A single-sided lifting and conveying device for a carrier plate

Abstract

This utility model discloses a single-sided lifting and conveying device for a carrier board, relating to the field of automation equipment technology. It includes a lifting component, a conveying component, a conveying substrate, and an adjusting component. The lifting component comprises a lifting substrate and a lifting driver, with the lifting driver disposed on the lifting substrate. The conveying substrate is connected to the output end of the lifting driver and slidably mounted on the lifting substrate in a vertical direction. The conveying component has a conveying channel adapted to an external silicon wafer carrier board. The conveying component is disposed on the conveying substrate via the adjusting component. The adjusting component is disposed between the conveying component and the conveying substrate to adjust the relative position of the conveying component relative to the conveying substrate and to connect the two. The single-sided lifting and conveying device for a carrier board provided by this utility model offers stable transmission, reliable lifting, easy adjustment, effective avoidance of the conveying channel, and does not obstruct upstream or downstream processing.

Description

Technical Field

[0001] This utility model relates to the field of automation equipment technology, and in particular to a single-sided lifting and conveying device for a carrier plate. Background Technology

[0002] As an important tool for supporting and fixing silicon wafers, silicon wafer carriers are used in the automated production process of photovoltaic cells. To facilitate the loading and unloading of silicon wafers at different processing equipment in different processing stages, or to transfer silicon wafers to be processed between upstream and downstream processing equipment, automated loading and unloading transfer devices need to be installed on the silicon wafer carriers.

[0003] In the existing technology, automated loading and unloading conveyor devices for silicon wafer carriers are generally divided into carrier-fixed type and carrier-lifting type. Carrier-fixed conveyor devices are suitable for processing scenarios with simple processes and high requirements for silicon wafer stability. Carrier-lifting conveyor devices are suitable for assembly line processing scenarios with multiple processes executed in succession. Obviously, carrier-lifting conveyor devices are more suitable for automated production scenarios of photovoltaic cells.

[0004] Carrier lifting and conveying devices typically include a single-sided lifting actuator. This actuator is used to hoist or lift the silicon wafer carrier from one side to the next processing station. However, when applied to the actual transportation of solar silicon wafer carriers, these devices often lack symmetrical fixing measures. During transport, the carriers frequently wobble, vibrate, become unstable, or even detach and fall off, severely impacting processing quality. Utility Model Content

[0005] The main purpose of this invention is to provide a single-sided lifting and conveying device for silicon wafer carriers, which can smoothly and reliably lift silicon wafer carriers.

[0006] To achieve the above objectives, this utility model provides a single-sided lifting and conveying device for a carrier plate, comprising:

[0007] The lifting assembly includes a lifting base plate and a lifting driver, wherein the lifting driver is disposed on the lifting base plate;

[0008] A transmission base plate is connected to the output end of the lifting driver and is slidably mounted on the lifting base plate in the vertical direction;

[0009] The transmission component has a transmission channel adapted to an external silicon wafer carrier, and the transmission component is set on the transmission substrate by an adjustment component;

[0010] And an adjustment component, which is disposed between the transmission component and the transmission substrate, with one end of the adjustment component being movably connected to the transmission component and the other end being movably connected to the transmission substrate. The adjustment component is used to adjust the relative position of the transmission component with respect to the transmission substrate and to connect the two.

[0011] Optionally, the transmission assembly includes a transmission frame; the transmission frame includes a bottom frame, a hanging rod, and a diagonal reinforcing rib; the bottom frame is located on the side of the transmission substrate away from the lifting assembly, the hanging rod is perpendicular to the plane of the bottom frame and fixedly located on its side edge near the transmission substrate, and the diagonal reinforcing rib is located between the hanging rod and the bottom frame, with one end fixedly connected to the end of the hanging rod away from the bottom frame, and the other end fixedly connected to the side edge of the bottom frame away from the hanging rod.

