Test platform

Abstract

A testing platform for waste gas treatment equipment includes a first cabinet, a first inlet pipe, a first valve group, a first water tank, a pump module, a second valve group, a first outlet pipe, and a control module. The input end of the first inlet pipe is connected to the output end of an external facility; the input end of the first valve group is connected to the output end of the first inlet pipe; the input end of the first water tank is fixedly connected to the output end of the first valve group; the pump module includes a horizontal pump whose input end is connected to the first output end of the first water tank, and a vertical pump whose input end is connected to the second output end of the first water tank. The second valve group includes a first sub-valve group whose input end is connected to the output end of the horizontal pump, and a second sub-valve group whose input end is connected to the first output end of the vertical pump. The input end of the first outlet pipe is connected to the output ends of the first and second sub-valve groups, and the output end of the first outlet pipe is connected to the input end of an external facility; the control module is electrically connected to the first and second valve groups.

Description

Technical Field

[0001] This application relates to the field of waste gas treatment equipment technology, and more specifically, to a test platform for waste gas treatment equipment. Background Technology

[0002] The semiconductor industry has a large market demand for waste gas treatment equipment, and it is essential to ensure the stable operation of this equipment while meeting market demand. In the process of cost reduction, batch testing of new devices is necessary to ensure the equipment operates without problems.

[0003] Various components used inside the machine tool must undergo rigorous testing before being applied to the equipment. However, the testing process involves complex water, electricity, and gas connections, requires a large testing area, and lacks a fixed testing location. The background art portion merely represents technology known to the public and does not necessarily represent prior art in this field. Utility Model Content

[0004] This application aims to provide a testing platform to solve the problems of current testing components occupying a large testing area and lacking a fixed testing location during the testing process.

[0005] According to one aspect of this application, a testing platform is provided for waste gas treatment equipment. The testing platform includes a first cabinet, a first inlet pipe, a first valve group, a first water tank, a pump module, a second valve group, a first outlet pipe, and a control module. The first inlet pipe passes through the upper surface of the first cabinet and is inserted into the first cabinet. The input end of the first inlet pipe is connected to the output end of an external field. The input end of the first valve group is connected to the output end of the first inlet pipe. The first water tank is fixedly installed at the bottom of the interior of the first cabinet, and the input end of the first water tank is fixedly connected to the output end of the first valve group. The pump module includes a horizontal pump and a vertical pump. The horizontal pump is installed on one side of the first water tank, and the input end of the horizontal pump is connected to the first output end of the first water tank. The vertical pump is installed on the upper surface of the first water tank, and the input end of the vertical pump is connected to the second output end of the first water tank. The second valve group includes a first sub-valve group and a second sub-valve group. The input end of the first sub-valve group is connected to the output end of the horizontal pump; the input end of the second sub-valve group is connected to the first output end of the vertical pump; the first water outlet pipe extends from the inside of the first cabinet to the upper surface of the first cabinet, the input end of the first water outlet pipe is connected to the output ends of the first sub-valve group and the second sub-valve group, and the output end of the first water outlet pipe is connected to the input end of the external field equipment; the control module is fixedly installed inside the first cabinet, and the control module is electrically connected to the first valve group and the second valve group.

[0006] According to some embodiments of this application, the test platform further includes a first manual valve and a second water tank. The input end of the first manual valve is connected to the second output end of the second valve assembly; the second water tank is fixedly installed inside the first cabinet, and the input end of the second water tank is connected to the output end of the first manual valve.

[0007] According to some embodiments of this application, the second valve assembly further includes a first flow meter. A first end of the first flow meter is connected to the output end of the first sub-valve assembly, and a second end of the first flow meter is connected to the output end of the second sub-valve assembly. The second end of the first flow meter is connected to the input end of the first outlet pipe.

[0008] According to some embodiments of this application, the second valve assembly further includes a flow divider and a second flow meter. The input end of the flow divider is connected to the second output end of the vertical pump; the first end of the second flow meter is connected to the output end of the flow divider; the test platform also includes a return water tank. The return water tank is located on one side of the first cabinet, the first input end of the return water tank is connected to the second end of the second flow meter, and the output end of the return water tank is connected to the input end of the first water tank.

