A grid for a transmission electron microscope and a transmission electron microscope sample rod

Abstract

This utility model discloses a transmission electron microscope (TEM) mesh carrier comprising two opposing fixed parts and two central crossbeams. The two central crossbeams are parallel and connected between the two fixed parts, thus forming an integrally molded support structure together with the fixed parts. The TEM sample rod of this utility model includes a carrier groove and at least one mesh carrier. The carrier groove is located at one end of the electron microscope sample rod. The mesh carrier is as described above, with the outer edges of the two fixed parts symmetrically arranged at the inner edge of the carrier groove. The double crossbeam design of the TEM mesh carrier provided by this utility model is located in the optimal observation area at the center of the sample rod, greatly improving the utilization rate of the effective testing area. The I-shaped mesh carrier of the TEM sample rod can load multiple samples at once, enabling continuous testing, increasing sample change efficiency several times, and greatly saving testing time.

Description

Technical Field

[0001] This utility model relates to the field of micro and nanomaterial detection technology, specifically to a grid for a transmission electron microscope and a sample holder for a transmission electron microscope. Background Technology

[0002] Transmission electron microscopy (TEM), with its ultra-high spatial resolution and ability to analyze the chemical composition of micro-areas, has become a core characterization tool in fields such as semiconductor failure analysis and materials science research, playing an irreplaceable role in quality control and R&D innovation in modern manufacturing. Standard TEM sample preparation procedures typically involve focused ion beam (FIB) technology. This technique requires extracting and fixing a specific area of ​​the sample onto a metal grid, then using an ion beam to thin it to a thickness that the electron beam can penetrate (approximately 100 nanometers), and finally placing it in the TEM vacuum chamber for observation. This sample preparation process is technically complex and time-consuming, with a single FIB preparation costing hundreds to thousands of yuan, and demands extremely high skill levels from the operators.

[0003] Currently, the industry commonly uses a classic semi-circular sample holder with a diameter of 3.05 mm. However, this traditional design has inherent limitations: to ensure mechanical stability and operational safety, the effective sample load of a single sample holder is usually no more than four. Overloading significantly increases the risk of samples falling off during transfer and testing, leading to the permanent loss of valuable samples. When performing batch sample analysis, operators must frequently remove the sample holder from the microscope tube to replace the sample holder, and then re-establish the high vacuum environment required for the microscope tube. Each vacuuming process is time-consuming. This process not only interrupts the testing flow, greatly reducing analytical throughput and efficiency, but also accelerates the wear and tear on instrument components such as vacuum pumps and sealing rings due to frequent vacuum breaking operations, resulting in higher maintenance costs. Although solutions such as multi-hole sample holders like PicoFemto can partially alleviate this problem, allowing for the loading of three sample holders at a time, these non-original accessories are expensive and suffer from poor compatibility and insufficient stability, making widespread adoption difficult. Therefore, developing a novel carrier structure that is fully compatible with existing standard sample holders and can achieve efficient loading of multiple samples in a single operation has become an urgent technical need in the industry and is of great significance for promoting the construction of high-throughput characterization capabilities in the semiconductor industry. Utility Model Content

[0004] In view of the problems existing in the prior art described above, this application provides a grid for transmission electron microscopy and a sample holder for transmission electron microscopy, which can realize the loading of multiple samples at a time, significantly improve the testing efficiency of TEM samples, and save sample change time.

[0005] To achieve the above and other related objectives, this utility model provides a grid for a transmission electron microscope, comprising:

[0006] Two fixed parts arranged opposite to each other;

[0007] Two central crossbeams are arranged in parallel and connected between two fixed parts, thus forming an integral load-bearing structure together with the fixed parts.

[0008] Optionally, the distance between the outer edges of the two fixing parts is between 3mm and 3.1mm.

[0009] Optionally, the outer edge of each fixing part is formed as an arc-shaped section, and the arc-shaped sections of the two fixing parts together define a support profile that matches the carrier groove of the sample rod of the transmission electron microscope.

[0010] Optionally, the surfaces of the two central crossbeams are provided with areas along their length for sequentially carrying multiple transmission electron microscope samples.

[0011] Optionally, the central crossbeam and / or the fixing part are provided with a marking structure for sample identification.

