Micropore distribution structure of a ceramic vacuum chuck

Abstract

This utility model discloses a microporous distribution structure for a ceramic vacuum suction cup, including a suction cup base. A ceramic suction cup is welded to the bottom surface of the suction cup base, and a suction cup shell is provided on the top surface of the ceramic suction cup. A vacuum pump is fixedly connected to the top surface of the suction cup base, and a fixing screw is fixedly connected to the top surface of the vacuum pump. A screw hole is provided on the top surface of the vacuum pump. A base through hole is opened on the top surface of the suction cup base, and a base groove is opened on the bottom surface of the suction cup base. The enhanced sealing through the flange of the adsorption component and the smooth airflow ensured by the microporous structure of the suction cup significantly improve adsorption reliability and effectively prevent the object being suctioned from falling off during handling. The presence of a buffer spring protects the ceramic suction cup, the object being suctioned, and other components from damage, expanding the applicability of the device. The reasonable structural design of each component ensures smooth overall operation of the device, facilitating installation and maintenance. It can be efficiently applied to automated handling, processing, and other scenarios, improving work efficiency.

Description

Technical Field

[0001] This utility model relates to the field of micropore technology, specifically to a micropore distribution structure for a ceramic vacuum chuck. Background Technology

[0002] Precise handling and positioning are crucial in the semiconductor chip manufacturing process. Microporous ceramic vacuum chucks combine electrostatic adsorption and vacuum adsorption technologies to achieve precise handling of semiconductor chips. These chucks have advantages such as simple structure and convenient operation, and can meet the high requirements for handling accuracy and stability in the semiconductor chip manufacturing process.

[0003] Traditional ceramic materials are relatively fragile and prone to cracking when subjected to impact or pressure, and their suction power is insufficient. Therefore, a microporous distribution structure for ceramic vacuum suction cups is needed. Utility Model Content

[0004] The purpose of this invention is to provide a microporous distribution structure for a ceramic vacuum suction cup. Traditional ceramic materials are relatively fragile and prone to cracking when subjected to impact or pressure, and their suction power is insufficient, reducing their practicality. Therefore, a microporous distribution structure for a ceramic vacuum suction cup is needed.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a micropore distribution structure for a ceramic vacuum suction cup, comprising a suction cup base, a ceramic suction cup welded to the bottom surface of the suction cup base, a suction cup shell disposed on the top surface of the ceramic suction cup, a vacuum pump fixedly connected to the top surface of the suction cup base, a fixing screw fixedly connected to the top surface of the vacuum pump, a screw hole disposed on the top surface of the vacuum pump, a base through hole opened on the top surface of the suction cup base, a base groove opened on the bottom surface of the suction cup base, a spring base disposed on the top surface of the ceramic suction cup, a buffer spring fixedly connected to the top surface of the spring base, a spring base through hole opened on the top surface of the spring base, a connecting shaft fixedly connected to the top surface of the ceramic suction cup, a connecting shaft hole opened on the side of the connecting shaft, an adsorption component fixedly connected to the top surface of the ceramic suction cup, a flange disposed on the top surface of the adsorption component, suction cup micropores opened on the top surface of the ceramic suction cup, a shell groove opened on the bottom surface of the suction cup shell, and a shell through hole opened on the top surface of the suction cup shell.

[0006] Preferably, the bottom surface of the ceramic suction cup is welded to the bottom edge of the suction cup base, the bottom surface of the suction cup shell is fastened to the top surface of the ceramic suction cup, and the vacuum pump is fixedly connected to the center of the top surface of the suction cup base.

[0007] Preferably, the top surface of the vacuum pump has four screw holes, and the vacuum pump is fixedly connected to the suction cup base by fixing screws. The center of the top surface of the suction cup base has a base through hole, and the base groove is opened at the center of the bottom surface of the suction cup base, with the base through hole penetrating the base groove.

[0008] Preferably, a buffer spring is fixedly connected to the center of the top surface of the spring base, and a spring base through hole is opened at the center of the spring base, and a connecting shaft is fixedly connected to the center of the top surface of the ceramic suction cup.

[0009] Preferably, a connecting shaft hole is provided at the center of the side of the connecting shaft, and an adsorption component is fixedly connected to the center of the top surface of the ceramic suction cup. The adsorption component surrounds the periphery of the connecting shaft, and the entire top surface of the adsorption component is set in a flange shape.

[0010] Preferably, the top surface of the ceramic suction cup has a suction cup micro-hole, which penetrates the ceramic suction cup; the bottom surface of the suction cup shell has a shell groove at the center; and the top surface of the suction cup shell has a shell through hole, which penetrates the suction cup shell.

