X-ray generating mechanism and circuit board testing equipment

Abstract

This application relates to the field of X-ray inspection technology, and discloses an X-ray generating mechanism and a circuit board inspection device. The X-ray generating mechanism includes a lifting assembly and an X-ray generator. The lifting assembly includes a lifting member and a driving member. The lifting member is connected to the X-ray generator and is positioned below the X-ray generator along a first direction. The lifting member is driven by the driving member to move, and the lifting member is suitable for driving the X-ray generator to reciprocate along the first direction. The X-ray generating mechanism of this application can improve the heat dissipation effect of the X-ray generator. The circuit board inspection device with the above-mentioned X-ray generating mechanism also has the above-mentioned advantages.

Description

Technical Field

[0001] This application relates to the field of X-ray inspection technology, and in particular to an X-ray generating mechanism and a circuit board inspection device. Background Technology

[0002] During the circuit board manufacturing process, X-rays are used to inspect the circuit boards to obtain information on defects or copper layer distribution. For circuit boards of different sizes, the X-ray emitter needs to be raised and lowered to ensure that the emitted rays can reach the circuit boards.

[0003] In related technologies, a lifting motor and guide rail are installed on the side of the radiation generator to achieve the raising and lowering of the radiation generator. However, when the lifting motor is located on the side of the radiation generator, the lifting motor and guide rail will block the heat dissipation holes on the side of the radiation generator, thereby reducing the heat dissipation effect of the radiation generator. Utility Model Content

[0004] In order to overcome the problems existing in the prior art, the main objective of this application is to provide a radiation generating mechanism and a circuit board testing device.

[0005] To achieve the above objectives, this application specifically adopts the following technical solution: According to a first aspect of the embodiments of this application, a radiation generating mechanism is provided, including a lifting assembly and a radiation generator. The lifting assembly includes a lifting member and a driving member. The lifting member is connected to the radiation generator and disposed below the radiation generator along a first direction. The lifting member is driven by the driving member to move, and the lifting member is adapted to drive the radiation generator to reciprocate along the first direction.

[0006] The first possibility is that the lifting assembly further includes a movable member and a support member. The movable member is movably connected to the side of the lifting member away from the ray generator along a first direction. The movable member is disposed between the lifting member and the support member along the first direction. The driving member is used to drive the movable member to move relative to the support member along a second direction. The movable member is adapted to drive the lifting member to move along the first direction. The second direction is perpendicular to the first direction.

[0007] The second possibility is that the movable part includes a guide portion and a movable portion, the movable portion being connected to the support member, the guide portion being connected to the lifting member and the movable portion, and the guide portion being inclined toward the first direction relative to the second direction.

[0008] The third possible scenario is that the movable part has a first inclined structure on the side facing the lifting member, and the lifting member has a second inclined structure on the side facing the movable part. The first inclined structure and the second inclined structure are inclined relative to the second direction and towards the first direction. The guide part is connected to the first inclined structure and is located between the first inclined structure and the second inclined structure.

[0009] The fourth possibility is that the guide part is a cross roller slide rail, which has a slide rail part and a roller part. The slide rail part is connected to the movable part, and the roller part is connected to the lifting member. The roller part and the slide rail part are slidably connected.

[0010] The fifth possibility is that the support member is provided with a sliding guide rail, and the movable part is connected to the sliding guide rail to be slidably connected to the support member.

[0011] The sixth possibility is that the radiation generator has multiple heat dissipation holes, and the radiation generator is provided with a heat dissipation channel in its circumference, and the heat dissipation channel is connected to the heat dissipation holes.

[0012] The seventh possibility is that the lifting assembly includes at least two support rods connected to the lifting member, and the at least two support rods are spaced apart in the circumference of the ray generator to define the heat dissipation channel.

[0013] An eighth possible scenario is that the lifting assembly further includes a cover plate disposed along a first direction on the side of the ray generator opposite to the lifting component, with the cover plate spaced apart from the ray generator.

[0014] The ninth possibility is that the cover plate has a hole structure along the first direction, and the ray generator has an emitting part on the side opposite to the lifting member, and the emitting part is located in the hole structure.

[0015] The tenth possibility is that the hole structure includes a first through hole and a second through hole, the first through hole and the second through hole are connected, the transmitting part is disposed in the first through hole, and the second through hole is used to accommodate the circuit of the transmitting part.

[0016] The eleventh possible scenario is that the lifting assembly includes a guide member connected to the support member, the lifting member being movably connected to the guide member, and the lifting member moving up and down along the guide member when the movable member moves relative to the lifting member.

[0017] The twelfth possible scenario is that the radiation generating mechanism includes a cover connected to the support member, the cover and the support member jointly defining a mounting cavity, the movable member being disposed in the mounting cavity, the cover having a first opening on the side facing the lifting member, the first opening communicating with the mounting cavity, and the lifting member and the radiation generator passing through the first opening.

[0018] The thirteenth possibility is that the lifting assembly includes a detection element and a sensing element, the detection element is connected to the support element and has a detection part, the sensing element is connected to the movable element and the sensing element and the detection part correspond to each other in a second direction.

[0019] According to a second aspect of the embodiments of this application, a circuit board inspection device is provided, the circuit board inspection device including a detection mechanism, a conveying mechanism, a housing, and a radiation generating mechanism described in any of the above embodiments.

[0020] A detection mechanism is spaced apart from the radiation generating mechanism. The detection mechanism is used to detect the radiation generated by the radiation generator. A conveying mechanism is located between the detection mechanism and the radiation generator. The conveying mechanism is used to convey circuit boards. A detection space is defined inside the housing. The housing houses the radiation generating mechanism, the detection mechanism, and the conveying mechanism within the detection space. The housing has an inlet and an outlet. The conveying mechanism is used to receive circuit boards fed in from the inlet and convey the circuit boards to the detection position for X-ray detection. The conveying mechanism is also used to convey the circuit boards at the detection position toward the outlet.