[0012] Alternatively, the identification structure may be a number, letters, or a positioning recess.

[0013] Optionally, the spacing between the two central crossbeams is between 0.8 mm and 1.2 mm, and the width of each central crossbeam is between 0.1 mm and 0.3 mm.

[0014] Another aspect of this utility model provides a transmission electron microscope sample holder, comprising:

[0015] A carrier groove is provided at one end of the sample holder of the electron microscope;

[0016] At least one carrier net, the carrier net being the carrier net described above, wherein the outer edges of the two fixing parts of the carrier net are symmetrically arranged on the inner edge of the carrier groove.

[0017] Optionally, the outer edge of the fixing part matches the shape of the inner edge of the carrier groove.

[0018] Optionally, the vehicle recess contains multiple nets.

[0019] As described above, the grid and sample holder for a transmission electron microscope provided by this utility model have at least the following beneficial technical effects:

[0020] The transmission electron microscope (TEM) support mesh of this invention includes two opposing fixing parts and two central crossbeams. The two central crossbeams are arranged in parallel and connected between the two fixing parts, thus forming an integrally molded support structure together with the fixing parts. The TEM sample rod of this invention includes a carrier groove and at least one support mesh. The carrier groove is located at one end of the electron microscope sample rod. The support mesh is as described above, and the outer edges of the two fixing parts of the support mesh are symmetrically arranged at the inner edge of the carrier groove.

[0021] This invention provides an I-shaped carrier grid and sample holder for a transmission electron microscope (TEM). The central crossbeam is precisely positioned and suspended in the central region of the I-shaped grid, which corresponds precisely to the optimal observation range of the electron beam path during testing. This layout maximizes the effective testing field of view of the electron microscope, avoiding the limited field of view caused by the sample ring being off-center in traditional carrier grids. This significantly increases the proportion of effective areas available for high-quality observation in a single sample load. Furthermore, this invention allows for the loading of multiple samples at once, enabling continuous testing and increasing sample change efficiency several times over, greatly saving testing time. The I-shaped structure also boasts high mechanical strength, and the central crossbeam is not easily deformed, ensuring the stability of multiple sample areas and reducing sample drift. Attached Figure Description

[0022] Figure 1 The diagram shown is a structural schematic of the carrier net provided in an embodiment of this utility model.

[0023] Figure 2 The diagram shown is a structural schematic of the sample holder for a transmission electron microscope provided in an embodiment of this utility model.

[0024] Figure Labels

[0025] 1. Transmission electron microscope sample holder; 11. Carrier groove; 111. Carrier screen; 1111. Fixing part; 1112. Central crossbeam. Detailed Implementation

[0026] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0027] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Although the illustrations only show components related to this utility model and are not drawn according to the actual number, shape and size of the components, the shape, quantity, positional relationship and proportion of each component can be arbitrarily changed under the premise of realizing the technical solution of this utility model, and the layout of the components may also be more complex.

[0028] Example 1

[0029] Reference Figure 1 This embodiment provides a carrier mesh 111, the core of which lies in its integrally formed I-shaped support structure. Specifically, the carrier mesh 111 is integrally formed from a non-magnetic metal material, preferably copper, nickel, molybdenum, or titanium alloy, to ensure sufficient mechanical strength while also taking into account electron beam penetration.

[0030] Reference Figure 1 In this embodiment, the carrier net 111 includes two fixing parts 1111 and two central crossbeams 1112. The two fixing parts 1111 are arranged opposite to each other, and their outer edges together define the overall outer contour of the carrier net 111. The outer edge of each fixing part 1111 is formed into an arc-shaped segment, and the arc-shaped segments of the two fixing parts 1111 together define a support contour that matches the carrier groove of the sample rod of the transmission electron microscope. The two central crossbeams 1112 are arranged in parallel and connected between the two fixing parts 1111, thus forming an integrally formed support structure together with the fixing parts 1111. This design forms a high-strength I-beam frame, making the central crossbeams 1112 less prone to deformation or vibration when carrying the sample, effectively ensuring the stability of the sample during observation and reducing image drift.