[0011] Compared with the prior art, the beneficial effects of this utility model are: This ceramic vacuum suction cup features a microporous distribution structure. During daily use, the operator first turns on the vacuum pump, which is fixed to the center of the suction cup base's top surface with screws; it serves as the core power source. When the vacuum pump starts, it draws air through the base through-hole at the center of the suction cup base's top surface. This through-hole extends to the base groove at the center of the suction cup base's bottom surface. The ceramic suction cup is welded to the edge of the base's bottom surface, with its top adsorption components distributed around the connecting shaft, and the micropores on the ceramic suction cup extending through itself. During evacuation, the airflow sequentially passes through the outer shell through-hole on the top surface of the suction cup shell, the outer shell groove on the bottom surface, then through the micropores of the ceramic suction cup, enters the base groove, and finally is extracted by the vacuum pump through the base through-hole. As the airflow continues to exit, the air pressure in the adsorption area below the ceramic suction cup gradually decreases, creating a vacuum negative pressure. This creates a pressure difference with the external atmospheric pressure, which pushes the device to make the ceramic suction cup tightly adhere to the object being suctioned, achieving adsorption. During the adsorption process, the buffer spring on the top surface of the ceramic suction cup plays a crucial role. When the device comes into contact with an object, the buffer spring cushions the impact through its base, preventing damage to components and ensuring a tight fit between the ceramic suction cup and the object's surface. The flange on the top surface of the adsorption assembly enhances the seal with the suction cup housing, preventing air leakage. The connecting shaft and its hole assist in adjusting the component position, ensuring coordinated operation and maintaining adsorption stability. When releasing an object, the vacuum pump stops, air enters the adsorption area, eliminating the pressure difference and completing the release. The enhanced sealing through the flange of the adsorption assembly and the smooth airflow ensured by the micropores of the suction cup significantly improve adsorption reliability, effectively preventing objects from falling off during transport. The buffer spring protects the ceramic suction cup, the object being adsorbed, and other components from damage, expanding the device's applicability. The rational design of each component ensures smooth overall operation, facilitating installation and maintenance. It can be efficiently applied in automated handling and processing scenarios, improving operational efficiency. Attached Figure Description

[0012] Figure 1 This is a three-dimensional installation diagram of the present invention; Figure 2 This is a structural diagram of the suction cup of this utility model; Figure 3 This is an exploded view of the components of this utility model; Figure 4 This is a diagram illustrating the adsorption component of this utility model.

[0013] In the diagram: 1. Suction cup base; 2. Ceramic suction cup; 3. Suction cup outer shell; 4. Vacuum pump; 5. Fixing screw; 6. Screw hole; 7. Base through hole; 8. Base groove; 9. Spring base; 10. Buffer spring; 11. Spring base through hole; 12. Connecting shaft; 13. Connecting shaft hole; 14. Adsorption assembly; 15. Flange; 16. Suction cup micropore; 17. Outer shell groove; 18. Outer shell through hole. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example 1

[0015] like Figure 1-4 As shown, this utility model provides a technical solution: a micropore distribution structure for a ceramic vacuum suction cup, including a suction cup base 1, a ceramic suction cup 2 welded to the bottom surface of the suction cup base 1, a suction cup shell 3 provided on the top surface of the ceramic suction cup 2, a vacuum pump 4 fixedly connected to the top surface of the suction cup base 1, the bottom surface of the ceramic suction cup 2 welded to the bottom edge of the suction cup base 1, the bottom surface of the suction cup shell 3 snapped onto the top surface of the ceramic suction cup 2, the vacuum pump 4 fixedly connected to the center of the top surface of the suction cup base 1, a fixing screw 5 fixedly connected to the top surface of the vacuum pump 4, and screw holes 6 provided on the top surface of the vacuum pump 4. The top surface of the vacuum pump 4 has four screw holes 6, and the vacuum pump 4 is fixedly connected to the suction cup base 1 by the fixing screws 5.

[0016] With the activation of vacuum pump 4, the interior of ceramic suction cup 2 begins to draw air from the inside of the suction cup and the air passage. Example 2

