Heated angle valves and vacuum systems

Abstract

This application provides a heatable angle valve and a vacuum system. The aforementioned heatable angle valve includes a valve and a spindle; the valve is connected to one end of the spindle; a mounting hole is formed axially at the center of the spindle; the heatable angle valve also includes a heating rod; the heating rod is located in the mounting hole and fixedly connected to the spindle; the heating rod, spindle, and valve are coaxially arranged; multiple heat sinks are provided on the outer periphery of the valve near the spindle; the multiple heat sinks are distributed circumferentially along the valve, making the heating of the angle valve more uniform and avoiding local overheating of the valve body. After the spindle is heated, it heats the internal air through convection, and the energy diffused during the heating process is fully absorbed by the air. This makes the heating efficiency of the heatable angle valve high and the energy loss low. At the same time, the heat of the valve can be quickly dissipated through the multiple heat sinks, avoiding the problem of poor heat dissipation rate of the valve body.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor manufacturing, and in particular to a heatable angle valve and vacuum system. Background Technology

[0002] The core applications of angle valves are concentrated in environments requiring ultra-cleanliness and precise control, especially in semiconductor manufacturing processes. They are primarily used in the piping between the vacuum chambers and pump systems of equipment used in semiconductor, OLED, and solar cell manufacturing. Heating the valves and piping before or during vacuuming accelerates the desorption (bake-out) of water vapor and residual gases adsorbed on the pipe walls, thereby achieving and maintaining an ultra-high vacuum (UHV) or high vacuum environment. In some corrosive gas pipelines, heating can prevent reaction products or byproducts from depositing or crystallizing within the valve body, thus maintaining the cleanliness and sealing performance of the valve's moving parts.

[0003] However, existing heatable angle valves include a heated silicone sleeve, which is fitted onto the valve cylinder. Heating the silicone sleeve heats the valve body. However, due to the poor insulation of the silicone sleeve and the air gap between the heated silicone sleeve and the valve body, the heat conduction efficiency is low, resulting in severe heat loss, reduced heating efficiency, and high energy consumption and uneven heating required for heating the valve body. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a heatable angle valve and vacuum system with better heating uniformity and a higher heat dissipation rate of the valve body.

[0005] The objective of this utility model is achieved through the following technical solution: A heatable angle valve includes a valve and a spindle, wherein the valve is connected to one end of the spindle. A mounting hole is formed along the axial direction at the center of the main shaft; The heatable angle valve also includes a heating rod, which is located in the mounting hole and fixedly connected to the main shaft. The heating rod, the main shaft, and the valve are arranged coaxially. The valve has multiple heat sinks on its outer periphery near the main shaft, and the multiple heat sinks are distributed at intervals along the circumference of the valve.

[0006] In one embodiment, the mounting hole is at least located at the end of the spindle adjacent to the valve, the heating rod also abuts against the valve, and the conductive wire of the heating rod extends outward from the outside of the spindle.

[0007] In one embodiment, the mounting hole extends through the spindle, and the conductive wire of the heating rod is led out through the mounting hole to the outside of the spindle.

[0008] In one embodiment, the heatable angle valve further includes a cylinder and a piston. The cylinder has a piston chamber, an air hole, and a sliding hole. The air hole and the sliding hole are both connected to the piston chamber. The main shaft passes through the sliding hole and is elastically slidably connected to the cylinder. The piston is located in the piston chamber and is sleeved on the main shaft. The piston and the cylinder are in a sealed slidable connection.

[0009] In one embodiment, the heatable angle valve further includes an elastic element, the cylinder body has a protruding end shaft, the sliding hole is opened along the center of the end shaft, the elastic element is sleeved on the end shaft, and the elastic element abuts against the cylinder body and the valve respectively.

[0010] In one embodiment, the main shaft includes a shaft body and a pressure block. The shaft body passes through the sliding hole and is slidably connected to the cylinder body. The piston is sleeved on the shaft body. One end of the shaft body is fixedly connected to the valve. The pressure block is sealed and sleeved on the outer peripheral wall of the shaft body and abuts against the valve. The end of the elastic element away from the cylinder body abuts against the valve. The elastic element is a helical spring.

[0011] In one embodiment, the heatable angle valve further includes a sleeve fitted onto the shaft, with both ends of the sleeve abutting against the end shaft and the pressure block, respectively; and / or, In one embodiment, the heatable angle valve further includes a bellows, with its two ends connected to the cylinder and the valve, respectively, and the main shaft and the elastic element both located inside the bellows.

