Optical component adjustment mechanism and semiconductor measurement system

Abstract

This application discloses an optical element adjustment mechanism and a semiconductor measurement system, relating to the field of semiconductor technology. The mechanism includes a base, a mounting component, an adjustment assembly, and a locking assembly. The mounting component is used to mount the optical element and is rotatably mounted on the base. The mounting component includes an adjustment section and a locking section. The adjustment assembly drives the adjustment section to rotate. The locking assembly applies a clamping force to the locking section. By integrating the adjustment section and the locking section onto a single mounting component, this application achieves a high degree of integration of adjustment and locking functions, significantly reducing the overall size and weight of the optical element adjustment mechanism and meeting the application requirements for miniaturization and lightweighting. Furthermore, the adjustment and locking functions are operated separately. During adjustment, precise driving is achieved through the adjustment assembly; after adjustment, the locking assembly applies a clamping force to the locking section, generating a stable and strong frictional locking force, ensuring the long-term stability of the adjusted position and preventing displacement due to external factors such as vibration.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically, to an optical element adjustment mechanism and a semiconductor measurement system. Background Technology

[0002] In related fields, it is often necessary to precisely fine-tune the rotation angles of optical components such as polarizers, waveplates, and filters to obtain ideal optical effects. To achieve this goal, specialized adjustment mechanisms are usually required.

[0003] Traditional optical element adjustment mechanisms have complex overall structures, numerous parts, and large size and weight, which not only increases manufacturing costs and assembly difficulty, but also makes it difficult to meet the requirements of modern precision equipment, especially semiconductor measurement systems, for miniaturization, compactness, and lightweighting.

[0004] Therefore, how to simplify the structure of the optical element adjustment mechanism while ensuring the adjustment accuracy of the optical element has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] In view of this, the purpose of this application is to provide an optical element adjustment mechanism that simplifies the structure of the optical element adjustment mechanism while ensuring the adjustment accuracy of the optical element.

[0006] Another objective of this application is to provide a semiconductor measurement system having the aforementioned optical element adjustment mechanism.

[0007] To achieve the above objectives, this application provides the following technical solution:

[0008] An optical element adjustment mechanism, comprising:

[0009] Base;

[0010] The mounting component is used to mount optical elements and is rotatably mounted on the base. The mounting component is provided with an adjustment part and a locking part.

[0011] Adjustment assembly, the adjustment assembly being used to drive the adjustment part to rotate;

[0012] A locking component for applying a clamping force to the locking portion.

[0013] Optionally, in the above-described optical element adjustment mechanism, the mounting member includes a mounting portion that defines a mounting cavity capable of accommodating the optical element.

[0014] Optionally, in the above-described optical element adjustment mechanism, the adjustment part includes at least one swing arm disposed on the mounting part, the swing arm extending from the side of the mounting part away from the mounting cavity toward a direction away from the mounting part.

[0015] Optionally, in the above-mentioned optical element adjustment mechanism, the swing arm is provided with a mounting hole, and the mounting hole communicates with the mounting cavity. The mounting hole is used to insert a first fastener that can press against the optical element.

[0016] Optionally, in the above-described optical element adjustment mechanism, the locking part includes at least one boss disposed on the mounting part, the boss being disposed on the side of the mounting part opposite to the mounting cavity.

[0017] Optionally, in the above-described optical element adjustment mechanism, the base has at least one receiving cavity adapted to the mounting member, and the receiving cavity is provided with a stepped portion for supporting the boss.

[0018] Optionally, in the above-mentioned optical element adjustment mechanism, the adjustment assembly includes at least one adjustment screw, and the base is provided with an adjustment hole for cooperating with the adjustment screw, the adjustment screw being used to drive the adjustment part to rotate.

[0019] Optionally, in the above-described optical element adjustment mechanism, there is one adjusting screw, one end of which is connected to the adjusting part, and the other end of which can be locked by a locking nut; or,

[0020] There are at least two adjusting screws, and each adjusting screw is respectively disposed on both sides of the adjusting part. The adjusting screws are threadedly engaged with the adjusting holes, and the ends of the adjusting screws can abut against the adjusting part.

[0021] Optionally, in the above-described optical element adjustment mechanism, the locking assembly includes a clamping member and at least one second fastener, the clamping member covering the locking portion, and the second fastener passing through the clamping member and connected to the base.

[0022] A semiconductor measurement system includes an optical element adjustment mechanism as described in any of the preceding claims.

