A water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces

Abstract

This utility model discloses a water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces. It includes a first semi-circular ring and a second semi-circular ring, which are separately configured, and a connecting assembly. Each of the inner arc-shaped end faces of the two semi-circular rings has a placement groove for placing the flange of the connecting flange on the semiconductor crystal growth furnace side, the flange of the connecting flange on the exhaust pipe side, and a sealing ring. The inner sides of the first and second semi-circular rings are respectively provided with a first circulating water path and a second circulating water path for cooling water flow. The retaining ring provided in this application is separately configured, and the two separately configured semi-circular rings can be connected into a whole by the connecting assembly, thereby facilitating installation and disassembly and reducing the skill requirements for operators. Furthermore, circulating cooling water can flow into the circulating water path, thus providing water cooling functionality, which can improve the situation of localized high temperatures at the connection point and effectively solve the problem of air leakage caused by deformation of the sealing ring due to high temperatures.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to a water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces. Background Technology

[0002] A typical semiconductor crystal growth furnace uses side exhaust. An exhaust pipe is connected to the furnace's exhaust port, and the exhaust pipe is connected to the exhaust port via two KF flanges (specifically, a KF flange on the exhaust port side and a KF flange on the exhaust pipe side). To ensure a tight seal, a sealing ring, typically made of fluororubber, is installed at the connection point of the two KF flanges. However, the exhaust pipe is located close to the high-temperature zone and requires frequent disassembly and cleaning. Therefore, both ease of installation and airtightness must be considered. The exhaust temperature in this area is high, necessitating both a secure connection and a tight seal at the installation location. Even slight installation errors can cause the sealing ring to deform under high temperatures, leading to abnormal pressure in the high-temperature equipment and a risk of explosion. This places high demands on the operator's skills and expertise. Utility Model Content

[0003] The purpose of this invention is to provide a water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces, in order to overcome the shortcomings of existing technologies.

[0004] The objective of this utility model is achieved through the following technical solution: A water-cooled retaining ring device for connecting a high-temperature exhaust pipe of a semiconductor crystal growth furnace includes a first semi-circular ring and a second semi-circular ring, which are separately arranged, and a connecting assembly. The first semi-circular ring and the second semi-circular ring can be connected by the connecting assembly to form a complete retaining ring. Each of the inner arc-shaped end faces of the two semi-circular rings is provided with a placement groove for placing the flange of the connecting flange on the semiconductor crystal growth furnace side, the flange of the connecting flange on the exhaust pipe side, and a sealing ring. The inner sides of the first semi-circular ring portion and the second semi-circular ring portion are respectively provided with a first circulating water channel and a second circulating water channel for cooling water to flow.

[0005] Preferably, both the first semicircular ring portion and the second semicircular ring portion include a main body portion and connecting portions located on the left and right sides of the main body portion in a radial direction; the connecting portions are used to connect with the connecting assembly; the circulating water channel is located on the main body portion.

[0006] Preferably, the connecting assembly includes a hinge assembly and a locking assembly; The left connecting portion of the first semicircular ring and the left connecting portion of the second semicircular ring, as well as the right connecting portion of the first semicircular ring and the right connecting portion of the second semicircular ring, can be connected by the hinge assembly and the locking assembly, respectively.

[0007] Preferably, the hinge assembly includes a hinge and at least two first fixing pins; the upper and lower parts of the hinge are each provided with at least one first connecting hole for the first fixing pin to pass through; Both the left connecting portion of the first semi-circular ring and the left connecting portion of the second semi-circular ring are provided with a first mounting groove and a first mounting hole for the first fixing pin to pass through; the first mounting groove penetrates the upper and lower radially distributed surfaces of the left connecting portion and also penetrates the left surface of the left connecting portion; the first mounting hole penetrates the front and rear axially distributed surfaces of the left connecting portion. The first mounting groove is used to accommodate the hinge; wherein one of the first fixing pins is used to pass through the first mounting hole on the first semicircular ring portion and the first connecting hole on the upper part of the hinge to connect the first semicircular ring portion and the upper part of the hinge; and the other of the first fixing pins is used to pass through the first mounting hole on the second semicircular ring portion and the first connecting hole on the lower part of the hinge to connect the second semicircular ring portion and the lower part of the hinge.

[0008] Preferably, the opposite edges of the connecting portions of the first semicircular ring portion and the second semicircular ring portion are provided with inwardly inclined bevels.