[0009] According to some embodiments of this application, the test platform further includes a second water inlet pipe, a third valve group, and a water-passing element. The second water inlet pipe passes through the upper surface of the first cabinet and is inserted into the first cabinet. The input end of the second water inlet pipe is connected to the output end of the external cooling water pipeline. The input end of the third valve group is connected to the output end of the second water inlet pipe. The input end of the water-passing element is connected to the output end of the third valve group, and the output end of the water-passing element is connected to the second input end of the return water tank. The control module is also electrically connected to the third valve group.

[0010] According to some embodiments of this application, the test platform further includes an air intake pipe, a pressure regulating valve, a fourth valve group, and pneumatic components. The air intake pipe passes through the upper surface of the first cabinet and is inserted into the first cabinet. The input end of the air intake pipe is connected to the output end of an external gas pipeline; the input end of the pressure regulating valve is connected to the output end of the air intake pipe; the input end of the fourth valve group is connected to the output end of the pressure regulating valve; and one end of the control module is connected to the output end of the fourth valve group. The control module is also electrically connected to the pressure regulating valve, the fourth valve group, and the pneumatic components.

[0011] According to some embodiments of this application, the test platform further includes a second cabinet. The second cabinet is disposed on one side of the first cabinet, and the back panel of the second cabinet is provided with mounting holes for installing water-passing components or pneumatic components, and the flat panel of the second cabinet is provided with a mounting opening for accommodating a return water tank.

[0012] According to some embodiments of this application, the test platform further includes a leakage collection tray and a leakage sensor. The leakage collection tray is disposed on the lower surface of the first water tank; the leakage sensor is disposed on the upper surface of the leakage collection tray.

[0013] According to some embodiments of this application, the test platform also includes a float switch. The float switch is disposed inside the first water tank.

[0014] According to some embodiments of this application, the test platform also includes a second hand valve and a third hand valve.

[0015] The input end of the second hand valve is connected to the output end of the first inlet pipe, and the output end of the second hand valve is connected to the input end of the first valve group; the input end of the third hand valve is connected to the first output end of the second valve group, and the output end of the third hand valve is connected to the input end of the first outlet pipe.

[0016] The technical solution of this application can provide a fixed place for testing circulating water pumps by integrating a first water tank, a horizontal pump and a vertical pump, and save testing space.

[0017] The technical solution of this application can automatically test the circulating water pump through the control module, the first valve group and the second valve group, thereby improving the testing efficiency. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This diagram illustrates the structure of a test platform according to an embodiment of the present application. Figure 2 This invention provides another schematic diagram of the structure of a test platform according to an embodiment of the present application. Figure 3 This invention provides another schematic diagram of the structure of a test platform according to an embodiment of the present application. Figure 4 This invention provides another schematic diagram of the structure of a test platform according to an embodiment of the present application. Figure 5 A schematic diagram of the waterway of a test platform according to an embodiment of this application is shown; Figure 6 A schematic diagram of the air path of a test platform according to an embodiment of this application is shown; Explanation of reference numerals in the attached figures: 10. First cabinet; 11. First inlet pipe; 12. First valve group; 13. First water tank; 14. Pump module; 15. Second valve group; 16. First outlet pipe; 17. Control module; 18. First manual valve; 19. Second water tank; 20. Return water tank; 21. Second inlet pipe; 22. Third valve group; 23. Water flow element; 24. Air inlet pipe; 25. Pressure regulating valve; 26. Fourth valve group; 27. Pneumatic element; 28. Second cabinet; 29. ​​Drainage tray; 30. Second manual valve; 31. Third manual valve; 32. Fourth manual valve; 33. Seventh manual valve.

[0020] 131. Float switch mounting plate.

[0021] 121. First ball valve; 122. First diaphragm valve.

[0022] 141. Horizontal pump; 142. Vertical pump.

[0023] 151. First sub-valve group; 152. Second sub-valve group; 153. First flow meter; 154. Flow divider; 155. Second flow meter; 156. Fifth manual valve; 157. Sixth manual valve.

[0024] 171. User interface.

[0025] 221. Second ball valve; 222. Fourth diaphragm valve.

