A pipeline gas detection device

Abstract

This utility model provides a pipeline gas distribution detection device, comprising: an inlet assembly including a first gas regulating unit and a first pressure detection unit, the inlet assembly being connected to a first flange disposed at the inlet end of a target pipeline via a first vacuum connection joint, the first pressure detection unit being used to detect the pressure at the inlet end of the target pipeline; an outlet assembly including a second pressure detection unit and a second gas regulating unit, the outlet assembly being connected to a second flange disposed at the outlet end of the target pipeline via a second vacuum connection joint, the second pressure detection unit being used to detect the pressure at the outlet end of the target pipeline; and the first gas regulating unit and the second gas regulating unit being used to regulate the operating environment of the target pipeline being detected, the first pressure detection unit and the second pressure detection unit being used to determine the operating conditions of the target pipeline.

Description

Technical Field

[0001] This utility model relates to the field of pipeline testing, and in particular to a pipeline gas distribution testing device. Background Technology

[0002] In semiconductor equipment, the flow resistance system includes gas distribution lines, mixing blocks, spray plates, and extraction rings. The gas distribution lines are a common set of two mirrored lines used in semiconductor equipment. As a crucial component of the flow resistance system, the gas distribution lines require high consistency in quality (flow resistance / pressure drop). This consistency directly affects the gas distribution uniformity of the semiconductor equipment, especially in SACVD (Sub-Atmospheric Chemical Vapor Deposition) machines with gas flow rates in the 10 SLM (Standard Liters per Minute) range.

[0003] Different gas pipeline manufacturers use different standard parts (such as elbows, connectors, etc.), and even within the same manufacturer, there may be differences in batches and welding precision. This makes it impossible for existing offline gas distribution detection devices to be directly adapted to the pipeline being tested, thus making it impossible to perform pipeline gas distribution detection.

[0004] In order to overcome the above-mentioned defects in the existing technology, there is an urgent need in the field for a pipeline gas separation detection device that can be adapted to gas pipelines of different standards. Utility Model Content

[0005] The following provides a brief overview of one or more aspects to offer a basic understanding of them. This overview is not an exhaustive summary of all conceived aspects, nor is it intended to identify key or decisive elements of all aspects, nor to define the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form to prepare for the more detailed descriptions that follow.

[0006] As mentioned above, different gas pipeline manufacturers use different standard parts (such as elbows, connectors, etc.), and even within the same manufacturer, there may be differences in batches and welding precision. This makes it impossible for existing offline gas distribution detection devices to be directly adapted to the pipeline being tested, thus making it impossible to perform pipeline gas distribution detection.

[0007] In order to overcome the above-mentioned defects in the existing technology, this utility model provides a pipeline gas distribution detection device that can be adapted to gas pipelines of different standards to overcome the installation problems caused by the differences in standard parts of the target pipeline.

[0008] Specifically, the pipeline gas distribution detection device provided by this utility model includes: an inlet assembly, including a first gas regulating unit and a first pressure detection unit, wherein the inlet assembly is connected to a first flange disposed at the inlet end of the target pipeline via a first vacuum connection joint, and the first pressure detection unit is used to detect the pressure at the inlet end of the target pipeline; an outlet assembly, including a second pressure detection unit and a second gas regulating unit, wherein the outlet assembly is connected to a second flange disposed at the outlet end of the target pipeline via a second vacuum connection joint, and the second pressure detection unit is used to detect the pressure at the outlet end of the target pipeline; and the first gas regulating unit and the second gas regulating unit are used to regulate the operating environment of the target pipeline being detected, and the first pressure detection unit and the second pressure detection unit are used to determine the operating conditions of the target pipeline.

[0009] Furthermore, in some embodiments of this utility model, the target pipeline is a gas distribution pipeline of a semiconductor device.

[0010] Furthermore, in some embodiments of this utility model, the target pipeline includes multiple target pipelines, and the first pressure detection unit and the second pressure detection unit are used to determine the operating conditions of the multiple target pipelines in order to determine the gas distribution consistency of the multiple target pipelines.

[0011] Furthermore, in some embodiments of this utility model, the first vacuum connector and the second vacuum connector are VCR adapters.