[0009] Preferably, the locking assembly includes a fisheye bolt, a retaining nut, and at least one second retaining pin; the fisheye bolt includes a fisheye at the head and a threaded portion; Both the right side connecting portion of the first semicircular ring and the right side connecting portion of the second semicircular ring are provided with a second mounting groove, and the right side connecting portion of the second semicircular ring is also provided with a second mounting hole for the second fixing pin to pass through; the second mounting groove penetrates the upper and lower surfaces of the right side connecting portion and penetrates the right side surface of the right side connecting portion; the second mounting hole penetrates the front and rear surfaces of the right side connecting portion. The second mounting groove has a radial through hole for the screw portion to pass through. The second mounting groove is used to accommodate the fisheye of the fisheye bolt and part of the screw portion. The end of the screw portion after being accommodated is exposed on the upper surface of the first semi-circular ring portion. The second fixing pin is used to pass through the second mounting hole and the fisheye of the fisheye bolt to connect the second semi-circular ring portion and the fisheye bolt. The fixing nut is used to pass through the exposed end of the screw portion and make tight contact with the upper surface of the first semi-circular ring portion, thereby locking the first semi-circular ring portion and the second semi-circular ring portion.

[0010] Preferably, the main body of the first semi-circular ring is provided with a first water inlet connector and a first water outlet connector that communicate with the first circulating water channel, and the main body of the second semi-circular ring is provided with a second water inlet connector and a second water outlet connector that communicate with the second circulating water channel.

[0011] Preferably, one of the water inlet connectors is used to connect to a cooling water source, and the water outlet connector corresponding to the water inlet connector is connected to the other water inlet connector.

[0012] Preferably, both the first circulating water path and the second circulating water path include an inlet channel, an outlet channel, and an intermediate channel; The water inlet channel and the water outlet channel are arranged horizontally; the intermediate channel is arranged perpendicularly to the water inlet channel and the water outlet channel. The first end of the water inlet channel is connected to the water inlet connector, and the first end of the water outlet channel is connected to the water outlet connector; the second end of the water inlet channel and the second end of the water outlet channel are both connected to the intermediate channel, so that cooling water can flow from the water inlet channel through the intermediate channel to the water outlet channel.

[0013] Preferably, one end of the intermediate channel penetrates the front or rear surface of the main body, and a plug is provided on the surface to block that end of the intermediate channel, so that cooling water can only flow through the intermediate channel to the outlet channel.

[0014] The retaining ring provided in this application is a split design, and the two split semicircular rings can be connected into a whole by a connecting component, which facilitates installation and disassembly and reduces the skill requirements for operators. Furthermore, circulating cooling water can be introduced into the circulating water circuit, thus providing water cooling functionality, which can improve the situation of localized high temperatures at the connection point and effectively solve the problem of air leakage caused by deformation of the sealing ring due to high temperatures. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments or related technologies of this application, the accompanying drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a three-dimensional structural schematic diagram of a water-cooled retaining ring device provided in one preferred embodiment of this application; Figure 2 yes Figure 1 Exploded view; Figure 3 yes Figure 1A schematic diagram of the structure of the first semicircular ring in the middle; Figure 4 This is a three-dimensional structural schematic diagram of the water-cooled retaining ring device provided in another preferred embodiment; Figure 5 This is a schematic diagram of the application status of the water-cooled retaining ring device provided in this application; Figure 6 yes Figure 5 Front view structural diagram; Figure 7 yes Figure 6 AA section front view; Figure 8 yes Figure 6 A schematic diagram of the AA cross-section three-dimensional structure; Explanation of reference numerals in the attached figures: 1-First semi-circular ring portion; 11-Main body portion; 111-First water inlet connector; 112-First water outlet connector; 113 Water inlet channel; 114-Water outlet channel; 115-Intermediate channel; 116-Plug; 117-Placement groove; 12-Connecting part; 121-First mounting groove; 122-First mounting hole; 123-Angle; 2-Second semi-circular ring portion; 211-Second water inlet connector; 212-Second water outlet connector; 221-Second mounting groove; 222-Second mounting hole; 3-Hinged assembly; 31-Hinge; 311-First connecting hole; 32-First retaining pin; 4-Locking assembly; 41-Fisheye bolt; 411-Fisheye; 42-Second retaining pin; 43-Retaining nut; 5-Flange. Detailed Implementation

[0017] The technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0018] The left, right, top, bottom, left and right directions in this application are only for the purpose of clearly and accurately describing the product structure and do not represent a limitation on the structural direction.

