacuum valve shown. Figure 6 for Figure 5 A cross-sectional view of the piston plate shown in Figure AA; Figure 7 This is a partial structural schematic diagram of a vacuum valve according to another embodiment; Figure 8 for Figure 7 Another partial structural diagram of the vacuum valve shown; Figure 9 for Figure 1 A cross-sectional schematic diagram of the vacuum valve shown. Figure 10 for Figure 1 An exploded view showing the connection between the valve stem and the slider of the vacuum valve shown. Detailed Implementation

[0021] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. The drawings illustrate preferred embodiments of this utility model. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.

[0022] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly attached to the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0024] This application provides a valve plate motion control device, comprising: a cylinder body having a communicating clearance through hole and a translation cavity; and / or, a piston plate slidably disposed within the translation cavity; and / or, the piston plate forming a longitudinal sliding cavity; and / or, a slider located within the longitudinal sliding cavity and slidably connected to the piston plate; and / or, a valve stem connected to the slider through the clearance through hole; and / or, the end of the valve stem located outside the cylinder body for connection to the valve plate; and / or, a longitudinal drive mechanism disposed on the piston plate; and / or, the power output end of the longitudinal drive mechanism fixedly connected to the slider; and / or, a translation drive mechanism disposed on the cylinder body; and / or, the power output end of the translation drive mechanism fixedly connected to the piston plate; and / or, the driving direction of the translation drive mechanism is perpendicular to the driving direction of the longitudinal drive mechanism.

[0025] In the aforementioned valve plate motion control device, the piston plate is slidably disposed within the translation cavity, and the translation drive mechanism is disposed on the cylinder body. The power output end of the translation drive mechanism is fixedly connected to the piston plate, causing the translation drive mechanism to drive the piston plate to translate relative to the cylinder body. Furthermore, since the slider is located within the longitudinal sliding cavity and slidably connected to the piston plate, one end of the valve stem is connected to the slider through a clearance hole, causing the piston plate to drive the slider to translate, thereby causing the valve stem to move horizontally relative to the cylinder body along with the slider. The other end of the valve stem is connected to the valve plate, thus driving the valve plate to move horizontally relative to the cylinder body. Additionally, since the longitudinal drive mechanism is disposed on the piston plate, and the power output end of the longitudinal drive mechanism is fixedly connected to the slider, the slider is located within the longitudinal sliding cavity and slidably connected to the piston plate, causing the longitudinal drive mechanism to drive the slider to move longitudinally relative to the piston plate. The valve stem moves longitudinally relative to the cylinder body along with the slider, thus driving the valve plate to move longitudinally relative to the cylinder body.

[0026] Furthermore, since the driving direction of the translational drive mechanism is perpendicular to the driving direction of the longitudinal drive mechanism, when driving the valve plate to the closed position, the longitudinal drive mechanism first drives the slider to move longitudinally relative to the piston plate, so that the valve plate moves from the open position to the middle position. Then, the translational drive mechanism drives the piston plate to translate relative to the cylinder, so that the valve plate moves from the middle position to the closed position. Compared with traditional vacuum valves, the bidirectional drive method is less prone to failure.

[0027] To better understand the technical solution and beneficial effects of this application, the following detailed description is provided in conjunction with specific embodiments: like Figures 1 to 4 As shown, a vacuum valve 10 in one embodiment includes a valve plate 100 and a valve plate motion control device 200. The valve plate motion control device 200 includes a cylinder 210, a piston plate 220, a slider 230, a valve stem 240, a longitudinal drive mechanism 250, and a translation drive mechanism 260.

[0028] In one embodiment, the cylinder body 210 has a communicating clearance hole 201 and a translation cavity 203; the piston plate 220 is slidably disposed within the translation cavity 203, and the piston plate 220 forms a longitudinal sliding cavity 205. The slider 230 is located within the longitudinal sliding cavity 205 and is slidably connected to the piston plate 220. In this embodiment, the direction in which the piston plate 220 slides relative to the cylinder body 210 is a first direction, and the direction in which the slider 230 slides relative to the piston plate 220 is a second direction. The first direction and the second direction are perpendicular to each other. Specifically, the first direction is a horizontal direction (parallel to the X-axis), and the second direction is a longitudinal direction, i.e., a vertical direction (parallel to the Y-axis).

