A loading structure and production line

Abstract

This invention provides a loading structure and production line. One end of the clearance groove is connected to the receiving groove, and the other end extends to the outside of the loading body. This structure provides additional operating space for the grippers before and during product gripping. When the grippers perform gripping actions, the cross-sectional area of ​​the clearance groove is larger than that of the receiving groove along its direction of movement. By setting a clearance groove with a larger cross-sectional area, the operating range of the grippers is fundamentally expanded, avoiding squeezing and collision between the grippers and the product edges due to insufficient space, effectively preventing product edge damage and scrapping. The loading structure solves the technical problem in related technologies where semiconductor devices are easily damaged during transport.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a loading structure and production line. Background Technology

[0002] In precision manufacturing fields such as semiconductors and optoelectronic displays, machines often use robotic arms or grippers to pick up products (such as glass substrates, silicon wafers, etc.) from loading structures (or wafer cassettes, carriers) for transfer or processing. In existing loading structure designs, the effective working area of ​​the product is relatively large and is close to the conveyor, which leads to insufficient gripping space when the machine grippers pick up the product, making it easy to damage the product's edges, causing damage or even scrapping.

[0003] Therefore, existing technologies need further development. Utility Model Content

[0004] The purpose of this invention is to overcome the above-mentioned technical deficiencies and provide a loading structure and production line to solve the technical problem that semiconductor devices are easily damaged during transportation in related technologies.

[0005] To achieve the above technical objectives, the present invention adopts the following technical solution: a loading structure is provided, including a loading body, the loading body being provided with a receiving groove for accommodating products, and the loading body being provided with a clearance groove in the gripper action area, the clearance groove being used to provide gripper operating space and prevent the gripper from contacting the edge of the product; The loading body includes a first loading plate and a second loading plate disposed opposite to each other; both the first loading plate and the second loading plate are provided with the receiving groove; the clearance groove is provided on at least one of the first loading plate and the second loading plate; the first end of the clearance groove is connected to the receiving groove; and the second end of the clearance groove extends to the outside of the loading body.

[0006] Furthermore, the first loading plate is provided with a plurality of receiving slots, which are arranged at intervals; the second loading plate is provided with a plurality of receiving slots; the receiving slots on the first loading plate and the receiving slots on the second loading plate are arranged in a one-to-one correspondence; the clearance slot is connected to the plurality of receiving slots on the first loading plate.

[0007] Furthermore, the loading body includes a top plate and a bottom plate; one end of the first loading plate is connected to the top plate; the other end of the first loading plate is connected to the bottom plate; one end of the second loading plate is connected to the top plate; the other end of the second loading plate is connected to the bottom plate; the clearance groove is recessed in the surface of the first loading plate, the third end of the clearance groove extends to the top plate, and the fourth end of the clearance groove extends to the bottom plate.

[0008] Furthermore, the loading structure also includes a guide groove; the guide groove is recessed into the bottom of the clearance groove; one end of the guide groove is connected to the receiving groove, and the other end of the guide groove extends to the outside of the loading body.

[0009] Furthermore, the opening of the guide groove faces the direction of the gripper's entry, and the edge of the guide groove opening is provided with a guide structure to facilitate the entry of the gripper.

[0010] Furthermore, along the direction away from the receiving groove, the cross-sectional area of ​​the guide groove gradually increases.

[0011] Furthermore, a locking block is provided on the inner wall of the receiving groove; the locking block protrudes from the inner wall of the receiving groove; the shortest distance between the locking block and the edge of the loading body is L; the shortest distance between the first end and the second end of the clearance groove is l; wherein, L < 1.5l.

[0012] A production line includes a loading structure and a transfer device, the transfer device including grippers; the grippers are used to grip products on the loading structure; the loading structure is the loading structure described above.