[0026] 281. Terminal block.

[0027] 1511, Second diaphragm valve; 1512, First check valve.

[0028] 1521. Third diaphragm valve; 1522. Second check valve. Detailed Implementation

[0029] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that this application will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted.

[0030] The described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Numerous specific details are provided in the following description to give a full understanding of embodiments of this disclosure. However, those skilled in the art will recognize that the technical solutions of this disclosure can be practiced without one or more of these specific details, or other methods, components, materials, devices, etc. In these cases, well-known structures, methods, devices, implementations, materials, or operations will not be shown or described in detail.

[0031] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0032] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order.

[0033] The technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0034] The English terms used in this application, their full English names, and their corresponding Chinese definitions are as follows: PCW stands for Process Cooling Water.

[0035] CW stands for Cooling Water.

[0036] CDA, Clean Dry Air.

[0037] PLC stands for Programmable Logic Controller.

[0038] According to one aspect of this application, a test platform is provided for waste gas treatment equipment.

[0039] See Figure 1 and Figure 2 The test platform includes a first cabinet 10, a first inlet pipe 11, a first valve group 12, a first water tank 13, a pump module 14, a second valve group 15, a first outlet pipe 16, and a control module 17.

[0040] According to the example embodiment, the first cabinet 10 can be a sheet metal cabinet. A first water inlet pipe 11 passes through the upper surface of the first cabinet 10 and is inserted into the first cabinet 10. The input end of the first water inlet pipe 11 is connected to the output end of an external facility. For example, the first water inlet pipe 11 can be a PCW water inlet pipe, and the input end of the first water inlet pipe 11 is connected to the PCW output end of an external facility to guide process cooling water into the first water inlet pipe 11.

[0041] The input end of the first valve group 12 is connected to the output end of the first water inlet pipe 11. The first valve group 12 can control the flow and cut-off of process cooling water.

[0042] The first water tank 13 is fixedly installed at the bottom inside the first cabinet 10, and the input end of the first water tank 13 is fixedly connected to the output end of the first valve group 12. When the first valve group 12 is open, process cooling water can flow into the first water tank 13.

[0043] Pump module 14 includes a horizontal pump 141 and a vertical pump 142. Both the horizontal pump 141 and the vertical pump 142 can be circulating water pumps to be tested for use in exhaust gas treatment equipment.

[0044] A horizontal pump 141 is disposed on one side of the first water tank 13, and the input end of the horizontal pump 141 is connected to the first output end of the first water tank 13. The process cooling water in the first water tank 13 can be pumped out by the horizontal pump 141. The mounting plate of the horizontal pump 141 can be detachably disposed at the bottom of the interior of the first cabinet 10 to install horizontal pumps 141 of different specifications.

[0045] A vertical pump 142 is mounted on the upper surface of the first water tank 13, and its input end is connected to the second output end of the first water tank 13. The upper surface of the first water tank 13 may be provided with an installation interface to accommodate vertical pumps of different specifications. The process cooling water in the first water tank 13 can be pumped out by the vertical pump 142.

[0046] The second valve group 15 includes a first sub-valve group 151 and a second sub-valve group 152. The input end of the first sub-valve group 151 is connected to the output end of the horizontal pump 141. The first sub-valve group 151 can be used to control the flow and cut-off of the process cooling water pumped out by the horizontal pump 141.

[0047] The input end of the second sub-valve group 152 is connected to the first output end of the vertical pump 142. The second sub-valve group 152 can be used to control the flow and cut-off of the process cooling water pumped out by the vertical pump 142.

[0048] The first outlet pipe 16 extends from the inside of the first cabinet 10 out of the upper surface of the first cabinet 10. The input end of the first outlet pipe 16 is connected to the output end of the first sub-valve group 151, and the input end of the first outlet pipe 16 is connected to the output end of the second sub-valve group 152. The output end of the first outlet pipe 16 is connected to the input end of the external facility. The process cooling water passing through the first sub-valve group 151 or the second sub-valve group 152 can flow out through the first outlet pipe 16 to the drain end of the PCW in the external facility. When testing the head of the horizontal pump 141 or the vertical pump 142, the main pipe of the horizontal pump 141 or the vertical pump 142 can also be connected to an external test pipeline to discharge the process cooling water to the external facility.