[0029] In one embodiment, the valve stem 240 is connected to the slider 230 through the clearance hole 201. The end of the valve stem 240 located outside the cylinder body 210 is connected to the valve plate 100, so that the valve plate 100 is connected to the slider 230 through the valve stem 240. A longitudinal drive mechanism 250 is disposed on the piston plate 220. The power output end of the longitudinal drive mechanism 250 is fixedly connected to the slider 230, so that the longitudinal drive mechanism 250 can drive the slider 230 to reciprocate along a direction parallel to the first direction.

[0030] In one embodiment, a translation drive mechanism 260 is disposed on the cylinder 210, and the power output end of the translation drive mechanism 260 is fixedly connected to the piston plate 220, so that the translation drive mechanism 260 can drive the piston plate 220 to reciprocate relative to the cylinder 210 in a direction parallel to the second direction.

[0031] In one embodiment, the driving direction of the translation drive mechanism 260 is perpendicular to the driving direction of the longitudinal drive mechanism 250. In this embodiment, the driving direction of the translation drive mechanism 260 is parallel to a first direction, and the driving direction of the longitudinal drive mechanism 250 is parallel to a second direction.

[0032] The aforementioned valve plate motion control device 200, since the piston plate 220 is slidably disposed in the translation cavity 203, and the translation drive mechanism 260 is disposed on the cylinder body 210, with the power output end of the translation drive mechanism 260 fixedly connected to the piston plate 220, causes the translation drive mechanism 260 to drive the piston plate 220 to translate relative to the cylinder body 210. Furthermore, since the slider 230 is located in the longitudinal sliding cavity 205 and slidably connected to the piston plate 220, one end of the valve stem 240 is connected to the slider 230 through the clearance hole 201, causing the piston plate 220 to drive the slider 230 to translate, thereby causing the valve stem 240 to move relative to the cylinder body 210. The cylinder 210 moves horizontally, and the other end of the valve stem 240 is connected to the valve plate 100, thus driving the valve plate 100 to move horizontally relative to the cylinder 210. Since the longitudinal drive mechanism 250 is located on the piston plate 220, the power output end of the longitudinal drive mechanism 250 is fixedly connected to the slider 230. The slider 230 is located in the longitudinal sliding cavity 205 and is slidably connected to the piston plate 220, so that the longitudinal drive mechanism 250 drives the slider 230 to move longitudinally relative to the piston plate 220. The valve stem 240 moves longitudinally relative to the cylinder 210 with the slider 230, thus driving the valve plate 100 to move longitudinally relative to the cylinder 210.

[0033] Furthermore, since the driving direction of the translation drive mechanism 260 is perpendicular to the driving direction of the longitudinal drive mechanism 250, when driving the valve plate 100 to the closed position, the longitudinal drive mechanism 250 first drives the slider 230 to move longitudinally relative to the piston plate 220, so that the valve plate 100 moves from the open position to the middle position. Then, the translation drive mechanism 260 drives the piston plate 220 to translate relative to the cylinder 210, so that the valve plate 100 moves from the middle position to the closed position. Compared with the traditional vacuum valve 10, the bidirectional drive method is less prone to failure.

[0034] like Figure 3 As shown, in one embodiment, the cylinder 210 is further provided with a translation through hole 207 communicating with the translation cavity 203. The translation drive mechanism 260 is located outside the translation cavity 203, and the power output end of the translation drive mechanism 260 is fixedly connected to the piston plate 220 through the translation through hole 207.

[0035] like Figure 3 As shown, in one embodiment, the translation drive mechanism 260 is a cylinder piston mechanism. In this embodiment, the translation drive mechanism 260 includes a translation piston plate 262 and a translation piston rod 264. In this embodiment, the translation piston plate 262 is fixedly connected to the piston plate 220 via the translation piston rod 264. The translation piston rod 262 passes through the translation through hole 207 and is slidably and sealingly connected to the cylinder body 210, so that the translation drive mechanism 260 drives the piston plate 220 to reciprocate relative to the cylinder body 210 in a direction parallel to the first direction.

