An annealing apparatus for perovskite thin films

Abstract

This application relates to the field of perovskite solar cell production equipment, and in particular to a perovskite thin film annealing apparatus. A perovskite thin film annealing apparatus includes a housing, an array of infrared lamp modules, a transmission component, and a substrate fixing member vertically disposed on the transmission component. The substrate fixing member is used to clamp the substrate to be annealed; the movement direction of the substrate fixing member is consistent with the array direction of the infrared lamps in the array of infrared lamp modules; a feed inlet is provided on one side of the housing; a discharge outlet is provided on the other two sides of the housing; and several air inlets and outlets are provided on the opposite sides of the array of infrared lamp modules. In this application, the substrate is fixed vertically by the substrate fixing member, and the substrate is stably suspended and unobstructed. The bottom of the substrate is irradiated by the vertically disposed infrared lamps, and the bottom is heated before the top, with the direction consistent with the solvent evaporation direction. This promotes orderly solvent evaporation, reduces porosity and defects, and improves the uniformity of the formed perovskite thin film.

Description

Technical Field

[0001] This application relates to the field of perovskite solar cell production equipment, and in particular to a perovskite thin film annealing apparatus. Background Technology

[0002] Perovskite solar cells, as the most promising next-generation photovoltaic technology, generate electricity efficiently under low-light indoor conditions, powering devices such as automatic lighting and human-machine interface sensors, and have broad application prospects. With the mass production of square meter-level modules, perovskite solar cells are rapidly achieving commercialization and industrial applications. The quality of the perovskite thin film crystals in perovskite solar cells directly affects the photoelectric performance and stability of the module. Thin film annealing is required during the production process of perovskite thin films. As a key step in the preparation of the perovskite functional layer, thin film annealing determines the crystallization and growth quality of the perovskite thin film, as well as the uniformity of the perovskite thin film.

[0003] Currently, the annealing process for perovskite thin films mainly relies on traditional infrared annealing. This process involves directly irradiating the film surface with infrared lamps, which leads to preferential crystallization on the surface, while the underlying layers are prone to defects and exhibit relatively poor film uniformity due to uneven heating. Furthermore, temperature gradients can cause component volatilization in the perovskite film, resulting in stoichiometric imbalances and affecting film quality. If the infrared lamps are placed at the bottom for heating, the substrate must be suspended and unobstructed; however, when large-area substrates are placed horizontally, the central area is prone to depression, also affecting film uniformity. Therefore, there is an urgent need to develop a new perovskite thin film annealing device. Utility Model Content

[0004] To address the problem of uniformity deviations in perovskite thin films in the prior art, which affect the performance of perovskite solar cell devices, this application provides a perovskite thin film annealing apparatus.

[0005] The perovskite thin film annealing apparatus provided in this application is achieved through the following technical solution:

[0006] An annealing apparatus for perovskite thin films includes a housing, an array of infrared lamp modules disposed within the housing, a transmission component disposed within the housing, and a substrate fixing member vertically disposed within the transmission component. The substrate fixing member is used to clamp the substrate to be annealed. The movement direction of the substrate fixing member is consistent with the array direction of the infrared lamps in the array of infrared lamp modules. A feed inlet is provided on one side of the housing. A discharge outlet is provided on the other two sides of the housing. The housing has a plurality of air inlets and exhaust outlets. The air inlets and exhaust outlets are all located on the opposite side of the array of infrared lamp modules.

[0007] In this application, a substrate fixing component is used to fix the vertical substrate, which is stably suspended and unobstructed. A vertically arranged infrared lamp tube is used to irradiate the bottom of the substrate. The bottom is heated before the top, and the direction is consistent with the solvent evaporation direction, which can promote the orderly evaporation of solvent, reduce pores and defects, and improve the uniformity of the formed perovskite film.

[0008] Preferably, the transmission assembly includes a support platform fixedly connected to the bottom surface of the housing, and several transmission roller-type transmission modules distributed along the length of the support platform and fixedly connected to the support platform. The spacing between adjacent transmission roller-type transmission modules is less than the length of the base fixing member. The transmission roller-type transmission modules are used to clamp the base fixing member, so that the base fixing member moves along the length direction of the support platform.

[0009] Preferably, the transmission roller type transmission module includes two mutually spaced and fixedly connected support bases to the support platform, a transmission rod rotatably connected to the two support bases, a transmission roller fixedly connected to the periphery of the transmission rod, and a drive motor and transmission rod coaxially fixedly connected to the transmission rod. The transmission roller is located between the two support platforms; the transmission rod is located inside the transmission roller; the transmission rod is connected to a base auxiliary clamping assembly; the base auxiliary clamping assembly is used to vertically clamp the base fixing component.