[0023] The optical element adjustment mechanism provided in this application mounts the optical element onto a mounting component, which is rotatably mounted on a base. When fine-tuning the optical element, the adjustment component drives the adjustment part on the mounting component to rotate, thereby rotating the optical element and achieving precise fine-tuning. Simultaneously, a locking component applies a clamping force to the locking part of the mounting component, locking the adjusted mounting component through friction between the locking component and the locking part, thus locking the precisely fine-tuned optical element. As can be seen from the above example, the optical element adjustment mechanism provided in this application integrates the adjustment and locking parts onto a single mounting component, achieving a high degree of integration of adjustment and locking functions. This significantly reduces the overall size and weight of the optical element adjustment mechanism, meeting the application requirements for miniaturization and lightweight design. Furthermore, it greatly reduces the total number of parts, simplifies the assembly process, and thus lowers manufacturing costs and assembly difficulty. In addition, the adjustment and locking functions are operated separately. During adjustment, precise driving is achieved through the adjustment component; after adjustment, the locking component applies a clamping force to the locking part, generating a stable and strong frictional locking force, which ensures the long-term stability of the adjusted position and is not easily displaced by external factors such as vibration.

[0024] The technical features mentioned above, those to be mentioned below, and those shown individually in the accompanying drawings can be combined arbitrarily, provided that the combined technical features are not contradictory. All feasible combinations of features are the technical content explicitly described herein. Any one of the multiple sub-features contained in the same statement can be applied independently, without necessarily being applied together with other sub-features. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of the optical element adjustment mechanism provided in the embodiments of this application;

[0027] Figure 2 This is a schematic diagram of the structure of the base provided in the embodiments of this application;

[0028] Figure 3 This is a schematic diagram of the structure of the mounting component provided in the embodiments of this application.

[0029] Among them, 100 is the optical element adjustment mechanism, 10 is the base, 11 is the receiving cavity, 111 is the step, 12 is the adjustment hole, 13 is the swing arm mounting cavity, 14 is the groove, 20 is the mounting part, 21 is the adjustment part, 211 is the swing arm, 2111 is the mounting hole, 22 is the locking part, 221 is the boss, 23 is the mounting part, 231 is the mounting cavity, 30 is the adjustment assembly, 31 is the adjustment screw, 40 is the locking assembly, 41 is the clamping part, and 200 is the optical element. Detailed Implementation

[0030] The core of this application is to provide an optical element adjustment mechanism that simplifies the structure of the optical element adjustment mechanism while ensuring the adjustment accuracy of the optical element.

[0031] Another core aspect of this application is to provide a semiconductor measurement system having the aforementioned optical element adjustment mechanism.

[0032] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0033] In related fields, especially semiconductor measurement and precision instruments, precise fine-tuning of the rotation angles of optical components such as polarizers, waveplates, and filters is often required to achieve ideal optical effects. Among these, polarizers, which convert natural light into polarized light, play a crucial role in optics, electronics, and communications. In semiconductor measurement systems, the light source emanating from the optical fiber must pass through a polarizer for filtering, resulting in better imaging during the measurement process. The polarizer needs to be rotated and fine-tuned within the optomechanical module to achieve the desired optical effect. To achieve this, a specialized adjustment mechanism is typically required.

[0034] Traditional optical element adjustment mechanisms, in order to simultaneously achieve both rotational adjustment and position locking, typically use independent transmission components, such as knobs, linkages, or gears, for rotational adjustment, and independent locking components, such as multiple set screws or locking rings, for fixing the optical element. However, this approach results in a complex overall structure, numerous parts, and significant size and weight, increasing manufacturing costs and assembly difficulty. Furthermore, it fails to meet the miniaturization, compactness, and lightweight requirements of modern precision equipment, especially semiconductor measurement systems.

[0035] Therefore, such as Figure 1As shown in the figure, this application discloses an optical element adjustment mechanism 100, including a base 10, a mounting part 20, an adjustment component 30, and a locking component 40. By integrating the adjustment part 21 and the locking part 22 onto a single mounting part 20, a high degree of integration of adjustment and locking functions is achieved, significantly reducing the overall size and weight of the optical element adjustment mechanism 100, and meeting the application requirements of miniaturization and lightweighting. At the same time, the total number of parts is greatly reduced, simplifying the assembly process, thereby reducing manufacturing costs and assembly difficulty. In addition, the adjustment and locking functions are operated separately. During adjustment, precise driving is achieved through the adjustment component 30; after adjustment, the locking component 40 applies a clamping force to the locking part 22, generating a stable and strong frictional locking force, ensuring the long-term stability of the adjusted position and preventing displacement due to external factors such as vibration.