[0012] In one embodiment, a fixing groove is provided at one end of the valve adjacent to the main shaft, and one end of the main shaft is located in the fixing groove and fixedly connected to the valve; the mounting hole is opened through the main shaft, the heating rod is fixed to the end of the main shaft adjacent to the valve, and the conductive wire of the heating rod is led out to the outside of the main shaft through the mounting hole.

[0013] In one embodiment, the heating rod includes a limiting portion and an extension portion connected together, the diameter of the limiting portion being larger than the diameter of the extension portion; a positioning groove is formed on the inner wall of the mounting hole, the limiting portion abuts against the positioning groove, and the extension portion is located within the mounting hole; and / or, In one embodiment, the valve has a heat radiation reflective layer on its end side adjacent to the spindle; and / or, In one embodiment, the valve has multiple heat dissipation reinforcement fins on the end side away from the spindle.

[0014] A vacuum system comprising the heatable angle valve described in any of the above embodiments.

[0015] Compared with the prior art, the present invention has at least the following advantages: 1) The aforementioned heatable angle valve has an axial mounting hole at the center of the main shaft. The heating rod is located in the mounting hole and fixedly connected to the main shaft. The heating rod, main shaft, and valve are coaxially arranged, which allows the heating rod to uniformly heat the peripheral wall of the main shaft after being energized. At the same time, the heat conducted to the valve through the main shaft is relatively uniform, thus making the heating of the angle valve more uniform and avoiding local overheating of the valve body. After the main shaft is heated, it heats the internal air through convection. Moreover, the energy diffused during the heating process is fully absorbed by the air. This makes the heating efficiency of the heatable angle valve high and the energy loss low.

[0016] 2) Furthermore, since multiple heat sinks are provided on the outer periphery of the valve near the main shaft, and these heat sinks are distributed at intervals along the circumference of the valve, the heat of the valve can be quickly dissipated through the multiple heat sinks, avoiding the problem of poor heat dissipation rate of the valve body. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of a vacuum system according to one embodiment; Figure 2 for Figure 1 A schematic diagram of the vacuum system shown from another perspective; Figure 3 for Figure 2 A cross-sectional view of the vacuum system shown. Figure 4 for Figure 3 A schematic diagram of a heatable angle valve in the vacuum system shown. Detailed Implementation

[0019] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. The drawings illustrate preferred embodiments of this utility model. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.

[0020] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly attached to the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0022] This application provides a heatable angle valve, including a valve and a spindle; and / or, the valve is connected to one end of the spindle; and / or, the center of the spindle has an axially formed mounting hole; and / or, the heatable angle valve further includes a heating rod; and / or, the heating rod is located in the mounting hole and fixedly connected to the spindle; and / or, the heating rod, the spindle, and the valve are coaxially arranged; and / or, a plurality of heat sinks are provided on the outer periphery of the portion of the valve adjacent to the spindle; and / or, the plurality of heat sinks are spaced apart circumferentially along the valve.

[0023] The aforementioned heatable angle valve features an axial mounting hole at the center of the main shaft. A heating rod is located within this hole and fixedly connected to the main shaft. The heating rod, main shaft, and valve are coaxially aligned, allowing the heating rod to uniformly heat the peripheral wall of the main shaft when energized. Simultaneously, the heat conducted to the valve via the main shaft is also relatively uniform, resulting in more even heating of the angle valve and preventing localized overheating. The heated main shaft heats the internal air through convection, and the diffused energy is fully absorbed by the air during the heating process. This contributes to the high heating efficiency and low energy loss of the heatable angle valve. Furthermore, multiple heat sinks are located on the outer periphery of the valve near the main shaft, spaced circumferentially. These fins allow for rapid heat dissipation, preventing issues with poor heat dissipation rates from the valve body.

[0024] To better understand the technical solution and beneficial effects of this application, the following detailed description is provided in conjunction with specific embodiments: like Figures 1 to 4 As shown, a vacuum system 10 in one embodiment includes a heatable angle valve 100. In this embodiment, the vacuum system 10 also includes a three-way pipe 200 and a top flange 300. The three-way pipe 200 includes an inlet end 202, an outlet end 204, and a mounting end 206. The top flange 300 is fixed to the mounting end 206. The heatable angle valve 100 is disposed on the top flange 300, and the heatable angle valve 100 is correspondingly disposed with a valve seat 2042 on the inner wall of the outlet end 204. The heatable angle valve 100 is used to open or close the valve seat 2042. When the heatable angle valve 100 is open in the valve seat 2042, the inlet end 202 and the outlet end 204 are connected. Conversely, when the heatable angle valve 100 is closed in the valve seat 2042, the inlet end 202 and the outlet end 204 are not connected.