[0010] Preferably, the base fixing member includes a frame with a base groove; a plurality of threaded posts are fixedly connected to the upper surface of the frame; a transparent silicone sheet is rotatably connected to each of the threaded posts; a fastening nut is threadedly connected to each of the threaded posts; when the base is engaged with the base groove of the frame, the upper surface of the base is flush with the upper surface of the frame, and the lower surface of the transparent silicone sheet abuts against the upper surface of the base.

[0011] Preferably, the array-type infrared lamp module includes a lamp holder disposed on the inner side of the housing and a plurality of infrared lamps vertically disposed on the lamp holder. The infrared lamps are arranged in a linear array on the lamp holder, and the spacing between adjacent infrared lamps is the same.

[0012] Preferably, the transmission component includes a linear transmission module and a clamping module, wherein the clamping module is detachably connected to the slide of the linear transmission module; the clamping module is detachably connected to the base fixing member, such that the base fixing member is vertically connected to the linear transmission module.

[0013] Preferably, the clamping module includes a base, a connector, and a clamping platform. The base is detachably connected to the slide of the linear transmission module; the connector is fixedly connected between the base and the clamping platform; and the clamping platform is detachably connected to the base fixing member.

[0014] Preferably, a slot is formed on the upper surface of the clamping platform along its length; the slot of the clamping platform is filled with a U-shaped PTFE profile; a fastening bolt B is threadedly connected to the side of the clamping platform; one end of the fastening bolt B abuts against the side of the U-shaped PTFE profile, and the base fixing member is detachably and fixedly connected to the U-shaped PTFE profile of the clamping platform by the fastening bolt B.

[0015] By adopting the above technical solution, the stability of the vertically transmitted base can be guaranteed.

[0016] In summary, this application has the following advantages:

[0017] 1. In this application, a substrate fixing component is used to fix a vertical substrate, which is stably suspended and unobstructed. The substrate fixing component holding the substrate moves in an directional manner through a transmission component. An infrared lamp tube is used to irradiate the bottom of the substrate to achieve annealing treatment. The bottom of the substrate is heated before the top, and the direction is consistent with the direction of solvent evaporation, which can promote the orderly evaporation of solvent and reduce pores and defects. At the same time, the bottom crystallizes preferentially, which is conducive to the growth of crystals from the substrate upward and along the direction of decreasing temperature. The relatively low surface temperature inhibits premature surface solidification, creating conditions for the formation of a more uniform film, improving the uniformity of the perovskite film after annealing, and thus improving the quality and service life of perovskite solar cell devices.

[0018] 2. The perovskite thin film annealing apparatus in this application realizes a vertical + bottom-up infrared annealing method, which improves the uniformity of the perovskite thin film and forms a dense and high-coverage perovskite thin film, which is beneficial to improving the quality and service life of perovskite solar cell devices.

[0019] 3. In the perovskite thin film annealing apparatus of this application, the substrate is stably suspended and unobstructed during the annealing process, which effectively avoids the problem of central depression caused by horizontal placement, and ensures that infrared light can uniformly and unobstructedly irradiate the entire substrate surface, thereby promoting the uniform crystallization and growth of perovskite thin films. Attached Figure Description

[0020] Figure 1 This is a top view of the perovskite thin film annealing apparatus in Example 1 after the top cover is hidden.

[0021] Figure 2 This is a schematic diagram of the connection structure between the transmission component and the base fixing member in Embodiment 1.

[0022] Figure 3 This is a schematic diagram of the connection structure between the transmission component and the base fixing member in Embodiment 2.

[0023] In the diagram, 1. Box body; 11. Feed inlet; 12. Discharge outlet; 13. Air inlet; 14. Air outlet; 2. Array-type infrared lamp module; 21. Lamp holder; 22. Infrared lamp; 3. Transmission assembly; 301. Support platform; 302. Transmission roller type transmission module; 3021. Support base; 3022. Transmission rod; 3023. Transmission roller; 3024. Drive motor; 3025. Transmission rod; 3026. Base auxiliary clamping assembly; 30261. U-shaped clip; 3 0262, Counterweight; 30263, Clip; 30264, Clip-in Slot; 30265, Fastening Bolt A; 31, Linear Transmission Module; 311, Slide Table; 32, Clamping Module; 321, Base; 322, Connector; 323, Clamping Platform; 3231, Slot; 324, U-shaped PTFE Profile; 325, Fastening Bolt B; 4, Base Fixing Component; 41, Frame; 411, Base Groove; 42, Threaded Post; 43, Transparent Silicone Sheet; 44, Fastening Nut. Detailed Implementation

[0024] To further understand the inventiveness and technical advancements of this application, the preferred embodiments of this application will be discussed in detail below with reference to the examples and accompanying drawings.