[0036] The following will combine Figures 1 to 3 The optical element adjustment mechanism 100 disclosed in the embodiments of this application will be explained and described in detail.

[0037] like Figure 1 As shown, the base 10 serves as the mounting foundation for the entire optical element adjustment mechanism 100, providing a stable mounting reference for other components. Simultaneously, the mounting member 20 is rotatably mounted on the base 10, and the optical element 200 can be mounted on the mounting member 20 and rotate synchronously with it. The mounting member 20 may be equipped with an adjustment part 21 and a locking part 22. The adjustment component 30 can drive the adjustment part 21 to rotate, thereby causing the optical element 200 on the mounting member 20 to rotate, achieving precise fine-tuning of the optical element 200 to achieve the desired optical effect. Once the optical element 200 is adjusted to the correct position, the locking component 40 applies a clamping force to the locking part 22 of the mounting member 20. This utilizes the friction between the locking component 40 and the locking part 22 of the mounting member 20 to lock the adjusted mounting member 20, preventing the mounting member 20 from causing the optical element 200 to shift, thus achieving precise locking of the optical element 200 after fine-tuning. It should be noted that in the above embodiments, the optical element 200 can be, but is not limited to, a polarizer, a waveplate, a filter, etc., which are not limited here. Unless otherwise specified, the optical element 200 is a polarizer.

[0038] In some embodiments, such as Figure 2As shown, the base 10 can adopt a plate-like structure, and the material of the base 10 can be a metal material with good rigidity and dimensional stability, such as aluminum alloy or stainless steel, and it is integrally formed by processing equipment to ensure its structural accuracy and stability. The base 10 can have at least one receiving cavity 11 adapted to the mounting component 20; that is, there can be one, two, or more receiving cavities 11, the specific number of which can be determined according to the optical element 200 mounted on the mounting component 20. The receiving cavity 11 can be a circular cavity to accommodate the mounting component 20 and provide guidance for the rotation of the mounting component 20. It should be noted that the inner wall of the receiving cavity 11 has a high surface finish to reduce the frictional force when the mounting component 20 rotates.

[0039] In some embodiments, such as Figure 3 As shown, the mounting component 20 may include a mounting portion 23, and the mounting portion 23 may form a mounting cavity 231 to mount the optical element 200 within the mounting cavity 231, thereby allowing the optical element 200 to rotate synchronously with the mounting component 20. The mounting portion 23 may adopt an annular structure adapted to the receiving cavity 11, allowing the mounting portion 23 to rotate within the receiving cavity 11, simultaneously driving the optical element 200 to rotate, thereby achieving precise fine-tuning of the optical element 200 and ensuring optical performance. It should be noted that the mounting cavity 231 may be a circular cavity adapted to the circular cross-section of the optical element 200, to mount the optical element 200 within the mounting cavity 231, thereby ensuring a larger optical area for the optical element 200 and improving optical performance. Of course, the mounting cavity 231 can also be a triangular cavity, a rectangular cavity or other polygonal cavity, so that the mounting cavity 231 can be adapted to the optical element 200 with a triangular cross section, a rectangular cross section or other polygonal cross section, so that the optical element 200 can be installed in the mounting cavity 231.

[0040] In some embodiments, such as Figure 3 As shown, the adjustment part 21 may include at least one swing rod 211 disposed on the mounting part 23. That is, one swing rod 211 may be used or two swing rods may be used. The swing rod 211 may extend from the outside of the mounting part 23 toward a direction away from the mounting part 23. That is, the swing rod 211 may extend from the side of the mounting part 23 away from the mounting cavity 231 toward a direction away from the mounting part 23, so that the swing rod 211 can be driven to swing by the adjustment component 30 to drive the optical element 200 on the mounting member 20 to rotate, thereby realizing precise fine adjustment of the optical element 200.

