Anti-falling device and detection system

Abstract

This utility model relates to an anti-detachment device and detection system. The anti-detachment device includes: an insert assembly and a hose; the insert assembly has a groove, the groove including at least one arc-shaped bending structure, the radius of curvature of the arc-shaped bending structure being adapted to the outer diameter of the hose; a continuous receiving channel is formed through the groove for receiving the hose, the depth of the groove being less than the outer diameter of the hose, forming an interference fit. This effectively increases the anti-detachment effect and improves the reliability of the purging gas pipeline.

Description

Technical Field

[0001] This utility model mainly relates to the field of semiconductor thin film deposition equipment, and in particular to an anti-detachment device and detection system. Background Technology

[0002] During operation, the internal power connectors of the heating plate are highly susceptible to oxidation due to the high-temperature environment, which shortens the lifespan of the heating plate and increases equipment maintenance costs and downtime. To solve this problem, a purging gas is introduced into the heating plate handle to create an inert gas atmosphere, protecting the power connectors from oxidation and extending the heating plate's lifespan. Therefore, the purging gas path for the heating plate is crucial in high-temperature equipment.

[0003] The existing equipment's heating plate purging pipeline uses a direct-venting atmospheric structure. This design prevents the purging air path from forming a closed loop, making it difficult to effectively monitor the operating status of the purging air path through loop pressure detection. Furthermore, the existing equipment lacks effective real-time monitoring methods for the presence or absence of the air supply pipe. If it becomes detached, it will negatively impact the lifespan of the heating plate. Utility Model Content

[0004] One objective of this invention is to provide an anti-detachment device and detection system to solve the problems of easy detachment of purge gas pipelines and inability to detect pipeline status in the prior art.

[0005] According to one aspect of the present invention, an anti-detachment device is provided, the anti-detachment device comprising: an insert assembly and a hose;

[0006] The insert assembly has a groove, the groove including at least one arc bend structure, the radius of curvature of the arc bend structure being adapted to the outer diameter of the hose;

[0007] The groove forms a continuous storage channel for storing the hose. The depth of the groove is less than the outer diameter of the hose, forming an interference fit.

[0008] Optionally, the insert assembly includes a first insert and a second insert, wherein the opposing surfaces of the first insert and the second insert are provided with mutually matching grooves.

[0009] Optionally, when the first insert and the second insert are fitted together, they together form a continuous storage channel for the hose, and a self-locking friction surface is formed through the arc bending structure for fastening the hose.

[0010] Optionally, the anti-detachment device includes a sensor and a first fixing member, wherein the sensor is mounted on the insert assembly via the first fixing member.

[0011] Optionally, the anti-fall-off device includes a switch baffle and a second fixing member, wherein the first fixing member is connected to the second fixing member;

[0012] The switch baffle is mounted on the insert assembly at a target position via the second fastener, the target position being the position opposite to the outlet end of the hose.

[0013] Optionally, the first insert is made of a transparent or translucent material for observing the posture of the hose.

[0014] Optionally, the surface of the groove is provided with anti-slip texture.

[0015] Optionally, the radius of curvature of the circular arc bending structure ranges from 4mm to 8mm.

[0016] According to another aspect of this application, a detection system for preventing detachment is also provided, the detection system comprising:

[0017] Controller, such as the aforementioned anti-fall-off device;

[0018] And sensors and switch baffles fixed to the insert assembly;

[0019] The sensing area of ​​the sensor corresponds to the movement trajectory of the switch baffle, and the presence state of the switch baffle is associated with the on / off signal of the sensor.

[0020] The controller is used to receive the on / off signal of the sensor to detect the presence status of the anti-detachment device.

[0021] Compared with existing technologies, this utility model provides an anti-detachment device comprising: an insert assembly and a hose; the insert assembly has a groove, the groove including at least one arc-shaped bend structure, the radius of curvature of the arc-shaped bend structure being adapted to the outer diameter of the hose; a continuous receiving channel is formed through the groove for receiving the hose, the depth of the groove being less than the outer diameter of the hose, forming an interference fit. This effectively increases the anti-detachment effect and improves the reliability of the purging gas pipeline. Attached Figure Description

[0022] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings, wherein:

[0023] Figure 1 A schematic diagram of an anti-fall-off device according to one aspect of the present invention is shown.

[0024] Figure 2 This diagram shows a structural schematic of the first insert in one embodiment of the present invention;

[0025] Figure 3 This diagram shows a structural schematic of the second insert in one embodiment of the present invention;

[0026] Figure 4 This diagram shows a structural schematic of the connection between the anti-fall-off device and the heating plate in one embodiment of the present invention.

