Wafer transfer robot rubber pillar structure

Abstract

This utility model relates to the field of rubber support technology, specifically disclosing a rubber support structure for a wafer transfer robotic arm, including a connector. The connector is composed of a front U-shaped block and a rear elongated block, and is configured as a two-layer structure. This utility model, by setting a layered mechanism, can divide the rubber support material into multiple layers, with the hardness gradually increasing from top to bottom. This design ensures both effective cushioning and load-bearing rigidity of the rubber support. Simultaneously, a replacement mechanism is provided. A metal insert is set in the lower layer of the rubber support, which improves the overall strength and stability of the rubber support. A threaded hole is provided in the middle of the metal insert, which can align with a circular hole in the robotic arm gripper connector. Bolts can then be used to connect and limit the connection between the two. The threaded hole in the middle of the lower layer of the rubber support facilitates replacement when the rubber support is damaged.

Description

Technical Field

[0001] This utility model relates to the field of rubber support technology, specifically a rubber support structure for a wafer transfer robotic arm. Background Technology

[0002] Wafers are the core substrate for semiconductor integrated circuit manufacturing. They are made from high-purity silicon materials through processes such as purification, crystal pulling, slicing, and polishing. During their production and processing, robotic arms are usually used for transfer. However, wafers can be scratched during the transfer process. To prevent wafer breakage, rubber supports are embedded in the surface of the moving robotic arm's gripper to protect the wafers from quality problems such as cracking and scratches.

[0003] In existing technologies, rubber pillars are generally made of a single type of rubber with a high hardness, which leads to a contradiction between the rubber pillar's buffering and support functions. While ensuring the suppression of high-frequency vibrations, the bearing rigidity cannot be guaranteed, resulting in design deficiencies. Utility Model Content

[0004] The purpose of this invention is to provide a rubber support structure for a wafer transfer robotic arm to solve the problems in the prior art.

[0005] The objective of this utility model can be achieved through the following technical solutions:

[0006] A rubber support structure for a wafer transfer robotic arm includes a connector, which is composed of a front U-shaped block and a rear elongated block. The connector has two layers: an upper rubber layer and a lower support layer. Mounting holes are provided inside the left and right ends of the connector, and a rubber support body is installed inside the mounting holes. A replacement mechanism is provided between the rubber support body and the connector.

[0007] Preferably, the mounting hole is composed of a first slot and a second slot, with the first slot located on the upper side of the second slot, and the diameter of the first slot being larger than the diameter of the second slot.

[0008] Preferably, the rubber support body includes a surface ball head, an embedded groove one, an embedded groove two, and a metal insert. The surface ball head is disposed on the upper side of the embedded groove one and is semi-circular. Preferably, the embedded groove two is disposed on the lower side of the embedded groove one, and the outer side of the embedded groove two is tightly fitted with the inner sidewall of the groove two.

[0009] Preferably, a metal insert is installed in the middle of the second embedding groove.

[0010] Preferably, the replacement mechanism includes a threaded hole, a connecting plate, and a bolt. The threaded hole is located inside the metal insert, and a bolt is threadedly connected to the outside of the threaded hole. The connecting plate is located at the lower end of the metal insert, and the outside of the connecting plate is fixedly connected to the connecting member. The bolt passes through and is located inside the connecting plate.

[0011] The beneficial effects of this utility model are:

[0012] 1. By setting a layered mechanism, this utility model can divide the rubber support material into multiple layers, with the hardness gradually increasing from top to bottom. The upper layer is softer and contacts the wafer, improving the buffering effect and preventing the wafer from being scratched. The lower layer is harder and can improve stable support. This setting can ensure the effective buffering effect of the rubber support and also ensure the load-bearing rigidity of the rubber support.

[0013] 2. This utility model, by setting a replacement mechanism, has a metal insert in the lower layer of the rubber support. The metal insert can improve the overall strength and stability of the rubber support. At the same time, a threaded hole is set in the middle of the metal insert. The threaded hole can be connected with the round hole in the mechanical arm clamp connector. Then, the two can be connected and limited by bolts. The setting of the threaded hole in the middle of the lower layer of the rubber support facilitates the replacement of the rubber support when it is damaged. Attached Figure Description

[0014] The present invention will be further described below with reference to the accompanying drawings.

[0015] Figure 1 This is a front view schematic diagram of the support structure of this utility model;

[0016] Figure 2 This is a perspective view of the connection structure of the support structure mounting hole, the rubber support body, and the replacement mechanism of this utility model.