[0021] The X-ray generating mechanism and circuit board detection equipment according to the embodiments of this application have at least the following beneficial effects: The lifting component is connected to the X-ray generator, and the lifting component is driven to move by a driving component, enabling the lifting component to move the X-ray generator vertically to achieve the lifting and lowering of the X-ray generator. Simultaneously, the lifting component is positioned below the X-ray generator vertically, thereby preventing the lifting assembly from obstructing the sides of the X-ray generator, thus improving the heat dissipation effect of the X-ray generator.

[0022] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the radiation generating mechanism in the embodiments of this application; Figure 2 This is a schematic diagram of the structure of the radiation generating mechanism in the embodiments of this application; Figure 3This is a schematic diagram of the structure of the radiation generating mechanism in the embodiments of this application; Figure 4 This is a schematic diagram of an explosion of the radiation generating mechanism in an embodiment of this application; Figure 5 This is a schematic diagram of the structure of the radiation generating mechanism in the embodiments of this application; Figure 6 This is a schematic diagram of the structure of the radiation generating mechanism in the embodiments of this application; Figure 7 This is a schematic diagram of the circuit board testing equipment in the embodiments of this application.

[0024] Figure label: Circuit board testing equipment 10; X-ray generating mechanism 100; Support member 111; guide part 112; movable part 113; first inclined structure 1131; movable part 1132; drive member 114; detection member 115; detection part 1151; sensing member 116; Lifting component 121; Second tilting structure 1211; Ray generator 122; Emitting part 1221; Outer periphery 1222; Heat dissipation hole 1223; Cover plate 123; Hole structure 1231; First through hole 1232; Second through hole 1233; Support rod 124; Third opening 1241; Guide component 125; Cover body 126; Mounting cavity 1261; First opening 1262; First side 1263; Second side 1264; Second opening 1265; Heat dissipation channel 127; Detection mechanism 200; conveying mechanism 300; moving mechanism 400; circuit board 500. Detailed Implementation

[0025] The following will clearly and completely describe the concept and technical effects of this application in conjunction with embodiments, so as to fully understand the purpose, features and effects of this application. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are all within the scope of protection of this application.

[0026] In the description of the embodiments of this application, if directional descriptions are involved, such as "up", "down", "front", "back", "left", "right" etc., indicating the directional or positional relationship based on the directional or positional relationship shown in the drawings, it is only for the convenience of describing this application and simplifying the description, and is not intended to indicate or imply that the device or device referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0027] In the description of the embodiments of this application, if a feature is referred to as "setting," "fixing," "connecting," or "installing" on another feature, it can be directly set, fixed, or connected to the other feature, or it can be indirectly set, fixed, connected, or installed on the other feature. In the description of the embodiments of this application, if "several" is involved, it means one or more; if "multiple" is involved, it means two or more; if "greater than," "less than," or "exceeds," it should be understood as excluding the stated number; if "above," "below," or "within," it should be understood as including the stated number. If "first" or "second" is involved, it should be understood as used to distinguish technical features, and not as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of the indicated technical features.

[0028] This application provides an X-ray generating mechanism and a circuit board inspection device. The circuit board inspection device can be used to inspect printed circuit boards (PCBs), semiconductor chips, or other workpieces. The circuit board inspection device includes a detection mechanism, an X-ray generating mechanism, a conveying mechanism, and a moving mechanism. When defect detection of the workpiece is required, the workpiece is conveyed by the conveying mechanism to a position corresponding to the detection mechanism and the X-ray generating mechanism. The X-ray generating mechanism moves vertically so that the detection X-rays can irradiate the circuit board. Then, the moving mechanism drives the X-ray generating mechanism to move horizontally to inspect the circuit board. During the inspection process, the detection mechanism detects whether the detection X-rays pass through the workpiece, thereby determining whether the circuit board has defects.

[0029] It should be noted that, for ease of description and understanding, in the embodiments and accompanying drawings of this application, the up-down direction is indicated as the first direction, and the front-back direction is indicated as the second direction.

[0030] A first aspect of this application provides a radiation generating mechanism 100, see [reference] Figure 1 and Figure 2 As shown, the X-ray generating mechanism 100 includes a lifting assembly and a X-ray generator 122. The lifting assembly includes a lifting member 121 and a driving member 114. The lifting member 121 is connected to the X-ray generator 122 and is positioned below the X-ray generator 122 in a vertical direction. When the driving member 114 operates, the lifting member 121 is driven by the driving member 114 to move, and the movement of the lifting member 121 causes the X-ray generator 122 to reciprocate in a vertical direction, thereby realizing the lifting and lowering movement of the X-ray generator 122.

[0031] Specifically, there are various ways in which the lifting member 121 drives the X-ray generator 122 to move vertically. For example, in one example, the lifting member 121 is a cam mechanism, and the X-ray generator 122 abuts against the lifting member 121. When the drive member 114 operates, the lifting member 121 will rotate. Since the lifting member 121 is biased, when the lifting member 121 rotates, the X-ray generator 122 will contact different walls of the lifting member 121, thereby realizing the lifting and lowering movement of the X-ray generator 122.

[0032] Alternatively, in another embodiment, the lifting member 121 is a linkage mechanism, having a first link and a second link connected together, with an included angle between them. One end of the first link is fixed, and the other end is rotatably connected to the second link, one end of which is driven by the driving member 114. The first and second links are arranged in a front-rear direction. When the second link is driven by the driving member 114 to move in the front-rear direction, it slides, causing rotation between the second and first links, thus changing the included angle between them. When the included angle between the first and second links increases, the vertical height of the connection between them decreases, causing the lifting member 121 to descend. When the included angle between the first and second links decreases, the vertical height of the connection between them increases, causing the lifting member 121 to rise, thereby realizing the lifting and lowering of the radiation generator 122.