[0049] The control module 17 is fixedly installed inside the first cabinet 10, and is electrically connected to the first valve group 12 and the second valve group 15. For example, the control module 17 can be a PLC controller. The control module 17 can send an on command to the first valve group 12, the first sub-valve group 151, or the second sub-valve group 152, and the first valve group 12, the first sub-valve group 151, or the second sub-valve group 152 can be turned on accordingly. The control module 17 can also send a off command to the first valve group 12, the first sub-valve group 151, or the second sub-valve group 152, and the first valve group 12, the first sub-valve group 151, or the second sub-valve group 152 can be turned off accordingly.

[0050] The control module 17 can receive user commands through the user interface 171, thereby generating on or off commands. The user interface 171 can be installed on the front cabinet of the first cabinet 10. The control module 17 can also monitor the drainage time of the horizontal pump 141 and the vertical pump 142. If the drainage time is within the preset required time, it indicates that the horizontal pump 141 and the vertical pump 142 meet the requirements.

[0051] Through the above embodiments, the technical solution of this application can provide a fixed place for testing circulating water pumps by integrating a first water tank, a horizontal pump and a vertical pump, and save testing space.

[0052] The technical solution of this application can automatically test the circulating water pump through the control module, the first valve group and the second valve group, thereby improving the testing efficiency.

[0053] Optionally, see Figures 2-5 The test platform also includes a first manual valve 18 and a second water tank 19. The input end of the first manual valve 18 is connected to the second output end of the second valve group 15. The first manual valve 18 can control the flow of process cooling water through the second valve group 15 into the second water tank 19. The first manual valve 18 can be manually controlled to open and close.

[0054] The second water tank 19 is fixedly installed inside the first cabinet 10, and its input end is connected to the output end of the first hand valve 18. For example, the second water tank 19 can be installed inside the front door of the first cabinet 10. The output end of the second water tank 19 can be connected to the input end of the first water tank 13. This arrangement allows some of the process cooling water during the testing process to flow into the first water tank 13 after passing through the second water tank 19, thus recycling water resources.

[0055] Optionally, see Figure 5There can be two first-hand valves 18, which control the input and output of the second water tank 19 respectively. The first-hand valve 18 located at the output of the second water tank 19 can control the flow of process cooling water after passing through the second water tank 19 into the first water tank 13.

[0056] Optionally, a level gauge may be installed inside the second water tank 19 to monitor the liquid level height of the second water tank 19.

[0057] Optionally, see Figure 5 The second valve assembly 15 also includes a first flow meter 153. The first end of the first flow meter 153 is connected to the output end of the first sub-valve assembly 151, and the first end of the first flow meter 153 is also connected to the output end of the second sub-valve assembly 152. The second end of the first flow meter 153 is connected to the input end of the first outlet pipe 16. The first flow meter 153 can measure the flow rate of industrial cooling water pumped by the horizontal pump 141 or the vertical pump 142.

[0058] Optionally, referring to 5, the second valve assembly 15 also includes a diverter 154 and a second flow meter 155. The input end of the diverter 154 is connected to the second output end of the vertical pump 142. The diverter 154 can be fixed to a crossbeam inside the first cabinet 10 for circulating water testing. The first end of the second flow meter 155 is connected to the output end of the diverter 154.

[0059] The test platform also includes a return water tank 20. The return water tank 20 is located on one side of the first cabinet 10. The first input end of the return water tank 20 is connected to the second end of the second flow meter 155, and the output end of the return water tank 20 is connected to the input end of the first water tank 13. The process cooling water passing through the output end of the vertical pump 142 can partially flow into the distributor 154, the second flow meter 155, and the return water tank 20 before flowing into the first water tank 13.

[0060] Optionally, see Figures 1-5 The test platform also includes a second water inlet pipe 21, a third valve group 22, and a water passage element 23.