[0017] like Figure 1-4As shown, this utility model provides a technical solution: a micropore distribution structure for a ceramic vacuum suction cup, including a suction cup base 1, a ceramic suction cup 2 welded to the bottom surface of the suction cup base 1, a suction cup shell 3 disposed on the top surface of the ceramic suction cup 2, a vacuum pump 4 fixedly connected to the top surface of the suction cup base 1, the bottom surface of the ceramic suction cup 2 welded to the bottom edge of the suction cup base 1, the bottom surface of the suction cup shell 3 snapped onto the top surface of the ceramic suction cup 2, the vacuum pump 4 fixedly connected to the center of the top surface of the suction cup base 1, a fixing screw 5 fixedly connected to the top surface of the vacuum pump 4, and screw holes 6 provided on the top surface of the vacuum pump 4. Four screw holes 6 are provided on the top surface of the vacuum pump 4, and the vacuum pump 4 is fixedly connected to the suction cup base 1 by the fixing screws 5. The top surface of the suction cup base 1 has a base through hole 7, and the bottom surface of the suction cup base 1 has a base groove 8. The center of the top surface of the suction cup base 1 has a base through hole 7, and the base groove 8 is located at the center of the bottom surface of the suction cup base 1, with the base through hole 7 penetrating through the base groove 8. The top surface of the ceramic suction cup 2 is provided with a spring base 9, and a buffer spring 10 is fixedly connected to the top surface of the spring base 9. The top surface of the spring base 9 has a spring base through hole 11, and the top surface of the ceramic suction cup 2 is fixedly connected with a connecting shaft 12. The center of the top surface of the spring base 9 has a buffer spring 10, and the center of the spring base has a spring base through hole 11. The center of the top surface of the ceramic suction cup 2 is fixedly connected with a connecting shaft 12.

[0018] When the vacuum pump 4 starts working, the air pressure inside the ceramic suction cup 2 gradually decreases through the buffer spring 10 on the spring base 9, forming a vacuum chamber. Example 3

[0019] like Figure 1-4As shown, this utility model provides a technical solution: a microporous distribution structure for a ceramic vacuum suction cup, including a suction cup base 1, a ceramic suction cup 2 welded to the bottom surface of the suction cup base 1, a suction cup shell 3 disposed on the top surface of the ceramic suction cup 2, a vacuum pump 4 fixedly connected to the top surface of the suction cup base 1, the bottom surface of the ceramic suction cup 2 welded to the bottom edge of the suction cup base 1, the bottom surface of the suction cup shell 3 fastened to the top surface of the ceramic suction cup 2, the vacuum pump 4 fixedly connected to the center of the top surface of the suction cup base 1, and a fixing screw 5 fixedly connected to the top surface of the vacuum pump 4. The vacuum pump 4 has four screw holes 6 on its top surface, and is fixedly connected to the suction cup base 1 by fixing screws 5. The suction cup base 1 has a base through hole 7 on its top surface and a base groove 8 on its bottom surface. The base through hole 7 is located at the center of the top surface of the suction cup base 1, and the base groove 8 is located at the center of the bottom surface of the suction cup base 1, with the base through hole 7 penetrating through the base groove 8. The top surface of the ceramic suction cup 2 is provided with a spring base 9, and a buffer spring 10 is fixedly connected to the top surface of the spring base 9. The top surface of the spring base 9 is provided with a spring base. A through hole 11 is provided. A connecting shaft 12 is fixedly connected to the top surface of the ceramic suction cup 2. A buffer spring 10 is fixedly connected to the center of the top surface of the spring base 9, and a spring base through hole 11 is provided at the center of the spring base. A connecting shaft 12 is fixedly connected to the center of the top surface of the ceramic suction cup 2, and a connecting shaft hole 13 is provided on the side of the connecting shaft 12. An adsorption assembly 14 is fixedly connected to the top surface of the ceramic suction cup 2. A flange 15 is provided on the top surface of the adsorption assembly 14. A connecting shaft hole 13 is provided at the center of the side of the connecting shaft 12. A suction assembly 10 is fixedly connected to the center of the top surface of the ceramic suction cup 2. The attachment component 14 surrounds the periphery of the connecting shaft 12. The entire top surface of the attachment component 14 is shaped as a flange 15. The top surface of the ceramic suction cup 2 is provided with suction cup micro-holes 16. The bottom surface of the suction cup shell 3 is provided with a shell groove 17. The top surface of the suction cup shell 3 is provided with a shell through hole 18. The top surface of the ceramic suction cup 2 is provided with suction cup micro-holes 16, and the suction cup micro-holes 16 penetrate the ceramic suction cup 2. The bottom surface of the suction cup shell 3 is provided with a shell groove 17 at the center. The top surface of the suction cup shell 3 is provided with a shell through hole 18, and the shell through hole 18 penetrates the suction cup shell 3.

[0020] When the air pressure in the ceramic suction cup 2 reaches a certain level, the ceramic suction cup will firmly adhere the object to the suction cup shell 3 through the operation of the vacuum pump 4.