[0041] In some embodiments, such as Figure 3 As shown, one swing arm 211 can be used. The base 10 is provided with a swing arm mounting cavity 13 that can accommodate the swing arm 211. The swing arm mounting cavity 13 is connected to the receiving cavity 11, such as... Figure 2As shown, this allows the mounting member 20 to be installed within the space connecting the rocker arm mounting cavity 13 and the receiving cavity 11, as follows. Figure 1 As shown. At the same time, the swing arm mounting cavity 13 has space that allows the swing arm 211 to swing counterclockwise or clockwise, so that the swing arm 211 can be driven to swing counterclockwise or clockwise by the adjustment component 30, thereby driving the optical element 200 on the mounting member 20 to rotate, thereby realizing precise fine adjustment of the optical element 200.

[0042] In some embodiments, two swing arms 211 may be used, and the two swing arms 211 are located on the same axis. The base 10 may be provided with swing arm mounting cavities 13 capable of accommodating the two swing arms 211. The swing arm mounting cavities 13 communicate with the receiving cavity 11, so that the mounting member 20 can be installed in the space communicating between the two swing arm mounting cavities 13 and the receiving cavity 11. Simultaneously, the swing arm mounting cavities 13 have space that allows the swing arms 211 to swing counterclockwise or clockwise. Thus, one swing arm 211 can be driven to swing counterclockwise by the adjusting component 30, or the other swing arm 211 can be driven to swing clockwise by the adjusting component 30, thereby causing the optical element 200 on the mounting member 20 to rotate, thereby achieving precise fine-tuning of the optical element 200.

[0043] In some embodiments, such as Figure 3 As shown, in order to fix the optical element 200 in the mounting cavity 231 of the mounting part 23, the swing arm 211 can be provided with a mounting hole 2111, and the mounting hole 2111 communicates with the mounting cavity 231. That is, the mounting hole 2111 can extend from the end of the swing arm 211 away from the mounting cavity 231 into the mounting cavity 231. This allows a first fastener, such as a set screw, to thread into the mounting hole 2111, so that the end of the set screw or other first fastener presses against the optical element 200, ensuring the reliability of the optical element 200's installation. This, in turn, allows the optical element 200 to rotate synchronously with the mounting part 20, enabling precise fine-tuning of the optical element 200. Of course, multiple mounting holes 2111 can also be provided at intervals along the circumferential direction of the mounting part 23, so that multiple set screws or other first fasteners can press against the optical element 200. It should be noted that the first fastener can be a nylon-tipped set screw to avoid damaging the optical element 200.

[0044] In some embodiments, such as Figure 3As shown, the locking part 22 may include at least one boss 221 provided on the mounting part 23, that is, one, two or more bosses 221 may be used, and the bosses 221 are provided on the outside of the mounting part 23, that is, the bosses 221 are located on the side away from the mounting cavity 231, so that the locking assembly 40 can apply a larger area of ​​clamping force to the mounting member 20 to lock the adjusted mounting member 20. At the same time, the receiving cavity 11 of the base 10 is provided with a step part 111 that can support the bosses 221, so that the bosses 221 can be supported on the step part 111 in the receiving cavity 11. Thus, the locking assembly 40 can apply a clamping force to the bosses 221 to lock the adjusted mounting member 20.

[0045] In some embodiments, one boss 221 may be used, and the boss 221 may extend along the circumferential direction of the mounting portion 23 to form a semi-enclosed annular boss that can avoid the adjustment portion 21. At the same time, the step portion 111 may extend along the circumferential direction of the receiving cavity 11 so that the step portion 111 is adapted to the semi-enclosed annular boss, thereby ensuring that the step portion 111 in the receiving cavity 11 reliably supports the semi-enclosed annular boss. Furthermore, the locking component 40 can apply a larger area of ​​clamping force to the boss 221 to ensure the reliability of locking the adjusted mounting component 20.

[0046] In some embodiments, such as Figure 3 As shown, two bosses 221 can be used, and the two bosses 221 can be symmetrically arranged on both sides of the mounting part 23. At the same time, the receiving cavity 11 can be symmetrically arranged with step portions 111 adapted to the bosses 221, so that the two bosses 221 of the mounting member 20 are respectively supported on the two step portions 111. Moreover, the locking component 40 can apply a larger area of ​​clamping force to the bosses 221, ensuring the reliability of the locking of the adjusted mounting member 20. Of course, three or more bosses 221 can also be used, and each boss 221 can be spaced apart along the circumferential direction of the mounting part 23. At the same time, the receiving cavity 11 can be spaced apart along the circumferential direction with step portions 111 adapted to each boss 221, so that each boss 221 of the mounting member 20 can be supported on the corresponding step portion 111. The locking component 40 can apply a larger area of ​​clamping force to the bosses 221, ensuring the reliability of the locking of the adjusted mounting member 20.