[0031] Reference Figure 1 In this optional embodiment, the distance between the two central crossbeams 1112 is between 0.8 mm and 1.2 mm, and the width of each central crossbeam 1112 is between 0.1 mm and 0.3 mm. This narrow beam design minimizes material obstruction of the electron beam while ensuring structural strength, thus increasing the effective area for sample observation. The surface of the central crossbeams 1112 is precision ground to a roughness ≤0.1 μm, ensuring that the extracted sample slices can be stably attached and avoiding sample tilting or drifting due to surface unevenness.

[0032] Reference Figure 1The distance between the outer edges of the two fixing parts 1111 is between 3mm and 3.1mm. In an optional embodiment of this example, the distance between the outer edges of the two fixing parts 1111 is 3.05mm to ensure that the carrier 111 can perfectly match the carrier groove of all standard transmission electron microscope sample rods, thereby achieving seamless compatibility and plug-and-play functionality. The surfaces of the two central crossbeams 1112 are provided with areas along their length for sequentially carrying multiple transmission electron microscope samples. This design is key to the efficient testing of the carrier 111 in this embodiment, enabling a single carrier 111 to simultaneously carry far more samples than traditional carriers (typically ≤4). The operator only needs to load the carrier 111 into the electron microscope and can control the sample stage movement to allow the electron beam to sequentially perform continuous and automated testing and analysis on multiple sample areas on the central crossbeams 1112, thereby increasing sample change efficiency several times and greatly saving testing time and costs.

[0033] Reference Figure 1 To further enhance ease of use and accuracy of sample management, identification structures for sample identification are provided on the central crossbeam 1112 and / or the fixing part 1111. These identification structures can be numbers, letters, or positioning recesses formed by laser etching, chemical etching, or precision stamping processes, facilitating users to quickly and accurately distinguish and record different samples during loading and testing. In an optional embodiment of this example, the identification structure adopts a hierarchical coding system. A main identifier, such as Roman numerals I, II, III, etc., is provided on the fixing part 1111 to distinguish different carrier grids 111; a secondary identifier, such as Arabic numerals 1, 2, 3… or letters A, B, C…, is provided on the central crossbeam 1112 to mark the sample order of different crossbeams on the same carrier grid; and micro-positioning marks, such as "+" shaped engravings or circular recesses with a diameter of 10 μm, are provided at the edge of each bearing position to facilitate rapid navigation to the target sample in the SEM-FIB combined system. All markings are made using laser micromachining technology, with the depth of the markings controlled between 5μm and 8μm and the width not exceeding 20μm, to ensure that they do not interfere with sample observation and do not generate additional electron scattering.

[0034] Example 2

[0035] Reference Figure 1 and Figure 2This embodiment provides a transmission electron microscope (TEM) sample holder 1, including a carrier groove 11 and at least one carrier mesh 111. The carrier groove 11 is disposed at one end of the TEM sample holder 1 for loading the sample. In an optional embodiment of this embodiment, the main body of the TEM sample holder 1 is made of high-strength titanium alloy or stainless steel, and the surface of the TEM sample holder 1 is anodized or nitrided to prevent scratches from long-term use. The inner wall of the carrier groove 11 is coated with a diamond-like carbon film with a thickness of 50nm to 100nm, and the coefficient of friction is <0.1, avoiding contamination of the sample by metal micro-wear particles. The entire TEM sample holder 1 is uniformly metallized on the entire surface through magnetron sputtering coating technology, with a resistivity <0.1Ω / sq, effectively avoiding image drift caused by charge accumulation. All materials have passed non-magnetic verification, with a relative permeability <1.01, meeting the stringent magnetic field requirements of high-resolution TEM. The carrier mesh 111 is the carrier mesh 111 described in Embodiment 1, and the outer edges of the two fixing parts 1111 of the carrier mesh 111 are symmetrically disposed on the inner edge of the carrier groove 11. Specifically, the outer edge of the fixing part 1111 and the inner edge of the carrier groove 11 are matched in shape, usually both being arc-shaped. This precise fit ensures that the I-shaped carrier 111 can be firmly snapped or placed in the carrier groove 11, and will not loosen or shift when the electron microscope is used for high-magnification observation and sample stage movement, thereby ensuring the stability of the observation process and the clarity of the image.