[0036] like Figure 3 and Figure 3a As shown, the cylinder body 210 further includes a translational piston chamber 209. A translational piston plate 262 is located within the translational piston chamber 209 and is slidably connected to the cylinder body 210 in a sealed manner. The translational piston plate 262 is fixedly connected to one end of the translational piston rod. The valve plate motion control device 200 also includes a cover plate 270, which is sealed over the translational piston chamber 209, thus sealing the translational piston plate 262 within the translational piston chamber 209. In this embodiment, the cylinder body 210 also includes a first air hole 2103 and a second air hole 2105. The translational piston plate 262 is located between the first air hole and the second air hole, and both the first and second air holes are used to communicate with the two control air ends of the air source. Furthermore, the cylinder body 210 also includes a positioning groove 211, which surrounds the translational piston chamber 209. The cover plate 270 is located within the positioning groove 211 and is slidably connected to the cylinder body. Specifically, a sealing ring (not shown) protrudes from the inner wall of the positioning groove 211, and the cover plate 270 abuts against the sealing ring, so that the cover plate is sealed to the inner wall of the positioning groove. The valve plate motion control device 200 also includes a first screw 280. The cover plate 270 has a through hole 272, and the inner wall of the positioning groove 211 has a threaded hole 2112. The first screw 280 is screwed into the threaded hole 2112 through the through hole 272, so that the first screw 280 of the cover plate is tightly locked to the cylinder body.

[0037] It is understood that in other embodiments, the translation drive mechanism 260 may also be a hydraulic piston mechanism or an electric cylinder mechanism.

[0038] like Figures 3 to 6As shown, in one embodiment, the longitudinal drive mechanism 250 includes a longitudinal piston 252 and a longitudinal piston rod 254. The longitudinal piston 252 is sleeved on the longitudinal piston rod 254. The piston plate 220 forms a piston stroke hole group 222, which includes a communicating longitudinal piston cavity 222a and a sliding hole 222b. The longitudinal piston 252 is located in the longitudinal piston cavity 222a. The longitudinal piston rod 254 passes through the sliding hole 222b and is slidably connected to the piston plate 220. The longitudinal piston rod 254 is fixedly connected to the slider 230 through the sliding hole 222b, so that the longitudinal drive mechanism 250 drives the longitudinal piston 252 to slide in the longitudinal piston cavity 222a. In this embodiment, the longitudinal piston rod 254 is connected to the longitudinal sliding cavity 205 through the sliding hole 222b. The longitudinal drive mechanism 250 also includes a top locking nut 225. The slider 230 has an installation groove 231 and a connecting hole 233. The connecting hole 233 is connected to the sliding hole 222b and the installation groove 231 respectively. The longitudinal piston rod 254 passes through the sliding hole 222b, the longitudinal sliding cavity 205 and the connecting hole 233 in sequence. One end of the longitudinal piston rod 254 is provided with a top thread. The top locking nut 225 is located in the installation groove and screwed to the top thread, so that one end of the longitudinal piston rod 254 is reliably fixedly connected to the slider 230.

[0039] It is understood that the longitudinal piston chamber 222a can be a pneumatically driven piston chamber or a hydraulically driven piston chamber. In this embodiment, the longitudinal piston chamber 222a is a pneumatically driven piston chamber.

[0040] like Figure 4 As shown, in one embodiment, the inner wall of the translation cavity 203 is provided with at least two bellows 214, and the piston plate 220 is formed with at least two air holes 221. Each bellows 214 communicates with the corresponding air hole 221, and each air hole 221 also communicates with the longitudinal piston cavity 222a. The longitudinal piston 252 is located between the two air holes 221, so that the driving air source can adjust the position of the longitudinal piston 252 in the longitudinal piston cavity 222a by controlling the air inlet or outlet of the two air holes 221, thereby driving the longitudinal piston rod 254 to move relative to the slider 230. In this way, the longitudinal driving mechanism 250 drives the longitudinal piston 252 to slide in the longitudinal piston cavity 222a. In this embodiment, one end of each bellows 214 is screwed to the cylinder body, and the other end is screwed to the corresponding air hole 221.