[0012] Furthermore, in some embodiments of this utility model, the first flange is a connecting flange, and the second flange is a flange fixing block.

[0013] Furthermore, in some embodiments of this utility model, the specifications and accuracy of the first pressure detection unit and the second pressure detection unit are determined by the friction loss formula of a circular pipeline.

[0014] Furthermore, in some embodiments of this utility model, the first gas regulating part is a pressure regulating valve, and the second gas regulating part is a needle valve.

[0015] Furthermore, in some embodiments of this utility model, the air outlet component further includes a flow meter.

[0016] Furthermore, in some embodiments of this utility model, the air intake assembly is disposed on a lifting platform.

[0017] Furthermore, in some embodiments of this utility model, the lifting platform is a manual locking type lifting platform. Attached Figure Description

[0018] The above-described features and advantages of this invention can be better understood after reading the following detailed description of the embodiments of this disclosure in conjunction with the accompanying drawings. In the drawings, the components are not necessarily drawn to scale, and components having similar related characteristics or features may have the same or similar reference numerals.

[0019] Figure 1 A schematic diagram of a pipeline gas distribution detection device according to some embodiments of the present invention is shown; and

[0020] Figure 2 A schematic diagram showing the connection between the air intake assembly and the air outlet assembly and the target pipeline according to some embodiments of the present invention is shown.

[0021] Figure label:

[0022] 100: Pipeline gas distribution detection device;

[0023] 110: Intake assembly;

[0024] 111: Manual valve;

[0025] 112: Pressure regulating valve;

[0026] 113: Pressure gauge;

[0027] 120: Vent assembly;

[0028] 121: Pressure gauge;

[0029] 122: Flow meter;

[0030] 123: Needle valve;

[0031] 124: Manual valve;

[0032] 131: First vacuum connection connector;

[0033] 132: Second vacuum connection connector;

[0034] 141: Connecting flange;

[0035] 142: Flange fixing block;

[0036] 150: Lifting platform; and

[0037] 200: Target pipeline. Detailed Implementation

[0038] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments. It should be noted that the aspects described below with reference to the accompanying drawings and specific embodiments are merely exemplary and should not be construed as limiting the scope of protection of the present invention in any way.

[0039] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0040] Furthermore, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," and "vertical" used in the following description should be understood as the orientations shown in the relevant paragraphs and accompanying drawings. These relative terms are for illustrative purposes only and do not imply that the described device must be manufactured or operated in a specific orientation; therefore, they should not be construed as limiting the scope of this invention.

[0041] It is understood that although terms such as "first," "second," and "third" may be used herein to describe various components, regions, layers, and / or parts, these components, regions, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers, and / or parts. Therefore, the first component, region, layer, and / or part discussed below may be referred to as the second component, region, layer, and / or part without departing from some embodiments of this utility model.

[0042] As mentioned above, different gas pipeline manufacturers use different standard parts (such as elbows, connectors, etc.), and even within the same manufacturer, there may be differences in batches and welding precision. This makes it impossible for existing offline gas distribution detection devices to be directly adapted to the pipeline being tested, thus making it impossible to perform pipeline gas distribution detection.

[0043] In order to overcome the above-mentioned defects in the existing technology, this utility model provides a pipeline gas distribution detection device that can be adapted to gas pipelines of different standards to overcome the installation problems caused by the differences in standard parts of the target pipeline.

[0044] Please refer to Figure 1 , Figure 1 A schematic diagram of a pipeline gas distribution detection device according to some embodiments of the present invention is shown.

[0045] like Figure 1 As shown, the pipeline gas distribution detection device 100 may include an air inlet assembly 110 and an air outlet assembly 120 connected to the target pipeline 200.

[0046] Here, the target pipeline 200 can be the gas distribution pipeline of a semiconductor device.

[0047] The intake assembly 110 may include a first gas regulating section and a first pressure sensing section arranged along the airflow direction.

[0048] In some embodiments, the first gas regulating unit may be a pressure regulating valve, and the first pressure detection unit may be a pressure gauge.

[0049] like Figure 1 As shown, the intake assembly 110 may include a hand valve 111, a pressure regulating valve 112, and a pressure gauge 113 arranged along the airflow direction.