[0012] Optionally, the adjustment component includes a rotating pin, which is fixedly connected to the transmission substrate. The rotating pin protrudes from the surface of the transmission substrate, and its axis is perpendicular to the plane of the transmission substrate. A hanging rod is hung on the rotating pin.

[0013] Optionally, the adjustment components include a hanging ear and a fine-tuning screw; the hanging ear is fixedly connected to the hanging rod; a fine-tuning through hole is opened on the hanging ear, the fine-tuning screw is screwed into the fine-tuning through hole, and its end extends out of the fine-tuning through hole to retractably hold the transmission substrate.

[0014] Optionally, the adjustment assembly also includes a fastening bolt; a fastening slot is also provided on the lug, through which the fastening bolt passes to press or loosen the transmission substrate.

[0015] Optionally, the fastening groove is an arc-shaped groove, and the center of the circle containing the fastening groove overlaps with the axis of the rotating pin.

[0016] Optionally, an adjustment gap is left between the hanging rod and the transmission substrate, which allows the hanging rod to tilt forward away from the transmission substrate or tilt backward closer to the transmission substrate.

[0017] Optionally, the adjustment assembly also includes an adjustment block; one end of the adjustment block is connected to the hanging rod, and the other end is connected to the transmission base plate.

[0018] Optionally, the adjustment assembly also includes a coarse adjustment bolt; the cross-section of the adjustment block is L-shaped, with one end close to and fixedly connected to the transmission substrate, and the other end close to the hanging rod; threaded holes are opened on both the adjustment block and the hanging rod, and the coarse adjustment bolt is screwed into the threaded hole on the adjustment block and the threaded hole on the hanging rod in sequence.

[0019] Optionally, the transmission assembly further includes a transmission driver, a first roller group, a transmission drive shaft, and a second roller group; the transmission driver is fixedly mounted on the bottom frame, the first roller group is laid along the edge of the bottom frame near the transmission substrate, and the first roller group is rotatably connected to the bottom frame, and the drive output shaft of the transmission driver is drivenly connected to the first roller group; the transmission drive shaft is fixedly connected to the drive output shaft of the transmission driver, and the transmission drive shaft is also drivenly connected to the second roller group; the second roller group is laid along the edge of the bottom frame away from the transmission substrate, and the second roller group is rotatably connected to the bottom frame, and the first roller group and the second roller group together form a transmission channel for the external silicon wafer carrier to pass through and be transmitted.

[0020] The beneficial effects of this utility model are as follows:

[0021] 1. Stable transmission and reliable lifting: The single-sided lifting and transmission device for the carrier plate provided in this utility model integrates the transmission component and the lifting component into a whole through the transmission substrate. The transmission component facilitates the passage and transmission of the external silicon wafer carrier plate, while the lifting component stably lifts the external silicon wafer carrier plate.

[0022] 2. Easy to adjust: The present invention is provided with an adjustment component, which can be used to adjust the relative position between the transmission substrate and the transmission component, so as to facilitate the adjustment of the relative position of the transmission component with respect to the transmission substrate in specific applications, and to align the upper and lower processing equipment to ensure the accuracy of the transmission of the external silicon wafer carrier.

[0023] 3. Effectively avoids the transmission channel and does not obstruct the processing of upstream and downstream components: In this utility model, a transmission channel is opened in the transmission component, and the transmission component and the lifting component are connected by the transmission substrate. The lifting component is erected on one side of the transmission component. In this way, the lifting component will completely give way to the passage and transmission channel, opening up all the space on the other side of the transmission component. This does not obstruct the transmission of the external silicon wafer carrier, nor does it hinder the movement of the robot or other upstream and downstream processing equipment. Attached Figure Description

[0024] The present invention will now be described in detail with reference to specific embodiments and accompanying drawings, wherein:

[0025] Figure 1 This is a schematic diagram of the overall structure of the single-sided lifting and conveying device for the carrier plate provided in a specific embodiment.

[0026] Figure 2 This is a schematic diagram of the structure of the lifting component and the transmission substrate in the single-sided lifting and transmission device provided in the specific embodiment.