[0025] In one embodiment, the heatable angle valve 100 includes a valve 110 and a spindle 120, with the valve 110 connected to one end of the spindle 120. A mounting hole 122 is formed axially at the center of the spindle 120. The heatable angle valve 100 also includes a heating rod 130, which is located within the mounting hole 122 and fixedly connected to the spindle 120. In this embodiment, the heating rod 130 is adapted to the mounting hole 122, allowing the heat generated by the heating rod 130 to be effectively conducted to the inner wall of the mounting hole 122.

[0026] Furthermore, the heating rod 130, the main shaft 120, and the valve 110 are coaxially arranged, that is, the center line of the heating rod 130, the center line of the main shaft 120, and the center line of the valve 110 are collinear.

[0027] Furthermore, a plurality of heat sinks 112 are provided on the outer periphery of the portion of the valve 110 adjacent to the main shaft 120, and the plurality of heat sinks 112 are distributed at intervals along the circumference of the valve 110.

[0028] The aforementioned vacuum system 10 and its heatable angle valve 100 have an axial mounting hole 122 formed at the center of the main shaft 120. The heating rod 130 is located in the mounting hole 122 and fixedly connected to the main shaft 120. The heating rod 130, the main shaft 120, and the valve 110 are coaxially arranged, so that the heating rod 130 can uniformly heat the peripheral wall of the main shaft 120 after being energized. At the same time, the heat conducted to the valve 110 through the main shaft 120 is relatively uniform, thereby making the heating of the angle valve more uniform and avoiding local overheating of the valve body. After the main shaft 120 is heated, it heats the internal air through convection. Moreover, the energy diffused during the heating process is fully absorbed by the air. Thus, the heating efficiency of the heatable angle valve 100 is high and the energy loss is low. Furthermore, since multiple heat sinks 112 are provided on the outer periphery of the part of the valve 110 near the main shaft 120, and the multiple heat sinks 112 are distributed at intervals along the circumference of the valve 110, the heat of the valve 110 can be quickly dissipated through the multiple heat sinks 112, avoiding the problem of poor heat dissipation rate of the valve body.

[0029] like Figure 2 and Figure 3 As shown, in one embodiment, the mounting hole 122 is at least located at the end of the spindle 120 adjacent to the valve 110, and the heating rod 130 abuts against the valve 110. The conductive wire of the heating rod 130 extends outward from the outside of the spindle 120, allowing the heating rod 130 to be externally energized. Furthermore, the heating rod 130 can heat the valve, enabling it to directly heat the peripheral wall of the spindle after being energized, thus preventing the deposition of reaction products or byproducts on the valve plate. In this embodiment, the mounting hole 122 extends through the spindle 120, and the conductive wire of the heating rod 130 extends outward from the outside of the spindle 120 through the mounting hole 122.

[0030] like Figure 2 and Figure 3As shown, in one embodiment, the heatable angle valve 100 further includes a cylinder 140 and a piston 150. The cylinder 140 has a piston chamber 142, an air hole 144, and a sliding hole 146. The air hole 144 and the sliding hole 146 are both connected to the piston chamber 142. The main shaft 120 passes through the sliding hole 146 and is elastically slidably connected to the cylinder 140. The piston 150 is located in the piston chamber 142 and is sleeved on the main shaft 120. The piston 150 is sealed and slidably connected to the cylinder 140. In this embodiment, the cylinder 140 is fixed to the top flange 300 by bolts. The air hole 144 is provided with an inflatable / deflate nozzle (not shown). By inflating or deflating the piston chamber 142 through the inflatable / deflate nozzle, the piston 150 is driven to slide within the piston chamber 142, causing the piston 150 to drive the main shaft 120 to move, thereby opening or closing the valve 110 at the valve seat 2042. Furthermore, the inner wall of the sliding hole 146 is provided with a sealing guide ring, which is slidably sleeved on the outer wall of the main shaft 120, and the main shaft 120 is slidably connected to the sliding hole 146 through the sealing guide ring.

[0031] It is understood that, in one embodiment, the length of the heating rod 130 along the axial direction parallel to the main shaft 120 can be flexibly adjusted according to the heating part of the main shaft 120. In one embodiment, one end of the heating rod 130 extends at least to the valve 110, and the other end of the heating rod 130 extends to the cylinder 140, so that the heating rod 130 can better heat the main shaft 120.