[0050] The hand valve 111 has a shut-off function. The pressure regulating valve 112 can control the pressure by adjusting the gas flow rate. The pressure gauge 113 can be used to measure pressure and can be installed near the inlet end of the target pipeline 200 to detect the pressure at the inlet end of the target pipeline 200.

[0051] The air outlet assembly 120 may include a second pressure detection unit and a second gas regulating unit arranged along the airflow direction.

[0052] In some embodiments, the second pressure detection unit may be a pressure gauge, and the second gas regulating unit may be a needle valve.

[0053] like Figure 1 As shown, the air outlet assembly 120 may include a pressure gauge 121, a flow meter 122, a needle valve 123, and a manual valve 124 arranged along the airflow direction.

[0054] Pressure gauge 121 is used to measure pressure. It can be installed near the outlet of the target pipeline 200 to detect the pressure at the outlet. Flow meter 122 can be installed near the outlet of the target pipeline 200 to detect the gas flow rate at the outlet. Needle valve 123 is used for fine adjustment and control of the gas flow rate. Hand valve 124 has a shut-off function.

[0055] In some embodiments, the specifications and precision of each component of the intake assembly 110 and the exhaust assembly 120 are determined by the friction loss formula for a circular pipeline.

[0056] Specifically, those skilled in the art can determine the specifications and accuracy range of each component (especially the pressure detection unit) based on the target pipeline being tested and the process environment parameters of the target management, combined with the pressure and flow rate of the target gas being introduced, and the friction loss formula for circular pipelines.

[0057] The formula for friction loss along a circular pipe is shown below:

[0058] ,

[0059] in, For pressure drop, This refers to the density of the fluid. It is the acceleration due to gravity. The friction factor. The length of the target pipeline, The diameter of the target pipeline, The velocity of the fluid.

[0060] exist Figure 1 In the illustrated embodiment, the pressure regulating valve 112 has a range of 0~0.5 MPa. The pressure gauges 113 and 121 have a range of 0~0.5 MPa and an accuracy of 0.01 kPa. The flow meter 122 has a range of 0~50 SLM.

[0061] Please refer to Figure 2 , Figure 2 A schematic diagram showing the connection between the air intake assembly and the air outlet assembly and the target pipeline according to some embodiments of the present invention is shown.

[0062] like Figure 2 As shown, the end of the intake assembly 110 connected to the target pipeline 200 is provided with a first vacuum connection connector 131, and the end of the exhaust assembly 120 connected to the target pipeline 200 is provided with a second vacuum connection connector 132. Figure 2 In the embodiment shown, the first vacuum connector and the second vacuum connector can be VCR adapters.

[0063] VCR (Vacuum Coupling Radiation) adapters can be used to connect pipes and maintain the system's seal and vacuum environment. VCR adapters can consist of multiple components, including internal threads, external threads, and sealing rings.

[0064] With the addition of a VCR conversion connector, the pipeline gas distribution detection device 100 can meet the installation and detection requirements of three-dimensional spatial pipelines.

[0065] In the gas delivery process of semiconductor equipment, gas path connections can be achieved through cavity connections and mixing block docking. Cavity connections refer to the connection method in which gas pipelines pass through the cavity from the outside of the equipment to enter the vacuum reaction zone; mixing block docking is the connection of multiple reaction gases through a modular interface component for precise mixing before entering the reaction chamber.

[0066] When semiconductor equipment piping is connected to a cavity (i.e., through-cavity connection) or connected to a mixing block plane, a simple VCR structure cannot be used for docking. Based on the connection characteristics of semiconductor equipment piping, interface flange fixtures can be assembled on the target piping 200 to achieve connection with the inlet assembly 110 and the outlet assembly 120.

[0067] The interface flange fixture may include a first flange located at the inlet end of the target pipeline and a second flange located at the outlet end of the target pipeline. Figure 2 In the embodiment shown, the first flange may be a connecting flange 141, and the second flange may be a flange fixing block 142.