[0033] In related technologies, the lifting assembly is located on the side of the radiation generator. When it is necessary to control the lifting movement of the radiation generator, fixed components such as a support plate are required on the side of the radiation generator to install moving parts, drive parts, and lifting components. As a result, the heat dissipation vents of the radiation generator are blocked by the support plate and other fixed components, thus affecting the heat dissipation of the radiation generator.

[0034] Compared to related technologies, the X-ray generating mechanism 100 of this application embodiment is connected to the X-ray generator 122 via a lifting member 121, and is driven by a driving member 114 to move the lifting member 121, enabling the lifting member 121 to move the X-ray generator 122 in the vertical direction to achieve the lifting and lowering of the X-ray generator 122. Simultaneously, the lifting member 121 is positioned below the X-ray generator 122 in the vertical direction, thereby preventing the lifting assembly from obstructing the side of the X-ray generator 122 and thus improving the heat dissipation effect of the X-ray generator 122.

[0035] See Figure 1 and Figure 2As shown, the lifting assembly also includes a support member 111 and a movable member 113. The support member 111 serves as the mounting base for the lifting assembly, and is used to mount and fix the movable member 113 and the drive member 114. The movable member 113 is positioned vertically between the lifting assembly 121 and the support member 111. The movable member 113 and the support member 111 are movably connected, and the drive member 114 is mounted on the support member 111 and connected to the movable member 113. The drive member 114 drives the movable member 113 to move relative to the support member 111 in the front-back direction. The X-ray generator 122 is connected vertically to the side of the lifting assembly 121 opposite to the movable member 113. When the movable member 113 moves vertically relative to the support member 111, it drives the lifting assembly 121 to move vertically, thereby achieving the lifting movement of the X-ray generator 122.

[0036] Specifically, when the driving member 114 connects to drive the movable member 113, the movable member 113 moves relative to the lifting member 121 and the support member 111 in the front-back direction. Then, the lifting member 121 contacts different outer wall surfaces of the movable member 113 as it moves in the front-back direction to perform lifting and lowering movements. Since the radiation generator 122 is connected to the side of the lifting member 121 opposite to the movable member 113, the radiation generator 122 also moves along the lifting member 121 in the up-down direction, thus converting the front-back movement of the movable member 113 into the up-down movement of the radiation generator 122. In this embodiment, the movable member 113 moves in the front-back direction, making its direction of movement different from the up-down direction of the radiation generator 122. The lifting member 121 acts as a motion conversion medium, converting the front-back movement of the movable member 113 into the up-down movement of the radiation generator 122. This saves space in the up-down direction of the radiation generating mechanism 100 and increases the stroke of the radiation generator 122 in the up-down direction.

[0037] See Figures 1 to 3As shown, the movable part 113 includes a guide portion 112 and a movable part 1132, with the movable part 1132 connected to the support member 111. The guide portion 112 connects the movable part 1132 and the lifting member 121, and the guide portion 112 is inclined vertically relative to the front-back direction. It is understood that, with the support member 111 as the assembly reference, the guide portion 112 is inclined relative to the support member 111, and the distance from various positions on the guide portion 112 to the support member 111 in the vertical direction is different. When the movable part 1132 is driven by the drive member 114, the guide portion 112 moves along the front-back direction following the movable part 1132, but the lifting member 121 does not move along with the movable part 1132 or the guide portion 112. Because the guide portion 112 is inclined, and the connection position between the lifting member 121 and the guide portion 112 changes during the movement of the guide portion 112, the lifting member 121 can move vertically in the vertical direction, thereby realizing the lifting movement of the radiation generator 122.

[0038] Specifically, the assembly methods of the lifting component 121, the guide portion 112, and the movable portion 1132 are varied. In one example, see [reference needed]. Figures 1 to 3 As shown, the guide portion 112 is disposed on the side of the movable portion 1132 opposite to the support member 111 along the vertical direction. The movable portion 1132, the guide portion 112 and the lifting member 121 are arranged along the vertical direction, and the guide portion 112 is disposed between the movable portion 1132 and the lifting member 121.

[0039] In another embodiment (not shown in the figure), a mounting position is provided in the middle portion of the movable part 1132 along the vertical direction, and the mounting position is recessed downward relative to the upper surface of the movable part 1132. A guide part 112 is inclinedly disposed on the side wall of the mounting position, and a lifting member 121 is housed in the mounting position and disposed on the guide part 112. When the guide part 112 moves along the front-back direction following the movable part 1132, the lifting member 121 will rise and fall along the inclined direction of the guide part 112 under the action of gravity, thereby realizing the lifting operation of the radiation generator 122.

[0040] In other examples (not shown in the figures), the middle portion of the lifting member 121 is provided with a mounting position, which is recessed upward relative to the lower surface of the lifting member 121, and the guide portion 112 is inclinedly disposed on the outer wall surface of the movable portion 1132. When the lifting member 121 is assembled to the movable portion 1132 and the guide portion 112, the lifting member 121 covers the movable portion 1132, so that the movable portion 1132 is accommodated in the mounting position, and the two sides of the lifting member 121 are connected to the guide portion 112.

[0041] In this embodiment, the guide portion 112 is a slide rail structure, the drive member 114 is a motor, and the movable portion 1132 is driven by the drive member 114 to slide along the arrangement direction of the guide rail. Specifically, the guide portion 112 is a cross roller slide rail. The cross roller slide rail has a slide rail portion and a roller portion. The slide rail portion is connected to the movable portion 1132, and the roller portion is connected to the lifting member 121. A sliding channel is provided in the middle of the slide rail portion. When the slide rail portion and the roller portion are connected, the roller portion is accommodated in the sliding channel and slidably connected to the slide rail portion, thereby allowing relative sliding between the lifting member 121 and the movable portion 1132 to realize the lifting movement of the lifting member 121. In other embodiments, the drive member 114 may also be a cylinder or a hydraulic cylinder or other drive component to drive the movable portion 1132 to move relative to the support member 111 along the arrangement direction of the guide rail.