[0027] Figure 3 This is a first-view overall structural diagram of the combination of the transmission component and the adjustment component in the single-sided lifting and transmission device of the carrier plate provided in a specific embodiment.

[0028] Figure 4 This is a second-view overall structural diagram of the combination of the transmission component and the adjustment component in the single-sided lifting and transmission device of the carrier plate provided in a specific embodiment.

[0029] Figure 5 This is a partial structural diagram of the combination of the transmission component and the adjustment component in the single-sided lifting and conveying device of the carrier plate provided in a specific embodiment.

[0030] exist Figure 1-5 In the attached figures, the labels are:

[0031] 1. Transmission assembly; 11. Transmission hanging frame; 12. Transmission driver; 13. First roller group; 14. Transmission drive shaft; 15. Second roller group; 111. Base frame; 112. Hanging rod; 113. Diagonal bracing rib;

[0032] 2. Lifting assembly; 21. Lifting base plate; 22. Lifting driver; 23. Lifting lead screw; 24. Lifting guide rail;

[0033] 3. Transmission substrate;

[0034] 4. Adjustment assembly; 41. Rotating pin; 42. Hanging lug; 43. Fine-tuning screw; 44. Fastening bolt; 45. Adjusting block; 46. Coarse-tuning bolt; 421. Fine-tuning through hole; 422. Fastening through groove; Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the following specific embodiments are only used to explain this utility model and do not constitute a limitation on this utility model.

[0036] Please see Figure 1 In this specific embodiment, a single-sided lifting and conveying device for a carrier plate is provided, including a conveying component 1, a lifting component 2, a conveying base plate 3, and an adjusting component 4.

[0037] The lifting assembly 2 includes a lifting base plate 21 and a lifting driver 22. A transmission base plate 3 is connected to the output end of the lifting driver 22 and is slidably mounted on the lifting base plate 21 in a vertical direction. The transmission assembly 1 has a transmission channel adapted to an external silicon wafer carrier. The transmission assembly 1 is mounted on the transmission base plate 3 via an adjustment assembly 4. The adjustment assembly 4 is positioned between the transmission assembly 1 and the transmission base plate 3, with one end movably connected to the transmission assembly 1 and the other end movably connected to the transmission base plate 3. The adjustment assembly 4 is used to adjust the relative position of the transmission assembly 1 relative to the transmission base plate 3 and to connect the two. When applied to a specific photovoltaic cell processing scenario, the single-sided lifting and transmission device provided in this embodiment can be placed at the unloading position of the front-end processing equipment, the loading position of the back-end processing equipment, or the centralized receiving and stacking position of silicon wafers that have completed continuous processing. If this device is placed between two processing stages with the same height, after the silicon wafers are processed by the preceding processing equipment and carried on the silicon wafer carrier, they enter the transfer component 1 of this device and are directly transferred from the transfer component 1 to the next processing stage, which is usually convenient. If this device is placed between two processing stages with different heights or at the centralized receiving and stacking position of silicon wafers that have completed continuous processing, after the silicon wafers are processed by the preceding processing equipment and carried on the silicon wafer carrier, they enter the transfer component 1 of this device and can remain in the transfer component 1. Since the transfer substrate 3 and the transfer component 1 are fused together to form a whole, the lifting component 2 can lift the transfer component 1 by driving the transfer substrate 3, thereby lifting the silicon wafer carrier to the height position or stacking position required by the subsequent processing equipment. It can be seen that, on the one hand, the transmission component 1 serves as a transport tool for the traditional silicon wafer carrier, providing a passageway for the silicon wafer carrier. On the other hand, it also relies on the integration of the transmission substrate 3 and the lifting component 2 to form a whole. The lifting process of the silicon wafer carrier is thus supported by a stable and reliable lifting structure, and the shaking and swaying during the lifting process are significantly reduced, making the lifting process smoother and more precise.