[0025] Example 1: Reference Figure 1 A perovskite thin film annealing device includes a housing 1, an array of infrared lamp modules 2, a transmission component 3, and a substrate fixing component 4. The substrate fixing component 4 clamps the substrate to be annealed. The substrate is vertical, stably suspended, and unobstructed, with its bottom facing the array of infrared lamp modules 2. Annealing is achieved by irradiating the bottom of the substrate with vertically arranged infrared lamps. The bottom of the substrate is heated before the top, in the same direction as the solvent evaporation, which promotes orderly solvent evaporation and reduces porosity and defects. Simultaneously, the bottom of the substrate preferentially crystallizes, facilitating crystal growth from the substrate upwards along the decreasing temperature direction. The relatively lower surface temperature inhibits premature surface solidification, creating conditions for forming a more uniform thin film, improving the uniformity of the perovskite thin film after annealing, and thus improving the quality and lifespan of perovskite solar cell devices.

[0026] refer to Figure 1 The housing 1 has a feed inlet 11 on one side for the base fixing component 4 to enter. The housing 1 also has a feed outlet 12 on the other two sides for the base fixing component 4 to exit. The housing 1 has several air inlets 13 and exhaust outlets 14 located on the opposite sides of the array-type infrared lamp module 2. The air inlets 13 are located at the front of the side of the housing 1, while the exhaust outlets 14 are located at the rear of the side of the housing 1.

[0027] refer to Figure 1An array-type infrared lamp module 2 is fixedly connected to the inner side of the housing 1. Specifically, the array-type infrared lamp module 2 includes a lamp holder 21 fixedly connected to the inner side of the housing 1 and several infrared lamps 22 fixedly connected to the lamp holder 21. The infrared lamps 22 are vertically arranged on the lamp holder 21 and are distributed in a linear array with the same spacing between adjacent infrared lamps 22 to ensure the uniformity of perovskite film annealing.

[0028] refer to Figure 1 and Figure 2 The base fixing component 4 is used to vertically clamp the annealing base. The base fixing component 4 includes a frame 41, several threaded posts 42, a transparent silicone sheet 43, and a fastening nut 44. The frame 41 has a base groove 411 machined inside, and the base to be annealed can be fitted and fixed into the base groove 411 of the frame 41. Several threaded posts 42 are fixedly connected to the upper surface of the frame 41. Specifically, there are eight threaded posts 42, which are divided into four groups, and the four groups of threaded posts 42 are respectively arranged on the four sides of the base groove 411. A transparent silicone sheet 43 is rotatably connected inside each threaded post 42, and a fastening nut 44 is threadedly connected to each threaded post 42. The fastening nut 44 is a wing nut and is located on the upper part of the transparent silicone sheet 43. When the substrate is fitted into the substrate groove 411 of the frame 41, the upper surface of the substrate is flush with the upper surface of the frame 41, and the lower surface of the transparent silicone sheet 43 abuts against the upper surface of the substrate to be annealed. Tightening the fastening nut 44 will allow the substrate to be detachably and fixedly connected to the substrate fixing member 4.

[0029] refer to Figure 1 The transmission component 3 is used to drive the base fixing component 4 to enter the box 1 through the feed port 11 for infrared annealing. After the infrared annealing is completed, the transmission component 3 is used to drive the base fixing component 4 to exit the box 1 through the discharge port 12, thereby realizing automated loading and unloading of the base and improving the efficiency of infrared annealing.

[0030] refer to Figure 1 and Figure 2The transmission component 3 includes a support platform 301 and several transmission roller-type transmission modules 302. The support platform 301 is fixedly connected to the bottom surface of the housing 1, with one end of the support platform 301 located at the feed inlet 11 of the housing 1 and the other end located at the discharge outlet 12 of the housing 1. The transmission roller-type transmission modules 302 are fixedly connected to the upper surface of the support platform 301 along its length. The spacing between adjacent transmission roller-type transmission modules 302 is equal, and the interval between adjacent transmission roller-type transmission modules 302 is less than the length of the base fixing member 4. Specifically, the interval between adjacent transmission roller-type transmission modules 302 is equal to 0.3-0.5 times the length of the base fixing member 4. The transmission roller-type transmission modules 302 are used to clamp the base fixing member 4 and drive the clamped base fixing member 4 to move along the length direction of the support platform 301, that is, to transmit the base fixing member 4 through the transmission component 3.