[0042] One possible implementation is that the support member 111 is provided with a sliding guide rail, which is connected to the side of the support member 111 facing the movable member 113. The sliding guide rail connects the support member 111 and the movable part 1132. When the driving device drives the movable part 1132 to move relative to the support member 111, the movable part 1132 can slide relative to the support member 111 along the arrangement direction of the sliding guide rail, thereby realizing the relative movement of the movable member 113 and the lifting member 121.

[0043] The X-ray generating mechanism 100 of this application embodiment uses an inclined guide portion 112, which is connected to the movable portion 1132 and the lifting member 121. When the movable portion 1132 is driven by the driving member 114 to move relative to the support member 111 and the lifting member 121, the guide portion 112 moves back and forth together with the movable portion 1132. During the movement, the lifting member 121 will contact and be supported by different positions of the guide portion 112. Therefore, the lifting member 121 and the X-ray generator 122 will move up and down according to the different support positions, thereby increasing the lifting stroke of the X-ray generator 122 and giving the X-ray generator 122 a larger detection range. In this embodiment, this solution avoids the situation where the movement direction of the movable member 113 is the same as that of the X-ray generator 122, which would require part of the structure of the movable member 113 to be arranged in the vertical direction and occupy vertical space. This saves the space occupied by the X-ray generating mechanism 100 and can increase the vertical stroke of the X-ray generator 122.

[0044] See Figures 1 to 3As shown, it can be understood that the movable part 1132 has a first inclined structure 1131 on the side facing the lifting member 121, and the lifting member 121 has a second inclined structure 1211 on the side facing the movable part 1132. The positions of the first inclined structure 1131 and the second inclined structure 1211 correspond to each other in the vertical direction. The guide part 112 is disposed between the first inclined structure 1131 and the second inclined structure 1211. The first inclined structure 1131 and the second inclined structure 1211 are inclined relative to the support member 111, and the inclination direction is the same as that of the guide part 112, both being inclined in the vertical direction relative to the front-back direction. This allows the guide part 112 and the first inclined structure 1131 to be adapted so that the guide part 112 can be connected to the first inclined structure 1131. The second inclined structure 1211 abuts against the side of the guide part 112 away from the first inclined structure 1131, thereby reducing the assembly height of the lifting member 121 and the movable part 1132 in the vertical direction, and thus further increasing the lifting stroke of the X-ray generator 122. Meanwhile, connecting the first inclined structure 1131 and the second inclined structure 1211 via the guide portion 112 reduces the contact friction between the first inclined structure 1131 and the second inclined structure 1211, thereby improving the relative movement efficiency between the movable portion 1132 and the lifting member 121. When the movable portion 1132 moves in the front-back direction relative to the support member 111 and the lifting member 121, the guide portion 112 will follow the movable portion 1132 in the front-back direction. The lifting member 121 will abut against the guide portion 112 at different positions due to the movement of the movable portion 1132, thereby realizing the lifting movement of the radiation generator 122.

[0045] See Figures 1 to 5 As shown, one possible implementation is that the ray generator 122 has multiple heat dissipation holes 1223, and the ray generator 122 is provided with a heat dissipation channel 127 in the circumferential direction that communicates with the external environment. The heat dissipation holes 1223 and the heat dissipation channel 127 are connected, thereby allowing the ray generator 122 to conduct heat to the external environment for heat dissipation through the heat dissipation holes 1223 and the heat dissipation channel 127.

[0046] Specifically, the radiation generator 122 can be provided with heat dissipation holes 1223 on its vertical or horizontal (front, back, left, and right) wall surfaces. Corresponding heat dissipation channels 127 are provided on the wall surfaces of the radiation generator 122 with the heat dissipation holes 1223, thereby allowing the heat generated by the radiation generator 122 during operation to be conducted through the heat dissipation holes 1223 and heat dissipation channels 127, thus improving the heat dissipation efficiency of the radiation generator 122. In this embodiment, the radiation generator 122 does not have a continuous circumferential shielding surface; that is, the peripheral wall of the radiation generator 122 is exposed to the external environment to promote the heat dissipation effect of the radiation generator 122.

[0047] See Figures 1 to 6 As shown, it can be understood that the lifting assembly may also include at least two support rods 124. The number of support rods 124 can be two, three, four, or other multiple features. The support rods 124 are connected to the side of the lifting member 121 facing away from the movable member 113 in the vertical direction. Adjacent support rods 124 are spaced apart to define a heat dissipation channel 127 that partially connects the ray generator 122 to the external environment, allowing the heat dissipation holes 1223 of the ray generator 122 to connect to the external environment, thereby improving the heat dissipation effect of the ray generator 122 during operation.

[0048] In one example, a support rod 124 is connected to a lifting member 121. The support rod 124 is positioned circumferentially around the ray generator 122 to define a receiving cavity, and the support rod 124 forms the boundary of the receiving cavity. The ray generator 122 is disposed within the receiving cavity. A third opening 1241 is defined between two adjacent support rods 124. The third opening 1241 is part of a heat dissipation channel 127 and communicates with the sidewall of the ray generator 122 and the external environment, exposing the sidewall of the ray generator 122 to the external environment. No other components between two adjacent support rods 124 obstruct the outer wall of the ray generator 122, thereby exposing the peripheral wall of the ray generator 122 to the external environment and preventing the heat dissipation holes 1223 from being blocked, thus improving the heat dissipation effect of the heat dissipation holes 1223 of the ray generator 122.