[0041] It is understood that in other embodiments, the bellows 214 may also be a valve 212. For example... Figure 7 and Figure 8As shown, in one embodiment, at least two valves 212 are formed within the translational cavity 203, and at least two air holes 221 are formed within the piston plate 220. Each valve 212 communicates with a corresponding air hole 221, and each air hole 221 also communicates with the longitudinal piston cavity 222a. The longitudinal piston 252 is located between the two air holes 221, allowing the driving air source to adjust the position of the longitudinal piston 252 within the longitudinal piston cavity 222a by controlling the inlet or outlet ends of the two air holes 221. This, in turn, drives the longitudinal piston rod 254 to move relative to the slider 230, thereby causing the longitudinal driving mechanism 250 to drive the longitudinal piston 252 to slide within the longitudinal piston cavity 222a. It is understood that each valve 212 can be directly or indirectly connected to the corresponding air hole 221. For example, each valve 212 can be connected to the corresponding air hole 221 via a flexible hose. For example, each of the valve stems 212 can be directly connected to the corresponding air port 221.

[0042] In one embodiment, each valve stem 212 is located within the corresponding air hole 221 and is slidably connected to the piston plate 220, so that each valve stem 212 is reliably connected to the corresponding air hole 221. At the same time, the valve stem 212 plays a guiding role during the sliding of the piston plate 220 relative to the cylinder 210, thereby making the sliding accuracy of the piston plate 220 relative to the cylinder 210 higher and the structure of the valve plate motion control device 200 more compact.

[0043] like Figures 3 to 6 As shown, in one embodiment, there are two longitudinal drive mechanisms 250 and two piston stroke hole groups 222. The longitudinal piston 252 of each longitudinal drive mechanism 250 is located within the longitudinal piston cavity 222a of the corresponding piston stroke hole group 222. The longitudinal piston rod 254 of each longitudinal drive mechanism 250 passes through the sliding hole 222b of the corresponding piston stroke hole group 222 and is slidably connected to the piston plate 220. The longitudinal piston rod 254 of each longitudinal drive mechanism 250 is fixedly connected to the slider 230 through the sliding hole 222b of the corresponding piston stroke hole group 222. The two longitudinal drive mechanisms 250 are located on opposite sides of the valve stem 240 to drive the slider 230 to slide more smoothly relative to the piston plate 220. In this embodiment, the two longitudinal drive mechanisms 250 are symmetrically arranged with respect to the centerline of the valve stem 240. The sliding holes 222b of the piston stroke hole group 222 are all connected to the longitudinal sliding cavity 205.

[0044] like Figures 3 to 6 , Figure 9As shown, in one embodiment, the two longitudinal drive mechanisms 250 are a first longitudinal drive mechanism and a second longitudinal drive mechanism, respectively. Two piston stroke orifice groups 222 are respectively a first piston stroke orifice group and a second piston stroke orifice group. There are four valves 212 and four orifices 221, with each valve 212 communicating with a corresponding orifice 221. The four orifices form two orifice groups, namely a first orifice group and a second orifice group. The two orifices 221 of the first orifice group are located on both sides of the longitudinal piston 252 of the first longitudinal drive mechanism and are both communicating with the longitudinal piston cavity 222a of the first piston stroke orifice group 222. The two orifices 221 of the second orifice group are located on both sides of the longitudinal piston 252 of the second longitudinal drive mechanism and are both communicating with the longitudinal piston cavity 222a of the second piston stroke orifice group 222.

[0045] like Figures 3 to 6 , Figure 9 As shown, each air port group further includes an upper air port and a lower air port. The bellows 214 corresponding to the upper air port of the first air port group is connected to the bellows 214 corresponding to the upper air port of the second air port group, and the bellows 214 corresponding to the lower air port of the first air port group is connected to the bellows 214 corresponding to the lower air port of the second air port group, so that the two air port groups can be better linked and controlled, thereby achieving consistency in the steps of the two longitudinal drive mechanisms 250. Furthermore, a first connecting air passage 213 and a second connecting air passage 215 are formed inside the cylinder body 210. The bellows 214 corresponding to the upper air port of the first air port group is connected to the bellows 214 corresponding to the upper air port of the second air port group through the first connecting air passage 213, and the bellows 214 corresponding to the lower air port of the first air port group is connected to the bellows 214 corresponding to the lower air port of the second air port group through the second connecting air passage 215, so that the two air port groups can be better linked and controlled, and the structure of the valve plate motion control device 200 is more compact. It is understood that in other embodiments, the first connecting air passage 213 and the second connecting air passage 215 may not be formed inside the cylinder block 210. For example, the bellows 214 corresponding to the upper air passage of the first air passage group is connected to the bellows 214 corresponding to the upper air passage of the second air passage group through the upper air pipe, and the bellows 214 corresponding to the lower air passage of the first air passage group is connected to the bellows 214 corresponding to the lower air passage of the second air passage group through the lower air pipe.