[0032] like Figure 2 and Figure 3 As shown, in one embodiment, the heatable angle valve 100 further includes an elastic element 160. The cylinder body 140 has a protruding end shaft 141, and the sliding hole 146 is opened along the center of the end shaft 141. The elastic element 160 is sleeved on the end shaft 141, and the elastic element 160 abuts against the cylinder body 140 and the valve 110 respectively. When the inflatable / expandable nozzle inflates the piston chamber 142, the piston 150 drives the main shaft 120 to move upward, the valve 110 opens at the valve seat 2042, and the elastic element 160 undergoes elastic deformation. When the inflatable / expandable nozzle deflates the piston chamber 142, the elastic element 160 elastically returns to its original position, causing the main shaft 120 to drive the piston 150 downward until the valve 110 closes at the valve seat 2042. In this embodiment, the elastic element 160 is a coil spring or an elastic rubber sleeve.

[0033] like Figure 2 and Figure 3As shown, in one embodiment, the main shaft 120 includes a shaft body 1202 and a pressure block 1204. The shaft body 1202 passes through the sliding hole 146 and is slidably connected to the cylinder body 140. The piston 150 is sleeved on the shaft body 1202. One end of the shaft body 1202 is fixedly connected to the valve 110. The pressure block 1204 is sealed and sleeved on the outer peripheral wall of the shaft body 1202 and abuts against the valve 110. The end of the elastic element 160 away from the cylinder body 140 abuts against the valve 110. The elastic element 160 is a helical spring. In this embodiment, both ends of the elastic element 160 elastically abut against the end shaft 141 and the pressure block 1204. The pressure block 1204 is sleeved on the outer peripheral wall of the shaft body 1202 through a sealing ring.

[0034] like Figure 2 and Figure 3 As shown, in one embodiment, the heatable angle valve 100 further includes a sleeve 170, which is sleeved on the shaft 1202, and both ends of the sleeve 170 abut against the end shaft 141 and the pressure block 1204 respectively, so that the sleeve 170 protects the shaft 1202, while the elastic element 160 is less likely to interfere during use; and / or, like Figure 3 and Figure 4 As shown, in one embodiment, the heatable angle valve 100 further includes a bellows 180, with its two ends connected to the cylinder 140 and the valve 110, respectively. The main shaft 120 and the elastic element 160 are both located within the bellows 180, making it less prone to interference with the elastic element 160 during use and preventing metal particles generated during operation from leaking through the air inlet 202 or air outlet 204. Furthermore, adding the bellows 180 helps improve the heating efficiency of the heatable angle valve 100. In this embodiment, the method by which the two ends of the bellows 180 are connected to the cylinder 140 and the valve 110 is existing technology and can be achieved by bolt fixing, welding, or adhesive bonding; no limitation is made here.

[0035] like Figure 2 and Figure 3 As shown, in one embodiment, a fixing groove 101 is provided at one end of the valve 110 adjacent to the spindle 120, and one end of the spindle 120 is located in the fixing groove 101 and fixedly connected to the valve 110; the mounting hole 122 is opened through the spindle 120, and the heating rod 130 is fixed to the end side of the spindle 120 adjacent to the valve 110. The conductive wire of the heating rod 130 is led out to the outside of the spindle 120 through the mounting hole 122, so that the heating rod 130 is fixed on the spindle 120, and at the same time, the valve 110 is better fixedly connected to the spindle 120.

[0036] like Figure 2 and Figure 3 As shown, in one embodiment, the heating rod 130 includes a limiting portion 132 and an extension portion 134 connected together. The diameter of the limiting portion 132 is larger than the diameter of the extension portion 134. A positioning groove 1222 is formed on the inner wall of the mounting hole 122. The limiting portion 132 abuts against the positioning groove, and the extension portion 134 is located within the mounting hole 122, so that the heating rod 130 is better positioned and fixed to the inner wall of the mounting hole 122. And / or, In one embodiment, a heat radiation reflective layer (not shown) is provided on the end side of the valve 110 adjacent to the main shaft 120, so that heat from the side of the valve 110 adjacent to the main shaft 120 is effectively blocked on one side of the valve 110, further reducing the energy loss of the heatable angle valve 100. In this embodiment, the material of the heat radiation reflective layer is a prior art heat radiation reflective material, which will not be described in detail here. And / or, like Figure 4 As shown, in one embodiment, the valve 110 is provided with a plurality of heat dissipation reinforcement fins 113 on the end side away from the main shaft 120, so that the heat of the valve 110 on the end side away from the main shaft 120 is better dissipated, and the heat of the valve 110 on the end side away from the main shaft 120 is avoided from accumulating.