[0013] Beneficial effects: The loading structure of this utility model has one end of the clearance groove connected to the receiving groove, and the other end extending to the outside of the loading body. This structure provides additional operating space for the grippers before and during product gripping. When the grippers perform a gripping action, the cross-sectional area of ​​the clearance groove is larger than that of the receiving groove along its direction of movement. By setting a clearance groove with a larger cross-sectional area, the operating range of the grippers is fundamentally expanded, avoiding squeezing and collision between the grippers and the product edge due to insufficient space, effectively preventing product edge damage and scrapping. The loading structure solves the technical problem in related technologies where semiconductor devices are easily damaged during transport. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the loading structure used in an embodiment of this utility model; Figure 2 This is a partial cross-sectional view of the loading structure used in an embodiment of this utility model; Figure 3 This is a side view of the loading structure used in an embodiment of this utility model; Figure 4 This is a schematic diagram of the clearance groove of the loading structure used in this embodiment of the utility model.

[0015] The above figures include the following reference numerals: 1. Loading body; 2. Receiving tank; 3. Guide groove; 5. Block; 6. First loading plate; 7. Second loading plate; 10. Clearance groove. Detailed Implementation

[0016] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0017] See Figures 1 to 4 According to an embodiment of the present invention, a loading structure is provided, including a loading body 1. The loading body 1 is provided with a receiving groove 2 for accommodating products. The loading body 1 is provided with a clearance groove 10 in the gripper action area. The clearance groove 10 is used to provide operating space for the gripper and prevent the gripper from contacting the edge of the product. The loading body 1 includes a first loading plate 6 and a second loading plate 7 disposed opposite to each other. The receiving groove 2 is provided on both the first loading plate 6 and the second loading plate 7. The clearance groove 10 is disposed on at least one of the first loading plate 6 and the second loading plate 7. The first end of the clearance groove 10 is connected to the receiving groove 2. The second end of the clearance groove 10 extends to the outside of the loading body 1.

[0018] Specifically, such as Figure 1 and Figure 2 As shown, one end of the clearance groove 10 is connected to the receiving groove 2, and the other end extends to the outside of the loading body 1. This structure provides additional operating space for the grippers before and during the gripping process in the receiving groove 2. When the grippers perform a gripping action, they will not damage the loading body 1 due to insufficient space.

[0019] By adopting the above configuration and setting a larger clearance groove 10, the operating range of the gripper is fundamentally expanded, avoiding the gripper from squeezing and colliding with the product edge due to insufficient space, and effectively preventing the product edge from being crushed and scrapped.

[0020] Specifically, the loading body 1 can be composed of a first loading plate 6 and a second loading plate 7 arranged opposite to each other. Both loading plates are provided with the receiving groove 2 for jointly supporting the product. The clearance groove 10 can be provided on one of the first loading plate 6 or the second loading plate 7, or on both plates. This split plate structure not only facilitates processing and manufacturing but also provides flexibility in arranging the clearance groove 10. The clearance groove 10 can be selected to be set on the side or both sides where clearance is most needed, based on the actual working path of the gripper, achieving precise clearance and optimizing the structural design.

[0021] In the loading structure of this embodiment, see Figure 1 The first loading plate 6 is provided with a plurality of receiving slots 2, which are arranged at intervals; the second loading plate 7 is provided with a plurality of receiving slots 2; the receiving slots 2 on the first loading plate 6 and the receiving slots 2 on the second loading plate 7 are arranged in a one-to-one correspondence; the clearance slot 10 is connected to the plurality of receiving slots 2 on the first loading plate 6.

[0022] Specifically, the first loading plate 6 may be provided with multiple receiving slots 2, which are arranged at intervals. Similarly, the second loading plate 7 is also provided with multiple receiving slots 2. The clearance slot 10 is connected to all the multiple receiving slots 2 on the first loading plate 6. This structure achieves a high-capacity design for the loading structure, which can accommodate multiple products simultaneously. The clearance slot 10 connects each receiving slot 2, ensuring that the gripper has sufficient clearance space when gripping a product at any position, avoiding interference problems during multi-station gripping, and improving production efficiency and reliability.

[0023] like Figure 1 As shown, each of the receiving slots 2 extends along a first preset direction; the plurality of receiving slots 2 on the first loading plate 6 are distributed at intervals along a second preset direction; wherein, the first preset direction and the second preset direction are perpendicular to each other.