[0027] The numbers on the map are:

[0028] 10-Installation Components;

[0029] 101 - First insert;

[0030] 102 - Second insert;

[0031] 112 - Groove;

[0032] 1111 - Arc bending structure;

[0033] 20-Hose;

[0034] 30-Sensor;

[0035] 40 - First fastener;

[0036] 50-Switch baffle;

[0037] 60 - Second fastener;

[0038] 70 - Heating plate handle;

[0039] The same or similar reference numerals in the accompanying drawings represent the same or similar parts. Detailed Implementation

[0040] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0041] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein, and therefore the present invention is not limited to the specific embodiments disclosed below.

[0042] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0043] Furthermore, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," and "vertical" used in the following description should be understood as the orientations shown in the relevant paragraphs and accompanying drawings. These relative terms are for illustrative purposes only and do not imply that the described device must be manufactured or operated in a specific orientation; therefore, they should not be construed as limiting the scope of this invention.

[0044] It is understood that although terms such as “first,” “second,” “third,” etc., may be used here to describe various pipes, channels, components, areas, layers, and / or parts, these components, areas, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different pipes, channels, components, areas, layers, and / or parts.

[0045] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components relevant to this utility model and are not drawn according to the actual number, shape, and size of the components in the actual implementation. In the actual implementation, the form, quantity, and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex. To keep the illustrations as concise as possible, not all structures are indicated in the drawings.

[0046] Figure 1 The diagram shows a structural schematic of an anti-detachment device according to one aspect of the present invention, the anti-detachment device comprising: an insert assembly 10 and a hose 20;

[0047] The insert assembly 10 has a groove, the groove including at least one arc bend structure, the radius of curvature of the arc bend structure being adapted to the outer diameter of the hose 20; the groove forms a continuous receiving channel for receiving the hose 20, the depth of the groove being less than the outer diameter of the hose 20, forming an interference fit.

[0048] The flexible hose 20 is a flexible conduit made of materials such as polyurethane, silicone, or rubber, used for transporting gas or liquid. In one embodiment of this application, the hose is a conduit used for purging the heating plate. The insert assembly 10 is used to embed the hose 20 to prevent it from falling out. The insert assembly is designed with grooves to form a continuous channel for accommodating the hose 20. To prevent the hose 20 from falling out, multiple arc-shaped bending structures can be designed, i.e., arc-shaped bending sections are designed so that the hose 20 is self-locking in the groove.

[0049] To achieve a self-locking effect, the radius of curvature (i.e., bending radius) of the arc-shaped bending structure needs to be adapted to the outer diameter of the hose, meaning the hose needs to be embedded in the groove at the bend. Furthermore, the depth of the groove needs to be less than the outer diameter of the hose, forming an interference fit. This interference fit means that when the groove depth is less than the outer diameter of the hose, the hose can be pressed into the groove, creating continuous radial pressure at the contact surface. This interference fit range is, for example, 0.1mm to 0.6mm, and in a specific embodiment of this application, it is preferably 0.5mm.

[0050] When the interference fit is applied, the hose is slightly compressed. Its function is to increase the friction of the hose in the insert assembly (increase the positive pressure) while ensuring smooth airflow, resist the axial pull-out force, and increase the hose's anti-detachment effect.

[0051] In one embodiment of this application, reference is made to Figure 2 and Figure 3 The insert assembly 10 includes a first insert 101 and a second insert 102, wherein the opposing surfaces of the first insert 101 and the second insert 102 are provided with matching grooves.

[0052] The first insert can be the upper insert, and the second insert can be the lower insert. Figure 2 The middle part is a structural schematic diagram of the upper insert, in which a groove 111 is provided, and the groove 111 has multiple arc bending structures 1111; Figure 3 The middle part is a structural schematic diagram of the lower insert. The lower insert also has a groove 112, which matches the groove 111. The groove 111 has multiple arc bending structures 1112, so that when the two inserts are put together, the grooves can be aligned and the arc bending structures can also be aligned.

[0053] Following the above embodiment, when the first insert 101 and the second insert 102 are attached together, they together form a continuous storage channel for the hose 20, and a self-locking friction surface is formed through the arc bending structure to fasten the hose.

[0054] After the upper and lower insert grooves are tightly aligned, their grooves form a channel for storing the purge air hose, which serves to store and secure the air hose within the inserts. The grooves of the upper and lower inserts have several arc bends; in a specific embodiment of this application, two arc bends are preferably used. While ensuring smooth airflow through the arc bends, the labyrinthine grooves increase the tensile deformation at the friction bends, creating a self-locking mechanism, reducing axial tensile force transmission, and enhancing the hose's anti-detachment effect.