[0037] Compared with the prior art, the present invention has at least the following advantages: 1) In the aforementioned heatable angle valve 100, since the center of the main shaft 120 has an axially formed mounting hole 122, the heating rod 130 is located in the mounting hole 122 and fixedly connected to the main shaft 120. The heating rod 130, the main shaft 120 and the valve 110 are coaxially arranged, so that the heating rod 130 can uniformly heat the peripheral wall of the main shaft 120 after being energized. At the same time, the heat conducted to the valve 110 through the main shaft 120 is relatively uniform, thereby making the heating of the angle valve more uniform and avoiding local overheating of the valve body. After the main shaft 120 is heated, it heats the internal air through convection. Moreover, the energy diffused during the heating process is fully absorbed by the air. Thus, the heating efficiency of the heatable angle valve 100 is high and the energy loss is low.

[0038] 2) Furthermore, since multiple heat sinks 112 are provided on the outer periphery of the part of the valve 110 near the main shaft 120, and the multiple heat sinks 112 are distributed at intervals along the circumference of the valve 110, the heat of the valve 110 can be quickly discharged through the multiple heat sinks 112, avoiding the problem of poor heat discharge rate of the valve body.

[0039] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A heatable angle valve, comprising a valve and a spindle, wherein the valve is connected to one end of the spindle, characterized in that, A mounting hole is formed along the axial direction at the center of the main shaft; The heatable angle valve also includes a heating rod, which is located in the mounting hole and fixedly connected to the main shaft. The heating rod, the main shaft, and the valve are arranged coaxially. The valve has multiple heat sinks on its outer periphery near the main shaft, and the multiple heat sinks are distributed at intervals along the circumference of the valve.

2. The heatable angle valve of claim 1, wherein, The mounting hole is at least located at the end of the spindle adjacent to the valve, the heating rod also abuts against the valve, and the conductive wire of the heating rod extends out to the outside of the spindle.

3. The heatable angle valve of claim 2, wherein, The mounting hole is formed through the main shaft, and the conductive wire of the heating rod is led out to the outside of the main shaft through the mounting hole.

4. The heatable angle valve of claim 1, wherein, It also includes a cylinder and a piston. The cylinder has a piston chamber, an air hole and a sliding hole. The air hole and the sliding hole are both connected to the piston chamber. The main shaft passes through the sliding hole and is elastically slidably connected to the cylinder. The piston is located in the piston chamber and is sleeved on the main shaft. The piston and the cylinder are sealed and slidably connected.

5. The heatable angle valve of claim 4, wherein, It also includes an elastic element, the cylinder body has a protruding end shaft, the sliding hole is opened along the center of the end shaft, the elastic element is sleeved on the end shaft, and the elastic element abuts against the cylinder body and the valve respectively.

6. The heatable angle valve of claim 5, wherein, The main shaft includes a shaft body and a pressure block. The shaft body passes through the sliding hole and is slidably connected to the cylinder body. The piston is sleeved on the shaft body. One end of the shaft body is fixedly connected to the valve. The pressure block is sealed and sleeved on the outer peripheral wall of the shaft body and abuts against the valve. The end of the elastic element away from the cylinder body abuts against the valve. The elastic element is a helical spring.

7. The heatable angle valve of claim 6, wherein, It also includes a sleeve, which is fitted onto the shaft body, and both ends of the sleeve abut against the end shaft and the pressure block, respectively; and / or, The heatable angle valve also includes a bellows, with its two ends connected to the cylinder and the valve, respectively. The main shaft and the elastic element are both located inside the bellows.

8. The heatable angle valve of claim 1, wherein, A fixing groove is provided at one end of the valve near the main shaft, and one end of the main shaft is located in the fixing groove and fixedly connected to the valve; the mounting hole is opened through the main shaft, the heating rod is fixed to the end of the main shaft near the valve, and the conductive wire of the heating rod is led out to the outside of the main shaft through the mounting hole.

9. The heatable angle valve according to claim 8, characterized in that, The heating rod includes a limiting portion and an extension portion connected together, the diameter of the limiting portion being larger than the diameter of the extension portion; a positioning groove is formed on the inner wall of the mounting hole, the limiting portion abuts against the positioning groove, and the extension portion is located within the mounting hole; and / or, The valve is provided with a heat radiation reflective layer on the end side adjacent to the main shaft; and / or, The valve is provided with multiple heat dissipation reinforcement fins on the end side away from the main shaft.

10. A vacuum system, characterized by The heated angle valve includes any one of claims 1 to 9.

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