[0024] Specifically, each of the receiving slots 2 is preferably along a first preset direction, which in this embodiment extends horizontally, for carrying products. The multiple receiving slots 2 on the first loading plate 6 are preferably along a second preset direction, which in this embodiment are vertically spaced, and the first preset direction and the second preset direction are perpendicular to each other. This crisscrossing and neatly arranged layout makes the internal space of the loading structure highly utilized and the structure compact. It facilitates precise positioning and sequential grasping by robotic arms or grippers in a two-dimensional plane, making it very suitable for efficient and orderly operation in automated production lines.

[0025] In the loading structure of this embodiment, along the moving direction of the gripper, the depth of the clearance groove 10 is not less than the thickness of the gripper, and the width of the clearance groove 10 is not less than the width of the gripper. Along the moving direction of the gripper, the clearance groove 10 is designed with a specific depth and width. The depth is not less than the thickness of the gripper, and the width is not less than the width of the gripper.

[0026] Specifically, along the moving direction of the gripper, the clearance groove 10 is designed with a specific depth and width. The depth is not less than the thickness of the gripper, and the width is not less than the width of the gripper. By ensuring that the depth and width of the clearance groove 10 are greater than or equal to the corresponding dimensions of the gripper, a truly "relaxed" operating environment is created for the gripper, ensuring that the gripper can fully sink into or pass through the clearance groove 10, avoiding the possibility of scratching or colliding with the product or loading body 1.

[0027] See Figure 1 In the loading structure of this embodiment, the loading body 1 includes a top plate 13 and a bottom plate 14; one end of the first loading plate 6 is connected to the top plate 13; the other end of the first loading plate 6 is connected to the bottom plate 14; one end of the second loading plate 7 is connected to the top plate 13; the other end of the second loading plate 7 is connected to the bottom plate 14; the clearance groove 10 is recessed in the surface of the first loading plate 6, the third end of the clearance groove 10 extends to the top plate 13, and the fourth end of the clearance groove 10 extends to the bottom plate 14.

[0028] By adopting the above configuration, the space of the clearance groove 10 can be maximized, thereby increasing the movement space of the gripper.

[0029] Specifically, the clearance groove 10 in this embodiment can be machined using a milling cutter. A cut is made from top to bottom on the first loading plate 6 to form the clearance groove 10.

[0030] See Figure 1 In the loading structure of this embodiment, the loading structure further includes a guide groove 3; the guide groove 3 is recessed into the bottom of the clearance groove 10; one end of the guide groove 3 is connected to the receiving groove 2, and the other end of the guide groove 3 extends to the outside of the loading body 1.

[0031] With the above configuration, the guide groove 3 facilitates the insertion of the product into the receiving groove 2.

[0032] like Figure 2 As shown, in the loading structure of this embodiment, the opening of the guide groove 3 faces the direction of the gripper entry, and the edge of the groove is provided with a guide structure 4 to facilitate the entry of the gripper.

[0033] With the above configuration, the guide structure 4 can guide and correct the entry of the gripper, enabling the gripper to align with the product and the receiving slot 2 more smoothly and accurately, reducing the risk of collision caused by misalignment, and further improving the success rate and safety of the gripping action.

[0034] In some embodiments, the clearance groove 10 can be designed to extend through the thickness of the loading body 1. This through-type clearance groove 10 has a simple structure and is easy to manufacture, for example, by milling or stamping. It provides maximum clearance space, ensuring effective clearance for the gripper throughout its entire movement from entry, gripping to exit, eliminating any potential interference points.

[0035] In the loading structure of this embodiment, the cross-sectional area of ​​the guide groove 3 gradually increases along the direction away from the receiving groove 2 by the clearance groove 10.

[0036] Specifically, such as Figure 4 As shown, along the direction away from the receiving groove 2, i.e. towards the outside of the loading structure, the cross-sectional area of ​​the guide groove 3 can gradually increase, forming a flared or trumpet-shaped structure. This gradually expanding inlet shape further optimizes the guiding performance, like a "funnel," so that even if the gripper has a slight positional deviation when it initially enters, it can be easily guided to the correct avoidance path, reducing the accuracy requirements for operation and improving the fault tolerance and stability of the equipment.

[0037] like Figure 4 As shown, in the loading structure of this embodiment, a locking block 5 is provided on the inner wall of the receiving groove 2; the locking block 5 protrudes from the inner wall of the receiving groove 2; the shortest distance between the locking block 5 and the edge of the loading body 1 is L; the shortest distance between the first end and the second end of the clearance groove 10 is l; wherein, L < 1.5l.