[0055] In one embodiment of this application, reference is made to Figure 1The anti-detachment device includes a sensor 30 and a first fixing member 40, wherein the sensor 30 is mounted on the insert assembly 10 via the first fixing member 40.

[0056] A sensor 30 can be fixed on the insert assembly. Preferably, a threaded hole is provided on the second insert (i.e., the lower insert) of the insert assembly. The first fixing member 40 can be fixed to the second insert using screws, and is located near the purge inlet.

[0057] Following the above embodiments, continue to refer to Figure 1 The anti-detachment device includes a switch baffle 50 and a second fixing member 60, wherein the first fixing member 40 is connected to the second fixing member 60; the switch baffle 50 is installed on the insert assembly 10 at a target position via the second fixing member 60, the target position being the position opposite to the outlet end of the hose.

[0058] The switch baffle is fixed to the insert assembly via a second fastener, which can also be fixed to the lower insert. The second fastener can be a screw. When the outlet end of the hose extends from one end of the insert assembly 10, the switch baffle is set at the opposite end of the insert assembly 10 as the target position, i.e., near the purge inlet. This ensures that the movement trajectory of the switch baffle corresponds to the sensing area of ​​the sensor. The presence of the switch baffle is associated with the on / off signal of the sensor. When the hose leaves the groove, the switch baffle is within the sensing area and triggers the sensor signal to turn on.

[0059] The sensor can be a photoelectric switch, and its sensing area is the physical space range within which the sensor can effectively detect the embedded component. The movement trajectory of the switch baffle refers to the spatial path traversed by the switch baffle during its operation (such as translation). For example, the initial position is away from the sensor or not installed, and the trigger position is when it enters the sensing area. When the flexible tube detaches from the groove and there is no embedded component, the switch baffle moves from the initial position to the trigger position. When the switch baffle is within the sensing area, the sensor signal is on, and the flexible tube is detached; when the switch baffle is not within the sensing area, the sensor signal is off, and the flexible tube is in place.

[0060] In one embodiment of this application, the first insert 101 is made of a transparent or translucent material and is used to observe the posture of the hose.

[0061] The first insert can be made of transparent or semi-transparent material to facilitate observation of the hose's posture when the insert assembly is assembled, ensuring that the hose is smoothly stored in the groove.

[0062] In one embodiment of this application, the surface of the groove is provided with anti-slip texture.

[0063] Anti-slip textures include raised textures or V-grooves, which increase the contact area and roughness between the hose and the groove surface, thereby improving friction. When the hose is pressed into the groove, the texture can grip the outer surface of the hose, forming additional mechanical gripping force, further reducing the risk of the hose falling off.

[0064] In one embodiment of this application, the radius of curvature of the arc bending structure ranges from 4mm to 8mm.

[0065] When the radius of curvature (i.e., bending radius) of the arc-shaped bending structure is less than 4mm, it will increase the stress on the hose, leading to deformation or breakage; when the radius of curvature is greater than 8mm, it will weaken the self-locking friction and reduce the anti-detachment effect. In a specific embodiment of this application, the radius of curvature is preferably 6mm, at which point the measured pull-out force meets the condition, meaning the hose is not easy to detach.

[0066] According to another aspect of this application, an anti-detachment detection system is also provided, the detection system comprising:

[0067] Controller, such as the aforementioned anti-fall-off device;

[0068] And sensors and switch baffles fixed to the insert assembly;

[0069] The sensing area of ​​the sensor corresponds to the movement trajectory of the switch baffle, and the presence state of the switch baffle is associated with the on / off signal of the sensor.

[0070] The controller is used to receive the on / off signal of the sensor to detect the presence status of the anti-detachment device.

[0071] like Figure 4 As shown, the heating plate purge air hose 20 passes through the insert assembly 10 and then through a universal connector fixed at the corresponding position of the equipment to deliver purge gas into the heating plate handle 70; at the same time, a position sensor 30 is added to monitor the presence or absence of the insert assembly (the air hose is fixed to the insert assembly) at the system level.

[0072] The aforementioned insert assembly has two inserts, upper and lower, each with internal grooves. When the grooved surfaces of the upper and lower inserts are tightly aligned, the grooves form a channel for storing the purge air hose, thus securing the air hose within the inserts. The grooves of the upper and lower inserts have several arc bends. These labyrinthine grooves, while ensuring unobstructed airflow, increase friction at the bends, creating a self-locking mechanism, reducing axial tensile force transmission, and enhancing the hose's anti-dislodgement effect.