[0031] refer to Figure 1 and Figure 2 The single transmission roller type transmission module 302 includes two spaced-apart support seats 3021, a transmission rod 3022, a transmission roller 3023, a drive motor 3024, a transmission rod 3025, and a base auxiliary clamping assembly 3026. The support seats 3021 are fixedly connected to the support platform 301. The transmission rod 3022 is rotatably connected to the two support seats 3021, with one end of the transmission rod 3022 transmitting to the support seat 3021 and located outside the support seat 3021. One end of the transmission rod 3022, located on the outer wall of the support seat 3021, is coaxially and fixedly connected to the output shaft of the drive motor 3024 via a coupling. The drive motor 3024 is fixedly connected to the support seat 3021. The transmission roller 3023 is fixedly connected to the periphery of the transmission rod 3022 and is located between the two support seats 3021. The transmission rod 3025 is located within the groove of the transmission roller 3023, and the transmission roller 3023 drives the transmission rod 3025 to move linearly. The outer wall of the transmission rod 3025 is integrally machined with knurling to increase the friction between the transmission rod 3025 and the transmission roller 3023, facilitating linear transmission. The base auxiliary clamping assembly 3026 is engaged with the transmission rod 3025, and vertically clamps the base fixing member 4. Driven by the drive motor 3024, the base fixing member 4 undergoes directional linear transmission.

[0032] refer to Figure 1 and Figure 2The base auxiliary clamping assembly 3026 includes a U-shaped snap-fit ​​member 30261, a counterweight 30262 integrally formed in the U-shaped snap-fit ​​member 30261, and two clamping strips 30263 fixedly connected to the counterweight 30262. The U-shaped snap-fit ​​member 30261 snaps into the outer wall of the transmission rod 3025. A snap-fit ​​groove 30264 is formed between the two clamping strips 30263, and the base fixing member 4 is fitted into the snap-fit ​​groove 30264. A fastening bolt A30265 is threadedly connected to the side wall of the clamping strip 3063. After the base fixing member 4 is installed, one end of the fastening bolt A30265 abuts against the base fixing member 4, so that the base fixing member 4 is vertically fixedly connected to the base auxiliary clamping assembly 3026.

[0033] The infrared annealing process implemented by the perovskite thin film annealing device is as follows: In the initial state, the substrate fixing member 4 is located at the discharge port 12 of the box 1. The substrate to be annealed is fixed in the substrate fixing member 4 and placed between two transmission rollers 3023. The bottom of the substrate fixing member 4 is in contact with the transmission rod 3022. Driven by the drive motor 3024, the transmission roller type transmission module 302 drives the substrate fixing member 4 into the box 1. The bottom surface of the substrate to be annealed in the substrate fixing member 4 faces the infrared lamp tube 22. The infrared lamp tube 22 is turned on, and the infrared lamp tube 22 rapidly heats up to anneal the substrate to be annealed. After the annealing process is completed, the transmission component 3 outputs the substrate fixing member 4 from the discharge port 12, thus completing the infrared annealing process of the perovskite thin film in the substrate.

[0034] The difference between Example 2 and Example 1 is as follows: (Refer to...) Figure 3 The transmission component 3 includes a linear transmission module 31 and a clamping module 32. The clamping module 32 is detachably connected to the slide table 311 of the linear transmission module 31. Specifically, the clamping module 32 is detachably connected to the slide table of the linear transmission module 31 by bolts.

[0035] refer to Figure 3 The clamping module 32 includes a base 321, a connector 322, and a clamping platform 323. The base 321 is detachably connected to the upper surface of the slide of the linear transmission module 31 by bolts. The connector 322 is fixedly connected between the base 321 and the clamping platform 323 by welding.

[0036] refer to Figure 3The clamping platform 323 has a slot 3231 formed along its length on its upper surface. The slot 3231 of the clamping platform 323 is filled with a U-shaped PTFE profile 324. A fastening bolt B325 is threaded onto the side of the clamping platform 323, with one end of the fastening bolt B325 abutting against the side of the U-shaped PTFE profile 324. A base fixing member 4 is fitted into the groove of the U-shaped PTFE profile 324. By rotating the fastening bolt B325, one end of the fastening bolt B325 is brought into contact with the U-shaped PTFE profile 324, making the base fixing member 4 detachable and fixedly connected to the U-shaped PTFE profile 324 of the clamping platform 323. The linear transmission module 31 drives the clamping module 32 to enter the housing 1 for infrared annealing. The linear transmission module 31 can reciprocate the clamping module 32, allowing base loading at both the inlet 11 and outlet 12 of the housing 1.