[0038] Please see Figure 2In this specific embodiment, the lifting assembly 2 further includes a lifting screw 23, a lifting nut (not shown), and a lifting guide rail 24; the lifting base plate 21 is erected on one side of the transmission assembly 1, the lifting screw 23 is fixedly connected to the drive output shaft of the lifting driver 22, the lifting nut is fixedly connected to the transmission base plate 3, and the lifting nut is sleeved on the lifting screw 23; the lifting guide rail 24 is laid vertically on the lifting base plate 21, and the transmission base plate 3 is fitted into the lifting guide rail 24 and moves back and forth along the lifting guide rail 24. In specific implementation, the lifting driver 22 can be a servo motor. When the servo motor rotates forward, the motor output shaft rotates forward, and the lifting screw 23 rotates forward accordingly. The screw nut sleeved on the lifting screw 23 moves upward along the axis of the lifting screw 23, and the transmission base plate 33, which is fixedly connected to the screw nut, moves upward synchronously, driving the transmission component 1 to move upward. At the same time, during the upward movement of the transmission component 1, since the transmission base plate 3 is always embedded in the lifting guide rail 24, the movement of the transmission base plate 3 is always guided and supported by the lifting guide rail 24. The entire lifting process thus obtains stable and reliable structural support, making the lifting more stable and reliable.

[0039] Please see Figure 3In this specific embodiment, the transmission component 1 includes a transmission frame 11, a transmission driver 12, a first roller group 13, a transmission drive shaft 14, and a second roller group 15; the transmission frame 11 includes a bottom frame 111, a hanging rod 112, and a diagonal reinforcing rib 113; the bottom frame 111 is disposed on the side of the transmission base plate 3 away from the lifting component 2, the hanging rod 112 is perpendicular to the plane of the bottom frame 111 and is fixedly disposed on its side edge near the transmission base plate 3, and the diagonal reinforcing rib 113 is disposed between the hanging rod 112 and the bottom frame 111, one end of which is fixedly connected to the end of the hanging rod 112 away from the bottom frame 111, and the other end of which is fixedly connected to the side edge of the bottom frame 111 away from the hanging rod 112. The bottom frame 111 and the hanging rod 112 are connected to form an L-shaped frame structure. A diagonal reinforcing rib 113 is installed on this L-shaped frame structure to further enhance the stability of the transmission frame 11, ensuring that the transmission frame 11 remains stable and undeformed during the transmission of silicon wafer carriers or when lifted by the lifting assembly 2. Simultaneously, since the bottom frame 111 and the hanging rod 112 form an L-shaped frame structure, and the diagonal reinforcing rib 113 is also located on the upper side of this L-shaped frame structure, the entire transmission frame 11 exhibits a "reinforced at the top, with lower clearance" structural form, ensuring frame stability without encroaching on the space below the transmission frame 11.Meanwhile, the transmission driver 12 is fixedly mounted on the bottom frame 111. The first roller group 13 is laid along the edge of the bottom frame 111 near the transmission substrate 3, and the first roller group 13 is rotatably connected to the bottom frame 111. The drive output shaft of the transmission driver 12 is drivenly connected to the first roller group 13. The first roller group 13 contains multiple rollers, and the roller shaft of each roller is embedded in the bottom frame 111. The drive output shaft of the transmission driver 12 is connected to each roller in the first roller group 13 via a chain or belt. When the transmission driver 12 is started, its drive output shaft outputs speed and torque, driving each roller in the first roller group 13 to rotate. The transmission drive shaft 14 is fixedly connected to the drive output shaft of the transmission driver 12, and the transmission drive shaft 14 is also drivenly connected to the second roller group 15. The second roller group 15 is laid along the edge of the bottom frame 111 away from the transmission substrate 3, and the second roller group 15 is rotatably connected to the bottom frame 111. Similarly, the second roller group 15 also has multiple rollers, and the roller shaft of each roller is connected to the base frame 111. The transmission drive shaft 14 is connected to the roller shaft of each roller in the second roller group 15 through a transmission method such as a chain or belt. When the transmission driver 12 is started, its drive output shaft starts to rotate. The speed and torque output by the transmission driver 12 will be transmitted to the second roller group 15 through the transmission drive shaft 14, causing each roller in the second roller group 15 to rotate together. The wheel surface of each roller in the first roller group 13 is kept at the same height as the wheel surface of each roller in the second roller group 15. The first roller group 13 and the second roller group 15 enclose a transmission channel for the external silicon wafer carrier to pass through and be transmitted. After the external silicon wafer carrier enters the transmission assembly 1, the first roller group 13 and the second roller group 15 will work together to support the external silicon wafer carrier to pass through and be transmitted along the laying direction of the first roller group 13 and the second roller group 15.