[0019] This application provides a water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces, such as... Figures 1-8As shown, the device includes a first semi-circular ring 1 and a second semi-circular ring 2, which are separately arranged, and a connecting assembly. The first semi-circular ring 1 and the second semi-circular ring 2 are symmetrically arranged, with semi-circular holes on opposite sides. Each of the two semi-circular rings has a semi-circular placement groove 117 on its inner arc-shaped end face for placing the flange 5 of the connecting flange on the semiconductor crystal growth furnace side and the flange on the exhaust pipe side, as well as the sealing ring. The first semi-circular ring and the second semi-circular ring can be connected by the connecting assembly. The two semi-circular holes form a complete through hole for the two connecting flanges to pass through, and the two semi-circular placement grooves form a complete receiving groove for accommodating the flange 5 of the two connecting flanges and the sealing ring, thus forming a complete retaining ring.

[0020] As will be understood by those skilled in the art, the dimensions of the placement groove should be adapted to the flange and sealing ring to ensure a tight fit between the flanges and sealing rings of the two connecting flanges.

[0021] The inner sides of the first semi-circular ring 1 and the second semi-circular ring 2 are respectively provided with a first circulating water passage and a second circulating water passage for cooling water to flow through.

[0022] It is worth noting that the first and second semicircular ring portions in this application refer only to the inner contour having a semicircle, while the outer contour is not limited to a semicircle and can be a rectangle or the like.

[0023] The retaining ring provided in this application is a split design, and the two split semicircular rings can be connected into a single unit via a connecting assembly, thus facilitating installation and disassembly and reducing the skill requirements for operators. Furthermore, circulating cooling water can be introduced into the circulating water circuit, providing water cooling and improving the localized high temperature at the connection point. The specific application process of the retaining ring device provided in this application is as follows: When connecting the exhaust pipe, first loosen the connecting parts to open the first semi-circular ring 1 and the second semi-circular ring 2, exposing the middle placement groove. Then connect the flanges 5 and sealing rings of the two connecting flanges. Figures 7-8 The sealing ring (not shown) is placed in the groove of the second semi-circular ring (between the two flanges). Then, the first and second semi-circular rings are closed, and the flanges and sealing rings of the two connecting flanges are also placed in the groove of the first semi-circular ring. The first and second semi-circular rings are then fixedly connected using connecting components, thus sealing the two connecting flanges and the sealing ring. Because the clearance around the groove is tightly fitted to the tolerance of the connecting flange face, the installation can be easily judged visually after installation. When used in the exhaust pipe, circulating cooling water is introduced into the circulating water system. The water cooling effect removes heat from the sealing ring through heat transfer, reducing its temperature and effectively preventing damage due to high temperatures.

[0024] Experiments have shown that this device can effectively cool down exhaust pipe connections, and also effectively solve the problem of air leakage caused by deformation of the sealing ring due to high temperature. It reduces the risk of abnormal operation by personnel, saves operation time, and improves the safety and occupational health of personnel in the production workshop. Therefore, it has good practical value and significance for technical improvement.

[0025] Preferably, both the first semicircular ring portion 1 and the second semicircular ring portion 2 include a main body portion 11 and connecting portions 12 located on the left and right sides of the main body portion along the radial direction; the connecting portions 12 are used for connection with connecting components; the circulating water passage is located on the main body portion 1. Figure 1 As shown, the main body has a rectangular outer contour to accommodate the circulating water channel.

[0026] As will be understood by those skilled in the art, the connecting components can employ existing technologies, as long as they meet the requirements for quick connection and disassembly.

[0027] This application provides a preferred connection assembly, including a hinge assembly 3 and a locking assembly 4.

[0028] The left connecting portion of the first semi-circular ring 1 and the left connecting portion of the second semi-circular ring 2, as well as the right connecting portion of the first semi-circular ring 1 and the right connecting portion of the second semi-circular ring 2, can be connected by the hinge assembly 3 and the locking assembly 4, respectively.

[0029] With the above configuration, in specific applications, the left sides of the first and second semicircular rings can be connected first through the hinge assembly. Before locking with the locking assembly, the right sides of the first and second semicircular rings can be opened so that they can be locked onto the connecting flange. Then they are closed and locked with the locking assembly, thereby firmly connecting the exhaust pipe to the crystal growth furnace.