[0061] The second water inlet pipe 21 passes through the upper surface of the first cabinet 10 and is inserted into a cabinet. The input end of the second water inlet pipe 21 is connected to the output end of the external cooling water pipeline. For example, the second water inlet pipe 21 can be a CW water inlet pipe. The input end of the third valve group 22 is connected to the output end of the second water inlet pipe 21. The input end of the water-passing element 23 is connected to the output end of the third valve group 22, and the output end of the water-passing element 23 is connected to the second input end of the return water tank 20. The control module 17 is also electrically connected to the third valve group 22.

[0062] For example, the water-passing element 23 can be a valve body or other component used in exhaust gas treatment equipment. When testing the water-passing element 23, if new cooling water is needed, the new cooling water can flow into the first water tank 13 through the return water pool 20, thereby avoiding the direct discharge of the new cooling water to the external site.

[0063] Optionally, see Figure 2 and Figure 6 The test platform also includes an intake pipe 24, a pressure regulating valve 25, a fourth valve group 26, and a pneumatic component 27. The control module 17 is also electrically connected to the pressure regulating valve 25, the fourth valve group 26, and the pneumatic component 27.

[0064] The intake pipe 24 passes through the upper surface of the first cabinet 10 and is inserted into the first cabinet 10. The input end of the intake pipe 24 is connected to the output end of an external gas pipeline. The intake pipe 24 can be a CDA intake pipe 24 or an N2 converter intake pipe 24. Two intake pipes 24 can be provided, namely a CDA intake pipe 24 and an N2 converter intake pipe 24.

[0065] The input end of the pressure regulating valve 25 is connected to the output end of the intake pipe 24. The pressure regulating valve 25 can regulate the pressure of the gas flowing into the intake pipe 24.

[0066] The input terminal of the fourth valve assembly 26 is connected to the output terminal of the pressure regulating valve 25. The fourth valve assembly 26 can be at least one of a valve island, a solenoid valve, and the pressure regulating valve 25. The fourth valve assembly 26 can be used to control the opening and closing of gas flow.

[0067] One end of the pneumatic component 27 is connected to the output end of the fourth valve group 26. For example, the pneumatic component 27 can be a pneumatic valve or other component used in exhaust gas treatment equipment, such as a solenoid valve, flow meter, diaphragm valve, ball valve, bypass valve, etc.

[0068] The test platform can be used to test the performance of the gas passing components, as well as the performance of the valve body of the fourth valve group 26.

[0069] Optionally, see Figure 1 and Figure 2 The testing platform also includes a second cabinet 28. The second cabinet 28 is located on one side of the first cabinet 10. The back panel of the second cabinet 28 has mounting holes for installing water-passing components 23 or pneumatic components 27. Multiple mounting holes can be provided for installing water-passing components 23 or pneumatic components 27 of different specifications. The back panel of the second cabinet 28 can also be equipped with a terminal block 281, which can be used for electrical testing. When power is required for testing the water-passing component 23 or pneumatic component 27, power is supplied to the water-passing component 23 or pneumatic component 27 through the terminal block 281. This configuration reduces the wiring distance of the water-passing component or pneumatic component 27, saving cabling.

[0070] The flat panel of the second cabinet 28 is provided with an installation port for accommodating the return water tank 20. The flat panel of the second cabinet 28 can also serve as a desktop for placing the water-passing component 23 or the pneumatic component 27.

[0071] Optionally, see Figure 3 and Figure 4 The test platform also includes a leak-collecting plate 29 and a leak sensor (not shown in the figure). The leak-collecting plate 29 is disposed on the lower surface of the first water tank 13. The leak-collecting plate 29 can contain water leaking from the first water tank 13, the second water tank 19, and various pipes. The leak sensor is disposed on the upper surface of the leak-collecting plate 29. The leak sensor can be electrically connected to the control module 17. The leak sensor can be a leak tape. The leak sensor can be used to detect whether the first water tank 13, the second water tank 19, and various pipes are leaking. If the leak sensor detects water leakage from the first water tank 13, the second water tank 19, and various pipes, the leak sensor can send an alarm signal to the control module 17.