[0046] like Figures 3 to 6 , Figure 9As shown, in one embodiment, a guide block 225 protrudes from the side wall of the piston plate 220, and the cylinder body 210 has a guide hole 217 communicating with the translation cavity 203. The guide block 225 is located within the guide hole 217 and is slidably connected to the cylinder body 210. The sliding direction of the guide block 225 relative to the guide hole 217 is parallel to the sliding direction of the piston plate 220, allowing the piston plate 220 to slide better relative to the cylinder body 210. In this embodiment, each valve stem 212 is located within the corresponding air hole 221 and is slidably connected to the piston plate 220 in a sealed manner, resulting in higher precision in the sliding of the piston plate 220 relative to the cylinder body 210.

[0047] like Figure 10 As shown, in one embodiment, the slider 230 includes a slider body 2302 and a clamping block 2304. The slider body 2302 has a first groove 2303, and the clamping block 2304 has a second groove 2305. The clamping block 2304 is fixedly connected to the slider body 2302 to form a fixing hole. The valve stem 240 passes through the fixing hole, so that the valve stem 240 is reliably fixed on the slider 230. In this embodiment, the slider body 2302 and the clamping block 2304 are detachably connected so that the slider 230 and the clamping block 2304 can be disassembled and assembled. Specifically, the slider 230 also includes a locking member (not shown). The clamping block 2304 has a locking through hole 2306, and the slider body 2302 has a threaded hole 2307. The locking member is screwed into the threaded hole through the locking through hole.

[0048] like Figure 10 As shown, the slider body 2302 further includes a receiving groove 2308 communicating with the first groove. The clamping block 2304 is located within the receiving groove 2308 and is fixedly connected to the slider body 2302, ensuring a reliable fixed connection between the clamping block 2304 and the slider body 2302. In this embodiment, a threaded hole is formed on the inner wall of the receiving groove 2308.

[0049] like Figure 10 As shown, the slider body 2302 further includes a through hole 2309, which is connected to the receiving groove 2308, the first groove and the second groove respectively. The valve stem 240 passes through the through hole 2309, so that the valve stem 240 is better fixedly connected to the slider 230.

[0050] like Figure 5 and Figure 10As shown, the piston plate 220 further includes an opening groove 211 communicating with the longitudinal sliding cavity 205, allowing the slider 230 to be better slidably mounted on the piston plate 220. In this embodiment, arc-shaped guide edges 230a are formed on both ends of the slider 230, and the longitudinal sliding cavity 205 is adapted to the arc-shaped guide edges, allowing the slider 230 to be better slidably connected to the piston plate 220.

[0051] Compared with the prior art, the present invention has at least the following advantages: 1) In the valve plate motion control device 200 described above, the piston plate 220 is slidably disposed in the translation cavity 203, and the translation drive mechanism 260 is disposed on the cylinder body 210. The power output end of the translation drive mechanism 260 is fixedly connected to the piston plate 220, so that the translation drive mechanism 260 drives the piston plate 220 to translate relative to the cylinder body 210. Also, since the slider 230 is located in the longitudinal sliding cavity 205 and is slidably connected to the piston plate 220, one end of the valve stem 240 is connected to the slider 230 through the clearance hole 201, so that the piston plate 220 drives the slider 230 to translate, thereby causing the valve stem 240 to move horizontally relative to the cylinder body 210 with the slider 230. The other end of the valve stem 240 is connected to the valve plate 100, thus driving the valve plate 100 to move horizontally relative to the cylinder body 210. 2) Since the longitudinal drive mechanism 250 is located on the piston plate 220, the power output end of the longitudinal drive mechanism 250 is fixedly connected to the slider 230. The slider 230 is located in the longitudinal slide cavity 205 and is slidably connected to the piston plate 220, so that the longitudinal drive mechanism 250 drives the slider 230 to move longitudinally relative to the piston plate 220. The valve stem 240 moves longitudinally relative to the cylinder 210 with the slider 230, thus driving the valve plate 100 to move longitudinally relative to the cylinder 210. 3) Since the driving direction of the translation drive mechanism 260 is perpendicular to the driving direction of the longitudinal drive mechanism 250, when driving the valve plate 100 to the closed position, the longitudinal drive mechanism 250 first drives the slider 230 to move longitudinally relative to the piston plate 220, so that the valve plate 100 moves from the open position to the middle position. Then, the translation drive mechanism 260 drives the piston plate 220 to translate relative to the cylinder 210, so that the valve plate 100 moves from the middle position to the closed position. Compared with the traditional vacuum valve 10, the bidirectional drive method is less prone to failure.