[0030] As those skilled in the art will understand, the hinge assembly 3 can employ existing technology to hinge the left sides of the first and second semicircular rings, thereby enabling the first and second semicircular rings to switch between open and closed states. The locking assembly 4 can lock the closed first and second semicircular rings.

[0031] This application provides a preferred hinge assembly 3, including a hinge 31 and at least two first fixing pins 32.

[0032] The upper and lower parts of the hinge 31 are each provided with at least one first connecting hole 311 through which the first fixing pin 32 passes, for connecting with the connecting parts of the first semi-circular ring 1 and the second semi-circular ring 2, respectively.

[0033] The left connecting portion of the first semicircular ring and the left connecting portion of the second semicircular ring are both provided with a first mounting groove 121 and a first mounting hole 122 for the first fixing pin 32 to pass through. The first mounting groove 121 penetrates the upper and lower radially distributed surfaces of the left connecting portion and also penetrates the left surface of the left connecting portion; the first mounting hole 122 penetrates the front and rear axially distributed surfaces of the left connecting portion. The first mounting groove 121 is used to accommodate the hinge 31. One first fixing pin 32 is used to pass through the first mounting hole 122 on the first semicircular ring and the first connecting hole 311 on the upper part of the hinge to connect the first semicircular ring and the upper part of the hinge. The other first fixing pin is used to pass through the first mounting hole on the second semicircular ring and the first connecting hole on the lower part of the hinge to connect the second semicircular ring and the lower part of the hinge.

[0034] Specifically, the connection process between the hinge assembly and the first and second semicircular ring portions is as follows: First, place the hinge 31 in the first mounting groove 121, with the upper part of the hinge located at the first semi-circular ring and the lower part of the hinge located at the second semi-circular ring. Align the first connecting hole 311 with the corresponding first mounting hole 122. Then, use the first fixing pin 32 to pass through the first mounting hole 122 and the first connecting hole 311 to fix the hinge 31 and the connecting part of the two semi-circular rings, so that the two semi-circular rings can rotate around the hinge, thereby opening and closing.

[0035] The first mounting slot 121 is designed as an open slot to facilitate the installation and removal of the hinge.

[0036] Preferably, the opposite edges of the connecting parts of the first semicircular ring and the second semicircular ring are provided with inwardly inclined bevels 123, which serve to ensure that the locked pipe fits tightly and securely by the inward inclination of the bevels.

[0037] Preferably, the locking assembly 4 includes a fisheye bolt 41 (the fisheye bolt rotates more flexibly than a conventional bolt, and has greater operational flexibility), a fixing nut 43, and at least one second fixing pin 42; the fisheye bolt 41 includes a fisheye 411 located at the head and a threaded portion.

[0038] The right side connecting portion of the first semicircular ring and the right side connecting portion of the second semicircular ring are both provided with a second mounting groove 221. The right side connecting portion of the second semicircular ring is also provided with a second mounting hole 222 for the second fixing pin 42 to pass through. The second mounting groove 221 penetrates the upper and lower surfaces of the right side connecting portion and also penetrates the right side surface of the right side connecting portion; the second mounting hole 222 penetrates the front and rear surfaces of the right side connecting portion.

[0039] The second mounting groove 221 has a radial through hole for the threaded portion to pass through. The second mounting groove 221 accommodates the eyelet of the fisheye bolt 41 and part of the threaded portion. The end of the threaded portion is exposed on the upper surface of the first semi-circular ring portion 1, meaning one end of the threaded portion needs to be exposed to the outside so that it can engage with the fixing nut 43. The second fixing pin 42 passes through the second mounting hole 222 and the eyelet 411 of the fisheye bolt to connect the second semi-circular ring portion 2 and the fisheye bolt 41. The fixing nut 43 passes through the exposed end of the threaded portion and makes tight contact with the upper surface of the first semi-circular ring portion, thereby locking the first and second semi-circular ring portions.

[0040] Specifically, such as Figure 1 As shown, the connection process between the locking assembly and the first and second semi-circular ring portions is as follows: First, place the fisheye bolt 41 in the second mounting groove 221 and align the fisheye 411 with the second mounting hole 222 of the second semi-circular ring. The screw part passes through the radial through hole, and the end of the screw part is exposed outside the first semi-circular ring. Then, the second fixing pin 42 passes through the second mounting hole 222 and the fisheye 411 to fix the fisheye bolt 41 to the second semi-circular ring 2 in the horizontal direction. Then, the fixing nut 43 passes through the screw part and is rotated to make close contact with the upper surface of the first semi-circular ring, thereby limiting the first and second semi-circular rings in the vertical direction and firmly locking the first and second semi-circular rings.