[0072] Optionally, the test platform also includes a float switch. The float switch is located inside the first water tank 13. A detachable float switch mounting plate 131 can be provided on the upper surface of the first water tank 13. The float switch can be used to monitor the liquid level in the first water tank 13. When the liquid level is higher than the high liquid level, the control module 17 sends a conduction command to the second valve group 15 (first sub-valve group 151 or second sub-valve group 152) to drain water from the first water tank 13. When the liquid level is lower than the low liquid level, the control module 17 sends a conduction command to the first valve group 12 to replenish water to the first water tank 13.

[0073] Optionally, see Figure 5 The test platform also includes a second hand valve 30 and a third hand valve 31. The input end of the second hand valve 30 is connected to the output end of the first water inlet pipe 11, and the output end of the second hand valve 30 is connected to the input end of the first valve group 12. The second hand valve 30 can be a control valve for manually controlling the flow of process cooling water into the first water inlet pipe 11.

[0074] The input end of the third hand valve 31 is connected to the first output end of the second valve group 15, and the output end of the third hand valve 31 is connected to the input end of the first outlet pipe 16. The third hand valve 31 can be a control valve for manually controlling the discharge of process cooling water from the first outlet pipe 16.

[0075] Optionally, see Figure 5 The test platform may also include a fourth hand valve 32. The input end of the fourth hand valve 32 is connected to the input end of the second water inlet pipe 21, and the output end of the fourth hand valve 32 is connected to the input end of the third valve group 22. The fourth hand valve 32 can be a control valve for manually controlling the flow of cooling water into the second water inlet pipe 21.

[0076] Optionally, see Figure 5The second valve group 15 may further include a fifth hand valve 156 and a sixth hand valve 157. The input end of the fifth hand valve 156 is connected to the output end of the first sub-valve group 151. The output end of the fifth hand valve 156 is connected to the first end of the first flow meter 153. The fifth hand valve 156 can be a control valve for manually controlling the pumping of the horizontal pump 141.

[0077] The input terminal of the sixth hand valve 157 is connected to the output terminal of the second sub-valve group 152. The output terminal of the sixth hand valve 157 is connected to the first terminal of the first flow meter 153. The sixth hand valve 157 can be a control valve for manually controlling the pumping of the vertical pump 142.

[0078] Optionally, see Figure 5 The test platform may also include a seventh hand valve 33, the input of which is connected to the output of the air intake pipe 24, and the output of which is connected to the input of the pressure regulating valve 25. The seventh hand valve 33 can be a control valve for manually controlling the gas input into the air intake pipe 24.

[0079] Optionally, see Figure 5 The first valve assembly 12 may include a first ball valve 121 and a first diaphragm valve 122. The input end of the first ball valve 121 is connected to the output end of the second hand valve 30. The input end of the first diaphragm valve 122 is connected to the output end of the first ball valve 121. The output end of the first diaphragm valve 122 is connected to the input end of the first water tank 13. This configuration can prevent water leakage in the pipeline.

[0080] Optionally, see Figure 5 The first sub-valve group 151 may include a second diaphragm valve 1511 and a first check valve 1512. The input end of the second diaphragm valve 1511 is connected to the output end of the horizontal pump 141. The input end of the first check valve 1512 is connected to the output end of the second diaphragm valve 1511. The output end of the first check valve 1512 is connected to the output end of the fifth hand valve 156. This arrangement can prevent pipeline leakage and restrict the flow direction of process cooling water.

[0081] Optionally, see Figure 5 The second sub-valve group 152 may include a third diaphragm valve 1521 and a second check valve 1522. The input end of the third diaphragm valve 1521 is connected to the first output end of the vertical pump 142. The input end of the second check valve 1522 is connected to the output end of the third diaphragm valve 1521. The output end of the second check valve 1522 is connected to the output end of the sixth hand valve 157. This arrangement can prevent pipeline leakage and restrict the flow direction of process cooling water.

[0082] Optionally, the third valve assembly 22 may include a second ball valve 221 and a fourth diaphragm valve 222. The input end of the second ball valve 221 is connected to the output end of the fourth hand valve 32. The fourth diaphragm valve 222 is connected to the output end of the second ball valve 221. The output end of the fourth diaphragm valve 222 is connected to the input end of the water-passing element 23. This configuration can prevent water leakage in the pipeline.