[0049] In other embodiments (not shown in the figures), there are multiple support rods 124, which are staggered along the horizontal direction (front-back and left-right directions) and the vertical direction, forming a grid structure and defining multiple third openings 1241. Connecting the support cover plate 123 with multiple support rods 124 improves the stability of the support rods 124 and the cover plate 123, and the ray generator 122 can communicate with the external environment through the multiple third openings 1241 for heat dissipation.

[0050] See Figures 2 to 6 As shown, it can be understood that the lifting assembly may also include a cover plate 123. In one example, the cover plate 123 is connected to at least two support rods 124, and the cover plate 123 is disposed on the side of the ray generator 122 opposite to the lifting assembly 121. The cover plate 123 is supported by the support rods 124 to be spaced apart from the ray generator 122 in the vertical direction, thereby creating a heat dissipation gap between the ray generator 122 and the cover plate 123, which is also part of the heat dissipation channel 127.

[0051] Specifically, support rods 124 are connected to the corners of the cover plate 123, providing support for the cover plate 123. Support rods 124 connect the cover plate 123 and the lifting member 121, and are spaced apart circumferentially along the X-ray generator 122. Specifically, one end of each support rod 124 is connected to the cover plate 123, and the other end is connected to the lifting member 121, thereby ensuring that the cover plate 123 is supported and held in a predetermined position. The height of the support rods 124 in the vertical direction is greater than the height of the X-ray generator 122. Therefore, when the cover plate 123 is connected to the support rods 124, the height of the cover plate 123 is less than the height of the X-ray generator 122, thus creating a spaced-apart gap between the cover plate 123 and the X-ray generator 122 to further improve the heat dissipation effect of the X-ray generator 122. Furthermore, the cover plate 123 can also shield the rays generated by the ray generator 122, thereby preventing the rays from irradiating the other working parts of the lifting assembly and causing damage.

[0052] In another embodiment (not shown in the figure), the cover plate 123 and the radiation generator 122 are spaced apart from the side opposite to the lifting member 121. A support member is provided on the side of the cover plate 123 and the radiation generator 122 opposite to the lifting member 121, and the support member is positioned vertically between the cover plate 123 and the radiation generator 122. When the cover plate 123 is positioned on the side of the radiation generator 122 opposite to the lifting member 121, the upper end of the support member is connected to support the cover plate 123, and the lower end of the support member is connected to the radiation generator 122. By placing the support member between the cover plate 123 and the radiation generator 122, the spaced arrangement of the cover plate 123 and the radiation generator 122 can be achieved through the support of the support member on the cover plate 123, thereby further improving the heat dissipation effect of the radiation generator 122. See also... Figures 2 to 6 As shown, it can be understood that the X-ray generator 122 has an emitting section 1221 on the side opposite to the lifting component 121. The emitting section 1221 is used to emit detection light to detect the circuit board 500. A cover plate 123 is provided at the location of the emitting section 1221, and the cover plate 123 can shield the working parts of the lifting assembly other than the emitting section 1221 to provide protection.

[0053] Specifically, the cover plate 123 may be provided with a hole structure 1231, which guides the upper and lower sides of the cover plate 123 vertically. When the cover plate 123 is installed on the side of the X-ray generator 122 away from the lifting component 121, the emitting part 1221 of the X-ray generator 122 will be accommodated in the hole structure 1231. By positioning the cover plate 123 at the position of the emitting part 1221, the working parts of the lifting assembly below the emitting part 1221 can be shielded in the vertical direction. This avoids the situation where, after the emitting part 1221 generates detection X-rays, the detection X-rays will irradiate other working parts due to X-ray scattering or refraction, thereby damaging the lifting assembly and affecting the working efficiency of the X-ray generating mechanism 100.

[0054] Understandably, further reading Figure 4 and Figure 6 As shown, the hole structure 1231 includes a first through hole 1232 and a second through hole 1233, which are interconnected. The first through hole 1232 is used to accommodate the emitting part 1221. The second through hole 1233 is used to accommodate the wiring structure of the emitting part 1221. Specifically, when the cover plate 123 and the radiation generator 122 are connected, the emitting part 1221 is positioned in the first through hole 1232. The first through hole 1232 blocks the scattered light emitted by the emitting part 1221 to protect the working components of the lifting assembly below the emitting part 1221. The second through hole 1233 houses the wiring structure of the emitting part 1221 to prevent it from being exposed to the external environment and damaged. Furthermore, since the first through hole 1232 and the second through hole 1233 extend vertically through both sides of the cover 126, and the cover plate 123 is disposed at the end of the radiation generator 122 and spaced apart from the radiation generator 122, when the radiation generator 122 is operating, the second through hole 1233 also connects the space between the radiation generator 122 and the cover plate 123, thereby transferring some of the heat from the radiation generator 122 to the external environment, thus improving the heat dissipation effect of the radiation generator 122.

[0055] See Figure 1 and Figure 3 As shown, the lifting assembly also includes a guide member 125. The guide member 125 is connected to the support member 111, and the outer periphery 1222 of the lifting member 121 is movably connected to the guide member 125. The guide member 125 provides a guiding path for the lifting movement of the X-ray generator 122, so that when the X-ray generator 122 moves up and down due to the movement of the movable member 113, the lifting member 121 can move up and down along the guide member 125, thereby improving the lifting stability of the lifting member 121 and the X-ray generator 122.