[0021] Working Principle: First, the operator turns on the vacuum pump 4, which is fixed to the center of the top surface of the suction cup base 1 by fixing screws 5. The vacuum pump 4 is the core power source. When the vacuum pump 4 starts, it draws air through the base through-hole 7 at the center of the top surface of the suction cup base 1. The base through-hole 7 extends to the base groove 8 at the center of the bottom surface of the suction cup base 1. The ceramic suction cup 2 is welded to the edge of the bottom surface of the base 1, and its top adsorption components 14 are distributed around the connecting shaft 12. The micro-pores 16 on the ceramic suction cup 2 penetrate the cup itself. During air extraction, the airflow passes sequentially through the outer shell through-hole 18 on the top surface of the suction cup outer shell 3, the outer shell groove 17 on the bottom surface, then through the micro-pores 16 of the ceramic suction cup 2, into the base groove 8, and finally is drawn out by the vacuum pump 4 through the base through-hole 7. As the airflow continues to exit, the air pressure in the adsorption area below the ceramic suction cup 2 gradually decreases, forming a vacuum negative pressure. This creates a pressure difference with the external atmospheric pressure, and the external atmospheric pressure pushes the device, causing the ceramic suction cup 2 to tightly adhere to the object being suctioned, thus achieving adsorption. During the adsorption process, the buffer spring 10 on the top surface of the ceramic suction cup 2 plays a crucial role. When the device comes into contact with an object, the buffer spring 10 cushions the impact force through the spring base 9, preventing damage to the components and ensuring a tight fit between the ceramic suction cup 2 and the object surface. The flange 15 on the top surface of the adsorption assembly 14 enhances the seal with the suction cup housing 3, preventing air leakage. The connecting shaft 12 and connecting shaft hole 13 assist in adjusting the position of the components, ensuring the coordination of all structures and maintaining adsorption stability. When it is necessary to release the object, the vacuum pump 4 stops working, air enters the adsorption area, eliminating the pressure difference, and the release is completed.

[0022] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A micro-pore distribution structure of a ceramic vacuum chuck comprising a chuck base (1), characterized in that: A ceramic suction cup (2) is welded to the bottom surface of the suction cup base (1). A suction cup shell (3) is provided on the top surface of the ceramic suction cup (2). A vacuum pump (4) is fixedly connected to the top surface of the suction cup base (1). A fixing screw (5) is fixedly connected to the top surface of the vacuum pump (4). A screw hole (6) is provided on the top surface of the vacuum pump (4). A base through hole (7) is opened on the top surface of the suction cup base (1). A base groove (8) is opened on the bottom surface of the suction cup base (1). A spring base (9) is provided on the top surface of the ceramic suction cup (2). A buffer is fixedly connected to the top surface of the spring base (9). A spring (10) has a spring base (9) with a spring base through hole (11) on its top surface. A connecting shaft (12) is fixedly connected to the top surface of the ceramic suction cup (2). A connecting shaft hole (13) is opened on the side of the connecting shaft (12). An adsorption component (14) is fixedly connected to the top surface of the ceramic suction cup (2). A flange (15) is provided on the top surface of the adsorption component (14). A suction cup microhole (16) is opened on the top surface of the ceramic suction cup (2). A shell groove (17) is opened on the bottom surface of the suction cup shell (3). A shell through hole (18) is opened on the top surface of the suction cup shell (3).

2. The micro-pore distribution structure of a ceramic vacuum chuck according to claim 1, wherein: The bottom surface of the ceramic suction cup (2) is welded to the bottom edge of the suction cup base (1), the bottom surface of the suction cup shell (3) is fastened to the top surface of the ceramic suction cup (2), and the vacuum pump (4) is fixedly connected to the center of the top surface of the suction cup base (1).

3. The micro-pore distribution structure of a ceramic vacuum chuck according to claim 1, wherein: The vacuum pump (4) has four screw holes (6) on its top surface and is fixedly connected to the suction cup base (1) by fixing screws (5). The suction cup base (1) has a base through hole (7) at the center of its top surface and a base groove (8) at the center of its bottom surface. The base through hole (7) passes through the base groove (8).

4. The micro-pore distribution structure of a ceramic vacuum chuck according to claim 1, wherein: A buffer spring (10) is fixedly connected to the center of the top surface of the spring base (9), and a spring base through hole (11) is opened at the center of the spring base. A connecting shaft (12) is fixedly connected to the center of the top surface of the ceramic suction cup (2).

5. The micro-pore distribution structure of a ceramic vacuum chuck according to claim 1, wherein: The connecting shaft (12) has a connecting shaft hole (13) at the center of its side. The ceramic suction cup (2) is fixedly connected to the center of its top surface with an adsorption component (14). The adsorption component (14) surrounds the connecting shaft (12), and the entire top surface of the adsorption component (14) is set as a flange (15).

6. The micropore distribution structure of a ceramic vacuum chuck according to claim 1, characterized in that: The top surface of the ceramic suction cup (2) is provided with suction cup micro-holes (16), and the suction cup micro-holes (16) penetrate the ceramic suction cup (2). The bottom surface of the suction cup shell (3) is provided with a shell groove (17), and the top surface of the suction cup shell (3) is provided with a shell through hole (18), and the shell through hole (18) penetrates the suction cup shell (3).

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