[0073] The groove depth formed after the upper and lower inserts are molded is slightly smaller than the outer diameter of the air hose. After molding, the groove and the hose have a small interference fit, that is, the hose is slightly compressed. Its function is to increase the friction of the hose in the insert (increase the positive pressure) while ensuring smooth airflow, and to increase the hose's anti-dislodgement effect.

[0074] A sensor is fixedly connected to a suitable position on the device. The lower insert has a fixing component, including but not limited to using threaded holes, which serves to fix the sensor switch plate. The presence or absence of the plate corresponds to two states of the sensor. The sensor's signal line transmits the feedback signal back to the device system control terminal (controller) to achieve system-level monitoring of the presence (presence or absence) of the purge air hose.

[0075] Specifically, the insert assembly secures the sensor and the switch baffle. The sensor detects the presence of the switch baffle and outputs an on or off signal. When the hose detaches, the switch baffle moves to the sensor's sensing area, and the controller receives the sensor's signal and analyzes the hose's status (whether it has detached). The controller is configured to determine that the hose is detached and trigger an alarm if it continuously receives an on signal for more than a threshold time. By adding local structural safeguards and system-level safeguards, the reliability of the purge gas pipeline is improved.

[0076] The basic concepts have been described above. Obviously, for those skilled in the art, the above disclosure is merely illustrative and does not constitute a limitation of this utility model. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this utility model. Such modifications, improvements, and corrections are suggested in this utility model, and therefore remain within the spirit and scope of the exemplary embodiments of this utility model.

[0077] Meanwhile, specific terms are used to describe embodiments of this utility model. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic related to at least one embodiment of this utility model. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. Furthermore, certain features, structures, or characteristics in one or more embodiments of this utility model can be appropriately combined.

[0078] In some embodiments, numbers describing the quantity of components and attributes are used. It should be understood that such numbers used in the description of embodiments are modified in some examples with the terms "approximately," "approximately," or "generally." Unless otherwise stated, "approximately," "approximately," or "generally" indicates that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may be changed according to the characteristics required by individual embodiments. In some embodiments, numerical parameters should take into account specified significant digits and employ a general method of digit reservation. Although the numerical ranges and parameters used to confirm the breadth of their range in some embodiments of this invention are approximate values, in specific embodiments, such values ​​are set as precisely as feasible.

Claims

1. An anti-fall-off device, characterized in that, The anti-fall-off device includes: an insert assembly and a hose; The insert assembly has a groove, the groove including at least one arc bend structure, the radius of curvature of the arc bend structure being adapted to the outer diameter of the hose; The groove forms a continuous storage channel for storing the hose. The depth of the groove is less than the outer diameter of the hose, forming an interference fit.

2. The anti-fall-off device according to claim 1, characterized in that, The insert assembly includes a first insert and a second insert, wherein the opposing surfaces of the first insert and the second insert are provided with matching grooves.

3. The anti-fall-off device according to claim 2, characterized in that, When the first insert and the second insert are fitted together, they together form a continuous storage channel for the hose, and a self-locking friction surface is formed through the arc bending structure for fastening the hose.

4. The anti-fall-off device according to claim 1, characterized in that, The anti-fall-off device includes a sensor and a first fixing member, wherein the sensor is mounted on the insert assembly via the first fixing member.

5. The anti-fall-off device according to claim 4, characterized in that, The anti-fall-off device includes a switch baffle and a second fixing member, wherein the first fixing member is connected to the second fixing member; The switch baffle is mounted on the insert assembly at a target position via the second fastener, the target position being the position opposite to the outlet end of the hose.

6. The anti-fall-off device according to claim 2, characterized in that, The first insert is made of a transparent or translucent material and is used to observe the posture of the hose.

7. The anti-fall-off device according to claim 1, characterized in that, The surface of the groove is provided with anti-slip texture.

8. The anti-fall-off device according to claim 1, characterized in that, The radius of curvature of the circular arc bending structure ranges from 4mm to 8mm.

9. A detection system for preventing detachment, characterized in that, The detection system includes: Controller, the anti-fall-off device as described in any one of claims 1 to 8; And sensors and switch baffles fixed to the insert assembly; The sensing area of ​​the sensor corresponds to the movement trajectory of the switch baffle, and the presence state of the switch baffle is associated with the on / off signal of the sensor. The controller is used to receive the on / off signal of the sensor to detect the presence status of the anti-detachment device.

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