[0041] The second mounting slot 221 is designed as an open slot, which allows the fisheye bolt 41 to be easily placed in the slot, facilitating the installation and removal of the fisheye bolt.

[0042] Preferably, the main body of the first semi-circular ring is provided with a first water inlet connector 111 and a first water outlet connector 112 communicating with the first circulating water path, and the main body of the second semi-circular ring is provided with a second water inlet connector 211 and a second water outlet connector 212 communicating with the second circulating water path. Cooling water enters the corresponding circulating water path from the two water inlets and then flows out from the corresponding water outlet connectors, thereby removing heat from the exhaust pipe at the connection point and reducing the temperature of the exhaust pipe at the connection point.

[0043] More preferably, one of the inlet connectors is used to connect to the cooling water source, and the outlet connector corresponding to the inlet connector is connected to the other inlet connector. That is, the cooling water of the two semi-circular rings is connected in series. The cooling water flows out of one semi-circular ring and enters the other semi-circular ring, flows inside it and then is discharged. In this way, the cooling water of the two semi-circular rings can share a water source, reducing the waste of water resources.

[0044] Preferably, the first water inlet connector 111 and the first water outlet connector 112 are located on the same side of the main body of the first semi-circular ring portion 1; the second water inlet connector 211 and the second water outlet connector 212 are located on the same side of the main body of the second semi-circular ring portion 2; and the first water inlet connector 111 and the second water inlet connector 211 are located on opposite sides, such as... Figure 4 As shown. This design simplifies the installation of inlet and outlet pipes, and the weight distribution on both sides of the retaining ring is more balanced, further improving its stability. Of course, the first inlet connector 111 and the second inlet connector 211 can also be located on the same side, as shown... Figure 1 As shown.

[0045] Preferably, both the first and second circulating water paths include an inlet channel 113, an outlet channel 114, and an intermediate channel 115; the inlet and outlet channels are horizontally arranged; and the intermediate channel is vertically arranged to the inlet and outlet channels.

[0046] The first end of the water inlet channel is connected to the water inlet connector, and the first end of the water outlet channel is connected to the water outlet connector; the second end of both the water inlet channel and the second end of the water outlet channel are connected to the middle channel, so that the cooling water can flow from the water inlet channel through the middle channel to the water outlet channel.

[0047] The above configuration creates a zigzag pattern in the main body of the circulating water system, extending the flow path of the cooling water and improving the cooling effect.

[0048] A deep hole can be drilled directly on the left or right side of the main body to form a water inlet and outlet channel. Then, a tap is used to tap the hole to install the water inlet and outlet connectors.

[0049] Preferably, one end of the intermediate channel 115 penetrates the front or rear surface of the main body, and a plug 116 is provided on the surface to block the end of the intermediate channel, so that cooling water can only flow through the intermediate channel to the outlet channel.

[0050] After drilling the inlet and outlet channels, a hole can be drilled on the front or rear surface of the main body to form an intermediate channel, connecting the inlet and outlet channels. At the same time, to prevent cooling water leakage, a plug is used to seal the surface of the hole, so that cooling water can only flow to the outlet channel through the intermediate channel.

[0051] The above method is used to create a circulating water channel inside the main body, which is simple and easy to operate.

[0052] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if these modifications and modifications of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include these modifications and modifications.

Claims

1. A water-cooled clamping ring device for high-temperature exhaust duct connection of a semiconductor crystal growing furnace, characterized by, It includes a first semi-circular ring and a second semi-circular ring that are set separately, and also includes a connecting component; the first semi-circular ring and the second semi-circular ring can be connected by the connecting component to form a complete retaining ring; each of the two semi-circular rings has a placement groove on its inner arc-shaped end face for placing the flange of the connecting flange on the semiconductor crystal growth furnace side, the flange of the connecting flange on the exhaust pipe side, and the sealing ring. The inner sides of the first semi-circular ring and the second semi-circular ring are respectively provided with a first circulating water channel and a second circulating water channel for cooling water to flow.