[0017] Figure 3 This is a schematic diagram of the connection structure of slot one and slot two in the support structure of this utility model;

[0018] Figure 4 This is a schematic diagram of the ball head, embedded groove, and metal insert structure on the surface of the support structure of this utility model.

[0019] The attached figures are labeled as follows:

[0020] 1. Connector; 2. Mounting hole; 21. Slot 1; 22. Slot 2; 3. Rubber support body; 31. Surface ball head; 32. Embedded groove 1; 33. Embedded groove 2; 34. Metal insert; 4. Replacement mechanism; 41. Threaded hole; 42. Connecting plate; 43. Bolt. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0022] To address the problems existing in the prior art, this embodiment provides the following technical solution: a rubber support structure for a wafer transfer robotic arm. The structure includes a connector 1 with symmetrical mounting holes 2 at both ends. A rubber support body 3 is housed inside the mounting holes 2. The rubber support body 3 has two layers with increasing hardness from top to bottom, ensuring both effective cushioning and load-bearing rigidity. A replacement mechanism 4 is provided between the rubber support body 3 and the connector 1, allowing for timely replacement of the rubber support body 3 in case of damage.

[0023] like Figures 1-4 As shown, a connector 1 is provided. The connector 1 is a component on the mechanical arm gripper. The connector 1 is composed of a front U-shaped block and a rear long strip block. The connector 1 is set with two layers, the upper layer is a rubber layer and the lower layer is a support layer. At the same time, mounting holes 2 are opened inside the left and right ends of the connector 1.

[0024] Mounting hole 2 is composed of slot 1 21 and slot 2 22. Slot 1 21 is located on the upper side of slot 2 22. The diameter of slot 1 21 is larger than the diameter of slot 2 22, and the connection between the two is set as an inclined surface.

[0025] A rubber support body 3 is provided inside the mounting hole 2. The rubber support body 3 includes a surface ball head 31, an embedded groove 1 32, an embedded groove 2 33, and a metal insert 34. The surface ball head 31 is located on the upper side of the embedded groove 1 32 and is semi-circular. The embedded groove 2 33 is located on the lower side of the embedded groove 1 32. At the same time, the diameter of the embedded groove 1 32 is smaller than the bottom diameter of the surface ball head 31, and the diameter of the embedded groove 1 32 is also smaller than the diameter of the embedded groove 2 33.

[0026] The surface ball head 31, the first embedded groove 32, and the second embedded groove 33 are all elastic. The second embedded groove 33 can be pinched and placed inside the first slot 21. The diameter of the first slot 21 is smaller than the diameter of the second embedded groove 33. When the second embedded groove 33 enters the inside of the first slot 21, it is in a compressed state. Pressing the second embedded groove 33 downward will cause it to enter the inside of the second slot 22 set below the first slot 21. The diameter of the second slot 22 is the same as that of the second embedded groove 33. The second embedded groove 33 will rebound, and its outer side will fit against the inner sidewall of the second slot 22.

[0027] When the second embedding groove 33 engages with the second slot 22, the first embedding groove 32 provided on the upper side of the second embedding groove 33 will enter the interior of the first slot 21 provided on the upper side of the second slot 22. The diameter of the first embedding groove 32 is the same as that of the first slot 21, and its outer side will fit against the inner sidewall of the first slot 21. At this time, the surface ball head 31 will be located at the upper end of the first slot 21 on the upper surface of the connector 1.

[0028] The rubber support body 3 itself is made of rubber, and its high flexibility is determined by the flexibility and cross-linking structure of its polymer chain. It can stretch and retract under external force.

[0029] Meanwhile, a metal insert 34 is installed in the middle of the rubber support body 3, which can improve the overall strength and stability of the rubber support body 3.

[0030] Secondly, a replacement mechanism 4 is provided between the rubber support body 3 and the connector 1 for fixed connection. The replacement mechanism 4 includes a threaded hole 41, a connecting plate 42, and a bolt 43. A circular block is provided on the bottom side of the bolt 43 to increase the contact area with the connector 1. The threaded hole 41 is located inside the metal insert 34. When the lower side of the rubber support body 3 is engaged with the inside of the mounting hole 2, its lower end will contact the lower side of the mounting hole 2. The outside of the connecting plate 42 is fixedly connected to the connector 1. A circular hole is opened in the middle of the connecting plate 42. After the rubber support body 3 is engaged with the mounting hole 2, the threaded hole 41 in the middle of the connecting plate 42 will be aligned vertically with the circular hole in the middle of the connecting plate 42.