[0052] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A valve plate motion control device, characterized in that, include: The cylinder body has interconnected clearance holes and translation chambers; A piston plate is slidably disposed within the translational cavity, and the piston plate forms a longitudinal sliding cavity; The slider is located within the longitudinal sliding cavity and is slidably connected to the piston plate. A valve stem, which is connected to the slider through the clearance hole, and the end of the valve stem located on the outside of the cylinder body is used to connect to the valve plate; A longitudinal drive mechanism is provided on the piston plate, and the power output end of the longitudinal drive mechanism is fixedly connected to the slider; A translation drive mechanism is mounted on the cylinder block. The power output end of the translation drive mechanism is fixedly connected to the piston plate. The driving direction of the translation drive mechanism is perpendicular to the driving direction of the longitudinal drive mechanism.

2. The valve plate motion control device according to claim 1, characterized in that, The cylinder body is also provided with a translation through hole that communicates with the translation cavity. The translation drive mechanism is located outside the translation cavity, and the power output end of the translation drive mechanism is fixedly connected to the piston plate through the translation through hole.

3. The valve plate motion control device according to claim 2, characterized in that, The translation drive mechanism is a cylinder piston mechanism.

4. The valve plate motion control device according to claim 1, characterized in that, The longitudinal drive mechanism includes a longitudinal piston and a longitudinal piston rod, with the longitudinal piston sleeved on the longitudinal piston rod; the piston plate has a piston stroke hole group, which includes a communicating longitudinal piston cavity and a sliding hole, the longitudinal piston is located in the longitudinal piston cavity, the longitudinal piston rod passes through the sliding hole and is slidably and sealingly connected to the piston plate, and the longitudinal piston rod is fixedly connected to the slider through the sliding hole.

5. The valve plate motion control device according to claim 4, characterized in that, There are two longitudinal drive mechanisms and two piston stroke hole groups. The longitudinal piston of each longitudinal drive mechanism is located in the longitudinal piston chamber of the corresponding piston stroke hole group. The longitudinal piston rod of each longitudinal drive mechanism passes through the sliding hole of the corresponding piston stroke hole group and is slidably and sealingly connected to the piston plate. The longitudinal piston rod of each longitudinal drive mechanism is fixedly connected to the slider through the sliding hole of the corresponding piston stroke hole group. The two longitudinal drive mechanisms are located on both sides of the valve stem.

6. The valve plate motion control device according to claim 4, characterized in that, The inner wall of the translation cavity is provided with at least two bellows, and the piston plate is formed with at least two air holes. Each bellows is connected to the corresponding air hole, and each air hole is also connected to the longitudinal piston cavity. The longitudinal piston is located between the two air holes.

7. The valve plate motion control device according to claim 4, characterized in that, The inner wall of the translation chamber is provided with at least two valves, and the piston plate is formed with at least two air holes. Each valve is connected to the corresponding air hole, and each air hole is also connected to the longitudinal piston chamber. The longitudinal piston is located between the two air holes.

8. The valve plate motion control device according to claim 7, characterized in that, Each of the valve stems is located within the corresponding air hole and is slidably connected to the piston plate.

9. The valve plate motion control device according to any one of claims 1 to 7, characterized in that, The piston plate has a protruding guide block on its side wall, and the cylinder has a guide hole communicating with the translation cavity. The guide block is located within the guide hole and is slidably connected to the cylinder. The sliding direction of the guide block relative to the guide hole is parallel to the sliding direction of the piston plate; and / or, The slider includes a slider body and a clamping block. The slider body has a first groove, and the clamping block has a second groove. The clamping block is fixedly connected to the slider body to jointly form a fixing hole, and the valve stem passes through the fixing hole.

10. A vacuum valve, characterized in that, The device includes a valve plate and a valve plate motion control device according to any one of claims 1 to 9, wherein the valve stem is connected to the valve plate.

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