[0056] In a specific implementation, the guide member 125 may include a guide rail and a slider. The guide rail is fixedly connected to the support member 111, and the slider is connected to the lifting member 121. The lifting member 121 is connected to the guide rail via the slider. When the movable member 113 slides along the first guide rail relative to the support member 111 and the lifting member 121, the movable member 113 increases its contact area with the lifting member 121 to increase its support for the lifting member 121, thereby increasing the setting height of the lifting member 121 through the first inclined structure 1131 and the second inclined structure 1211; or the movable member 113 decreases its contact area with the lifting member 121 to decrease its support for the lifting member 121, thereby decreasing the setting height of the lifting member 121 through the first inclined structure 1131 and the second inclined structure 1211. By providing the guide member 125 to connect the support member 111 and the lifting member 121, a guiding function can be provided for the lifting member 121 when it moves up and down relative to the support member 111, thereby preventing the lifting member 121 from deviating relative to the support member 111 during the lifting process. Furthermore, by setting the guide member 125, the lifting member 121 can move up and down in the same position, thereby avoiding the possibility that the lifting member 121 changes the horizontal coordinate of the X-ray generator 122 during the lifting process, that is, drives the X-ray generator 122 to move in the front and back direction, which could lead to the detection X-ray irradiation deviation.

[0057] See Figures 4 to 6 As shown, the X-ray generating mechanism 100 includes a cover 126, a support member 111 connected to the bottom of the cover 126, and a hollow structure inside the cover 126. The support member 111 and the cover 126 together define a mounting cavity 1261, which forms the outer frame structure of the mounting cavity 1261. The movable part 113, the drive part 114, and part of the lifting assembly are all installed and accommodated within the mounting cavity 1261. By having the cover 126 and the support member 111 jointly cover part of the working components of the X-ray generating mechanism 100, the detection light generated by the X-ray generator 122 can be prevented from being scattered or refracted and irradiating this part of the working components, thus avoiding damage to the working components and affecting the working efficiency and service life of the X-ray generating mechanism 100.

[0058] Furthermore, a first opening 1262 is provided on the side of the cover 126 facing away from the support member 111. The first opening 1262 extends vertically through the outer wall of the cover 126 and is connected to the mounting cavity 1261. When the lifting member 121 and the radiation generator 122 are housed in the mounting cavity 1261 of the cover 126, a portion of the lifting member 121 and the radiation generator 122 will extend out from the first opening 1262. When the lifting member 121 and the radiation generator 122 are driven by the movable member 113 to move up and down relative to the support member 111, the lifting member 121 and the radiation generator 122 can move up and down through the first opening 1262, thereby avoiding interference from the cover 126 on the lifting member 121 and the radiation generator 122, thus improving the lifting efficiency of the lifting member 121 and the radiation generator 122.

[0059] See Figure 5 and Figure 6 As shown, one possible implementation is that the cover 126 has a second opening 1265 on its opposite first side 1263 and second side 1264. The second openings 1265 on both sides 1263 and 1264 connect to the mounting cavity 1261, and the second openings 1265 and the mounting cavity 1261 together define a heat dissipation channel. When the lifting assembly and the radiation generator 122 generate heat during operation, convection occurs through the second openings 1265 on the first side 1263 and second side 1264. This allows airflow to carry away some heat as it passes through the second openings 1265 and the mounting cavity 1261, thereby improving the heat dissipation effect of the radiation generating mechanism 100 and preventing heat accumulation that could affect its performance.

[0060] Specifically, the first side 1263 and the second side 1264 are opposite sides of the cover 126 in the front-back or left-right direction. The first side 1263 and the second side 1264 are in a conductive state to form a second opening 1265, which is connected to the mounting cavity 1261 inside the cover 126. When the lifting member 121 and the radiation generator 122 move up and down in the vertical direction, the friction generated by the operation of the driving member 114 and the movement of the moving member 113 will generate heat in the mounting cavity 1261. By forming the second opening 1265 through the first side 1263 and the second side 1264, the first side 1263 and the second side 1264 can provide a heat dissipation channel for the working parts of the mounting cavity 1261. The heat generated by the various components in the mounting cavity 1261 can be discharged from the mounting cavity 1261 through the second opening 1265, thereby avoiding heat accumulation. Furthermore, when the lifting component 121 and the radiation generator 122 are raised or lowered, a portion of them will be located within the mounting cavity 1261. The lifting component 121 and the radiation generator 122 located outside the mounting cavity 1261 can dissipate heat through the third opening 1241, while the lifting component 121 and the radiation generator 122 located inside the mounting cavity 1261 can dissipate heat through the second opening 1265, thereby improving the heat dissipation effect of the radiation generator 122 and the lifting component 121.

[0061] See Figures 4 to 6 As shown, one possible implementation is that the lifting assembly includes a cover plate 123, which is disposed on the side of the X-ray generator 122 away from the lifting component 121, and the cover plate 123 blocks the first opening 1262 in the vertical direction. The cover plate 123 can prevent the detection X-rays generated by the X-ray generator 122 from entering the mounting cavity 1261 through the first opening 1262 and irradiating the working parts in the mounting cavity 1261, thereby providing protection for the working parts in the mounting cavity 1261.

[0062] In specific implementation, the position of the cover plate 123 corresponds vertically to the position of the first opening 1262 of the cover plate 123. When the cover plate 123 and the cover body 126 are assembled to the designated position, the cover plate 123 blocks the first opening 1262 in the vertical direction, thereby reducing the possibility that the detection light generated by the X-ray generator 122, after being scattered or refracted, will irradiate the lifting assembly through the first opening 1262. It is understood that the cover plate 123 extends horizontally, making its circumferential dimension larger than the size of the first opening 1262. By increasing the circumferential dimension of the cover plate 123, the degree of blocking of scattered and refracted detection rays by the cover plate 123 can be improved, further reducing the possibility of detection light entering the mounting cavity 1261 from the first opening 1262, and improving the protection of the lifting assembly.

[0063] See Figures 2 to 5As shown, it can be understood that the lifting assembly may also include a detection element 115 and a sensing element 116. The detection element 115 is connected to the support element 111 and has a detection section 1151, which can monitor the position or movement state of the movable element 113. The sensing element 116 is connected to the movable element 113, and the sensing element 116 and the detection section 1151 of the detection element 115 correspond to each other in the front-back direction. That is, when the sensing element 116 moves with the movable element 113 in the front-back direction, the sensing element 116 will be located in one of the positions in the detection section 1151. At this time, the detection section 1151 can detect the sensing element 116, thereby obtaining the movement distance or position of the movable element 113, thereby realizing the detection of the movement of the movable element 113.