[0047] In some embodiments, such as Figure 1 As shown, the adjustment component 30 can be adapted to the mounting component 20, that is, each mounting component 20 is provided with an adjustment component 30 to ensure that the optical elements 200 on each mounting component 20 can be independently and precisely finely adjusted, thereby ensuring the optical effect of each optical element 200.

[0048] In some embodiments, such as Figure 1As shown, the adjusting assembly 30 may include at least one adjusting screw 31, that is, one, two or more adjusting screws 31 may be used, and the base 10 is provided with adjusting holes 12 that can cooperate with the adjusting screws 31, such as Figure 2 As shown, the adjusting screw 31 drives the adjusting part 21 to rotate, thereby driving the optical element 200 on the mounting part 20 to rotate, thereby achieving precise fine adjustment of the optical element 200.

[0049] In some embodiments, one adjusting screw 31 may be used, with one end of the adjusting screw 31 connected to the adjusting part 21, and the other end of the adjusting screw 31 passing through the adjusting hole 12 and locked by a locking nut. When adjusting the optical element 200, the length of the adjusting screw 31 can be released or shortened by rotating the locking nut, thereby driving the adjusting part 21 to rotate, which in turn drives the optical element 200 on the mounting part 20 to rotate, thereby achieving precise fine-tuning of the optical element 200.

[0050] In some embodiments, such as Figure 1 As shown, two or more adjusting screws 31 can be used, each adjusting screw 31 can be respectively arranged on both sides of the adjusting part 21, and adjusting holes 12 adapted to the adjusting screws 31 can be opened on both sides of the base 10. The end of the adjusting screw 31 can abut against the adjusting part 21, and the adjusting screw 31 can be threaded into the adjusting hole 12. When adjusting the optical element 200, the adjusting screws 31 on both sides of the adjusting part 21 can be rotated respectively, so that the end of the adjusting screw 31 can push the adjusting part 21 to rotate to the other side, thereby driving the optical element 200 on the mounting part 20 to rotate, and thus achieving precise fine adjustment of the optical element 200.

[0051] In some embodiments, such as Figure 1 As shown, the locking assembly 40 may include a clamping member 41 and at least one second fastener. The clamping member 41 may cover the locking portion 22, and one, two or more second fasteners such as bolts may pass through the clamping member 41 and be threadedly connected to the base 10, so that the clamping member 41 can apply a clamping force to the locking portion 22. Thus, the friction between the clamping member 41 and the locking portion 22 of the mounting member 20 can be used to lock the adjusted mounting member 20, thereby achieving locking after precise fine-tuning of the optical element 200.

[0052] In some embodiments, such as Figure 1As shown, the clamping member 41 can adopt a strip-shaped plate structure so that it can simultaneously clamp and lock the locking parts 22 of multiple mounting members 20. Two clamping members 41 can be used, and each clamping member 41 can respectively clamp two symmetrically arranged locking parts 22 on each mounting member 20 to ensure the reliability of the locking assembly 40 in locking the adjusted mounting member 20. It should be noted that, as... Figure 2 As shown, the base 10 may be provided with a groove 14 that can accommodate the clamping member 41, so that after the clamping member 41 clamps the mounting member 20, the flatness of the surface of the base 10 can be guaranteed, thereby facilitating the installation between the optical element adjustment mechanism 100 and other accessories.

[0053] The optical element adjustment mechanism 100 disclosed in this application involves mounting an optical element 200 onto a mounting member 20, with the mounting member 20 rotatably mounted on a base 10. When fine-tuning the optical element 200, the adjustment component 30 drives the adjustment part 21 on the mounting member 20 to rotate, thereby rotating the optical element 200 on the mounting member 20. This achieves precise fine-tuning of the optical element 200. Simultaneously, the locking component 40 applies a clamping force to the locking part 22 of the mounting member 20, locking the adjusted mounting member 20 through the friction between the locking component 40 and the locking part 22 of the mounting member 20, thus achieving locking of the optical element 200 after precise fine-tuning.

[0054] The optical element adjustment mechanism 100 disclosed in this application integrates the adjustment part 21 and the locking part 22 onto a single mounting component 20, achieving a high degree of integration of adjustment and locking functions. This significantly reduces the overall size and weight of the optical element adjustment mechanism 100, meeting the application requirements of miniaturization and lightweighting. Simultaneously, it drastically reduces the total number of parts, simplifies the assembly process, and thus lowers manufacturing costs and assembly difficulty. Furthermore, the adjustment and locking functions are operated separately. During adjustment, precise driving is achieved through the adjustment component 30; after adjustment, the locking component 40 applies a clamping force to the locking part 22, generating a stable and powerful frictional locking force, ensuring the long-term stability of the adjusted position and preventing displacement due to external factors such as vibration.