[0031] At this time, bolts 43 can be inserted into the round hole and threaded hole 41 to tighten and limit the position. Then the rubber support body 3 can be firmly installed inside the connector 1. After the rubber support body 3 is inserted into the mounting hole 2, the lower end will contact the bottom of the mounting hole 2. The mounting hole 2 is elastic and will generate a rebound force after being flattened, which can increase the friction between the threads and effectively prevent the bolts 43 from loosening due to impact.

[0032] Additionally, the surface ball head 31 is located on the surface of the connector 1 and is positioned on the upper side of the rubber support body 3. When the robotic arm transfers the wafer, it will directly contact the wafer. It is set with relatively soft hardness and has excellent elasticity and viscoelasticity, which can effectively absorb and buffer the vibration and impact generated by the robotic arm during high-speed movement, and can prevent the wafer from being scratched or damaged by the positioning clamping force. The first embedded groove 32 and the second embedded groove 33 are located on the lower side of the rubber support body 3 and are set with relatively hard hardness, which can effectively improve the stability of the bottom support.

[0033] If the rubber support body 3 is damaged, it can be pulled out of the round hole and threaded hole 41 of the connecting plate 42 by unscrewing the bolt 43. The groove 1 21 and groove 2 22 are set as an inclined surface. After the rubber support body 3 is separated from the replacement mechanism 4, the rubber support body 3 can be pulled directly from the top. The rubber support body 3 is easy to deform, making it easy to take out the interior of the mounting hole 2 for replacement.

[0034] The working principle of the rubber support structure of the wafer transfer robotic arm is as follows: By opening a mounting hole 2 inside the connector 1, the rubber support body 3 can be easily engaged and installed into the mounting hole 2 for positioning. Then, a replacement mechanism 4 is set between the rubber support body 3 and the connector 1, which can firmly install the rubber support body 3 into the connector 1, preventing the rubber support body 3 from falling off during equipment operation. In addition, the replacement mechanism 4 facilitates the replacement of the rubber support body 3. Furthermore, the rubber support body 3 adopts a multi-layer design, with the hardness gradually increasing from top to bottom. This design can ensure both the cushioning effect of the rubber support body 3 and its load-bearing rigidity.

[0035] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A rubber support structure for a wafer transfer robotic arm, characterized in that: Includes a connector (1), which is composed of a front U-shaped block and a rear long strip block. The connector (1) is configured with two layers, with the upper layer being a rubber layer and the lower layer being a support layer. Mounting holes (2) are provided inside the left and right ends of the connector (1). A rubber support body (3) is provided inside the mounting hole (2). A replacement mechanism (4) is provided between the rubber support body (3) and the connector (1).

2. The rubber support structure for a wafer transfer robotic arm according to claim 1, characterized in that, The mounting hole (2) is composed of a first slot (21) and a second slot (22). The first slot (21) is located on the upper side of the second slot (22), and the diameter of the first slot (21) is larger than the diameter of the second slot (22).

3. The rubber support structure for a wafer transfer robotic arm according to claim 1, characterized in that, The rubber support body (3) includes a surface ball head (31), an embedded groove one (32), an embedded groove two (33), and a metal insert (34). The surface ball head (31) is located on the upper side of the embedded groove one (32). The surface ball head (31) is semi-circular and located at the upper end of the mounting hole (2). The outer side of the embedded groove one (32) is tightly fitted with the inner sidewall of the slot one (21).

4. The rubber support structure for a wafer transfer robotic arm according to claim 3, characterized in that, The lower side of the first embedding groove (32) is provided with the second embedding groove (33), and the outer side of the second embedding groove (33) is closely fitted with the inner sidewall of the second slot (22).

5. The rubber support structure for a wafer transfer robotic arm according to claim 4, characterized in that, A metal insert (34) is installed in the middle of the second embedding groove (33).

6. The rubber support structure for a wafer transfer robotic arm according to claim 1, characterized in that, The replacement mechanism (4) includes a threaded hole (41), a connecting plate (42), and a bolt (43). The threaded hole (41) is located inside the metal insert (34), and the bolt (43) is threadedly connected to the outside of the threaded hole (41). The connecting plate (42) is located at the lower end of the metal insert (34), and the outside of the connecting plate (42) is fixedly connected to the connector (1). The bolt (43) is inserted through the inside of the connecting plate (42).

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