[0064] In one specific embodiment, the movable member 113 and the detection member 115 are spaced apart. The detection member 115 generates a detection beam in the direction of the movable member 113 to form a detection section 1151. The sensing member 116 is positioned between the detection member 115 and the movable member 113 in a horizontal direction (front-back or left-right). It should be noted that the sensing member 116 can move relative to the detection member 115. Therefore, the sensing member 116 is spatially positioned between the detection member 115 and the movable member 113. The sensing member 116 can only be detected by the detection section 1151 when it moves to a specific position. When the movable member 113 moves relative to the support member 111 and the lifting member 121, the sensing member 116 will also move along with the movable member 113. When the sensing member 116 moves to the position of the detection member 115, the sensing member 116 and the detection member 115 face each other. At this time, the sensor 116 will block the detection beam generated by the detector 115, thereby enabling the detector 115 to detect the position or distance of the moving part 113.

[0065] In another embodiment, the detection element 115 extends upward and has two protrusions spaced apart. A detection beam is generated between the two protrusions to define the detection section 1151. A sensor 116 is positioned horizontally between the two protrusions. When the sensor 116 moves along with the movable element 113, it blocks the detection beam between the two protrusions when it moves between them, thereby allowing the detection element 115 to detect the position or distance of the movable element 113.

[0066] A second aspect of this application provides a circuit board testing device 10, see [link to relevant documentation]. Figure 7As shown, the circuit board inspection equipment 10 includes a detection mechanism 200, a conveying mechanism 300, a housing, and a radiation generating mechanism 100 as described in any of the above embodiments. The circuit board inspection equipment 10 is used to inspect the processing quality of circuit boards 500, semiconductor chips, or other workpieces. The processing techniques include drilling, back drilling, patterned circuit processing, solder mask processing, etc.

[0067] The detection mechanism 200 is used to detect the radiation emitted by the radiation generating mechanism 100 to determine whether there are defects in the workpiece under test. The radiation generating mechanism 100 and the detection mechanism 200 are spaced apart. The radiation generating mechanism 100 controls the lifting and lowering of the radiation generator 122 so that the detection radiation generated by the radiation generator 122 can irradiate the circuit board 500. The conveying mechanism 300 is positioned between the radiation generating mechanism 100 and the detection mechanism 200, and is used to convey the workpiece under test to a designated position for inspection. The interior of the machine housing defines an inspection space, within which the detection mechanism 200, the conveying mechanism 300, and the radiation generating mechanism 100 are all housed. The machine housing has an inlet and an outlet. The conveying mechanism 300 receives the circuit board 500 conveyed into the inspection space from the inlet and transports the circuit board 500 to the inspection position of the inspection equipment for X-ray inspection. Furthermore, after a circuit board 500 has completed inspection, the conveying mechanism 300 will also transport the circuit board 500 to the outlet for output. Alternatively, in another possible implementation, the machine cover may be provided with only one feed port, which can be used for feeding and discharging the circuit board 500. The conveying mechanism 300 is used to reciprocate the circuit board 500 between the feed port and the detection position. That is, the input and output of the circuit board 500 are both realized through the feed port, so that the circuit board 500 can realize unilateral feeding and discharging operations.

[0068] In one example, the detection device 10 also includes a moving mechanism 400 connected to the X-ray generating mechanism 100. The moving mechanism 400 is used to drive the X-ray generating mechanism 100 to translate in the left-right and front-back directions, so that the X-ray generator 122 can detect various positions of the workpiece to be tested.

[0069] In one example, using circuit board 500 as an exemplary description, during the inspection of circuit board 500, it is conveyed to the feed inlet of the machine housing. Then, circuit board 500 is placed on conveyor mechanism 300 at the feed inlet and transported by conveyor mechanism 300 to the inspection position between detection mechanism 200 and X-ray generating mechanism 100 for X-ray inspection. The X-ray generating mechanism 100 is then adjusted to raise and lower the X-ray generator 122 to the required height, and subsequently, the X-ray generator 122 generates inspection rays to inspect circuit board 500. During the inspection, detection mechanism 200 detects the rays emitted by X-ray generating mechanism 100. If a defect exists in circuit board 500, when the X-ray shines on the defect location, the X-ray passes through circuit board 500 and is detected by detection mechanism 200, thereby obtaining the location of the defect in circuit board 500. Furthermore, during the inspection process, the moving mechanism 400 can drive the X-ray generating mechanism 100 to move in the front-back and left-right directions, so that all positions of the circuit board 500 are inspected by the X-ray generator 122. After the circuit board 500 completes the X-ray inspection, the conveying mechanism 300 moves to the inspection position to carry the circuit board 500 that has completed the inspection and conveys the circuit board 500 towards the discharge port, thereby completing the output of the circuit board 500.

[0070] In another embodiment, a back-drilling process is described using a circuit board 500. The basic principle of the circuit board inspection device 10 is as follows: A radiation generator 122 emits radiation that passes through the circuit board 500 to inspect it. Simultaneously, a lifting assembly controls the vertical movement of the radiation generator 122, and a moving mechanism 400 controls its horizontal movement, thus achieving circumferential movement of the radiation generator 122. Then, a detection mechanism 200 is controlled to receive the radiation passing through the circuit board 500. Simultaneously, the moving mechanism 400 drives the detection mechanism 200 to move in the left-right and front-back directions, bringing the detection mechanism 200 into contact with the radiation. The generator 122 moves synchronously to complete the scanning of the three-dimensional image of the component, thereby detecting the copper layer spacing of the circuit board 500 before back drilling, so that the circuit board drilling equipment can obtain the value of back drilling in the vertical direction, thereby controlling the circuit board drilling equipment to complete the back drilling process; secondly, the circuit board inspection equipment 10 is also suitable for inspection after the back drilling process is completed. The X-ray generator 122 produces X-ray scanning of the back drilled hole to detect the STUB value of the actual back drilled hole (the length of the copper pillar remaining after the back drilling process, that is, the length of the through hole residual stump that has not been completely removed), thereby judging the drilling quality of the back drilling process.