[0040] Please see Figure 4-5In this specific embodiment, the adjustment component 4 includes a rotating pin 41, a hanging lug 42, a fine-tuning screw 43, and a fastening bolt 44. The rotating pin 41 is fixedly connected to the transmission substrate 3, and the rotating pin 41 protrudes from the surface of the transmission substrate 3, with its axis perpendicular to the plane of the transmission substrate 3. The hanging rod 112 is hung on the rotating pin 41. Since the rotating pin 41 is connected to the transmission substrate 3 and the hanging rod 112 is connected to the bottom frame 111, the entire transmission component 1 can be hung on the transmission substrate 3 through the hanging rod 112 and the rotating pin 41. As explained above, the hanging rod 112 and the bottom frame 111 form a special L-shaped frame structure, so the entire hanging rod 112 will be close to the transmission substrate 3. When the bottom frame 111 is pushed, the transmission component 1 can swing left and right with the rotating pin 41 as the swing center and the hanging rod 112 as the swing arm, which makes it convenient for technicians to adjust the left and right swing angle of the bottom frame 111. The lug 42 is also provided with a fastening slot 422. The transmission base plate 3 is provided with a threaded hole that matches the fastening bolt 44. The fastening bolt 44 passes through the fastening slot 422 and is screwed into the matching threaded hole. Tightening the fastening bolt 44 will cause the lug 42 to press the transmission base plate 3, and the transmission component 1 will be fixed on the transmission base plate 3. Loosening the fastening bolt 44 will cause the lug 42 to release the transmission base plate 3, and the transmission component 1 will be loosely hung on the rotating pin 41. The fastening slot 422 is an arc-shaped slot, and the center of the circle in which the fastening slot 422 is located overlaps with the axis of the rotating pin 41. Therefore, when the transmission component 1 is hung on the rotating pin 41 by the hanging rod 112, the transmission component 1 swings along the opening direction of the fastening slot 422. The transmission component 1 will swing left and right with the axis of the rotating pin 41 as the swing center, and the angle between the plane of the bottom frame 111 and the horizontal plane will change accordingly.

[0041] Meanwhile, the ear 42 is fixedly connected to the hanging rod 112. A fine adjustment through hole 421 is opened on the ear 42. The fine adjustment screw 43 is screwed into the fine adjustment through hole 421. Its end extends out of the fine adjustment through hole 421 and retractably holds the transmission substrate 3. An adjustment gap is left between the hanging rod 112 and the transmission substrate 3. The adjustment gap allows the hanging rod 112 to tilt forward away from the transmission substrate 3 or tilt backward close to the transmission substrate 3. A fine-tuning through hole 421 is provided on the lug 42, and a fine-tuning screw 43 is provided corresponding to the fine-tuning through hole 421. After the fine-tuning screw 43 is screwed into the fine-tuning through hole 421, the fine-tuning screw 43 will be connected to the lug 42. When the fine-tuning screw 43 has just been screwed into the fine-tuning through hole 421 and has not yet passed out of the fine-tuning through hole 421, the entire transmission assembly 1 is hung on the rotating pin 41 by the hanging rod 112, and the transmission assembly 1 hangs down naturally under gravity. As the fine-tuning screw 43 is continuously screwed in, the top of the fine-tuning screw 43 passes out of the fine-tuning through hole 421 and abuts against the transmission substrate 3. The longer the pitch of the fine-tuning screw 43, the greater the angle at which the hanging rod 112 is lifted upward by the fine-tuning screw 43, and the greater the angle at which the entire transmission assembly 1 tilts forward relative to the transmission substrate 3.