[0036] Optionally, refer to Figure 1 and Figure 2 The carrier groove 11 contains multiple mesh carriers 111. While a single conventional transmission electron microscope sample holder 1's carrier groove 11 can only accommodate one standard mesh carrier, the transmission electron microscope sample holder 1's carrier groove 11 in this embodiment can accommodate multiple mesh carriers 111. Since each I-shaped mesh carrier 111 can carry multiple samples, this allows for a several-fold increase in the number of samples that can be continuously tested after a single insertion of the sample holder.

[0037] Reference Figure 1 and Figure 2 In practice, the user first loads the prepared TEM samples onto the central beams 1112 of multiple I-shaped carriers 111, and then places these I-shaped carriers 111 one by one into the carrier grooves 11 of the transmission electron microscope sample rod 1. After inserting the transmission electron microscope sample rod 1 into the electron microscope and completing the vacuum evacuation, the operator can control the electron beam of the electron microscope to automatically position and observe each sample area on each I-shaped carrier 111 sequentially through software control. The entire process does not require interruption of the high vacuum environment or repeated removal of the transmission electron microscope sample rod 1, thereby greatly improving the test throughput, saving valuable machine time and labor costs, and significantly reducing the damage to the precision electron microscope equipment caused by frequent vacuum breaking.

[0038] Reference Figure 1 and Figure 2 This invention provides an I-shaped carrier net 111 for a transmission electron microscope (TEM) and a TEM sample rod. The central crossbeam 1112 is precisely positioned and suspended in the central region of the I-shaped carrier net 111, which corresponds precisely to the optimal observation range of the electron beam path during testing of the TEM sample rod 1. This layout maximizes the effective testing field of view of the electron microscope, avoiding the limited field of view caused by the sample ring being off-center in traditional carrier nets, thus significantly increasing the proportion of effective areas available for high-quality observation in a single sample loading. Furthermore, the carrier net for a TEM provided by this invention can load multiple samples at once, enabling continuous testing and increasing sample changing efficiency several times over, greatly saving testing time. Moreover, the I-shaped structure has high mechanical strength, and the central crossbeam 1112 is not easily deformed, ensuring the stability of multiple sample areas and reducing sample drift.

[0039] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A grid for a transmission electron microscope, characterized in that, include: Two fixed parts arranged opposite to each other; Two central crossbeams are arranged in parallel and connected between the two fixed parts, thus forming an integral load-bearing structure together with the fixed parts.

2. The grid for a transmission electron microscope according to claim 1, characterized in that, The distance between the outer edges of the two fixing parts is between 3 mm and 3.1 mm.

3. The grid for a transmission electron microscope according to claim 1, characterized in that, The outer edge of each of the fixing parts is formed as an arc-shaped segment, and the arc-shaped segments of the two fixing parts together define a support profile that is adapted to the carrier groove of the sample rod of the transmission electron microscope.

4. The grid for a transmission electron microscope according to claim 1, characterized in that, The surfaces of the two central crossbeams are provided with areas along their length for sequentially supporting multiple transmission electron microscope samples.

5. The grid for a transmission electron microscope according to claim 1, characterized in that, The central crossbeam and / or the fixing part are provided with an identification structure for sample identification.

6. The grid for a transmission electron microscope according to claim 5, characterized in that, The identification structure is a number, a letter, or a positioning recess.

7. The grid for a transmission electron microscope according to claim 1, characterized in that, The distance between the two central crossbeams is between 0.8 mm and 1.2 mm, and the width of each central crossbeam is between 0.1 mm and 0.3 mm.

8. A sample holder for a transmission electron microscope, characterized in that, include: A carrier groove is provided at one end of the electron microscope sample rod; At least one carrier net, wherein the carrier net is the carrier net according to any one of claims 1 to 7, and the outer edges of the two fixing parts of the carrier net are symmetrically arranged on the inner edge of the groove of the carrier.

9. The transmission electron microscope sample holder according to claim 8, characterized in that, The outer edge of the fixing part matches the shape of the inner edge of the carrier groove.

10. The transmission electron microscope sample holder according to claim 8, characterized in that, The vehicle groove contains multiple of the carrier nets.

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