[0037] It should be noted that this specific embodiment is merely an explanation of the technical solution of this application and is not a limitation thereof. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but such modifications are protected by patent law as long as they are within the scope of the claims of this application.

Claims

1. A perovskite thin film annealing apparatus, characterized by: The device includes a housing (1), an array-type infrared lamp module (2) disposed in the housing (1), a transmission component (3) disposed inside the housing (1), and a base fixing component (4) vertically disposed on the transmission component (3). The base fixing component (4) is used to clamp the substrate to be annealed. The movement direction of the base fixing component (4) is consistent with the array direction of the infrared lamps in the array-type infrared lamp module (2). A feed inlet (11) is provided on one side of the housing (1). A discharge outlet (12) is provided on the other pair of sides of the housing (1). Several air inlets (13) and exhaust outlets (14) are provided on the opposite sides of the array-type infrared lamp module (2).

2. The perovskite thin film annealing apparatus according to claim 1, characterized in that: The transmission component (3) includes a support platform (301) fixedly connected to the bottom surface of the box (1), and several transmission roller type transmission modules (302) distributed along the length of the support platform (301) and fixedly connected to the support platform (301). The interval between adjacent transmission roller type transmission modules (302) is less than the length of the base fixing member (4). The transmission roller type transmission module (302) is used to clamp the base fixing member (4) so ​​that the base fixing member (4) moves along the length direction of the support platform (301).

3. The perovskite thin film annealing apparatus according to claim 2, characterized in that: Each of the aforementioned transmission roller type transmission modules (302) includes two mutually spaced and fixedly connected support bases (3021), a transmission rod (3022) rotatably connected to the two support bases (3021), a transmission roller (3023) fixedly connected to the periphery of the transmission rod (3022), and a drive motor (3024) and a transmission rod (3025) coaxially fixedly connected to the transmission rod (3022). The transmission roller (3023) is located between the two support platforms (301); the transmission rod (3025) is located inside the transmission roller (3023); the transmission rod (3025) is connected to a base auxiliary clamping assembly (3026); the base auxiliary clamping assembly (3026) is used to vertically clamp the base fixing member (4).

4. The perovskite thin film annealing apparatus according to claim 1, characterized in that: The base fixing member (4) includes a frame (41) with a base groove (411) formed therein; a plurality of threaded posts (42) are fixedly connected to the upper surface of the frame (41); a transparent silicone sheet (43) is rotatably connected inside a single threaded post (42); a fastening nut (44) is threadedly connected to a single threaded post (42); when the base is fitted into the base groove (411) of the frame (41), the upper surface of the base is flush with the upper surface of the frame (41), and the lower surface of the transparent silicone sheet (43) abuts against the upper surface of the base.

5. The perovskite thin film annealing apparatus according to claim 1, characterized in that: The array-type infrared lamp module (2) includes a lamp holder (21) disposed on the inner side of the housing (1) and several infrared lamps (22) disposed vertically on the lamp holder (21). The infrared lamps (22) are arranged in a linear array on the lamp holder (21), and the spacing between adjacent infrared lamps (22) is the same.

6. The perovskite thin film annealing apparatus according to claim 1, characterized in that: The transmission component (3) includes a linear transmission module (31) and a clamping module (32). The clamping module (32) is detachably connected to the slide of the linear transmission module (31). The clamping module (32) is detachably connected to the base fixing member (4), so that the base fixing member (4) is vertically connected to the linear transmission module (31).

7. The perovskite thin film annealing apparatus according to claim 6, characterized in that: The clamping module (32) includes a base (321), a connector (322), and a clamping platform (323). The base (321) is detachably connected to the slide of the linear transmission module (31). The connector (322) is fixedly connected between the base (321) and the clamping platform (323). The clamping platform (323) is detachably connected to the base fixing member (4).

8. The perovskite thin film annealing apparatus according to claim 7, characterized in that: The clamping platform (323) has a slot (3231) formed on its upper surface along its length direction; the slot (3231) of the clamping platform (323) is filled with a U-shaped PTFE profile (324); the clamping platform (323) is threadedly connected to a fastening bolt B (325) on its side; one end of the fastening bolt B (325) abuts against the side of the U-shaped PTFE profile (324), and the base fixing member (4) is detachably and fixedly connected to the U-shaped PTFE profile (324) of the clamping platform (323) by the fastening bolt B (325).

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