[0083] Finally, it should be noted that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions of the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A test platform, characterized by, The testing platform is used for waste gas treatment equipment, and the testing platform includes: First cabinet; The first water inlet pipe passes through the upper surface of the first cabinet and is inserted into the first cabinet. The input end of the first water inlet pipe is connected to the output end of the external equipment. The first valve assembly has its input end connected to the output end of the first water inlet pipe; The first water tank is fixedly installed at the bottom of the inside of the first cabinet, and the input end of the first water tank is fixedly connected to the output end of the first valve group. Pump module, including: A horizontal pump is installed on one side of the first water tank, and the input end of the horizontal pump is connected to the first output end of the first water tank. A vertical pump is installed on the upper surface of the first water tank, and the input end of the vertical pump is connected to the second output end of the first water tank. The second valve assembly includes: The first sub-valve group, the input end of the first sub-valve group is connected to the output end of the horizontal pump; The second sub-valve group has its input end connected to the first output end of the vertical pump; The first water outlet pipe extends from the inside of the first cabinet to the upper surface of the first cabinet. The input end of the first water outlet pipe is connected to the output end of the first sub-valve group and the output end of the second sub-valve group. The output end of the first water outlet pipe is connected to the input end of the external field. The control module is fixedly installed inside the first cabinet, and the control module is electrically connected to the first valve group and the second valve group.

2. The test platform of claim 1, wherein, The testing platform also includes: The first manual valve has its input end connected to the second output end of the second valve group; The second water tank is fixedly installed inside the first cabinet, and the input end of the second water tank is connected to the output end of the first hand valve.

3. The testing platform according to claim 1, characterized in that, The second valve assembly also includes: The first flow meter has its first end connected to the output end of the first sub-valve group, and its first end connected to the output end of the second sub-valve group, and its second end connected to the input end of the first outlet pipe.

4. The testing platform according to claim 3, characterized in that, The second valve assembly also includes: A flow divider, the input end of which is connected to the second output end of the vertical pump; A second flow meter, the first end of which is connected to the output end of the flow divider; The testing platform also includes: A return water tank is located on one side of the first cabinet. The first input end of the return water tank is connected to the second end of the second flow meter, and the output end of the return water tank is connected to the input end of the first water tank.

5. The testing platform according to claim 4, characterized in that, The testing platform also includes: The second water inlet pipe passes through the upper surface of the first cabinet and is inserted into the first cabinet. The input end of the second water inlet pipe is connected to the output end of the external cooling water pipe. The third valve assembly, wherein the input end of the third valve assembly is connected to the output end of the second inlet pipe; A water-passing element, the input end of which is connected to the output end of the third valve group, and the output end of which is connected to the second input end of the return water tank; The control module is also electrically connected to the third valve group.

6. The testing platform according to claim 5, characterized in that, The testing platform also includes: An air intake pipe passes through the upper surface of the first cabinet and is inserted into the first cabinet. The input end of the air intake pipe is connected to the output end of an external gas pipeline. A pressure regulating valve, wherein the input end of the pressure regulating valve is connected to the output end of the air intake pipe; The fourth valve group, the input end of which is connected to the output end of the pressure regulating valve; A pneumatic component, one end of which is connected to the output end of the fourth valve group; The control module is also electrically connected to the pressure regulating valve, the fourth valve group, and the pneumatic component.

7. The testing platform according to claim 6, characterized in that, The testing platform also includes: The second cabinet is located on one side of the first cabinet. The back panel of the second cabinet is provided with mounting holes for installing the water-passing element or the pneumatic element, and the flat panel of the second cabinet is provided with a mounting opening for accommodating the return water tank.

8. The testing platform according to claim 1, characterized in that, The testing platform also includes: A drip tray is disposed on the lower surface of the first water tank; A leakage sensor is disposed on the upper surface of the leakage receiving plate.

9. The testing platform according to claim 1, characterized in that, The testing platform also includes: The float switch is located inside the first water tank.

10. The testing platform according to claim 1, characterized in that, The testing platform also includes: The second hand valve has its input end connected to the output end of the first water inlet pipe and its output end connected to the input end of the first valve group. The third hand valve has its input end connected to the first output end of the second valve group, and its output end connected to the input end of the first outlet pipe.

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