[0068] The connecting flange 141 can be fixed to the air inlet end of the target pipeline 200 by means of threads or other means. The air inlet assembly 110 can be connected and sealed to the connecting flange 141 located at the air inlet end of the target pipeline 200 through the first vacuum connection joint 131.

[0069] The flange fixing block 142 can be locked to the air outlet end of the target pipeline 200 by clamping or other means. The air outlet assembly 120 can be connected and sealed to the flange fixing block 142 located at the air outlet end of the target pipeline 200 through the second vacuum connection joint 132.

[0070] By using a universal VCR connection connector that is compatible with both the target pipeline 200 and the pipeline gas distribution detection device 100 with an interface flange tooling, the universality of the connection between the pipeline gas distribution detection device 100 and the target pipeline 200 can be guaranteed, adapting to target pipelines 200 of different standards and overcoming installation problems caused by differences in standard parts of the target pipeline 200.

[0071] Thus, the intake assembly 110 is connected to the intake end of the target pipeline 200 via the first vacuum connection joint 131 and the connecting flange 141, and the exhaust assembly 120 is connected to the exhaust end of the target pipeline 200 via the second vacuum connection joint 132 and the flange fixing block 142, thereby connecting the pipeline gas distribution detection device 100 to the target pipeline 200.

[0072] During the detection process of the pipeline gas distribution detection device 100, an inert gas, such as high-purity nitrogen (Pure N2), can be introduced into the inlet of the gas inlet assembly 110.

[0073] Through the first gas regulating unit and the second gas regulating unit, the pipeline gas distribution detection device 100 can adjust the operating environment of the target pipeline 200 being detected.

[0074] exist Figure 1 and Figure 2In the embodiment shown, the hand valves 111 and 124 on both sides of the target pipeline 200 are opened, and the flow rate and pressure of the inlet nitrogen N2 of the pipeline gas distribution detection device 100 are controlled in the working environment of the target pipeline by adjusting the pressure regulating valve 112 of the inlet assembly 110 and the needle valve 123 of the outlet assembly 120.

[0075] For example, when the target pipeline is the gas distribution pipeline of SACVD, the operating environment of the target pipeline can be adjusted to 0.3MPa and 10~30SLM by adjusting the pressure regulating valve 112 and the needle valve 123.

[0076] The pipeline gas distribution detection device 100 can determine the operating condition of the target pipeline 200 through the first pressure detection unit and the second pressure detection unit.

[0077] exist Figure 1 and Figure 2 In the illustrated embodiment, the pressure at the intake end of the target pipeline 200 can be determined by reading the pressure gauge 113 of the intake assembly 110, and the pressure at the outlet end of the target pipeline 200 can be determined by reading the pressure gauge 121 of the outlet assembly 120.

[0078] Based on the pressure values ​​at both ends of the target pipeline 200, the operating flow resistance or deviation percentage of the target pipeline 200 can be calculated by calculating the pressure drop.

[0079] Here, the formula for calculating the flow resistance under operating conditions is:

[0080] ,

[0081] in, This refers to volumetric flow rate.

[0082] Furthermore, the target pipeline 200 may include multiple target pipelines.

[0083] Through the first pressure detection unit and the second pressure detection unit of the pipeline gas distribution detection device 100, the pipeline gas distribution detection device 100 can determine the operating conditions of multiple target pipelines 200, and then measure the gas distribution consistency of multiple target pipelines 200.

[0084] In some embodiments, the pipeline gas distribution detection device 100 can determine the operating flow resistance or deviation percentage of multiple target pipelines 200, thereby measuring the gas distribution consistency of the multiple target pipelines 200.

[0085] In some embodiments, multiple target pipelines may be a set of two mirrored pipelines of a semiconductor device. The pipeline gas distribution detection device can verify the gas distribution consistency and uniformity by performing single-pipe retesting and overall assembly testing on different target pipelines.

[0086] In other embodiments, the multiple target pipelines may be uniform pipelines from different batches, and the pipeline gas distribution detection device can verify the consistency of the multiple target pipelines.

[0087] In some embodiments, the target pipeline is often a spatial structure, that is, the target pipeline has different heights at the inlet and outlet ends.