[0055] This application also discloses a semiconductor measurement system, including the optical element adjustment mechanism 100 disclosed in the above embodiments. Therefore, it has all the technical effects of the optical element adjustment mechanism 100, which will not be repeated here.

[0056] The terminology used in the above embodiments is for the purpose of describing specific embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions "a," "an," "the," "the," "the," and "this" are intended to also include expressions such as "one or more," unless the context clearly indicates otherwise. It should also be understood that in the embodiments of this application, "one or more" refers to one, two, or more; "and / or" describes the relationship between related objects, indicating that three relationships may exist; for example, A and / or B can represent: A alone, A and B simultaneously, or B alone, where A and B can be singular or plural. The character " / " generally indicates that the preceding and following related objects are in an "or" relationship.

[0057] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0058] The "multiple" mentioned in the embodiments of this application refers to two or more. It should be noted that in the description of the embodiments of this application, terms such as "first" and "second" are used only for the purpose of distinguishing descriptions and should not be construed as indicating or implying relative importance, nor should they be construed as indicating or implying order.

[0059] The terms "parallel" and "perpendicular" used in this application refer to "basically parallel" and "basically perpendicular" in practical operation. "Basically parallel" can be understood as parallelism with a certain degree of error, and similarly, "basically perpendicular" can be understood as perpendicularity with a certain degree of error.

[0060] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An optical element adjustment mechanism characterized by, include: Base (10); Mounting member (20), which is used to mount optical element (200), and is rotatably mounted on base (10). Mounting member (20) is provided with adjustment part (21) and locking part (22). An adjustment component (30) is used to drive the adjustment part (21) to rotate; Locking component (40) is used to apply a clamping force to the locking part (22).

2. The optical element adjustment mechanism according to claim 1, characterized in that, The mounting component (20) includes a mounting portion (23) that defines a mounting cavity (231) capable of accommodating the optical element (200).

3. The optical element adjustment mechanism according to claim 2, characterized in that, The adjustment part (21) includes at least one swing rod (211) disposed on the mounting part (23), the swing rod (211) extending from the side of the mounting part (23) away from the mounting cavity (231) in a direction away from the mounting part (23).

4. The optical element adjustment mechanism according to claim 3, characterized in that, The swing arm (211) is provided with a mounting hole (2111), and the mounting hole (2111) is connected to the mounting cavity (231). The mounting hole (2111) is used to insert a first fastener that can press against the optical element (200).

5. The optical element adjustment mechanism according to claim 2, characterized in that, The locking part (22) includes at least one boss (221) disposed on the mounting part (23), the boss (221) being disposed on the side of the mounting part (23) away from the mounting cavity (231).

6. The optical element adjustment mechanism according to claim 5, characterized in that, The base (10) has at least one receiving cavity (11) adapted to the mounting member (20), and the receiving cavity (11) is provided with a step portion (111) for supporting the boss (221).

7. The optical element adjustment mechanism according to claim 1, characterized in that, The adjustment assembly (30) includes at least one adjustment screw (31), and the base (10) is provided with an adjustment hole (12) for cooperating with the adjustment screw (31). The adjustment screw (31) is used to drive the adjustment part (21) to rotate.

8. The optical element adjustment mechanism according to claim 7, characterized in that, The adjusting screw (31) is a single screw, one end of which is connected to the adjusting part (21), and the other end of which can be locked by a locking nut; or, There are at least two adjusting screws (31), and each adjusting screw (31) is respectively disposed on both sides of the adjusting part (21). The adjusting screw (31) is threadedly engaged with the adjusting hole (12), and the end of the adjusting screw (31) can abut against the adjusting part (21).

9. The optical element adjustment mechanism according to any one of claims 1 to 8, characterized in that, The locking assembly (40) includes a clamping member (41) and at least one second fastener, the clamping member (41) covering the locking portion (22), and the second fastener passing through the clamping member (41) and connected to the base (10).

10. A semiconductor measurement system, characterized in that, Includes the optical element adjustment mechanism (100) as described in any one of claims 1 to 9.

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