2. The water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces as described in claim 1, characterized in that, Both the first semicircular ring portion and the second semicircular ring portion include a main body portion and connecting portions located on the left and right sides of the main body portion in a radial direction; the connecting portions are used to connect with the connecting assembly; the circulating water channel is located on the main body portion.

3. The water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces as described in claim 2, characterized in that, The connection assembly includes a hinge assembly and a locking assembly; The left connecting portion of the first semicircular ring and the left connecting portion of the second semicircular ring, as well as the right connecting portion of the first semicircular ring and the right connecting portion of the second semicircular ring, can be connected by the hinge assembly and the locking assembly, respectively.

4. The water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces as described in claim 3, characterized in that, The hinge assembly includes a hinge and at least two first fixing pins; the upper and lower parts of the hinge are each provided with at least one first connecting hole through which the first fixing pins pass; Both the left connecting portion of the first semi-circular ring and the left connecting portion of the second semi-circular ring are provided with a first mounting groove and a first mounting hole for the first fixing pin to pass through; the first mounting groove penetrates the upper and lower radially distributed surfaces of the left connecting portion and also penetrates the left surface of the left connecting portion; the first mounting hole penetrates the front and rear axially distributed surfaces of the left connecting portion. The first mounting groove is used to accommodate the hinge; wherein one of the first fixing pins is used to pass through the first mounting hole on the first semicircular ring portion and the first connecting hole on the upper part of the hinge to connect the first semicircular ring portion and the upper part of the hinge; and the other of the first fixing pins is used to pass through the first mounting hole on the second semicircular ring portion and the first connecting hole on the lower part of the hinge to connect the second semicircular ring portion and the lower part of the hinge.

5. The water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces as described in claim 2, characterized in that, The opposing edges of the connecting portions of the first semicircular ring portion and the second semicircular ring portion are both provided with inwardly inclined bevels.

6. The water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces as described in claim 3, characterized in that, The locking assembly includes a fisheye bolt, a retaining nut, and at least one second retaining pin; the fisheye bolt includes a fisheye at the head and a threaded portion; Both the right side connecting portion of the first semicircular ring and the right side connecting portion of the second semicircular ring are provided with a second mounting groove, and the right side connecting portion of the second semicircular ring is also provided with a second mounting hole for the second fixing pin to pass through; the second mounting groove penetrates the upper and lower surfaces of the right side connecting portion and penetrates the right side surface of the right side connecting portion; the second mounting hole penetrates the front and rear surfaces of the right side connecting portion. The second mounting groove has a radial through hole for the screw portion to pass through. The second mounting groove is used to accommodate the fisheye of the fisheye bolt and part of the screw portion. The end of the screw portion after being accommodated is exposed on the upper surface of the first semi-circular ring portion. The second fixing pin is used to pass through the second mounting hole and the fisheye of the fisheye bolt to connect the second semi-circular ring portion and the fisheye bolt. The fixing nut is used to pass through the exposed end of the screw portion and make tight contact with the upper surface of the first semi-circular ring portion, thereby locking the first semi-circular ring portion and the second semi-circular ring portion.

7. The water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces as described in claim 2, characterized in that, The main body of the first semi-circular ring is provided with a first water inlet connector and a first water outlet connector that are connected to the first circulating water channel, and the main body of the second semi-circular ring is provided with a second water inlet connector and a second water outlet connector that are connected to the second circulating water channel.

8. The water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces as described in claim 7, characterized in that, One of the water inlet connectors is used to connect to a cooling water source, and the water outlet connector corresponding to the water inlet connector is connected to the other water inlet connector.

9. The water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces as described in claim 8, characterized in that, Both the first circulating water path and the second circulating water path include an inlet channel, an outlet channel, and an intermediate channel; The water inlet channel and the water outlet channel are arranged horizontally; the intermediate channel is arranged perpendicularly to the water inlet channel and the water outlet channel. The first end of the water inlet channel is connected to the water inlet connector, and the first end of the water outlet channel is connected to the water outlet connector; the second end of the water inlet channel and the second end of the water outlet channel are both connected to the intermediate channel, so that cooling water can flow from the water inlet channel through the intermediate channel to the water outlet channel.

10. The water-cooled retaining ring device for connecting high-temperature exhaust pipes in semiconductor crystal growth furnaces as described in claim 9, characterized in that, One end of the intermediate channel penetrates the front or rear surface of the main body, and a plug is provided on the surface to block that end of the intermediate channel, so that cooling water can only flow through the intermediate channel to the outlet channel.

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