[0042] In practical applications, technicians can first hang the transmission component 1 on the rotating pin 41, insert the fastening bolt 44 so that the fastening bolt 44 penetrates the fastening slot 422 and is screwed into the threaded hole on the transmission substrate 3. Keeping the fastening bolt 44 loose, when the technician pushes the transmission component 1 along the fastening slot 422, the transmission component 1 will swing to the left or right at a certain angle with the axis of the rotating pin 41 as the center. The bottom frame 111 in the transmission component 1 will change its angle with the horizontal plane accordingly. After adjusting the left and right angle of the transmission component 1 to a satisfactory position in the left and right direction, the technician can further tighten the fine adjustment screw 43 set on the hanging ear 42. The fine adjustment screw 43 can be screwed in a certain length to push the transmission component 1 upward and increase the angle between the axis of the hanging rod 112 and the vertical plane, or it can be screwed out a certain length to decrease the angle between the axis of the hanging rod 112 and the vertical plane and lower the transmission component 1. In this way, the front and back angle of the transmission component 1 can be adjusted to a satisfactory position in the front and back direction. After both the left-right and front-back angle adjustments are completed, the angle position of the transmission component 1 is adjusted. At this time, the plane where the bottom frame 111 of the transmission component 1 is located is adjusted to be horizontal, ensuring that the external silicon wafer carrier will not tilt or slip after entering the transmission component 1. Then, the technicians tighten the fastening bolts 44 to completely attach and fix the hanging ears 42 to the current angle position, ensuring that the transmission component 1 and the transmission substrate 3 are firmly and reliably connected.

[0043] Please see Figure 4-5In another specific embodiment, the adjustment assembly 4 further includes an adjustment block 45 and a coarse adjustment bolt 46; one end of the adjustment block 45 is connected to the hanging rod 112, and the other end is connected to the transmission base plate 3. The cross-section of the adjustment block 45 is L-shaped, with one end close to and fixedly connected to the transmission base plate 3, and the other end close to the hanging rod 112; threaded holes are provided on both the adjustment block 45 and the hanging rod 112, and the coarse adjustment bolt 46 is screwed into the threaded holes on the adjustment block 45 and the hanging rod 112 in sequence. When the lifting base plate 21 is erected in a vertical plane and the transmission base plate 3 is close to the lifting base plate 21, it can be inferred that the plane on which the transmission base plate 3 is located is also vertical. When the transmission component 1 is hung on the rotating pin 41 by the hanging rod 112, if the transmission component 1 hangs down naturally, the axis of the hanging rod 112 should also be parallel to the vertical plane. Since the cross-section of the adjusting block 45 is L-shaped, when one end of it is close to the surface of the transmission base plate 3, the distance between its other end and the hanging rod 112 naturally determines the degree to which the hanging rod 112 is tilted relative to the lifting base plate. Therefore, a coarse adjustment bolt 46 is provided on the adjusting block 45. By tightening or loosening the coarse adjustment bolt 46, the technician can adjust the front and rear angles of the transmission component 1 accordingly. The adjustment block 45 and coarse adjustment bolt 46 provided in this specific embodiment are alternative adjustment schemes. When the adjustment scheme described above, which uses the rotating pin 41 and the lug 42 to adjust the left and right angles and front and back angles of the transmission component 1, is obstructed, technicians can use this alternative adjustment scheme to adjust the angle of the transmission component 1 to ensure that the external silicon wafer carrier does not tilt or slip when entering the transmission channel.