[0038] With the above configuration, the relevant dimensional relationships ensure that the product is securely restrained by the locking block 5 within the safe area of ​​the receiving groove 2, while the part that needs to be clamped extends beyond the connection point and is located in the "clamping zone" with a depth of l. Since L is much smaller than l, it ensures that a sufficiently long part of the product is stably supported, while an appropriate length of part is exposed for clamping, perfectly balancing the contradictory requirements of "clamping convenience" and "load-bearing stability," fundamentally preventing damage caused by product loosening or tilting during clamping.

[0039] The production line of this embodiment includes a loading structure and a transfer device, wherein the transfer device includes grippers; the grippers are used to grip products on the loading structure; the loading structure is the loading structure described above.

[0040] By adopting the loading structure of this embodiment, the reliability and product quality of the entire production line are significantly improved. The grippers are no longer prone to damaging product edges due to insufficient space when grasping products, thereby greatly reducing product scrap rates and improving production efficiency and economic benefits.

[0041] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0042] Optionally, specific examples in this embodiment can refer to the examples described in the above embodiments, and will not be repeated here.

[0043] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0044] In the above embodiments of this application, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0045] The above description is only a preferred embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A loading structure, comprising a loading body (1), wherein the loading body (1) is provided with a receiving groove (2) for receiving products, characterized in that: The loading body (1) is provided with a relief groove (10) in the gripper action area. The relief groove (10) is used to provide gripper operation space and avoid the gripper from contacting the product edge. The loading body (1) includes a first loading plate (6) and a second loading plate (7) arranged opposite to each other; the first loading plate (6) and the second loading plate (7) are each provided with the receiving groove (2); the clearance groove (10) is provided on at least one of the first loading plate (6) and the second loading plate (7); the first end of the clearance groove (10) is connected to the receiving groove (2); the second end of the clearance groove (10) extends to the outside of the loading body (1).

2. The loading structure according to claim 1, characterized in that: The first loading plate (6) is provided with a plurality of receiving slots (2), which are arranged at intervals; the second loading plate (7) is provided with a plurality of receiving slots (2); the receiving slots (2) on the first loading plate (6) and the receiving slots (2) on the second loading plate (7) are arranged in a one-to-one correspondence; the clearance slot (10) is connected to the plurality of receiving slots (2) on the first loading plate (6).

3. The loading structure according to claim 2, characterized in that: The loading body (1) includes a top plate (13) and a bottom plate (14); one end of the first loading plate (6) is connected to the top plate (13); the other end of the first loading plate (6) is connected to the bottom plate (14); one end of the second loading plate (7) is connected to the top plate (13); the other end of the second loading plate (7) is connected to the bottom plate (14); the clearance groove (10) is recessed in the surface of the first loading plate (6), the third end of the clearance groove (10) extends to the top plate (13), and the fourth end of the clearance groove (10) extends to the bottom plate (14).

4. The loading structure according to claim 3, characterized in that: The loading structure also includes a guide groove (3); the guide groove (3) is recessed at the bottom of the clearance groove (10); one end of the guide groove (3) is connected to the receiving groove (2), and the other end of the guide groove (3) extends to the outside of the loading body (1).

5. The loading structure according to claim 4, characterized in that: The opening of the guide groove (3) faces the direction of the gripper entry, and the edge of the guide groove (3) is provided with a guide structure (4) to facilitate the entry of the gripper.

6. The loading structure according to claim 5, characterized in that: Along the direction away from the receiving groove (2) from the clearance groove (10), the cross-sectional area of ​​the guide groove (3) gradually increases.

7. The loading structure according to claim 1, characterized in that: A locking block (5) is provided on the inner wall of the receiving groove (2); the locking block (5) protrudes from the inner wall of the receiving groove (2); the shortest distance between the locking block (5) and the edge of the loading body (1) is L; the shortest distance between the first end and the second end of the clearance groove (10) is l; wherein, L < 1.5l.

8. A production line comprising a loading structure and a transfer device, the transfer device including grippers; the grippers being used to grip products on the loading structure; characterized in that, The loading structure is the loading structure according to any one of claims 1 to 7.

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