[0088] Please continue to refer to this. Figure 2 In order to improve the adaptability of the pipeline gas distribution detection device 100 to target pipelines 200 of different sizes and different connectors, and at the same time avoid pressure fluctuations and test errors caused by hose connections at the inlet and outlet ends of the target pipeline 200, the pipeline gas distribution detection device 100 can also be equipped with a manually raised lifting platform 150.

[0089] The height of the air intake component 110 of the pipeline gas distribution detection device 100 can be adjusted via the lifting platform 150.

[0090] In some embodiments, the lifting platform 150 may be a manually operated snap-fit ​​lifting platform.

[0091] exist Figure 2 In the embodiment shown, before connecting the pipeline gas distribution detection device 100 to the target pipeline 200, the intake assembly 110 can be placed on the lifting platform 150, and the height of the lifting platform 150 can be adjusted according to the size, connector and operating parameters of the target pipeline 200.

[0092] In some embodiments, during the detection of the target pipeline 200, the pipeline gas distribution detection device 100 can further adjust the height of the lifting platform 150 according to the working conditions.

[0093] Thus, by using a VCR conversion connector that can meet the installation and testing requirements of three-dimensional pipelines, an interface flange tooling that can adapt to various target pipelines with different characteristics, and a lifting platform 150 that can adjust the height, the pipeline gas distribution testing device 100 can solve the problem of difficult installation of target pipelines with different three-dimensional structures and adapt to three-dimensional target pipelines.

[0094] In summary, this utility model provides a pipeline gas distribution detection device that calibrates the uniformity of gas distribution in a pipeline based on working environment parameters and pressure changes. It can be adapted to gas pipelines of different standards to overcome installation problems caused by differences in standard components of the target pipeline.

[0095] The prior description of this disclosure is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to this disclosure will be apparent to those skilled in the art, and the general principles defined herein may be applied to other variations without departing from the spirit or scope of this disclosure. Therefore, this disclosure is not intended to be limited to the examples and designs described herein, but should be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A pipeline gas distribution detection device, characterized in that, include: An air intake assembly includes a first gas regulating unit and a first pressure detection unit. The air intake assembly is connected to a first flange disposed at the air intake end of a target pipeline via a first vacuum connection joint. The first pressure detection unit is used to detect the pressure at the air intake end of the target pipeline. The gas outlet assembly includes a second pressure detection unit and a second gas regulating unit. The gas outlet assembly is connected to a second flange located at the gas outlet end of the target pipeline via a second vacuum connection joint. The second pressure detection unit is used to detect the pressure at the gas outlet end of the target pipeline. The first gas regulating unit and the second gas regulating unit are used to regulate the operating environment of the target pipeline being tested, and the first pressure detecting unit and the second pressure detecting unit are used to determine the operating conditions of the target pipeline.

2. The pipeline gas distribution detection device as described in claim 1, characterized in that, The target pipeline is the gas distribution pipeline of a semiconductor device.

3. The pipeline gas distribution detection device as described in claim 1, characterized in that, The target pipeline includes multiple target pipelines. The first pressure detection unit and the second pressure detection unit are used to determine the operating conditions of the multiple target pipelines in order to determine the gas distribution consistency of the multiple target pipelines.

4. The pipeline gas distribution detection device as described in claim 1, characterized in that, The first vacuum connector and the second vacuum connector are VCR adapters.

5. The pipeline gas distribution detection device as described in claim 1, characterized in that, The first flange is a connecting flange, and the second flange is a flange fixing block.

6. The pipeline gas distribution detection device as described in claim 1, characterized in that, The specifications and accuracy of the first pressure detection unit and the second pressure detection unit are determined by the friction loss formula for circular pipelines.

7. The pipeline gas distribution detection device as described in claim 1, characterized in that, The first gas regulating part is a pressure regulating valve, and the second gas regulating part is a needle valve.

8. The pipeline gas distribution detection device as described in claim 1, characterized in that, The air outlet assembly also includes a flow meter.

9. The pipeline gas distribution detection device as described in claim 1, characterized in that, The air intake assembly is mounted on the lifting platform.

10. The pipeline gas distribution detection device as described in claim 9, characterized in that, The lifting platform is a manual snap-lock type lifting platform.

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