[0044] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A single-sided lifting and conveying device for a carrier plate, characterized in that, include: A lifting assembly includes a lifting base plate and a lifting driver, wherein the lifting driver is disposed on the lifting base plate; A transmission base plate is connected to the output end of the lifting driver and is slidably mounted on the lifting base plate in the vertical direction; The transmission component has a transmission channel that is compatible with an external silicon wafer carrier. And an adjustment component, which is disposed between the transmission component and the transmission substrate, with one end movably connected to the transmission component and the other end movably connected to the transmission substrate. The adjustment component is used to adjust the relative position of the transmission component with respect to the transmission substrate and to connect the two.

2. The single-sided lifting and conveying device for a carrier plate as described in claim 1, characterized in that, The transmission assembly includes a transmission frame; the transmission frame includes a base frame, a hanging rod, and a diagonal reinforcing rib; the base frame is disposed on the side of the transmission base away from the lifting assembly, the hanging rod is perpendicular to the plane of the base frame and fixedly disposed on its side edge near the transmission base, and the diagonal reinforcing rib is disposed between the hanging rod and the base frame, one end of which is fixedly connected to the end of the hanging rod away from the base frame, and the other end of which is fixedly connected to the side edge of the base frame away from the hanging rod.

3. The single-sided lifting and conveying device for a carrier plate as described in claim 2, characterized in that, The adjustment assembly includes a rotating pin, which is fixedly connected to the transmission substrate. The rotating pin protrudes from the surface of the transmission substrate, and its axis is perpendicular to the plane of the transmission substrate. The hanging rod is hung on the rotating pin.

4. The single-sided lifting and conveying device for a carrier plate as described in claim 3, characterized in that, The adjustment component includes a hanging ear and a fine-tuning screw; the hanging ear is fixedly connected to the hanging rod; a fine-tuning through hole is opened on the hanging ear, the fine-tuning screw is screwed into the fine-tuning through hole, and its end extends out of the fine-tuning through hole and retractably abuts against the transmission substrate.

5. The single-sided lifting and conveying device for a carrier plate as described in claim 4, characterized in that, The adjustment assembly also includes a fastening bolt; a fastening slot is also provided on the lug, and the fastening bolt penetrates the fastening slot to make the lug press or loosen the transmission substrate.

6. The single-sided lifting and conveying device for a carrier plate as described in claim 5, characterized in that, The fastening groove is an arc-shaped groove, and the center of the circle containing the fastening groove overlaps with the axis of the rotating pin.

7. The single-sided lifting and conveying device for a carrier plate as described in claim 2, characterized in that, An adjustment gap is provided between the hanging rod and the transmission substrate, the adjustment gap allowing the hanging rod to tilt forward away from the transmission substrate or tilt backward closer to the transmission substrate.

8. The single-sided lifting and conveying device for a carrier plate as described in claim 2, characterized in that, The adjustment assembly further includes an adjustment block; one end of the adjustment block is connected to the hanging rod, and the other end is connected to the transmission base plate.

9. The single-sided lifting and conveying device for a carrier plate as described in claim 8, characterized in that, The adjustment assembly also includes a coarse adjustment bolt; the cross-section of the adjustment block is L-shaped, with one end close to and fixedly connected to the transmission substrate, and the other end close to the hanging rod; threaded holes are provided on both the adjustment block and the hanging rod, and the coarse adjustment bolt is screwed into the threaded hole on the adjustment block and the threaded hole on the hanging rod in sequence.

10. The single-sided lifting and conveying device for a carrier plate as described in claim 2, characterized in that, The transmission assembly further includes a transmission driver, a first roller group, a transmission drive shaft, and a second roller group. The transmission driver is fixedly mounted on the bottom frame. The first roller group is laid along the edge of the bottom frame near the transmission substrate and is rotatably connected to the bottom frame. The drive output shaft of the transmission driver is drivenly connected to the first roller group. The transmission drive shaft is fixedly connected to the drive output shaft of the transmission driver and is also drivenly connected to the second roller group. The second roller group is laid along the edge of the bottom frame away from the transmission substrate and is rotatably connected to the bottom frame. The first roller group and the second roller group together form a transmission channel for the passage and transmission of an external silicon wafer carrier.

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