[0071] The circuit board testing equipment 10 of this application uses the X-ray generating mechanism 100 to control the lifting and lowering of the X-ray generator 122 to adapt to the size of different circuit boards 500. When the X-ray generator 122 is lifted and lowered, the lifting component will not affect the lifting stroke of the X-ray generator 122, thereby expanding the range that the X-rays of the X-ray generating mechanism 100 can cover to adapt to more sizes of circuit boards 500, and improving the adaptability of the circuit board testing equipment 10.

[0072] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application. Furthermore, unless otherwise specified, the embodiments and features described in the embodiments of this application can be combined with each other.

Claims

1. A radiation generating apparatus, characterized by comprising: include: X-ray generator; A lifting assembly includes a lifting member and a driving member. The lifting member is connected to the radiation generator and is disposed below the radiation generator along a first direction. The lifting member is driven by the driving member to move. The lifting member is adapted to drive the radiation generator to reciprocate along the first direction.

2. The radiation generating mechanism according to claim 1, characterized in that, The lifting assembly further includes a movable component and a support component. The movable component is movably connected to the side of the lifting component away from the ray generator along a first direction. The movable component is disposed between the lifting component and the support component along the first direction. The driving component is used to drive the movable component to move relative to the support component along a second direction. The movable component is adapted to drive the lifting component to move along the first direction. The second direction is perpendicular to the first direction.

3. The radiation generating mechanism according to claim 2, wherein The movable component includes a guide portion and a movable portion. The movable portion is connected to the support component, and the guide portion is connected to the lifting component and the movable portion. The guide portion is inclined relative to the second direction toward the first direction.

4. The radiation generating mechanism according to claim 3, characterized in that, The movable part has a first inclined structure on the side facing the lifting member, and the lifting member has a second inclined structure on the side facing the movable part. The first inclined structure and the second inclined structure are inclined relative to the second direction and towards the first direction. The guide part is connected to the first inclined structure and is located between the first inclined structure and the second inclined structure.

5. The radiation generating mechanism according to claim 3, characterized in that, The guide part is a cross roller slide rail, which has a slide rail part and a roller part. The slide rail part is connected to the movable part, and the roller part is connected to the lifting member. The roller part and the slide rail part are slidably connected.

6. The radiation generating mechanism according to claim 3, characterized in that, The support member is provided with a sliding guide rail, and the movable part is connected to the sliding guide rail to be slidably connected to the support member.

7. The radiation generating mechanism according to claim 1, characterized in that, The radiation generator has multiple heat dissipation holes, and a heat dissipation channel is arranged circumferentially on the radiation generator. The heat dissipation channel and the heat dissipation holes are connected.

8. The radiation generating mechanism according to claim 7, characterized in that, The lifting assembly includes at least two support rods connected to the lifting member, and the at least two support rods are spaced apart in the circumference of the ray generator to define the heat dissipation channel.

9. The radiation generating mechanism according to claim 1, characterized in that, The lifting assembly also includes a cover plate, which is disposed along a first direction on the side of the ray generator opposite to the lifting component, and the cover plate is spaced apart from the ray generator.

10. The radiation generating mechanism according to claim 9, characterized in that, The cover plate has a perforated structure along the first direction, and the ray generator has an emitting part on the side opposite to the lifting member, the emitting part being disposed in the perforated structure.

11. The radiation generating mechanism according to claim 10, characterized in that, The hole structure includes a first through hole and a second through hole, the first through hole and the second through hole are connected, the transmitting part is disposed in the first through hole, and the second through hole is used to accommodate the circuit of the transmitting part.

12. The radiation generating mechanism according to any one of claims 2-6, characterized in that, The lifting assembly includes a guide member connected to the support member, and the lifting member is movably connected to the guide member. When the movable member moves relative to the lifting member, the lifting member moves up and down along the guide member.

13. The radiation generating mechanism according to any one of claims 2-6, characterized in that, The radiation generating mechanism includes a cover connected to the support member. The cover and the support member together define a mounting cavity. The movable member is disposed in the mounting cavity. The cover has a first opening on the side facing the lifting member. The first opening communicates with the mounting cavity. The lifting member and the radiation generator pass through the first opening.

14. The radiation generating mechanism according to any one of claims 2-6, characterized in that, The lifting assembly includes a detection element and a sensing element. The detection element is connected to the support element and has a detection part. The sensing element is connected to the movable element and the sensing element corresponds to the detection part in a second direction.

15. A circuit board testing device, characterized in that, include: The radiation generating mechanism as described in any one of claims 1 to 14; A detection mechanism is provided at an interval from the radiation generating mechanism, and the detection mechanism is used to detect the radiation generated by the radiation generator. A conveying mechanism is disposed between the detection mechanism and the ray generator, and the conveying mechanism is used to convey the circuit board; The machine housing defines an internal detection space, which houses the X-ray generating mechanism, the detection mechanism, and the conveying mechanism. The machine housing has an inlet and an outlet. The conveying mechanism receives circuit boards fed from the inlet and conveys them to the detection position for X-ray detection. The conveying mechanism also conveys the circuit boards at the detection position toward the outlet. Alternatively, the machine housing has a feed port, and the conveying mechanism reciprocates between the feed port and the detection position to transport the circuit boards.

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